AU2001287045A1 - Robust fluid flow and property microsensor made of optimal material - Google Patents

Robust fluid flow and property microsensor made of optimal material

Info

Publication number
AU2001287045A1
AU2001287045A1 AU2001287045A AU8704501A AU2001287045A1 AU 2001287045 A1 AU2001287045 A1 AU 2001287045A1 AU 2001287045 A AU2001287045 A AU 2001287045A AU 8704501 A AU8704501 A AU 8704501A AU 2001287045 A1 AU2001287045 A1 AU 2001287045A1
Authority
AU
Australia
Prior art keywords
sensor
die
glass
physical property
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001287045A
Other languages
English (en)
Inventor
Ulrich Bonne
Michael James Haji-Sheikh
Aravind Padmanabhan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of AU2001287045A1 publication Critical patent/AU2001287045A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6842Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845Micromachined devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01FMEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F5/00Measuring a proportion of the volume flow
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N1/2247Sampling from a flowing stream of gas
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/18Investigating or analyzing materials by the use of thermal means by investigating thermal conductivity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00Investigating or analyzing materials by the use of thermal means
    • G01N25/20Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/48Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation
    • G01N25/4873Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on solution, sorption, or a chemical reaction not involving combustion or catalytic oxidation for a flowing, e.g. gas sample
    • G01N25/488Details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004Gaseous mixtures, e.g. polluted air
    • G01N33/0009General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011Sample conditioning
    • G01N33/0014Sample conditioning by eliminating a gas
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/22Devices for withdrawing samples in the gaseous state
    • G01N2001/2285Details of probe structures

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Fluid Mechanics (AREA)
  • Combustion & Propulsion (AREA)
  • Molecular Biology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biomedical Technology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
AU2001287045A 2000-09-07 2001-09-04 Robust fluid flow and property microsensor made of optimal material Abandoned AU2001287045A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/656,694 US7109842B1 (en) 1998-12-07 2000-09-07 Robust fluid flow and property microsensor made of optimal material
US09656694 2000-09-07
PCT/US2001/027368 WO2002021083A1 (en) 2000-09-07 2001-09-04 Robust fluid flow and property microsensor made of optimal material

Publications (1)

Publication Number Publication Date
AU2001287045A1 true AU2001287045A1 (en) 2002-03-22

Family

ID=24634159

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001287045A Abandoned AU2001287045A1 (en) 2000-09-07 2001-09-04 Robust fluid flow and property microsensor made of optimal material

Country Status (7)

Country Link
US (2) US7109842B1 (ko)
EP (1) EP1315949A1 (ko)
JP (1) JP2004513331A (ko)
KR (1) KR20030029161A (ko)
CN (1) CN1236289C (ko)
AU (1) AU2001287045A1 (ko)
WO (1) WO2002021083A1 (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258003B2 (en) 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
US6794981B2 (en) * 1998-12-07 2004-09-21 Honeywell International Inc. Integratable-fluid flow and property microsensor assembly
EP1351039A1 (en) * 2002-04-03 2003-10-08 Sensirion AG Flow sensor and method for producing the same
DE10232072B4 (de) * 2002-07-15 2005-03-24 Robert Bosch Gmbh Verfahren zur Reinigung eines von einem Gasstrom umströmten Messelementes
JP4504037B2 (ja) * 2004-02-02 2010-07-14 大日本印刷株式会社 光学素子
US7892488B2 (en) * 2006-02-10 2011-02-22 Honeywell International, Inc. Thermal liquid flow sensor and method of forming same
US7500392B1 (en) 2007-10-11 2009-03-10 Memsys, Inc. Solid state microanemometer device and method of fabrication
US8018065B2 (en) * 2008-02-28 2011-09-13 Atmel Corporation Wafer-level integrated circuit package with top and bottom side electrical connections
US8261618B2 (en) * 2010-11-22 2012-09-11 General Electric Company Device for measuring properties of working fluids
JP2014016237A (ja) * 2012-07-09 2014-01-30 Azbil Corp フローセンサ
JP2014016238A (ja) * 2012-07-09 2014-01-30 Azbil Corp フローセンサ

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Also Published As

Publication number Publication date
US7109842B1 (en) 2006-09-19
CN1236289C (zh) 2006-01-11
KR20030029161A (ko) 2003-04-11
WO2002021083A1 (en) 2002-03-14
US20030098771A1 (en) 2003-05-29
EP1315949A1 (en) 2003-06-04
CN1473261A (zh) 2004-02-04
JP2004513331A (ja) 2004-04-30

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