JPH10135098A - System and method for production - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately predict the arrival time of a trial lot by manufacturing the trial lot through a substantial physical process which does not give processing waiting time. SOLUTION: A trial lot is manufactured through a substantial physical process, which does not produce processing waiting times. Therefore, a production information management system 23 is provided for sharing the progress predicting information of the trial lot scheduled in real time one second by one second by fetching the state of a line which changes from time to time, the arranged state of each member, and the state of each section contributing to the trial manufacture among the sections contributing to the trial manufacture, so that the sections can make preparation by recognizing the timing and contents of the matters to be done. In addition, the real time schedule information is shared among the sections by respectively installing terminals 13-22 to the sections. Therefore, the production efficiency of the line can be prevented from being deteriorated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a production system and a production method for industrial products, and more particularly to a production system and a production method for shortening the development period of a specific lot of a semiconductor product or a thin film product.

[0002]

2. Description of the Related Art In recent years, the needs of semiconductor products have diversified,
In particular, custom products are intensifying competition with other companies. For this reason, timely delivery of the product at the required time according to the needs of the customer will secure the market share.
Therefore, each company is focusing on reducing the time from product order to delivery. In particular, it is important to devise ways to shorten the time required to deliver prototypes to customers and to reduce the time required from product trial production to mass production transfer. However, product development involves complicated procedures and processes, and it is not easy to shorten the development period. To briefly explain the semiconductor product development procedure, first, a design department designs a product having a function that satisfies customer or market needs, and creates a design drawing. When this drawing is approved, the mask manufacturing department creates a mask to be used in a lithographic apparatus described later based on the design drawing, and the process development department creates a process flow, a manufacturing specification, and a work instruction. When the process flow, manufacturing specifications, and work instructions are approved, the operator of the manufacturing line performs various manufacturing process processes and inspections according to the instructions of the process flow and the manufacturing specifications, and the semiconductor device is placed on the single crystal silicon wafer. make. In semiconductor manufacturing, a cleaning apparatus for cleaning the surface of a wafer, an oxidation processing apparatus for forming a uniform oxide film on the surface, a diffusion processing apparatus for diffusing impurity atoms on the wafer,
Along with a sputtering apparatus for forming a metal film on a wafer, a lithographic apparatus for forming a patterned resist film on a wafer using the mask described above, and a patterned resist film formed by a lithographic apparatus,
An etching apparatus for processing a wafer, an ion implantation apparatus for implanting impurity atoms into the wafer, and the like are used. Since these semiconductor product manufacturing apparatuses are used in a region where the processing accuracy is limited, processing conditions are adjusted in advance in the manufacturing apparatus of each process when performing trial production. This work time varies depending on the state of the apparatus and the required processing accuracy. In this way, when the prototype is completed through various manufacturing process processes, the prototype is sent for inspection, and a tester is used to test whether the function operates normally and whether the intended performance is guaranteed. This test program is created by the design department. Normally, prototypes are repeated several times to narrow down the optimal design details and manufacturing specifications.

[0003] When this prototype passes the prototype inspection,
The prototype is completed. This prototype is offered to customers as a sample. When a customer places an order for mass production of this sample product, the mass production line performs mass production trial production to accept a new product. First, in preparation for mass production trial, the processing conditions for a new product are adjusted in the mass production manufacturing apparatus. Thereafter, a mass production prototype is flown on the mass production line, and when the mass production prototype passes mass production prototype inspection, it is shipped to the customer.

As described above, the development of a product involves complicated procedures and steps. Among these procedures, the effect of shortening the development period is to shorten the production period of a prototype lot. It is to shorten the mass production prototype period.

For this purpose, as disclosed in Japanese Patent Application Laid-Open No. Hei 7-21605, a trial production line is constructed in accordance with a mass production line, and a single wafer such as lithography, etching, sputtering, etc. constituting the mass production line is manufactured. It is effective to share the processing equipment on the prototype line (Fig. 1
reference). As a result, in the trial operation line, all the processes can be performed on a single wafer, so that the manufacturing period can be shortened, and the trial manufacturing can be repeated in a short period of time. In the single-wafer manufacturing apparatus, the processing time can be further reduced by configuring the prototype lot with a small number of wafers. Also, since the single wafer processing equipment can be shared with the mass production line, investment can be saved,
The period for tuning the trial processing conditions to the mass production processing conditions can be shortened.

However, in such a single-wafer manufacturing facility shared by the prototype line and the mass production line, if the arrival time of the prototype lot cannot be accurately predicted, the following inconvenience occurs, and the production efficiency of this line is raised. Decrease. There is a problem.

