ATE553503T1 - Einrichtung zur fotoelektrischen detektion insbesondere für röntgen- oder gammastrahlung - Google Patents
Einrichtung zur fotoelektrischen detektion insbesondere für röntgen- oder gammastrahlungInfo
- Publication number
- ATE553503T1 ATE553503T1 AT03796129T AT03796129T ATE553503T1 AT E553503 T1 ATE553503 T1 AT E553503T1 AT 03796129 T AT03796129 T AT 03796129T AT 03796129 T AT03796129 T AT 03796129T AT E553503 T1 ATE553503 T1 AT E553503T1
- Authority
- AT
- Austria
- Prior art keywords
- detection
- inter
- pixel
- electrodes
- zones
- Prior art date
Links
- 238000001514 detection method Methods 0.000 title abstract 8
- 230000005855 radiation Effects 0.000 title abstract 2
- 229910004613 CdTe Inorganic materials 0.000 abstract 3
- 229910004611 CdZnTe Inorganic materials 0.000 abstract 3
- 239000000463 material Substances 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 238000005538 encapsulation Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000002161 passivation Methods 0.000 abstract 1
- 230000010287 polarization Effects 0.000 abstract 1
- 230000008719 thickening Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
- G01T1/2921—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras
- G01T1/2928—Static instruments for imaging the distribution of radioactivity in one or two dimensions; Radio-isotope cameras using solid state detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14618—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14634—Assemblies, i.e. Hybrid structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
- H01L27/14676—X-ray, gamma-ray or corpuscular radiation imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/085—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors the device being sensitive to very short wavelength, e.g. X-ray, Gamma-rays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- High Energy & Nuclear Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Toxicology (AREA)
- Measurement Of Radiation (AREA)
- Light Receiving Elements (AREA)
- Solid State Image Pick-Up Elements (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0216149A FR2849272B1 (fr) | 2002-12-19 | 2002-12-19 | Dispositif de detection photo-electrique et notamment de rayonnement x ou y |
PCT/FR2003/003550 WO2004066402A1 (fr) | 2002-12-19 | 2003-12-02 | Dispositif de detection photo-electrique et notamment de rayonnement x ou ϝ |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE553503T1 true ATE553503T1 (de) | 2012-04-15 |
Family
ID=32406189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT03796129T ATE553503T1 (de) | 2002-12-19 | 2003-12-02 | Einrichtung zur fotoelektrischen detektion insbesondere für röntgen- oder gammastrahlung |
Country Status (5)
Country | Link |
---|---|
US (1) | US7034311B2 (de) |
EP (1) | EP1579510B1 (de) |
AT (1) | ATE553503T1 (de) |
FR (1) | FR2849272B1 (de) |
WO (1) | WO2004066402A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8039808B2 (en) * | 2005-09-15 | 2011-10-18 | Koninklijke Philips Electronics N.V. | Performance solid state detectors |
DE102011003454A1 (de) * | 2011-02-01 | 2012-08-02 | Siemens Aktiengesellschaft | Strahlungsdirektkonverter, Strahlungsdetektor, medizintechnisches Gerät und Verfahren zum Erzeugen eines Strahlungsdirektkonverters |
CN113113508A (zh) * | 2021-03-17 | 2021-07-13 | 西北工业大学 | 条形电极结构的电流型CdZnTe探测器及其制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57162372A (en) * | 1981-03-30 | 1982-10-06 | Toshiba Corp | Semiconductor radiation detector |
GB9520791D0 (en) * | 1995-10-13 | 1995-12-13 | Philips Electronics Nv | Image sensor |
US6175120B1 (en) * | 1998-05-08 | 2001-01-16 | The Regents Of The University Of Michigan | High-resolution ionization detector and array of such detectors |
JP4183784B2 (ja) * | 1997-09-09 | 2008-11-19 | 株式会社半導体エネルギー研究所 | 液晶パネルの作製方法 |
JP3432770B2 (ja) * | 1998-09-29 | 2003-08-04 | シャープ株式会社 | 二次元画像検出器の製造方法 |
FR2793954B1 (fr) * | 1999-05-19 | 2003-06-13 | Commissariat Energie Atomique | Dispositif de detection de rayonnement a forte dynamique |
US6847039B2 (en) * | 2001-03-28 | 2005-01-25 | Canon Kabushiki Kaisha | Photodetecting device, radiation detecting device, and radiation imaging system |
-
2002
- 2002-12-19 FR FR0216149A patent/FR2849272B1/fr not_active Expired - Fee Related
-
2003
- 2003-12-02 AT AT03796129T patent/ATE553503T1/de active
- 2003-12-02 EP EP03796129A patent/EP1579510B1/de not_active Expired - Lifetime
- 2003-12-02 WO PCT/FR2003/003550 patent/WO2004066402A1/fr active Application Filing
-
2005
- 2005-05-17 US US11/131,007 patent/US7034311B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP1579510B1 (de) | 2012-04-11 |
WO2004066402A1 (fr) | 2004-08-05 |
FR2849272B1 (fr) | 2005-11-18 |
FR2849272A1 (fr) | 2004-06-25 |
US7034311B2 (en) | 2006-04-25 |
EP1579510A1 (de) | 2005-09-28 |
US20050236575A1 (en) | 2005-10-27 |
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