ATE546396T1 - Vertikalversatzbeschichter und verwendungsverfahren - Google Patents
Vertikalversatzbeschichter und verwendungsverfahrenInfo
- Publication number
- ATE546396T1 ATE546396T1 AT05784314T AT05784314T ATE546396T1 AT E546396 T1 ATE546396 T1 AT E546396T1 AT 05784314 T AT05784314 T AT 05784314T AT 05784314 T AT05784314 T AT 05784314T AT E546396 T1 ATE546396 T1 AT E546396T1
- Authority
- AT
- Austria
- Prior art keywords
- substrate
- coater
- path
- transport system
- travel
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/001—General methods for coating; Devices therefor
- C03C17/002—General methods for coating; Devices therefor for flat glass, e.g. float glass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/02—Controlled or contamination-free environments or clean space conditions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/30—Aspects of methods for coating glass not covered above
- C03C2218/365—Coating different sides of a glass substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physical Vapour Deposition (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US60092304P | 2004-08-12 | 2004-08-12 | |
PCT/US2005/028003 WO2006020533A2 (en) | 2004-08-12 | 2005-08-05 | Vertical-offset coater and methods of use |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE546396T1 true ATE546396T1 (de) | 2012-03-15 |
Family
ID=35908056
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05784314T ATE546396T1 (de) | 2004-08-12 | 2005-08-05 | Vertikalversatzbeschichter und verwendungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (2) | US7678198B2 (de) |
EP (1) | EP1781560B1 (de) |
JP (1) | JP2008509805A (de) |
AT (1) | ATE546396T1 (de) |
CA (1) | CA2554011A1 (de) |
WO (1) | WO2006020533A2 (de) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20060134363A (ko) * | 2005-06-22 | 2006-12-28 | 엘지.필립스 엘시디 주식회사 | 경사형 캐리어 이송 장치 |
CN101626969A (zh) * | 2007-03-07 | 2010-01-13 | 株式会社爱发科 | 真空装置、基板搬送方法 |
US7954627B2 (en) * | 2007-03-23 | 2011-06-07 | Btsystems, Llc | Bin transporter system |
DE102007022431A1 (de) * | 2007-05-09 | 2008-11-13 | Leybold Optics Gmbh | Behandlungssystem für flache Substrate |
DE102007052524B4 (de) * | 2007-11-01 | 2012-05-31 | Von Ardenne Anlagentechnik Gmbh | Transportmittel und Vakuumbeschichtungsanlage für Substrate unterschiedlicher Größe |
US9782949B2 (en) | 2008-05-30 | 2017-10-10 | Corning Incorporated | Glass laminated articles and layered articles |
TWI502751B (zh) * | 2008-09-05 | 2015-10-01 | First Solar Inc | 經塗覆基材及包含該基材的半導體元件 |
US20100059115A1 (en) | 2008-09-05 | 2010-03-11 | First Solar, Inc. | Coated Substrates and Semiconductor Devices Including the Substrates |
US8842357B2 (en) | 2008-12-31 | 2014-09-23 | View, Inc. | Electrochromic device and method for making electrochromic device |
US8432603B2 (en) * | 2009-03-31 | 2013-04-30 | View, Inc. | Electrochromic devices |
JP6049051B2 (ja) * | 2011-07-29 | 2016-12-21 | 日東電工株式会社 | 両面真空成膜方法 |
DE102011083139B4 (de) * | 2011-09-21 | 2013-12-24 | Von Ardenne Anlagentechnik Gmbh | Substratbehandlungsverfahren und Substratbehandlungsanlage |
CN104011588B (zh) | 2011-12-12 | 2021-06-22 | 唯景公司 | 薄膜装置和制造 |
EP2650135A1 (de) * | 2012-04-12 | 2013-10-16 | KBA-NotaSys SA | Intaglio-Druckplattenbeschichtungsvorrichtung |
WO2014031119A1 (en) | 2012-08-23 | 2014-02-27 | National University Corporation Tokyo University Of Agriculture And Technology | Highly transparent aluminum nitride single crystalline layers and devices made therefrom |
WO2014120637A1 (en) | 2013-01-29 | 2014-08-07 | Hexatech, Inc. | Optoelectronic devices incorporating single crystalline aluminum nitride substrate |
WO2014159954A1 (en) | 2013-03-14 | 2014-10-02 | Hexatech, Inc. | Power semiconductor devices incorporating single crystalline aluminum nitride substrate |
FR3005654B1 (fr) * | 2013-05-17 | 2017-03-24 | Saint Gobain | Procede de depot de revetements sur un substrat |
US11688589B2 (en) * | 2013-06-10 | 2023-06-27 | View, Inc. | Carrier with vertical grid for supporting substrates in coater |
US9321259B2 (en) * | 2013-11-11 | 2016-04-26 | Lee Milazzo | Anti-friction roller |
