AU2001280200A1 - Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator - Google Patents
Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generatorInfo
- Publication number
- AU2001280200A1 AU2001280200A1 AU2001280200A AU8020001A AU2001280200A1 AU 2001280200 A1 AU2001280200 A1 AU 2001280200A1 AU 2001280200 A AU2001280200 A AU 2001280200A AU 8020001 A AU8020001 A AU 8020001A AU 2001280200 A1 AU2001280200 A1 AU 2001280200A1
- Authority
- AU
- Australia
- Prior art keywords
- magnetic field
- field generator
- plasma
- etching apparatus
- plasma etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000000034 method Methods 0.000 title 1
- 238000001020 plasma etching Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3266—Magnetic control means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000-265728 | 2000-09-01 | ||
JP2000265728 | 2000-09-01 | ||
PCT/JP2001/007355 WO2002021585A1 (en) | 2000-09-01 | 2001-08-28 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator |
Publications (1)
Publication Number | Publication Date |
---|---|
AU2001280200A1 true AU2001280200A1 (en) | 2002-03-22 |
Family
ID=18752954
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2001280200A Abandoned AU2001280200A1 (en) | 2000-09-01 | 2001-08-28 | Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator |
Country Status (8)
Country | Link |
---|---|
US (1) | US7922865B2 (en) |
EP (1) | EP1329947B1 (en) |
JP (1) | JP4817592B2 (en) |
KR (1) | KR100863098B1 (en) |
CN (1) | CN100568461C (en) |
AU (1) | AU2001280200A1 (en) |
TW (1) | TW544802B (en) |
WO (1) | WO2002021585A1 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100403616B1 (en) * | 2001-01-03 | 2003-10-30 | 삼성전자주식회사 | Method for simulation of plasma processing by a plasma apparatus |
DE10147998A1 (en) * | 2001-09-28 | 2003-04-10 | Unaxis Balzers Ag | Method and device for generating a plasma |
JP2003309107A (en) * | 2002-04-12 | 2003-10-31 | Tokyo Electron Ltd | Etching method for laminated film |
JP4412661B2 (en) * | 2004-10-15 | 2010-02-10 | 信越化学工業株式会社 | Plasma processing apparatus and plasma processing method |
US7618521B2 (en) * | 2005-03-18 | 2009-11-17 | Applied Materials, Inc. | Split magnet ring on a magnetron sputter chamber |
JP4558563B2 (en) * | 2005-04-11 | 2010-10-06 | 信越化学工業株式会社 | Permanent magnet type magnetic field generator |
KR20100099054A (en) * | 2009-03-02 | 2010-09-10 | 신에쓰 가가꾸 고교 가부시끼가이샤 | Permanent magnet type magnetic field generating apparatus |
KR101107047B1 (en) * | 2009-09-16 | 2012-01-25 | 아쿠아셀 주식회사 | Hand shower |
US8590485B2 (en) * | 2010-04-26 | 2013-11-26 | Varian Semiconductor Equipment Associates, Inc. | Small form factor plasma source for high density wide ribbon ion beam generation |
TWI434624B (en) * | 2010-07-02 | 2014-04-11 | Ind Tech Res Inst | Magnetic modue of electron cyclotron resonance and electron cyclotron resonance apparatus using the same |
US20120312233A1 (en) * | 2011-06-10 | 2012-12-13 | Ge Yi | Magnetically Enhanced Thin Film Coating Method and Apparatus |
JP6009171B2 (en) * | 2012-02-14 | 2016-10-19 | 東京エレクトロン株式会社 | Substrate processing equipment |
JP6052278B2 (en) * | 2012-03-02 | 2016-12-27 | 日本電気株式会社 | Motion determination device, motion determination system, and motion determination method |