(1) When a prototype lot arrives earlier than expected, the prototype lot may stagnate due to the following events.

[1] The manufacturing equipment is starting construction of another lot (mass production lot).

[2] The production equipment is under maintenance.

[3] In the manufacturing equipment, adjustment of the processing conditions for the prototype lot has not been completed.

[4] The operator in charge is doing other work and is in a situation where he cannot release his hand.

[5] Manufacturing specifications or work instructions required for processing a prototype lot have not been issued.

(2) If the prototype lot arrives later than expected, the production of the mass production lot will be delayed.

(When the processing of the prototype lot is performed with the highest priority,
In order to prevent the prototype lot from stagnating, it is necessary to complete the adjustment of the processing conditions of the manufacturing equipment in advance, and the manufacturing equipment and the operator need to wait without performing other operations. However, if the arrival of the prototype lot is later than expected, the production of the mass production lot is delayed because the start of the mass production lot and the maintenance of the manufacturing equipment cannot be performed. )

[0015]

SUMMARY OF THE INVENTION As described above, a production line is constructed in accordance with a mass production line, and the production efficiency of a production line in which an apparatus for performing single-wafer processing constituting the mass production line is shared with the prototype line is reduced. To avoid this, it is necessary to accurately predict the start date and time of the prototype lot in advance in a manufacturing apparatus that performs single-wafer processing that is shared by the prototype line and the mass production line before proceeding.

[0016] To this end, the problem 1: To prepare an accurate schedule in advance for the production of a prototype lot.

Task 2: This is to be moved forward as planned,
Implement without delay.

Regarding the accurate production schedule planning of the prototype lot of the problem 1, the time required by the manufacturing apparatus in each process to process the prototype lot (hereinafter, this is defined as physical completion)
It is necessary to accurately know the processing waiting time in each process of the prototype lot. Physical completion can be calculated by knowing the processing recipe of each manufacturing facility and the number of wafers to be processed. But,
It is difficult to accurately estimate the processing waiting time in each process of a prototype lot. This is because the waiting time of the prototype lot flows when the following events occur.

[1] The manufacturing facility is starting work on another lot (mass production lot).

[2] The manufacturing equipment is under maintenance.

[3] In the manufacturing equipment, adjustment of the processing conditions for the prototype lot has not been completed.

[4] The operator in charge is doing other work and is in a situation where he cannot release his hand.

[5] Manufacturing specifications or work instructions required for processing a prototype lot have not been issued.

Accordingly, for the problem 1, it is necessary to accurately estimate the processing waiting time in each process of the prototype lot.

Regarding the problem 2, even if an accurate production schedule of a prototype lot is prepared, the following unexpected event causes the schedule schedule initially planned and the production plan of an actual prototype lot to progress. We need to consider how to deal with the shift.

Stagnation of prototype lots due to unexpected troubles in manufacturing equipment.

The adjustment of the processing conditions for the prototype lot of the manufacturing apparatus is delayed, and is not completed even when the prototype lot arrives.

The arrival of parts required in each step and mask lines required for the lithographic apparatus is delayed.

[0029]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is to construct a prototype line in accordance with a mass production line, and to provide an apparatus for performing a single-wafer processing which constitutes the mass production line. In the production system commonly used in the above, the prototype lot is manufactured by substantially complete physical engineering without giving a processing wait time. Further, in the present invention, a processing lot is not given a processing wait time to a prototype lot in a progressing state of the prototype lot which changes every moment such as a trouble of a manufacturing apparatus, a delay in arranging parts, a delay in preparation of each department related to a trial production, and the like. In order to make the production with substantial physics work, the departments involved in the trial production can understand in advance when and what to do and prepare for it, so that the situation of the line, which is constantly changing, And a production information management system for sharing the progress prediction in seconds of the prototype lot scheduled in real time by taking in the status of each department involved in the trial production between the departments involved in the trial production.

[0030]

Embodiments of the present invention will be described below in detail with reference to the drawings.

In a production system in which a trial production line is constructed in accordance with a mass production line and an apparatus for performing a single-wafer processing constituting the mass production line is also used in the prototype line, FIG.
As shown in (1), the prototype lot is manufactured with substantial physical processing without giving a processing wait time. As a result, the scheduled start date and time of the prototype lot for each process is accurately given by [input date and time] + [sum of physical work completion from the first process to the process before the process for which the start of the process is desired to be calculated].

The following operation rules are applied to manufacture with substantially complete physical engineering.

