TW200519062A - Apparatus and method for coating a film on a glass substrate - Google Patents

Apparatus and method for coating a film on a glass substrate

Info

Publication number
TW200519062A
TW200519062A TW092137461A TW92137461A TW200519062A TW 200519062 A TW200519062 A TW 200519062A TW 092137461 A TW092137461 A TW 092137461A TW 92137461 A TW92137461 A TW 92137461A TW 200519062 A TW200519062 A TW 200519062A
Authority
TW
Taiwan
Prior art keywords
substrate
coater
film
coating
sides
Prior art date
Application number
TW092137461A
Other languages
Chinese (zh)
Inventor
Chang-Ha Lee
Sang-Jae Yim
Sung-Cheal Kim
Young-Jae Kee
Kyung-Won Ryu
Original Assignee
Samsung Corning Prec Glass Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Corning Prec Glass Co filed Critical Samsung Corning Prec Glass Co
Publication of TW200519062A publication Critical patent/TW200519062A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Optical Filters (AREA)
  • Coating Apparatus (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

It is an object of the present invention to coat a film on a glass substrate while utilizing a clean room effectively and minimizing vibration of the substrate, down time and foreign material attachment. The present invention provides a substrate coating apparatus, including: a loading conveyor for conveying the substrate in a vertical position while buoyantly supporting both sides of the substrate; a vertically disposed first and a vertically disposed second film coater for coating films on the both sides; a coater moving device for moving the first and the second coater between a coating position where the coaters coat films on the both sides and a supply position where the coaters are supplied with a film roll; an unloading conveyor for conveying the substrate coated with films; and a control unit for controlling the loading and the unloading conveyor, and the first and the second coater.
TW092137461A 2003-12-01 2003-12-30 Apparatus and method for coating a film on a glass substrate TW200519062A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR20030086214 2003-12-01

Publications (1)

Publication Number Publication Date
TW200519062A true TW200519062A (en) 2005-06-16

Family

ID=34737854

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092137461A TW200519062A (en) 2003-12-01 2003-12-30 Apparatus and method for coating a film on a glass substrate

Country Status (3)

Country Link
JP (1) JP2005167171A (en)
CN (1) CN1623947A (en)
TW (1) TW200519062A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4413789B2 (en) * 2005-01-24 2010-02-10 東京エレクトロン株式会社 Stage device and coating treatment device
EP1970467B1 (en) 2007-03-14 2012-05-16 Applied Materials, Inc. Flood chamber for coating installations
US11795102B2 (en) * 2016-01-26 2023-10-24 Corning Incorporated Non-contact coated glass and related coating system and method
CN110257793A (en) * 2019-07-04 2019-09-20 深圳市捷佳伟创新能源装备股份有限公司 Tilt the filming equipment of conveying tray

Also Published As

Publication number Publication date
JP2005167171A (en) 2005-06-23
CN1623947A (en) 2005-06-08

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