ATE537565T1 - Lichtemittierende halbleitervorrichtung mit metallsubstrat - Google Patents
Lichtemittierende halbleitervorrichtung mit metallsubstratInfo
- Publication number
- ATE537565T1 ATE537565T1 AT06805076T AT06805076T ATE537565T1 AT E537565 T1 ATE537565 T1 AT E537565T1 AT 06805076 T AT06805076 T AT 06805076T AT 06805076 T AT06805076 T AT 06805076T AT E537565 T1 ATE537565 T1 AT E537565T1
- Authority
- AT
- Austria
- Prior art keywords
- layer
- light
- semiconductor device
- metal substrate
- emitting semiconductor
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 239000000758 substrate Substances 0.000 title abstract 2
- 239000002184 metal Substances 0.000 title 1
- 239000011651 chromium Substances 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/018—Bonding of wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/85—Packages
- H10H20/858—Means for heat extraction or cooling
- H10H20/8581—Means for heat extraction or cooling characterised by their material
Landscapes
- Led Devices (AREA)
- Led Device Packages (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100308687A CN100474642C (zh) | 2005-10-27 | 2005-10-27 | 含有金属铬基板的铟镓铝氮半导体发光元件及其制造方法 |
| PCT/CN2006/002871 WO2007048346A1 (en) | 2005-10-27 | 2006-10-26 | Semiconductor light-emitting device with metal support substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE537565T1 true ATE537565T1 (de) | 2011-12-15 |
Family
ID=36805820
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT06805076T ATE537565T1 (de) | 2005-10-27 | 2006-10-26 | Lichtemittierende halbleitervorrichtung mit metallsubstrat |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8361880B2 (de) |
| EP (1) | EP1941556B1 (de) |
| JP (1) | JP2009514198A (de) |
| KR (1) | KR20080060223A (de) |
| CN (1) | CN100474642C (de) |
| AT (1) | ATE537565T1 (de) |
| WO (1) | WO2007048346A1 (de) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7829909B2 (en) * | 2005-11-15 | 2010-11-09 | Verticle, Inc. | Light emitting diodes and fabrication methods thereof |
| KR100661602B1 (ko) * | 2005-12-09 | 2006-12-26 | 삼성전기주식회사 | 수직 구조 질화갈륨계 led 소자의 제조방법 |
| CN101295758B (zh) * | 2007-04-29 | 2013-03-06 | 晶能光电(江西)有限公司 | 含有碳基衬底的铟镓铝氮发光器件以及其制造方法 |
| US20110127567A1 (en) * | 2008-06-02 | 2011-06-02 | Korea University Industrial & Academic Collaboration Foundation | Supporting substrate for preparing semiconductor light-emitting device and semiconductor light-emitting device using supporting substrates |
| WO2010020069A1 (en) * | 2008-08-19 | 2010-02-25 | Lattice Power (Jiangxi) Corporation | METHOD FOR FABRICATING InGaAlN LIGHT-EMITTING DIODES WITH A METAL SUBSTRATE |
| US8354665B2 (en) * | 2008-08-19 | 2013-01-15 | Lattice Power (Jiangxi) Corporation | Semiconductor light-emitting devices for generating arbitrary color |
| WO2010020077A1 (en) * | 2008-08-22 | 2010-02-25 | Lattice Power (Jiangxi) Corporation | Method for fabricating ingaain light-emitting device on a combined substrate |
| US8188496B2 (en) | 2008-11-06 | 2012-05-29 | Samsung Led Co., Ltd. | Semiconductor light emitting device including substrate having protection layers and method for manufacturing the same |
| CN101840966B (zh) * | 2009-05-08 | 2013-07-03 | 晶能光电(江西)有限公司 | 半导体发光器件以及制备发光二极管的方法 |
| KR20110123118A (ko) | 2010-05-06 | 2011-11-14 | 삼성전자주식회사 | 패터닝된 발광부를 구비한 수직형 발광소자 |
| US8853057B2 (en) | 2010-09-28 | 2014-10-07 | National Chung-Hsing University | Method for fabricating semiconductor devices |
| TWI480926B (zh) * | 2010-09-28 | 2015-04-11 | Nat Univ Chung Hsing | Preparation method of epitaxial element |
| US8436363B2 (en) | 2011-02-03 | 2013-05-07 | Soitec | Metallic carrier for layer transfer and methods for forming the same |
| US9142412B2 (en) | 2011-02-03 | 2015-09-22 | Soitec | Semiconductor devices including substrate layers and overlying semiconductor layers having closely matching coefficients of thermal expansion, and related methods |
| US9082948B2 (en) | 2011-02-03 | 2015-07-14 | Soitec | Methods of fabricating semiconductor structures using thermal spray processes, and semiconductor structures fabricated using such methods |
| US8952395B2 (en) | 2011-07-26 | 2015-02-10 | Micron Technology, Inc. | Wafer-level solid state transducer packaging transducers including separators and associated systems and methods |
| US8497146B2 (en) | 2011-08-25 | 2013-07-30 | Micron Technology, Inc. | Vertical solid-state transducers having backside terminals and associated systems and methods |