(1) In the processing of a prototype lot in the prototype line, the processing of the next step is started as soon as the processing of the previous step is completed. The pre-operation time, such as adjustment of the processing conditions of the manufacturing equipment, has been completed before the arrival of the prototype lot.

(2) With one facility in the prototype line,
No waiting occurs due to the processing of a plurality of prototype lots. For this reason, the amount of prototype lots put into the prototype line is limited.

(3) In the single-wafer manufacturing apparatus shared by the prototype line and the mass production line, the processing of the mass production lot and the maintenance of the manufacturing equipment are not performed during the time when the processing of the prototype lot is scheduled. adjust.

Further, in the progress of the prototype lot, which changes every moment, such as a trouble in the manufacturing equipment, a delay in arranging parts, and a delay in preparation of each department related to the trial production, the processing time is not given to the prototype lot. In order to make it possible for each department involved in the trial production to understand and prepare in advance for preparation and preparation for actual physical engineering, the line conditions that change every moment, the arrangement of parts, and By incorporating a production information management system that captures the status of each unit related to prototype manufacturing in seconds and predicts the progress of a prototype lot in real time, which is scheduled in real time, between the units involved in prototype manufacturing, it has a production information management system that can be used for initial planning and scheduling. Even when the actual production schedule of the production lot deviates, the departments involved in manufacturing can quickly correct and respond to their plans. For production scheduling, it is possible to minimize the deviation of the actual production progress. In this production system, terminals are arranged in each department involved in manufacturing, and the following real-time schedule information of the prototype lot is shared between the departments in an image as shown in FIG.

[1] Real-time display of the initial plan of the production schedule of the prototype lot, the actual results and the progress prediction in seconds.

[2] Status of manufacturing equipment constituting a prototype line (real-time notification of occurrence of equipment trouble, etc.)

[3] Progress of preparation for production of a prototype lot in each department (engineer's processing condition adjustment by an engineer).

[4] Whether or not a manufacturing specification and a work instruction have been issued for each process of the prototype line and the contents thereof.

[5] Delivery schedule or delivery results of members and masks.

The terminal information is generated by the production information management system [23] shown in FIG. The structure and operation of this production information management system [23] will be described below.

The production information management system [23] includes development management [1], design [2], process development [3], line management [4], mask manufacturing [5], and component maker related to the production of the production line.
[6], the tester [7], the system terminal [13] to [20] located in each department of the production line [8], the information that each person inputs at any time (details will be described later), and the production of the production line Equipment [10], wafer ID
Information collected online from the identification sorting system [11] and inspection equipment [12] is collected in real time, processed, and output to the system terminals [13] to [20] located in each department.

Hereinafter, the operation and mechanism of the production information management system [23] will be described in detail.

(1) Operation for Preparing for Production Start of Prototype Lot The operation for preparing for production start of a prototype lot will be described with reference to FIG.

(1.1) Work of Development Management [1] Information on the prototype lot to be input (prototype lot number, product name, priority, etc.) is input from the system terminal [13].

Since the maximum number of lots that can be put into the line needs to be limited as described above, the number is also input in advance from the system terminal [13].

(1.2) Processing of the production information management system [23] The information of the prototype lot registered from the system terminal [13] is
It is registered in the prototype lot management list [24] as shown in Table 1. This list rearranges the order of starting the trial production by FIFO and priority. In the prototype lot management list [24], information on registered lots (product name, priority, list registration date and time, scheduled input date and time, scheduled completion date, drawing registration deadline and result, specification registration deadline and result, member type registration Deadlines and delivery results, process flow registration deadlines and results, manufacturing specifications registration deadlines and results, mask order deadlines and results, member order deadlines and results,
Etc.) can be referred to. (Details of the operation of the prototype lot management list [24] will be described later.)

[0049]

[Table 1]

(1.3) Work of development management [1] Using the system terminal [13], a prototype lot management list [24]
, Register the deadline for the next work in charge of design [2].
(Preparation of drawings, preparation of specifications, designation of component types required for production of prototype lots, etc.). Similarly, the deadline of the next work assigned by the engineer [3] is also registered in the prototype lot management list [24]. (Preparation of process flow, preparation of production specifications, estimation of physical work completion of production equipment for each process, preparation of work instructions, etc.) (1.4) Processing of production information management system [23] Input of development management [1] Based on the information, the work deadline of the design [2] engineer [3] is registered in the prototype lot management list [24].
This information can be referenced from each system terminal.