CN105586566B (en) * | 2014-11-03 | 2018-05-25 | 北京北方华创微电子装备有限公司 | A kind of reaction chamber and semiconductor processing equipment |
US10784085B2 (en) * | 2015-02-04 | 2020-09-22 | Applied Materials, Inc. | Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber |
JP6948788B2 (en) * | 2016-12-15 | 2021-10-13 | 東京エレクトロン株式会社 | Plasma processing equipment |
US11915915B2 (en) | 2021-05-28 | 2024-02-27 | Applied Materials, Inc. | Apparatus for generating magnetic fields during semiconductor processing |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3311064B2 (en) * | 1992-03-26 | 2002-08-05 | 株式会社東芝 | Plasma generation device, surface treatment device and surface treatment method |
US5444207A (en) * | 1992-03-26 | 1995-08-22 | Kabushiki Kaisha Toshiba | Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field |
JP3238200B2 (en) * | 1992-07-17 | 2001-12-10 | 株式会社東芝 | Substrate processing apparatus and semiconductor element manufacturing method |
JP2704352B2 (en) * | 1993-01-22 | 1998-01-26 | 信越化学工業株式会社 | Magnetic field generator |
EP0661728B1 (en) * | 1993-12-28 | 1997-06-11 | Shin-Etsu Chemical Co., Ltd. | Dipole ring magnet for use in magnetron sputtering or magnetron etching |
JP3124204B2 (en) * | 1994-02-28 | 2001-01-15 | 株式会社東芝 | Plasma processing equipment |
US5659276A (en) * | 1995-07-12 | 1997-08-19 | Shin-Etsu Chemical Co., Ltd. | Magnetic field generator for magnetron plasma |
JPH09260355A (en) * | 1996-03-22 | 1997-10-03 | Toshiba Corp | Magnetron discharge type plasma surface treatment equipment and its treatment method |
US5659176A (en) * | 1996-03-28 | 1997-08-19 | Xerox Corporation | Scanning corotron |
JP3281545B2 (en) * | 1996-07-26 | 2002-05-13 | 東京エレクトロン株式会社 | Plasma processing equipment |
TW351825B (en) * | 1996-09-12 | 1999-02-01 | Tokyo Electron Ltd | Plasma process device |
JP3646968B2 (en) * | 1998-05-22 | 2005-05-11 | 信越化学工業株式会社 | Magnetron plasma magnetic field generator |
US6562189B1 (en) * | 2000-05-19 | 2003-05-13 | Applied Materials Inc. | Plasma reactor with a tri-magnet plasma confinement apparatus |
-
2001
- 2001-08-28 EP EP01958549A patent/EP1329947B1/en not_active Expired - Lifetime
- 2001-08-28 CN CNB018150349A patent/CN100568461C/en not_active Expired - Fee Related
- 2001-08-28 US US10/362,879 patent/US7922865B2/en not_active Expired - Fee Related
- 2001-08-28 JP JP2002525908A patent/JP4817592B2/en not_active Expired - Lifetime
- 2001-08-28 AU AU2001280200A patent/AU2001280200A1/en not_active Abandoned
- 2001-08-28 WO PCT/JP2001/007355 patent/WO2002021585A1/en active Application Filing
- 2001-08-28 KR KR1020037003037A patent/KR100863098B1/en active IP Right Grant
- 2001-08-31 TW TW090121928A patent/TW544802B/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JP4817592B2 (en) | 2011-11-16 |
JP5306425B2 (en) | 2013-10-02 |
US7922865B2 (en) | 2011-04-12 |
US20040094509A1 (en) | 2004-05-20 |
WO2002021585A1 (en) | 2002-03-14 |
KR20030051632A (en) | 2003-06-25 |
JPWO2002021585A1 (en) | 2004-01-15 |
EP1329947B1 (en) | 2012-07-04 |
EP1329947A1 (en) | 2003-07-23 |
CN100568461C (en) | 2009-12-09 |
TW544802B (en) | 2003-08-01 |
KR100863098B1 (en) | 2008-10-13 |
EP1329947A4 (en) | 2008-08-20 |
JP2011228746A (en) | 2011-11-10 |
CN1451175A (en) | 2003-10-22 |
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