CN204058252U (zh) * | 2014-07-15 | 2014-12-31 | 河南康平光电高科有限公司 | 一种玻璃镀膜机用装片架 |
EP3387163B1 (de) * | 2015-12-11 | 2020-04-29 | Cardinal CG Company | Verfahren zur beidseitigen beschichtung eines substrats |
WO2019223952A1 (en) * | 2018-05-23 | 2019-11-28 | Agc Glass Europe | Double sided coated glass substrate and method for making the same |
EP3999459A1 (de) * | 2019-07-19 | 2022-05-25 | Saint-Gobain Glass France | Vorrichtung zum fördern einer substratbahn |
CN113145415B (zh) * | 2021-04-26 | 2023-03-24 | 芜湖东信光电科技有限公司 | 超薄柔性玻璃的表面涂布方法 |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1442314A (en) | 1973-07-20 | 1976-07-14 | Triplex Safety Glass Co | Heat treatment of glass sheets |
US4194962A (en) | 1978-12-20 | 1980-03-25 | Advanced Coating Technology, Inc. | Cathode for sputtering |
US4890714A (en) | 1986-02-14 | 1990-01-02 | Brown H Gary | Conveying system |
FR2596920A1 (fr) | 1986-04-03 | 1987-10-09 | Saint Roch Sa Glaceries | Cathode de pulverisation |
DE3623970A1 (de) | 1986-07-16 | 1988-01-28 | Leybold Heraeus Gmbh & Co Kg | Transporteinrichtung mit rollensystemen fuer vakuum-beschichtungsanlagen |
DE3702775A1 (de) * | 1987-01-30 | 1988-08-11 | Leybold Ag | Vorrichtung zum quasi-kontinuierlichen behandeln von substraten |
DE4029905C2 (de) | 1990-09-21 | 1993-10-28 | Leybold Ag | Vorrichtung für den Transport von Substraten |
EP0577766B1 (de) | 1991-04-04 | 1999-12-29 | Seagate Technology, Inc. | Verfahren und vorrichtung zum sputtern mit hoher geschwindigkeit |
US5228553A (en) | 1992-02-24 | 1993-07-20 | Circuit Chemistry Equipment, Inc. | Drive mechanism for a conveyor of a printer circuit board processor |
DE4428136A1 (de) | 1994-08-09 | 1996-02-15 | Leybold Ag | Vakuum-Beschichtungsanlage |
US5543022A (en) * | 1995-01-17 | 1996-08-06 | Hmt Technology Corporation | Disc-handling apparatus |
US5762674A (en) | 1995-09-27 | 1998-06-09 | Glasstech, Inc. | Apparatus for coating glass sheet ribbon |
DE19826949A1 (de) | 1998-06-17 | 1999-12-23 | Georg Kunkel | Vorrichtung zum Transport von plattenartigen Substraten, beispielsweise von Glasplatten für Flachbildschirme |
CA2383744C (en) | 1998-12-21 | 2006-05-23 | Cardinal Ig Company | Soil-resistant coating for glass surfaces |
JP4378790B2 (ja) | 1999-05-28 | 2009-12-09 | 株式会社日立プラズマパテントライセンシング | ガラス基板のスパッタリング方法及びスパッタリング装置 |
JP2001213517A (ja) * | 1999-11-24 | 2001-08-07 | Daiichi Shisetsu Kogyo Kk | 板状部材の搬送装置 |
US6919001B2 (en) * | 2000-05-01 | 2005-07-19 | Intevac, Inc. | Disk coating system |
JP5021112B2 (ja) * | 2000-08-11 | 2012-09-05 | キヤノンアネルバ株式会社 | 真空処理装置 |
US6921579B2 (en) * | 2000-09-11 | 2005-07-26 | Cardinal Cg Company | Temporary protective covers |
JP2002203885A (ja) * | 2000-12-27 | 2002-07-19 | Anelva Corp | インターバック型基板処理装置 |
JP4856308B2 (ja) * | 2000-12-27 | 2012-01-18 | キヤノンアネルバ株式会社 | 基板処理装置及び経由チャンバー |
JPWO2003014410A1 (ja) | 2001-08-07 | 2004-11-25 | 日本板硝子株式会社 | スパッタリング装置 |
JP4478376B2 (ja) * | 2002-08-27 | 2010-06-09 | 株式会社アルバック | 縦型化学気相成長装置及び該装置を用いた成膜方法 |
DE10319379A1 (de) * | 2003-04-30 | 2004-11-25 | Applied Films Gmbh & Co. Kg | Vorrichtung zum Transportieren eines flachen Substrats in einer Vakuumkammer |
-
2005
- 2005-08-04 US US11/197,651 patent/US7678198B2/en active Active
- 2005-08-05 EP EP05784314A patent/EP1781560B1/de not_active Not-in-force
- 2005-08-05 AT AT05784314T patent/ATE546396T1/de active
- 2005-08-05 WO PCT/US2005/028003 patent/WO2006020533A2/en active Application Filing
- 2005-08-05 CA CA002554011A patent/CA2554011A1/en not_active Abandoned
- 2005-08-05 JP JP2007525689A patent/JP2008509805A/ja not_active Withdrawn
-
2010
- 2010-02-26 US US12/713,843 patent/US8906206B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US7678198B2 (en) | 2010-03-16 |
CA2554011A1 (en) | 2006-02-23 |
US8906206B2 (en) | 2014-12-09 |
JP2008509805A (ja) | 2008-04-03 |
EP1781560A2 (de) | 2007-05-09 |
US20060035021A1 (en) | 2006-02-16 |
WO2006020533A2 (en) | 2006-02-23 |
WO2006020533A3 (en) | 2006-08-24 |
US20100221422A1 (en) | 2010-09-02 |
EP1781560B1 (de) | 2012-02-22 |
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