AU2017260147B2 - Apparatus for feeding a liquid material to an evaporator device - Google Patents

Apparatus for feeding a liquid material to an evaporator device Download PDF

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Publication number
AU2017260147B2
AU2017260147B2 AU2017260147A AU2017260147A AU2017260147B2 AU 2017260147 B2 AU2017260147 B2 AU 2017260147B2 AU 2017260147 A AU2017260147 A AU 2017260147A AU 2017260147 A AU2017260147 A AU 2017260147A AU 2017260147 B2 AU2017260147 B2 AU 2017260147B2
Authority
AU
Australia
Prior art keywords
electromagnetic pump
liquid metal
feed tube
container
evaporator device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
AU2017260147A
Other languages
English (en)
Other versions
AU2017260147A1 (en
Inventor
Eduard Paul Mattheus Bakker
Colin COMMANDEUR
Douglas Alexander Hamilton
Peter William Hazelett
Timothy Dean Kaiser
Roland Jan Snijders
Stephen James Widdis
Edzo ZOESTBERGEN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tata Steel Nederland Technology BV
Original Assignee
Tata Steel Nederland Technology BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tata Steel Nederland Technology BV filed Critical Tata Steel Nederland Technology BV
Publication of AU2017260147A1 publication Critical patent/AU2017260147A1/en
Application granted granted Critical
Publication of AU2017260147B2 publication Critical patent/AU2017260147B2/en
Ceased legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K44/00—Machines in which the dynamo-electric interaction between a plasma or flow of conductive liquid or of fluid-borne conductive or magnetic particles and a coil system or magnetic field converts energy of mass flow into electrical energy or vice versa
    • H02K44/02—Electrodynamic pumps
    • H02K44/04—Conduction pumps

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Power Engineering (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Physical Vapour Deposition (AREA)
  • Jet Pumps And Other Pumps (AREA)
AU2017260147A 2016-05-03 2017-05-01 Apparatus for feeding a liquid material to an evaporator device Ceased AU2017260147B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16168167.1 2016-05-03
EP16168167 2016-05-03
PCT/EP2017/060316 WO2017191082A1 (en) 2016-05-03 2017-05-01 Apparatus for feeding a liquid material to an evaporator device

Publications (2)

Publication Number Publication Date
AU2017260147A1 AU2017260147A1 (en) 2018-11-15
AU2017260147B2 true AU2017260147B2 (en) 2022-08-25

Family

ID=56083902

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2017260147A Ceased AU2017260147B2 (en) 2016-05-03 2017-05-01 Apparatus for feeding a liquid material to an evaporator device

Country Status (8)

Country Link
US (1) US11220739B2 (enExample)
EP (1) EP3452633B1 (enExample)
JP (1) JP7069039B2 (enExample)
KR (1) KR102357447B1 (enExample)
CN (1) CN109072414B (enExample)
AU (1) AU2017260147B2 (enExample)
ES (1) ES2787924T3 (enExample)
WO (1) WO2017191082A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2017260148B2 (en) 2016-05-03 2022-08-25 Tata Steel Nederland Technology B.V. Method to operate an apparatus for feeding liquid metal to an evaporator device
WO2017191081A1 (en) 2016-05-03 2017-11-09 Tata Steel Nederland Technology B.V. Method to control the temperature of an electromagnetic pump
JP7315218B2 (ja) * 2019-12-24 2023-07-26 株式会社ヂーマグ 金属溶湯駆動装置および金属溶湯駆動方法
US20240397663A1 (en) * 2023-05-23 2024-11-28 Microsoft Technology Licensing, Llc Systems and methods for magnetic pumping in thermal management devices

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013143692A1 (en) * 2012-03-30 2013-10-03 Tata Steel Nederland Technology B.V. Method and apparatus for feeding liquid metal to an evaporator device

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US3408224A (en) 1964-06-25 1968-10-29 Pennsalt Chemicals Corp Vapor coating employing degassing of coating metal
US3581766A (en) 1968-08-02 1971-06-01 Jones & Laughlin Steel Corp Supplying liquid to a vacuum chamber
US3550924A (en) 1968-12-06 1970-12-29 United States Steel Corp Mechanism for controlling flow of liquid to a vacuum-treating vessel
IT1130947B (it) * 1980-03-10 1986-06-18 De Dionigi Manlio Perfezionamenti alle pompe elettromagnetiche alternative in particolare per fluidi non viscosi
US4392786A (en) 1980-10-16 1983-07-12 Merenkov Jury F Electromagnetic induction pump
JPS5938379A (ja) 1982-08-26 1984-03-02 Mitsubishi Heavy Ind Ltd 真空蒸着装置のスタ−トアツプ法
FR2562099B1 (fr) * 1984-03-30 1986-06-20 Commissariat Energie Atomique Cellule d'evaporation d'un compose liquide adaptee a l'epitaxie par jets moleculaires
JP3452617B2 (ja) * 1993-12-10 2003-09-29 真空冶金株式会社 ガスデポジション装置
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US7339139B2 (en) * 2003-10-03 2008-03-04 Darly Custom Technology, Inc. Multi-layered radiant thermal evaporator and method of use
DE102004041855B4 (de) 2004-04-27 2007-09-13 Von Ardenne Anlagentechnik Gmbh Vorrichtung und Verfahren zur kontinuierlichen thermischen Vakuumbeschichtung
US20100124022A1 (en) * 2008-11-14 2010-05-20 Suad Causevic Thermoelectric cooling apparatus and method for cooling an integrated circuit
EP2652167B1 (en) 2010-12-13 2015-04-08 Posco Continuous coating apparatus
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RU2584369C2 (ru) * 2011-01-14 2016-05-20 Арселормитталь Инвестигасион И Десаррольо Устройство автоматического питания промышленного генератора пара металла
CN103188912A (zh) * 2011-12-27 2013-07-03 刘源 使用液态金属工质的藕状规则多孔金属微通道热沉
WO2015067662A1 (en) * 2013-11-05 2015-05-14 Tata Steel Nederland Technology B.V. Method and apparatus for controlling the composition of liquid metal in an evaporator device
CN204805055U (zh) 2015-04-29 2015-11-25 周小林 电磁泵
WO2017191081A1 (en) 2016-05-03 2017-11-09 Tata Steel Nederland Technology B.V. Method to control the temperature of an electromagnetic pump
AU2017260148B2 (en) 2016-05-03 2022-08-25 Tata Steel Nederland Technology B.V. Method to operate an apparatus for feeding liquid metal to an evaporator device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013143692A1 (en) * 2012-03-30 2013-10-03 Tata Steel Nederland Technology B.V. Method and apparatus for feeding liquid metal to an evaporator device

Also Published As

Publication number Publication date
WO2017191082A1 (en) 2017-11-09
EP3452633B1 (en) 2020-03-25
CN109072414A (zh) 2018-12-21
AU2017260147A1 (en) 2018-11-15
CN109072414B (zh) 2022-02-22
JP2019515141A (ja) 2019-06-06
KR102357447B1 (ko) 2022-01-28
JP7069039B2 (ja) 2022-05-17
KR20190003587A (ko) 2019-01-09
US11220739B2 (en) 2022-01-11
US20190153587A1 (en) 2019-05-23
EP3452633A1 (en) 2019-03-13
ES2787924T3 (es) 2020-10-19

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Legal Events

Date Code Title Description
FGA Letters patent sealed or granted (standard patent)
MK14 Patent ceased section 143(a) (annual fees not paid) or expired