AU2001232606A1 - Method and apparatus for singulation of electronic devices - Google Patents

Method and apparatus for singulation of electronic devices

Info

Publication number
AU2001232606A1
AU2001232606A1 AU2001232606A AU3260601A AU2001232606A1 AU 2001232606 A1 AU2001232606 A1 AU 2001232606A1 AU 2001232606 A AU2001232606 A AU 2001232606A AU 3260601 A AU3260601 A AU 3260601A AU 2001232606 A1 AU2001232606 A1 AU 2001232606A1
Authority
AU
Australia
Prior art keywords
singulation
electronic devices
electronic
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001232606A
Inventor
Qiong Chen
Choong Whye Kwok
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Systems Automation Ltd Singapore
Original Assignee
ADVANCED SYSTEMS AUTOMATION
Advanced Systems Automation Ltd Singapore
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADVANCED SYSTEMS AUTOMATION, Advanced Systems Automation Ltd Singapore filed Critical ADVANCED SYSTEMS AUTOMATION
Publication of AU2001232606A1 publication Critical patent/AU2001232606A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67092Apparatus for mechanical treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
AU2001232606A 2000-02-04 2001-01-31 Method and apparatus for singulation of electronic devices Abandoned AU2001232606A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
SG200000782A SG90093A1 (en) 2000-02-04 2000-02-04 Method and apparatus for singulation of electronic devices
SG200000782-3 2000-02-04
PCT/SG2001/000016 WO2001057922A1 (en) 2000-02-04 2001-01-31 Method and apparatus for singulation of electronic devices

Publications (1)

Publication Number Publication Date
AU2001232606A1 true AU2001232606A1 (en) 2001-08-14

Family

ID=20430527

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001232606A Abandoned AU2001232606A1 (en) 2000-02-04 2001-01-31 Method and apparatus for singulation of electronic devices

Country Status (4)

Country Link
AU (1) AU2001232606A1 (en)
SG (1) SG90093A1 (en)
TW (1) TW439107B (en)
WO (1) WO2001057922A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL1030004C2 (en) 2005-09-21 2007-03-22 Fico Singulation B V Device and method for separating electronic components.
DE102007049160B4 (en) * 2007-10-13 2010-01-28 Carl Baasel Lasertechnik Gmbh & Co. Kg A method of separating grouped into a group, having a Kunststoffvergusskörper chip housings
JP2015184162A (en) * 2014-03-25 2015-10-22 セイコーエプソン株式会社 Electronic component conveyance device and electronic component inspection device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589360A (en) * 1981-07-10 1983-01-19 Hitachi Ltd Manufacture of hybrid integrated circuit
GB2150360B (en) * 1983-11-21 1987-08-12 Casio Computer Co Ltd A method of manufacturing a small electronic device
JPH04333299A (en) * 1991-05-08 1992-11-20 Toshiba Corp Cutting method of film board
JPH1140523A (en) * 1997-07-22 1999-02-12 Mitsubishi Electric Corp Substrate cutting device and substrate cutting method
JPH11233680A (en) * 1998-02-18 1999-08-27 Mitsubishi Electric Corp Semiconductor device and method and apparatus for chips
JP2000277550A (en) * 1999-03-25 2000-10-06 Mitsubishi Electric Corp Semiconductor device and its manufacture

Also Published As

Publication number Publication date
TW439107B (en) 2001-06-07
SG90093A1 (en) 2002-07-23
WO2001057922A1 (en) 2001-08-09

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