TW200619414A - Method of depositing a metal compound layer and apparatus for depositing a metal compound layer - Google Patents
Method of depositing a metal compound layer and apparatus for depositing a metal compound layerInfo
- Publication number
- TW200619414A TW200619414A TW094143330A TW94143330A TW200619414A TW 200619414 A TW200619414 A TW 200619414A TW 094143330 A TW094143330 A TW 094143330A TW 94143330 A TW94143330 A TW 94143330A TW 200619414 A TW200619414 A TW 200619414A
- Authority
- TW
- Taiwan
- Prior art keywords
- compound layer
- metal compound
- depositing
- flow rate
- source gas
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
- H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
- H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System
- H01L21/28556—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic System by chemical means, e.g. CVD, LPCVD, PECVD, laser CVD
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28202—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation in a nitrogen-containing ambient, e.g. nitride deposition, growth, oxynitridation, NH3 nitridation, N2O oxidation, thermal nitridation, RTN, plasma nitridation, RPN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
Abstract
In a method and an apparatus for depositing a metal compound layer, a first source gas and a second source gas may be provided onto a substrate to deposit a first metal compound layer on the substrate. The first source gas may include a metal and halogen elements, and the second source gas may include a first material capable of being reacted with the metal and a second material capable of being reacted with the halogen element. The first and the second source gases may be provided at a first flow rate ratio. A second metal compound layer may be deposited on the first metal compound layer by providing the first and the second source gases with a second flow rate ratio different from the first flow rate ratio. The apparatus may include a process chamber configured to receive a substrate, a gas supply system, and a flow rate control device.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20040104741 | 2004-12-13 | ||
KR1020050049565A KR100596495B1 (en) | 2004-12-13 | 2005-06-10 | Method of depositing a metal compound and apparatus for performing the same |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200619414A true TW200619414A (en) | 2006-06-16 |
Family
ID=36787604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094143330A TW200619414A (en) | 2004-12-13 | 2005-12-08 | Method of depositing a metal compound layer and apparatus for depositing a metal compound layer |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100596495B1 (en) |
CN (1) | CN1789487A (en) |
TW (1) | TW200619414A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI552199B (en) * | 2011-06-30 | 2016-10-01 | 三星顯示器有限公司 | Nozzle set, atomic layer deposition apparatus including the nozzle set, and sealing method of organic light emitting device using the same |
TWI671798B (en) * | 2017-03-30 | 2019-09-11 | 日商國際電氣股份有限公司 | Substrate processing method, substrate processing device, and program |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8207010B2 (en) * | 2007-06-05 | 2012-06-26 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing photoelectric conversion device |
JP5087657B2 (en) | 2009-08-04 | 2012-12-05 | 株式会社日立国際電気 | Semiconductor device manufacturing method and substrate processing apparatus |
JP5610438B2 (en) * | 2010-01-29 | 2014-10-22 | 株式会社日立国際電気 | Substrate processing apparatus and semiconductor device manufacturing method |
JP5722595B2 (en) * | 2010-11-11 | 2015-05-20 | 株式会社日立国際電気 | Substrate processing apparatus and semiconductor device manufacturing method |
US20130143415A1 (en) * | 2011-12-01 | 2013-06-06 | Applied Materials, Inc. | Multi-Component Film Deposition |
JP2017503079A (en) | 2014-01-05 | 2017-01-26 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Film deposition using spatial atomic layer deposition or pulsed chemical vapor deposition |
KR102518932B1 (en) * | 2023-01-27 | 2023-04-06 | (주)브이아이테크 | MTS deposition gas control system of silicon carbide deposition equipment |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100363088B1 (en) * | 2000-04-20 | 2002-12-02 | 삼성전자 주식회사 | Method of manufacturing barrier metal layer using atomic layer deposition method |
JP4528413B2 (en) | 2000-04-25 | 2010-08-18 | 日鉱金属株式会社 | Vapor growth method |
-
2005
- 2005-06-10 KR KR1020050049565A patent/KR100596495B1/en not_active IP Right Cessation
- 2005-12-08 TW TW094143330A patent/TW200619414A/en unknown
- 2005-12-13 CN CNA2005101369870A patent/CN1789487A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI552199B (en) * | 2011-06-30 | 2016-10-01 | 三星顯示器有限公司 | Nozzle set, atomic layer deposition apparatus including the nozzle set, and sealing method of organic light emitting device using the same |
TWI671798B (en) * | 2017-03-30 | 2019-09-11 | 日商國際電氣股份有限公司 | Substrate processing method, substrate processing device, and program |
Also Published As
Publication number | Publication date |
---|---|
KR100596495B1 (en) | 2006-07-04 |
CN1789487A (en) | 2006-06-21 |
KR20060066602A (en) | 2006-06-16 |
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