AU2002227016A1 - Electrode for plasma processes and method for manufacture and use thereof - Google Patents

Electrode for plasma processes and method for manufacture and use thereof

Info

Publication number
AU2002227016A1
AU2002227016A1 AU2002227016A AU2002227016A AU2002227016A1 AU 2002227016 A1 AU2002227016 A1 AU 2002227016A1 AU 2002227016 A AU2002227016 A AU 2002227016A AU 2002227016 A AU2002227016 A AU 2002227016A AU 2002227016 A1 AU2002227016 A1 AU 2002227016A1
Authority
AU
Australia
Prior art keywords
electrode
manufacture
plasma processes
plasma
processes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002227016A
Inventor
David Benzing
Albert R. Ellingboe
Jerome S. Hubacek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of AU2002227016A1 publication Critical patent/AU2002227016A1/en
Abandoned legal-status Critical Current

Links

AU2002227016A 2000-12-29 2001-12-07 Electrode for plasma processes and method for manufacture and use thereof Abandoned AU2002227016A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/749,916 2000-12-29

Publications (1)

Publication Number Publication Date
AU2002227016A1 true AU2002227016A1 (en) 2002-07-16

Family

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