(1.5) Work of design [2] By the registration deadline entered in development management [1], the drawing creation work, the specification creation work, and the specification of the member type are executed, and the created drawing [key: Register the product name], specification [key: product name], and material type designation [key: product name, process name to be used] from the system terminal [13]. If you ca n’t do that,
Change the registration completion schedule date and time and enter it.

(1.6) Production Information Management System [23] The drawings, specifications, and member types input by the design [2] are stored in the drawing / manufacturing specifications DB [25]. This information can be referenced from each system terminal. And the prototype lot management list
In [24], register the drawing, specification, and member type registration completion. If the design [2] changes the expected registration completion date, it is registered in the prototype lot management list [24] because the registration work cannot be completed in time. This information can be referenced from each system terminal as an alarm.

(1.7) Work of engineer [3] By the registration deadline entered in development management [1], process flow creation,
The process flow [key: product name] and the manufacturing specifications [key: product] are created by creating the manufacturing specifications, creating work instructions, and calculating the physical completion of the manufacturing equipment for each process (combination of the ratio and the number of sheets). Name, process name, work instruction] from the system terminal [15]. In addition, there is an input column in the manufacturing specification sheet for the physical engineering completion estimate of the manufacturing apparatus in each process, and is input there. Further, the manufacturing specification has input fields for a manufacturing apparatus name and a manufacturing recipe used in each process. Here, a manufacturing apparatus name and a manufacturing recipe are input. In addition, the manufacturing specification has input fields for an inspection device name and an inspection recipe used in each process. Here, the inspection device name and the inspection recipe are input. If these tasks cannot be completed in time, change the registration completion date and enter it.

Further, here, there is an input column for an insertion / extraction instruction recipe for each wafer # instructed to the wafer ID identification sorting system.

The production specifications and work instructions may be changed or newly registered as needed even during the production of the prototype lot. (1.8) Processing engineer of production information management system [23] The process flow, the production specification, and the work instruction entered in [3] are stored in the drawing / production specification DB [25]. This information can be referenced from each system terminal.

Also, the manufacturing lithography, inspection lithography, and wafer insertion / extraction instruction described in the manufacturing specifications are downloaded to the manufacturing apparatus [10], the wafer ID identification sorting system [11], and the inspection apparatus [12] via an online line. . And the prototype lot management list [24]
Register the process flow, manufacturing specifications, and work order registration completion in. Since the registration work is not in time, if the engineer [3] changes the scheduled completion date and time, it will be changed to the prototype lot management list
Register in [24]. This information can be referenced from each system terminal as an alarm.

(1.9) Work of development management [1] Completion of registration of drawings, specifications, and member types by design [2], process flow by engineer [3], manufacturing specifications, and manufacturing equipment for each process Confirm the completion of each physical work and the registration of the work order in the prototype lot management list [24]. In addition, design in advance
The development management [1] registers in advance from the system terminal [13] the time required for the delivery date from ordering the member type registered in [2]. If there is a prototype whose design [2] and engineer [3] work is delayed, the work of design [2] and engineer [3] is completed even if the priority is lower than the prototype lot If there is a prototype, the order of lots on the prototype lot management list [24] may be changed.

(1.10) Processing of the production information management system [23] Registration of drawings, specifications, and member types by design [2], and process flows, manufacturing specifications by engineers [3], and manufacturing equipment for each process After the completion of each physical work and the registration of the work instruction, the total work completion time from the input of each prototype lot to completion is calculated by the prototype lot progress prediction calculation function [27]. This is calculated by the following procedure. Using the process names of the process flow of the target product as search keys, search the drawing / manufacturing specification DB for the relevant manufacturing specifications, and enter the physical engineering completion data for each manufacturing facility described in that. In the order of the process flow, the total of the physical processes from the first process to the last process is calculated. Next, the scheduled input date and time and the completion date and time of the lot waiting to be input on the prototype lot management list [24] are calculated and output to the prototype lot management list [24].

