ATE554364T1 - Niederkohärenz-interferometer bei dem die mess- zweideutigkeit aufgelöst ist - Google Patents

Niederkohärenz-interferometer bei dem die mess- zweideutigkeit aufgelöst ist

Info

Publication number
ATE554364T1
ATE554364T1 AT08772181T AT08772181T ATE554364T1 AT E554364 T1 ATE554364 T1 AT E554364T1 AT 08772181 T AT08772181 T AT 08772181T AT 08772181 T AT08772181 T AT 08772181T AT E554364 T1 ATE554364 T1 AT E554364T1
Authority
AT
Austria
Prior art keywords
resolved
coherence interferometer
low coherence
measurement
interferometer
Prior art date
Application number
AT08772181T
Other languages
English (en)
Inventor
David B Kay
Original Assignee
Quality Vision Internat
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Quality Vision Internat filed Critical Quality Vision Internat
Application granted granted Critical
Publication of ATE554364T1 publication Critical patent/ATE554364T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02027—Two or more interferometric channels or interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02041—Interferometers characterised by particular imaging or detection techniques
    • G01B9/02044—Imaging in the frequency domain, e.g. by using a spectrometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
    • G01B9/02074—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer of the detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
    • G01B9/02078—Caused by ambiguity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
AT08772181T 2007-12-18 2008-06-27 Niederkohärenz-interferometer bei dem die mess- zweideutigkeit aufgelöst ist ATE554364T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/958,411 US7791731B2 (en) 2007-12-18 2007-12-18 Partial coherence interferometer with measurement ambiguity resolution
PCT/US2008/068602 WO2009079031A1 (en) 2007-12-18 2008-06-27 Partial coherence interferometer with measurement ambiguity resolution

Publications (1)

Publication Number Publication Date
ATE554364T1 true ATE554364T1 (de) 2012-05-15

Family

ID=40752764

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08772181T ATE554364T1 (de) 2007-12-18 2008-06-27 Niederkohärenz-interferometer bei dem die mess- zweideutigkeit aufgelöst ist

Country Status (5)

Country Link
US (1) US7791731B2 (de)
EP (1) EP2104833B1 (de)
JP (1) JP4568372B2 (de)
AT (1) ATE554364T1 (de)
WO (1) WO2009079031A1 (de)

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DE102009049932B4 (de) * 2009-10-19 2016-04-07 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Schwingungsmessung an einem Objekt
US8269157B2 (en) * 2009-10-23 2012-09-18 Academia Sinica Optical imaging system
US8508748B1 (en) * 2010-06-03 2013-08-13 Kla-Tencor Corporation Inspection system with fiber coupled OCT focusing
JP5504068B2 (ja) * 2010-06-23 2014-05-28 Ｄｍｇ森精機株式会社 変位検出装置
DE102011115027A1 (de) * 2011-10-07 2013-04-11 Polytec Gmbh Kohärenzrasterinterferometer und Verfahren zur ortsaufgelösten optischen Vermessung der Oberflächengeometrie eines Objekts
DE102011085599B3 (de) * 2011-11-02 2012-12-13 Polytec Gmbh Vorrichtung und Verfahren zur interferometrischen Vermessung eines Objekts
DE102013202349B3 (de) * 2013-02-13 2013-12-19 Polytec Gmbh Kohärenzrasterinterferometer und Verfahren zur ortsaufgelösten optischen Vermessung der Höhengeometriedaten eines Objekts
US9091523B2 (en) 2013-07-19 2015-07-28 Quality Vision International, Inc. Profilometer with partial coherence interferometer adapted for avoiding measurements straddling a null position
US10935366B2 (en) 2014-12-12 2021-03-02 Werth Messtechnik Gmbh Method and device for measuring features on workpieces
DE102015121582A1 (de) 2014-12-12 2016-06-16 Werth Messtechnik Gmbh Verfahren und Vorrichtung zur Messung von Merkmalen an Werkstücken
US10107615B2 (en) 2016-04-20 2018-10-23 Quality Vision International, Inc. Remote probe for optical measuring machine
CN109690234B (zh) * 2016-09-15 2021-09-14 科磊股份有限公司 用于优化以成像为基础的覆盖度量的聚焦的系统及方法
US10254105B2 (en) 2016-12-05 2019-04-09 Quality Vision International, Inc. Exchangeable lens module system for probes of optical measuring machines
US10107614B1 (en) 2017-04-18 2018-10-23 Quality Vision International, Inc. Optical pen for interferometric measuring machine
CN113574344A (zh) 2019-01-28 2021-10-29 优质视觉技术国际公司 通过偏振光纤连接到源/检测器的部分相干范围传感器笔
JP7443156B2 (ja) 2020-05-18 2024-03-05 株式会社ミツトヨ 測定装置および測定方法

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DE3219503C2 (de) 1982-05-25 1985-08-08 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte
JPS6088210U (ja) 1983-11-24 1985-06-17 横河電機株式会社 ３次元自由曲面測定装置
JPS60130711A (ja) * 1983-12-20 1985-07-12 Ricoh Co Ltd 干渉計におけるフオ−カシング方法
US5263776A (en) 1992-09-25 1993-11-23 International Business Machines Corporation Multi-wavelength optical thermometry
JPH08114413A (ja) 1994-10-18 1996-05-07 Fuji Photo Optical Co Ltd 干渉計の被検面距離合わせ方法
JP3230977B2 (ja) 1995-12-28 2001-11-19 富士写真光機株式会社 光波干渉装置の被検体ポジショニング装置
US5995222A (en) 1995-12-28 1999-11-30 Fuji Photo Optical Co., Ltd. Subject positioning device for optical interferometer
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US6195168B1 (en) 1999-07-22 2001-02-27 Zygo Corporation Infrared scanning interferometry apparatus and method
JP3642996B2 (ja) * 1999-11-18 2005-04-27 独立行政法人科学技術振興機構 光干渉法による測定対象物の屈折率と厚さの同時測定方法及びそのための装置
US7130059B2 (en) 2002-06-24 2006-10-31 Light Gage, Inc Common-path frequency-scanning interferometer
US6781699B2 (en) 2002-10-22 2004-08-24 Corning-Tropel Two-wavelength confocal interferometer for measuring multiple surfaces
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Also Published As

Publication number Publication date
JP4568372B2 (ja) 2010-10-27
US7791731B2 (en) 2010-09-07
EP2104833B1 (de) 2012-04-18
US20090153839A1 (en) 2009-06-18
EP2104833A1 (de) 2009-09-30
JP2010510529A (ja) 2010-04-02
EP2104833A4 (de) 2011-01-05
WO2009079031A1 (en) 2009-06-25

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