ATE86676T1 - Verfahren und vorrichtung zum faerben von gegenstaenden mittels plasmabeschichtung. - Google Patents

Verfahren und vorrichtung zum faerben von gegenstaenden mittels plasmabeschichtung.

Info

Publication number
ATE86676T1
ATE86676T1 AT88304837T AT88304837T ATE86676T1 AT E86676 T1 ATE86676 T1 AT E86676T1 AT 88304837 T AT88304837 T AT 88304837T AT 88304837 T AT88304837 T AT 88304837T AT E86676 T1 ATE86676 T1 AT E86676T1
Authority
AT
Austria
Prior art keywords
objects
plasma coating
rack
held
plasma stream
Prior art date
Application number
AT88304837T
Other languages
English (en)
Inventor
James Alexander Evert Bell
Bruce Randolph Conard
Juraj Babjak
Raymond Augustus Bradford
Original Assignee
Inco Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inco Ltd filed Critical Inco Ltd
Application granted granted Critical
Publication of ATE86676T1 publication Critical patent/ATE86676T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • A—HUMAN NECESSITIES
    • A44—HABERDASHERY; JEWELLERY
    • A44C—PERSONAL ADORNMENTS, e.g. JEWELLERY; COINS
    • A44C27/00—Making jewellery or other personal adornments
    • A44C27/001—Materials for manufacturing jewellery
    • A44C27/005—Coating layers for jewellery
    • A44C27/006—Metallic coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641—Nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Chemical Vapour Deposition (AREA)
AT88304837T 1987-05-29 1988-05-27 Verfahren und vorrichtung zum faerben von gegenstaenden mittels plasmabeschichtung. ATE86676T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA000538430A CA1264025A (en) 1987-05-29 1987-05-29 Apparatus and process for coloring objects by plasma coating
EP88304837A EP0293229B1 (de) 1987-05-29 1988-05-27 Verfahren und Vorrichtung zum Färben von Gegenständen mittels Plasmabeschichtung

Publications (1)

Publication Number Publication Date
ATE86676T1 true ATE86676T1 (de) 1993-03-15

Family

ID=4135780

Family Applications (1)

Application Number Title Priority Date Filing Date
AT88304837T ATE86676T1 (de) 1987-05-29 1988-05-27 Verfahren und vorrichtung zum faerben von gegenstaenden mittels plasmabeschichtung.

Country Status (6)

Country Link
US (1) US4926792A (de)
EP (1) EP0293229B1 (de)
JP (1) JPH0759749B2 (de)
AT (1) ATE86676T1 (de)
CA (1) CA1264025A (de)
DE (1) DE3878987T2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408818A1 (de) * 1989-07-20 1991-01-23 Battelle Memorial Institute Verfahren zur gleichzeitigen Herstellung von metallischen Legierungen und Überzügen aus diesen Legierungen auf Gegenständen
DE3931713C1 (de) * 1989-09-22 1991-03-14 Balzers Ag, Balzers, Li
US5741544A (en) * 1995-08-31 1998-04-21 Olin Corporation Articles using specialized vapor deposition processes
NL1010531C2 (nl) * 1998-11-11 2000-05-15 Vacumetal B V Inrichting en werkwijze voor het door middel van opdampen (PVD) op voorwerpen aanbrengen van een laag.
US6365016B1 (en) * 1999-03-17 2002-04-02 General Electric Company Method and apparatus for arc plasma deposition with evaporation of reagents
DE19914129C2 (de) * 1999-03-27 2001-04-05 Forschungszentrum Juelich Gmbh Verfahren zum doppelseitigen Beschichten eines Substrates mit insbesondere einem Hochtemperatursupraleiter-Material durch Materialabscheidung und Vorrichtung zur Durchführung des Verfahrens
ITRM20040205A1 (it) * 2004-04-23 2004-07-23 Mauro Busi Prodotto con caratteristiche tessili da utilizzare in piu' settori merceologici ed in particolare per il settore orafo e relativo metodo di produzione con valenza ecologica.
US8968830B2 (en) * 2007-12-06 2015-03-03 Oerlikon Trading Ag, Trubbach PVD—vacuum coating unit
AT508254B1 (de) * 2009-12-01 2010-12-15 Muenze Oesterreich Ag Verfahren zum überziehen geprägter scheibenkörper, insbesondere münzen
US20180294062A1 (en) * 2015-10-06 2018-10-11 The Penn State Research Foundation Ceramic coating for corrosion resistance of nuclear fuel cladding
US10596653B2 (en) * 2015-10-20 2020-03-24 Richard Keeton Cutting water table and methods of use
US11225717B2 (en) * 2017-11-29 2022-01-18 Oerlikon Surface Solutions Ag, Pfäffikon Fixture for coating of double-ended tools
EP3567128A1 (de) * 2018-05-08 2019-11-13 IHI Hauzer Techno Coating B.V. Abscheidungsvorrichtung und verfahren zum beschichten von kugelförmigen gegenständen
CN118086860A (zh) * 2024-04-29 2024-05-28 成都晨发泰达航空科技股份有限公司 一种转子叶片化学气相沉积铝涂层装置及方法