The input scheduled date and time and the completion date and time are recalculated every time the list of waiting lots is rearranged. This is calculated by the following procedure. First, the input date and time is calculated. This is because, from the schedule management table DB [26], information on all prototype lots currently under construction at the current line is searched, and the number of lots under construction is entered.
Check if it is a number, and if it does not reach the Max number, set the current date and time as the input date and time. When the lots with the maximum number of inputs are under construction, the scheduled completion date and time is the earliest in the scheduled line (the procedure for calculating the planned line will be described later) in the schedule management table of all the prototype lots under construction on the prototype line. The scheduled completion date and time of the prototype lot is set as the input date and time of the first lot of the prototype lot management list [24]. Once the scheduled input date and time is determined, the total work completion time of each prototype lot has been calculated, so it is calculated as [scheduled completion date] = [scheduled input date and time] + [total work completion time]. Based on the information calculated above, a schedule plan for each prototype lot is calculated. To do so, it is necessary to calculate the scheduled start date and time for each process in each prototype lot, and this is calculated using the scheduled input date and time of the prototype lot to be calculated and the physical work completion for each process. Scheduled lot start date / time] = [input date / time] + [sum of the physical work completion of each process from the first process to the process before the process for which the scheduled start date / time is to be calculated]. Then, the production start time of the members of each prototype lot is calculated. This is calculated by the following procedure. First, the time required for the delivery process from the order of the process and the order of the material type in the process of the prototype lot to be calculated was searched from the drawing / manufacturing specification DB [25], and this time was calculated above. It is obtained by subtracting from the start date and time of the start of the process that requires members in the process of each prototype lot. The information calculated above is stored in the schedule management table DB [26], and can be referred to from each system terminal as the initial planned line and the predicted line on the schedule management table shown in FIG. Initially, the scheduled line is a point at which the scheduled start date and time of each process is scheduled. When the actual line deviates from the initially scheduled line, the forecast line provides the scheduled start date and time of the start of the prototype lot in each process after the next process to the person in charge of each department more accurately than the initially planned line, It also provides an indication as to whether the production progress of the prototype lot is delayed or advanced compared to the originally scheduled date and time. Before the start of construction, the forecast line is consistent with the originally planned line. (The procedure for updating the prediction line accompanying the progress of the prototype will be described later.) When the above processing is completed,
Advance the progress of the prototype lot management list [24] to completion of input preparation.

(2) Operations for Starting Production of Prototype Lot (2.1) Development Management [1] Work Inputting a start instruction for the prototype lot whose preparation has been completed in the prototype lot management list [24].

(2.2) Processing of the Production Information Management System [23] For the prototype lot for which the input start instruction has been input by the development management [1], parts are automatically ordered by the time of starting the parts production. When the order is completed, the production start time and delivery date of the component can be referenced from the system terminal [18] prepared by the component maker. When the production start date and time comes, an alarm is generated and transmitted to each system terminal. Each system terminal alarms this information to the person in charge of each department by sound or image blinking.

Then, regarding the prototype lot whose input date and time has come,
The start of feeding is transmitted to each system terminal as an alarm.

(3) Operation During Prototyping Lot Production The operation during trial production lot production will be described mainly with reference to FIG.

(3.1) Mask manufacturing [5], member manufacturer [6] Check the delivery time of masks and members on the system terminals [17] and [18], and make sure that it is in time for delivery to the prototype line. , Masks and components are manufactured and delivered to the prototype line. Mask manufacturing
[5], the component maker [6], if it is judged that the production of masks and components can be carried out sufficiently in time for delivery, manufactures masks and components of other products, and if there is not enough time, the target Production of masks and members for prototype lots is a top priority. If the delivery of masks and components is not in time for delivery, the scheduled delivery date and time of masks and components in the prototype lot management list [24] are changed using the system terminals [17] and [18].

(3.2) Processing of Production Information Management System [23] If the scheduled delivery date and time of the masks and members are changed, as shown in FIG. The prediction line in the schedule management table is updated so as to be the start date and time of the process start of the prototype lot. This is calculated in the following procedure. This is to delete the forecast line after the process of changing the scheduled start date and time, connect the current actual line with the changed scheduled delivery date and time of the members and masks, and set the dots that make up the forecast line after that. , [Scheduled start date and time of the prototype lot for each process on the forecast line] = [Changed scheduled start date and time] + [From the process where the scheduled start date and time was changed to the process before the process for which the scheduled start date and time is to be calculated] Calculated by sum of physics engineering]. This information is transmitted to each system terminal as an alarm. Based on this information, each system terminal issues an alarm to the person in charge of each department by sound or image blinking. This information can be referenced from system terminals of other departments.

As long as the change of the scheduled delivery date and time of the member and the mask is not canceled, the update of the prediction line accompanying the update of the actual result of the prototype lot is continued by the above procedure.

(3.3) Responsibility of Each Department The revised schedule plan is confirmed on the system terminal, and based on the information, the own work plan is revised.

