AU2000257476A1 - Recipe cascading in a wafer processing system - Google Patents

Recipe cascading in a wafer processing system

Info

Publication number
AU2000257476A1
AU2000257476A1 AU2000257476A AU5747600A AU2000257476A1 AU 2000257476 A1 AU2000257476 A1 AU 2000257476A1 AU 2000257476 A AU2000257476 A AU 2000257476A AU 5747600 A AU5747600 A AU 5747600A AU 2000257476 A1 AU2000257476 A1 AU 2000257476A1
Authority
AU
Australia
Prior art keywords
processing system
wafer processing
recipe cascading
cascading
recipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2000257476A
Inventor
Hilario Oh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML US Inc
Original Assignee
ASML US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML US Inc filed Critical ASML US Inc
Publication of AU2000257476A1 publication Critical patent/AU2000257476A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41865—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by job scheduling, process planning, material flow
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32269—Decision, of job release, select job to be launched next in shop
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32275—Job, recipe cascading: no delay, next job is started immediatly when first is finished
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32333—Use of genetic algorithm
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Quality & Reliability (AREA)
  • General Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • General Factory Administration (AREA)
  • Drying Of Semiconductors (AREA)
AU2000257476A 2000-03-07 2000-06-16 Recipe cascading in a wafer processing system Abandoned AU2000257476A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09521026 2000-03-07
US09/521,026 US6678572B1 (en) 1998-12-31 2000-03-07 Recipe cascading in a wafer processing system
PCT/US2000/016794 WO2001067493A1 (en) 2000-03-07 2000-06-16 Recipe cascading in a wafer processing system

Publications (1)

Publication Number Publication Date
AU2000257476A1 true AU2000257476A1 (en) 2001-09-17

Family

ID=24075017

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2000257476A Abandoned AU2000257476A1 (en) 2000-03-07 2000-06-16 Recipe cascading in a wafer processing system

Country Status (7)

Country Link
US (2) US6678572B1 (en)
EP (1) EP1264332A1 (en)
JP (3) JP3987725B2 (en)
KR (1) KR100731822B1 (en)
AU (1) AU2000257476A1 (en)
SG (1) SG143963A1 (en)
WO (1) WO2001067493A1 (en)

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KR102037907B1 (en) * 2017-09-11 2019-10-29 세메스 주식회사 Substrate treating apparatus and substrate treating method
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Also Published As

Publication number Publication date
JP3987725B2 (en) 2007-10-10
US6678572B1 (en) 2004-01-13
JP4912947B2 (en) 2012-04-11
JP2003526916A (en) 2003-09-09
WO2001067493A1 (en) 2001-09-13
US7052919B2 (en) 2006-05-30
JP4903553B2 (en) 2012-03-28
JP2007214550A (en) 2007-08-23
KR20030007454A (en) 2003-01-23
US20040087187A1 (en) 2004-05-06
KR100731822B1 (en) 2007-06-25
EP1264332A1 (en) 2002-12-11
SG143963A1 (en) 2008-07-29
JP2007281490A (en) 2007-10-25

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