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR979772A (fr) * 1948-01-30 1951-05-02 Procédé et dispositif pour l'application de précipités métalliques sur des corps quelconques
CH311812A (de) * 1951-11-05 1955-12-15 Zeiss Carl Fa Aufdampfeinrichtung.
US3717119A (en) * 1971-07-30 1973-02-20 Gen Motors Corp Vacuum processing machine for aluminizing headlamp reflectors
JPS50147440A (de) * 1974-05-18 1975-11-26
US3926147A (en) * 1974-11-15 1975-12-16 Mc Donnell Douglas Corp Glow discharge-tumbling vapor deposition apparatus
JPS5487683A (en) * 1977-12-26 1979-07-12 Ulvac Corp Metal film depositing apparatus
JPS58695Y2 (ja) * 1978-04-17 1983-01-07 日本真空技術株式会社 ドライプレ−テイング装置
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
JPS57131363A (en) * 1981-02-03 1982-08-14 Citizen Watch Co Ltd Ion plating device
US4550239A (en) * 1981-10-05 1985-10-29 Tokyo Denshi Kagaku Kabushiki Kaisha Automatic plasma processing device and heat treatment device
US4582720A (en) * 1982-09-20 1986-04-15 Semiconductor Energy Laboratory Co., Ltd. Method and apparatus for forming non-single-crystal layer
DE3520924A1 (de) * 1984-06-12 1985-12-12 Toyoda Gosei Co., Ltd., Haruhi, Aichi Plasmaverfahrensanlage
US4818169A (en) * 1985-05-17 1989-04-04 Schram Richard R Automated wafer inspection system
US4650064A (en) * 1985-09-13 1987-03-17 Comptech, Incorporated Substrate rotation method and apparatus
US4709655A (en) * 1985-12-03 1987-12-01 Varian Associates, Inc. Chemical vapor deposition apparatus
US4775281A (en) * 1986-12-02 1988-10-04 Teradyne, Inc. Apparatus and method for loading and unloading wafers
DE8711193U1 (de) * 1987-08-17 1987-10-01 INTERATOM GmbH, 5060 Bergisch Gladbach Beschichtungskammer mit Einrichtung zum Beschichten von Kleinteilen

Also Published As

Publication number Publication date
EP0293229A2 (de) 1988-11-30
CA1264025A (en) 1989-12-27
DE3878987D1 (de) 1993-04-15
JPS63310964A (ja) 1988-12-19
US4926792A (en) 1990-05-22
DE3878987T2 (de) 1993-06-17
EP0293229B1 (de) 1993-03-10
JPH0759749B2 (ja) 1995-06-28
EP0293229A3 (en) 1989-08-30

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