(3.4) Work of Engineer [3] When the production of the prototype lot is started on the production line, the engineer [3] operates the engineer so that the production of the prototype lot in each process is performed without delay. [3] is responsible for adjusting the processing conditions and changing the manufacturing specifications for each manufacturing facility on the prototype line,
In order to complete the issuance of the work order by the arrival of each process of the prototype lot, work is performed while checking the progress status of the prototype lot at the system terminal [15]. If the engineer [3] judges that these operations can be carried out with sufficient time by the start date and time of each process, they will perform other operations (eg, work on a different product), and will not have enough time. If you concentrate on these tasks.

If these operations are not in time for the start of the trial lot start of the target process, the scheduled start date and time of the schedule management table DB [26] is changed using the system terminal [15].

(3.5) Processing of the Production Information Management System [23] When the engineer inputs a change of the scheduled start date and time, the predicted line table is recalculated. Same as delivery date change). This information is transmitted to each system terminal as an alarm. Each system terminal alarms this information to the person in charge of each department by sound or image blinking.

(3.6) Work assigned to each department Check the revised schedule plan on the system terminal, and modify its own work plan based on the information.

(3.7) Operation of Line Management [4] The scheduled start date and time of the start of the production lot of the production equipment of the production line, which is shared with the mass production line, is confirmed in the schedule management table so that the production lot can be started without delay. Next, a start plan for the mass production lot and a maintenance plan for the manufacturing equipment are made, and the line operator is instructed. When planning, keep in mind the following two points.

[1] The start plan of the mass production lot and the maintenance plan of the manufacturing equipment are adjusted so that the start of the start of the mass production lot does not conflict with the scheduled start date and time of the prototype lot.

[2] Adjustment of the processing conditions of the manufacturing equipment for manufacturing the prototype lot is completed by the scheduled start date and time of the prototype lot. At this time, no unnecessary waiting time is left between the completion of the processing condition adjustment and the scheduled start date and time of the start of the prototype lot.

(3.8) Checking the progress of the prototype lot in the work schedule management table of the line operator [9]
Execute the start plan of mass production lot and the maintenance plan of manufacturing equipment as instructed by line management [4].

The actual results of the start and the completion of the start of the prototype lot are input to the system terminal [20] each time.

However, in the case of the online manufacturing apparatus [10], the results of the start and completion of the construction automatically increase to the production information management system [23].

(3.9) Production Information Management System [23] Based on the actual results of the start of the prototype lot input by the line operator [9], as shown in FIG. To update. The performance line is a plot of the start date and time of the start of each process completed to date. Here, regarding the update of the forecast line, [Scheduled start date and time of the start of the prototype lot for each process on the forecast line] = [Start date and time of the start of the process that is currently starting the start of the prototype lot] + [Start date and time of the start of the process currently being started. The sum of physics work up to the process before the process for which you want to calculate]
Is calculated. With the update of this forecast line, mask manufacturing [5],
The mask and member production start time and delivery date to the member manufacturer [6] are also recalculated and updated.

When the difference between the date and time when the actual start date of the start of the prototype lot is input in the process currently under construction and the current date and time exceeds the physical work completion of this process, the operation completion result of this process is not input. This information is transmitted to each system terminal as an alarm (prototype lot stagnation). Each system terminal alarms this information to the person in charge of each department by sound or image blinking. This information can be referenced from each system terminal.

(4) Operation when trouble occurs in the production equipment on the line (4.1) Work of operator [9] on the production line When trouble occurs on the production equipment on the prototype line, the operator [9] Enter the name of the facility where the trouble occurred and its status into the system terminal [20].

(4.2) Processing of Production Information Management System [23] The information input by the operator [9] from the system terminal [20] is transmitted to each system terminal as an alarm. Each system terminal alarms this information to the person in charge of each department by sound or image blinking.

(4.3) Work of Engineer [3] If it is determined that the trouble is related to the manufacturing equipment and this affects the production of the prototype lot, the date and time of the scheduled recovery of the manufacturing equipment is reported from the system terminal [15]. The recovery work is entered with the highest priority, and the recovery date and time is input from the system terminal [15] as soon as the response is completed.

(4.4) Processing of the Production Information Management System [23] If the scheduled recovery date and time is later than the scheduled start date and time of the start of the prototype lot on the prediction line, as shown in FIG. The prediction line is updated so that the scheduled date and time is the start date and time of the start of the corresponding process of the prototype lot. (This calculation is performed in the same manner as the update of the forecast line when the engineer [3] enters the scheduled start date and time change.) However, when the engineer [3] inputs the completion of the recovery work, If the date and time is completed earlier than the start date and time of the start displayed when the start date and time of the trouble are changed, the information input in the change of the scheduled start date and time of the start due to the trouble is deleted and the prediction line is calculated again. This information is transmitted to each system terminal as an alarm. Based on this information, each system terminal issues an alarm to the person in charge of each department by sound or image blinking. This information can be referenced from system terminals of other departments.