| US8853668B2 (en) * | 2011-09-29 | 2014-10-07 | Kabushiki Kaisha Toshiba | Light emitting regions for use with light emitting devices |
| FR3059147B1 (fr) * | 2016-11-18 | 2019-01-25 | Centre National De La Recherche Scientifique | Heterostructures semi-conductrices avec structure de type wurtzite sur substrat en zno |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0435938A (ja) * | 1990-05-31 | 1992-02-06 | Minnesota Mining & Mfg Co <3M> | 金属調光沢を有する積層フィルム |
| US5985687A (en) * | 1996-04-12 | 1999-11-16 | The Regents Of The University Of California | Method for making cleaved facets for lasers fabricated with gallium nitride and other noncubic materials |
| JPH11261105A (ja) * | 1998-03-11 | 1999-09-24 | Toshiba Corp | 半導体発光素子 |
| US20010042866A1 (en) * | 1999-02-05 | 2001-11-22 | Carrie Carter Coman | Inxalygazn optical emitters fabricated via substrate removal |
| US6803603B1 (en) * | 1999-06-23 | 2004-10-12 | Kabushiki Kaisha Toshiba | Semiconductor light-emitting element |
| US7202506B1 (en) * | 1999-11-19 | 2007-04-10 | Cree, Inc. | Multi element, multi color solid state LED/laser |
| JP2001217443A (ja) * | 2000-02-04 | 2001-08-10 | Sony Corp | 半導体素子およびその製造方法、太陽電池およびその製造方法ならびに半導体素子を用いた光学素子 |
| JP2001267242A (ja) * | 2000-03-14 | 2001-09-28 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体及びその製造方法 |
| JP2001313259A (ja) * | 2000-04-28 | 2001-11-09 | Toyoda Gosei Co Ltd | Iii族窒化物系化合物半導体基板の製造方法及び半導体素子 |
| JP3502036B2 (ja) * | 2000-11-08 | 2004-03-02 | シャープ株式会社 | 半導体素子の製造方法および半導体素子 |
| US6632694B2 (en) * | 2001-10-17 | 2003-10-14 | Astralux, Inc. | Double heterojunction light emitting diodes and laser diodes having quantum dot silicon light emitters |
| US20030189215A1 (en) * | 2002-04-09 | 2003-10-09 | Jong-Lam Lee | Method of fabricating vertical structure leds |
| US20030193055A1 (en) * | 2002-04-10 | 2003-10-16 | Martter Robert H. | Lighting device and method |
| CN1288764C (zh) * | 2002-09-17 | 2006-12-06 | 日本电信电话株式会社 | 半导体光调制器和具有光调制器的激光器 |
| JP4217093B2 (ja) * | 2003-03-27 | 2009-01-28 | スタンレー電気株式会社 | 半導体発光素子及びその製造方法 |
| JP3821232B2 (ja) * | 2003-04-15 | 2006-09-13 | 日立電線株式会社 | エピタキシャル成長用多孔質基板およびその製造方法ならびにiii族窒化物半導体基板の製造方法 |
| US7538010B2 (en) * | 2003-07-24 | 2009-05-26 | S.O.I.Tec Silicon On Insulator Technologies | Method of fabricating an epitaxially grown layer |
| TWM255514U (en) * | 2003-10-16 | 2005-01-11 | Arima Optoelectronics Corp | Structure improvement of Gallium Indium Nitride light-emitting diode |
| KR100586948B1 (ko) * | 2004-01-19 | 2006-06-07 | 삼성전기주식회사 | 질화물 반도체 발광소자 및 그 제조방법 |
| JP2005209925A (ja) * | 2004-01-23 | 2005-08-04 | Nichia Chem Ind Ltd | 積層半導体基板 |
| CN1299329C (zh) * | 2004-03-04 | 2007-02-07 | 中国科学院上海光学精密机械研究所 | ZnO:Al2O3或ZnO:Cr2O3导电衬底的制备方法 |
| US20050269943A1 (en) * | 2004-06-04 | 2005-12-08 | Michael Hack | Protected organic electronic devices and methods for making the same |
| US7432119B2 (en) * | 2005-01-11 | 2008-10-07 | Semileds Corporation | Light emitting diode with conducting metal substrate |
| EP1681712A1 (de) * | 2005-01-13 | 2006-07-19 | S.O.I. Tec Silicon on Insulator Technologies S.A. | Verfahren zur Herstellung von Substraten für Optoelektronischen Anwendungen |
| US7635637B2 (en) * | 2005-07-25 | 2009-12-22 | Fairchild Semiconductor Corporation | Semiconductor structures formed on substrates and methods of manufacturing the same |
-
2005
- 2005-10-27 CN CNB2005100308687A patent/CN100474642C/zh not_active Expired - Fee Related
-
2006
- 2006-10-26 JP JP2008536913A patent/JP2009514198A/ja active Pending
- 2006-10-26 KR KR1020087005774A patent/KR20080060223A/ko not_active Ceased
- 2006-10-26 WO PCT/CN2006/002871 patent/WO2007048346A1/en not_active Ceased
- 2006-10-26 AT AT06805076T patent/ATE537565T1/de active
- 2006-10-26 US US12/063,989 patent/US8361880B2/en not_active Expired - Fee Related
- 2006-10-26 EP EP06805076A patent/EP1941556B1/de not_active Not-in-force
Also Published As
| Publication number | Publication date |
|---|---|
| US20080224154A1 (en) | 2008-09-18 |
| KR20080060223A (ko) | 2008-07-01 |
| WO2007048346A1 (en) | 2007-05-03 |
| EP1941556B1 (de) | 2011-12-14 |
| EP1941556A1 (de) | 2008-07-09 |
| EP1941556A4 (de) | 2009-06-17 |
| JP2009514198A (ja) | 2009-04-02 |
| CN1794476A (zh) | 2006-06-28 |
| US8361880B2 (en) | 2013-01-29 |
| CN100474642C (zh) | 2009-04-01 |
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