(4.5) Responsibility of each department The revised schedule plan is confirmed on the system terminal, and based on the information, the own work plan is revised.

(4.6) Development Management [1] When the manufacture of the prototype lot is completed, the prototype lot operation inspection is performed in the tester section, and the tester necessary for it is arranged in advance. Arrangements are made by confirming the date and time of completion of the production of the prototype lot from the schedule management table and making arrangements so that the tester can secure the date and time.

(4.7) Tester section [7] The progress of the prototype lot is checked, and as soon as the production of the prototype lot is completed, the tester is prepared so that the operation test can be performed. I do.

According to the present invention, a prototype lot can be manufactured in a very short period of time. However, in addition to this production system, the following means, ie, inspection by an inspection device in the middle of the trial lot, is not performed. If the method of performing operation inspection using only a tester after the production of the prototype lot is adopted, the production period of the prototype lot can be further shortened. In some cases, two or more prototypes can be implemented. In that case, it is more efficient to omit the inspection step in the middle.

(5) Operation after Prototype Completion (5.1) Processing of Production Information Management System [23] When the production of the prototype lot is completed, the information of the prototype lot is deleted from the prototype lot management list [24]. Save the schedule management line table. This data is used as reference data by development management [1], engineer [3], etc.

As described above, when the production system of the present invention is used for the production of a prototype of semiconductor production or thin film production, it is effective in shortening the development period of the prototype. In addition, the present production system can be applied to the production of experimental products before the production of prototypes.

The present system is characterized in that a prototype lot is manufactured by substantially physical work, but the present invention can also be applied to a case where a prototype lot is manufactured in a specific period. In addition, a prototype line is constructed in line with the mass production line, and the prototype lot and the mass production lot can be mixedly produced without taking the form of a production system that shares the equipment that performs single-wafer processing that constitutes the mass production line with the prototype line. It can be applied to the case where a prototype lot is manufactured in a specific period in a production system. Further, the present invention can be applied to a case where a specific lot is manufactured in a specific period in a normal mass production line.

[0091]

According to the present invention, a prototype line is constructed in accordance with a mass production line, and a single production line such as a lithography, etching, and sputter device that constitutes the mass production line is shared with the prototype line. Since the arrival time of the prototype lot can be accurately predicted in the single-wafer manufacturing facility shared with the mass production line, the following inconvenience does not occur, and the production efficiency of this line does not decrease.

(1) When a prototype lot arrives earlier than expected, the prototype lot may be stagnated by the following events.

[1] The manufacturing facility is starting work on another lot (mass production lot).

[2] The manufacturing equipment is under maintenance.

[3] In the manufacturing facility, adjustment of the processing conditions for the prototype lot has not been completed.

[4] The operator in charge is doing other work and is in a situation where he cannot release his hand.

[5] Manufacturing specifications or work instructions required for processing a prototype lot have not been issued.

(2) When the prototype lot arrives later than expected, the production of the mass production lot is delayed.

(When the processing of the prototype lot is performed with the highest priority,
In order to prevent the prototype lot from stagnating, it is necessary to complete the adjustment of the processing conditions of the manufacturing equipment in advance, and the manufacturing equipment and the operator need to wait without performing other operations. However, if the arrival of the prototype lot is later than expected, the production of the mass production lot is delayed because the start of the mass production lot and the maintenance of the manufacturing equipment cannot be performed. )

[Brief description of the drawings]

FIG. 1 shows a production system in which a prototype line is constructed in accordance with a mass production line, and an apparatus for performing single-wafer processing constituting the mass production line is also used in the prototype line.

FIG. 2 shows a comparison between a normal lot manufacturing method and the lot manufacturing method of the present invention.

FIG. 3 shows an outline of information provided by the production system to a department involved in trial production.

FIG. 4 shows the configuration of the system of the present invention.

FIG. 5 shows information input to a production information management system by a department involved in trial production in preparation for trial lot production and information generated by the production information management system based on the information.

FIG. 6 shows a method of manufacturing a prototype lot in each step by the present production system.

FIG. 7 shows a calculation example of a schedule change performed by the production information management system for a trouble that occurred during the production of a prototype lot.

FIG. 8 shows an example of calculating a schedule change performed by the production information management system with respect to the update of processing results in each process of a prototype lot.

[Explanation of symbols]

1 ... development management department, 2 ... design department, 3 ... engineer department, 4 ... line management department, 5 ... mask production department, 6 ... member manufacturer, 7 ... tester, 8 ...
Production line, 9 ... Line operator, 10 ... Production equipment, 11 ... Wafer ID identification sorting system, 12
... Inspection device, 13-20 ... System terminal, 21
... online terminal for manufacturing equipment, 22 ... online terminal for inspection equipment, 23 ... production information management system, 24
… Prototype lot management list, 25… Drawing / manufacturing specification D
B, 26: Schedule management table DB, 27: Prototype lot progress prediction calculation function.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masaru Kobayashi 5-2-1, Josuihonmachi, Kodaira-shi, Tokyo In the semiconductor division of Hitachi, Ltd. (72) Inventor Tsutomu Okabe 882 Ma, Hitachinaka-shi, Ibaraki (72) Inventor Masao Sakata Inventor Masao Sakata 5-20-1, Kamisumihonmachi, Kodaira-shi, Tokyo Incorporated Semiconductor Company, Hitachi Ltd. 5-20-1, Honmachi Semiconductor Division, Hitachi, Ltd. (72) Inventor Kazuo Horiguchi 5-20-1, Josuihonmachi, Kodaira City, Tokyo Inside Semiconductor Division, Hitachi, Ltd.

Claims (12)

[Claims] 1. A production system in which a prototype line is constructed in accordance with a mass production line, and an apparatus for performing single-wafer processing constituting the mass production line is also used in the trial production line. A production system comprising control means for producing. 2. The control means according to claim 1, wherein said control means receives terminals registered in each of the departments involved in the manufacturing, receives data input from each terminal and registers the data, and manufactures a specific lot to be controlled by substantially physical processing. The management table data is created based on the registered data, and can be referred to at each terminal, and when a status report relating to delay or advancement of the schedule management table data is received from any of the terminals, the schedule management is performed. The production system according to claim 1, further comprising: a production information management system that recreates table data and notifies each terminal of the table data. 3. The production information management system according to claim 1, wherein the schedule management table data of the specific lot to be controlled, which is displayed on each terminal, comprises process flow, initial plan, actual, and forecast data. The production system according to claim 2, wherein 4. The system according to claim 1, wherein each of the initial plan, actual, and forecast data constituting the schedule management table data of the specific lot to be controlled represents a position of each process on a time axis in units of seconds. 3. The production system according to 3. 5. The original plan data constituting the schedule management table data of the specific lot to be controlled represents at least one of a scheduled start date and time or a scheduled completion date and time of each process. 5. The method according to claim 3, wherein the predicted data represents at least one of the scheduled start date and time of the next process and the subsequent processes and the scheduled completion date and time recalculated based on the actual data. 6. Production system. 6. The production information management system, when creating or re-creating the schedule management table data, creates at least one of a start time or a deadline of a work to be assigned by each of the departments, and 3. The production system according to claim 2, wherein the terminal can be referred to from the terminal of the department. 7. A trial production line according to a mass production line,
A production method characterized in that an apparatus for performing single-wafer processing constituting the mass production line is constructed so as to be shared also in the prototype line, and a prototype lot is manufactured with substantial physical work. 8. Schedule management table data for manufacturing a specific lot with substantial physical processing is created based on the registered data, and the schedule management table data can be referred to at each terminal installed in each department involved in manufacturing. Delay of the schedule management table data from any of the terminals,
Alternatively, the production method is characterized in that, when a status report relating to the advancement is received, the schedule management table data is recreated and notified to each terminal. 9. The production method according to claim 8, wherein the schedule management table data of the specific lot displayed on each terminal comprises data of a process flow, an initial plan, an actual result, and a forecast. 10. The system according to claim 8, wherein each of the initial plan, actual, and forecast data constituting the schedule management table data of the specific lot represents a position of each process on a time axis in units of seconds. Production method. 11. The initial plan data constituting the schedule management table data of the specific lot includes scheduled start date and time of each process,
Or at least one of the scheduled completion date and time, the actual data indicates the actual start date and time of the start of construction, or the actual completed date and time, and the prediction data is the date and time of the scheduled start of the next process and the scheduled completion date and time after the next process recalculated based on the actual data. 11. The production method according to claim 9, wherein at least one of them is represented. 12. When the schedule management table data is created or re-created, at least one of a start time and a deadline of work to be assigned in each section is created and can be referred to from the terminal in each section. 9. The production method according to claim 8, wherein: