ATE527579T1 - Systeme und verfahren zur herstellung von mikrostrukturen durch abbilden einer zwischen äusseren schichten geschichteten strahlungsempfindlichen schicht und dadurch hergestellte mikrostrukturen - Google Patents

Systeme und verfahren zur herstellung von mikrostrukturen durch abbilden einer zwischen äusseren schichten geschichteten strahlungsempfindlichen schicht und dadurch hergestellte mikrostrukturen

Info

Publication number
ATE527579T1
ATE527579T1 AT04809596T AT04809596T ATE527579T1 AT E527579 T1 ATE527579 T1 AT E527579T1 AT 04809596 T AT04809596 T AT 04809596T AT 04809596 T AT04809596 T AT 04809596T AT E527579 T1 ATE527579 T1 AT E527579T1
Authority
AT
Austria
Prior art keywords
microstructures
sensitive layer
outer layers
imaging
radiation
Prior art date
Application number
AT04809596T
Other languages
German (de)
English (en)
Inventor
Robert Freese
Thomas Rinehart
Robert Wood
Original Assignee
Bright View Technologies Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bright View Technologies Corp filed Critical Bright View Technologies Corp
Application granted granted Critical
Publication of ATE527579T1 publication Critical patent/ATE527579T1/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0015—Production of aperture devices, microporous systems or stamps
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0025—Machining, e.g. grinding, polishing, diamond turning, manufacturing of mould parts
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1852—Manufacturing methods using mechanical means, e.g. ruling with diamond tool, moulding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G03F7/161—Coating processes; Apparatus therefor using a previously coated surface, e.g. by stamping or by transfer lamination
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
    • Y10S430/146—Laser beam

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optics & Photonics (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Laminated Bodies (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
AT04809596T 2003-09-11 2004-08-20 Systeme und verfahren zur herstellung von mikrostrukturen durch abbilden einer zwischen äusseren schichten geschichteten strahlungsempfindlichen schicht und dadurch hergestellte mikrostrukturen ATE527579T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/661,974 US7192692B2 (en) 2003-09-11 2003-09-11 Methods for fabricating microstructures by imaging a radiation sensitive layer sandwiched between outer layers
PCT/US2004/027071 WO2005036271A2 (en) 2003-09-11 2004-08-20 Systems and methods for fabricating microstructures by imaging a radiation sensitive layer sandwiched between outer layers, and microstructures fabricated thereby

Publications (1)

Publication Number Publication Date
ATE527579T1 true ATE527579T1 (de) 2011-10-15

Family

ID=34273989

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04809596T ATE527579T1 (de) 2003-09-11 2004-08-20 Systeme und verfahren zur herstellung von mikrostrukturen durch abbilden einer zwischen äusseren schichten geschichteten strahlungsempfindlichen schicht und dadurch hergestellte mikrostrukturen

Country Status (6)

Country Link
US (3) US7192692B2 (cg-RX-API-DMAC7.html)
EP (1) EP1664929B1 (cg-RX-API-DMAC7.html)
JP (1) JP4989223B2 (cg-RX-API-DMAC7.html)
KR (1) KR101192624B1 (cg-RX-API-DMAC7.html)
AT (1) ATE527579T1 (cg-RX-API-DMAC7.html)
WO (1) WO2005036271A2 (cg-RX-API-DMAC7.html)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7145125B2 (en) * 2003-06-23 2006-12-05 Advanced Optical Technologies, Llc Integrating chamber cone light using LED sources
US7521667B2 (en) * 2003-06-23 2009-04-21 Advanced Optical Technologies, Llc Intelligent solid state lighting
US7190387B2 (en) * 2003-09-11 2007-03-13 Bright View Technologies, Inc. Systems for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam
US7192692B2 (en) * 2003-09-11 2007-03-20 Bright View Technologies, Inc. Methods for fabricating microstructures by imaging a radiation sensitive layer sandwiched between outer layers
US7808706B2 (en) 2004-02-12 2010-10-05 Tredegar Newco, Inc. Light management films for displays
US7262912B2 (en) * 2004-02-12 2007-08-28 Bright View Technologies, Inc. Front-projection screens including reflecting layers and optically absorbing layers having apertures therein, and methods of fabricating the same
US7355284B2 (en) 2004-03-29 2008-04-08 Cree, Inc. Semiconductor light emitting devices including flexible film having therein an optical element
US7619811B2 (en) * 2004-10-07 2009-11-17 The United States of America as represented by the Secretary of the Army Pentagon Zonal lenslet array
US7092166B1 (en) * 2005-04-25 2006-08-15 Bright View Technologies, Inc. Microlens sheets having multiple interspersed anamorphic microlens arrays
JP2009500662A (ja) * 2005-06-29 2009-01-08 リフレキサイト・コーポレーション コリメーティングマイクロレンズアレイ
US7324276B2 (en) * 2005-07-12 2008-01-29 Bright View Technologies, Inc. Front projection screens including reflecting and refractive layers of differing spatial frequencies
EP1910736A4 (en) 2005-07-28 2010-05-26 Light Prescriptions Innovators BANDWIDTH SAFE LIGHTING OPTICS FOR BACK AND FRONT LUMINAIRES
US7646035B2 (en) * 2006-05-31 2010-01-12 Cree, Inc. Packaged light emitting devices including multiple index lenses and multiple index lenses for packaged light emitting devices
US8835952B2 (en) 2005-08-04 2014-09-16 Cree, Inc. Submounts for semiconductor light emitting devices and methods of forming packaged light emitting devices including dispensed encapsulants
US7502169B2 (en) * 2005-12-07 2009-03-10 Bright View Technologies, Inc. Contrast enhancement films for direct-view displays and fabrication methods therefor
US7420742B2 (en) * 2005-12-07 2008-09-02 Bright View Technologies, Inc. Optically transparent electromagnetic interference (EMI) shields for direct-view displays
CN103925521A (zh) 2005-12-21 2014-07-16 科锐公司 照明装置
US20070195406A1 (en) * 2006-02-22 2007-08-23 Wood Robert L Screens, microstructure templates, and methods of forming the same
US7777166B2 (en) 2006-04-21 2010-08-17 Cree, Inc. Solid state luminaires for general illumination including closed loop feedback control
JP4944948B2 (ja) 2006-05-05 2012-06-06 クリー インコーポレイテッド 照明装置
US7394594B2 (en) * 2006-05-08 2008-07-01 Bright View Technologies, Inc. Methods for processing a pulsed laser beam to create apertures through microlens arrays
EP2064487A4 (en) 2006-07-14 2010-09-01 Light Prescriptions Innovators BRIGHTNESS-REINFORCED FILM
US20080084611A1 (en) * 2006-10-05 2008-04-10 Bright View Technologies, Inc. Methods and Apparatus for Creating Apertures Through Microlens Arrays Using Curved Cradles, and Products Produced Thereby
US8128257B2 (en) * 2007-02-09 2012-03-06 Bright View Technologies Corporation Curved compact collimating reflectors
JP5431320B2 (ja) * 2007-07-17 2014-03-05 クリー インコーポレイテッド 内部光学機能を備えた光学素子およびその製造方法
TW200919075A (en) 2007-10-19 2009-05-01 Bright View Technologies Inc Portable front projection screen assemblies with flexible screens
USD596657S1 (en) 2007-11-05 2009-07-21 Bright View Technologies, Inc. Portable front projection screen
JP2009116289A (ja) * 2007-11-06 2009-05-28 Bright View Technologies Inc 携帯形前面投影スクリーン
USD594894S1 (en) 2007-11-06 2009-06-23 Bright View Technologies, Inc. Portable front projection screen
US7706066B2 (en) * 2007-11-08 2010-04-27 Bright View Technologies, Inc. Portable front projection screen assemblies with flexible screens
USD602973S1 (en) 2007-11-08 2009-10-27 Bright View Technologies, Inc. Portable front projection screen
US8177382B2 (en) * 2008-03-11 2012-05-15 Cree, Inc. Apparatus and methods for multiplanar optical diffusers and display panels for using the same
US8240875B2 (en) 2008-06-25 2012-08-14 Cree, Inc. Solid state linear array modules for general illumination
US8974069B2 (en) * 2008-07-22 2015-03-10 Bright View Technologies Corporation Optical diffusers with spatial variations
WO2011046864A1 (en) * 2009-10-13 2011-04-21 Purchase Ken G Transmissive optical microstructure substrates that produce visible patterns
WO2011143015A1 (en) 2010-05-11 2011-11-17 Bright View Technologies Corporation Optical beam shaping devices using microfacets
CN102608862A (zh) * 2011-01-19 2012-07-25 中国科学院微电子研究所 制备大高宽比结构器件的方法
EP2697558B1 (en) 2011-04-14 2022-11-09 Bright View Technologies Corporation Light transmissive structures and fabrication methods for controlling far-field light distribution
TW201325884A (zh) * 2011-12-29 2013-07-01 Hon Hai Prec Ind Co Ltd 光學薄膜壓印滾輪及該滾輪之製作方法
CN102757014B (zh) * 2012-06-21 2015-08-05 西安交通大学 一种玻璃棒表面微透镜阵列的制备方法
US20140355122A1 (en) 2013-05-28 2014-12-04 Tredegar Film Products Corporation Polyolefin Volumetric Diffuser
WO2014205027A1 (en) * 2013-06-19 2014-12-24 Bright View Technologies Corporation Microstructure-based optical diffusers for creating batwing and other lighting patterns
US10302275B2 (en) 2013-06-19 2019-05-28 Bright View Technologies Corporation Microstructure-based diffusers for creating batwing lighting patterns
WO2015013594A1 (en) 2013-07-26 2015-01-29 Bright View Technologies Corporation Shaped microstructure-based optical diffusers
WO2015095189A1 (en) 2013-12-19 2015-06-25 Bright View Technologies Corporation 2d deglaring diffusers increasing axial luminous intensity
CN105911620B (zh) * 2016-06-14 2017-07-25 西安交通大学 一种具有毫微纳三级结构复眼透镜的制造方法
WO2019006288A1 (en) 2017-06-30 2019-01-03 Bright View Technologies Corporation LIGHT TRANSMISSION STRUCTURES FOR REDISTRIBUTION OF LIGHT, AND LIGHTING SYSTEMS COMPRISING SAME
KR102870227B1 (ko) 2018-01-30 2025-10-14 브라이트 뷰 테크놀로지즈 코포레이션 램버시안 분포를 갖는 광을 배트윙 분포로 변환하기 위한 마이크로구조체
US11520182B2 (en) 2019-01-03 2022-12-06 BrightViewTechnologies, Inc. Color conversion film back light unit for backlit displays
EP4028830A4 (en) 2019-09-11 2023-10-04 BrightView Technologies, Inc. BACKLIGHT UNIT FOR BACKLIT SCREENS
US11822158B2 (en) 2019-09-11 2023-11-21 Brightview Technologies, Inc. Back light unit for backlit displays
WO2021150813A1 (en) 2020-01-24 2021-07-29 Brightview Technologies, Inc. Optical film for back light unit and back light unit including same
US12228819B2 (en) 2022-10-04 2025-02-18 Brightview Technologies, Inc. Back light unit for backlit displays
CN119002122A (zh) 2023-05-22 2024-11-22 亮视技术公司 用于背光显示器的背光单元

Family Cites Families (47)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3469982A (en) * 1968-09-11 1969-09-30 Jack Richard Celeste Process for making photoresists
US4087300A (en) 1974-01-07 1978-05-02 Edward Adler Process for producing metal-plastic laminate
US3945825A (en) 1974-05-22 1976-03-23 Rca Corporation Method for producing width-modulated surface relief patterns
US4071367A (en) 1974-11-27 1978-01-31 E. I. Du Pont De Nemours And Company Channeled photosensitive element
US4423956A (en) 1981-02-27 1984-01-03 Eastman Kodak Company Vapor deposit contact printing method and apparatus
JPS60156004A (ja) 1984-01-12 1985-08-16 Toppan Printing Co Ltd 回折格子露光装置
CA1270934A (en) 1985-03-20 1990-06-26 Masataka Shirasaki Spatial phase modulating masks and production processes thereof, and processes for the formation of phase-shifted diffraction gratings
US4965118A (en) 1986-10-30 1990-10-23 Dai Nippon Insatsu Kabushiki Kaisha Flexible optical information recording medium and method of manufacturing the same
JPS6480901A (en) * 1987-09-22 1989-03-27 Brother Ind Ltd Microlens and its production
US4986633A (en) * 1987-09-22 1991-01-22 Brother Kogyo Kabushiki Kaisha Microlens and process for producing same
IL84000A (en) 1987-09-23 1991-12-12 Scitex Corp Ltd Apparatus for scan rotation in image scanning equipment
JPH0242761A (ja) 1988-04-20 1990-02-13 Matsushita Electric Ind Co Ltd アクティブマトリクス基板の製造方法
US5175072A (en) 1990-07-26 1992-12-29 Minnesota Mining And Manufacturing Company Flexographic printing plate process
DE4125931A1 (de) 1991-08-05 1993-02-11 Gerhardt Int As Verfahren zur herstellung eines walzenfoermigen praegewerkzeugs
EP0530674A1 (en) 1991-08-30 1993-03-10 Canon Kabushiki Kaisha Plate blank, process for producing printing plate from plate blank, and printing method and apparatus using plate
JPH05210236A (ja) * 1991-08-30 1993-08-20 Canon Inc 印刷用原版、その印刷用原版を用いた印刷版の製造方法、その印刷版を用いた印刷方法及び印刷装置
US5347375A (en) 1991-11-26 1994-09-13 Kabushiki Kaisha Toshiba Computer-assisted holographic image formation technique which determines interference pattern data used to form the holographic
JP2746790B2 (ja) 1992-03-02 1998-05-06 富士写真フイルム株式会社 立体画像記録方法および立体画像記録装置
US5342737A (en) 1992-04-27 1994-08-30 The United States Of America As Represented By The Secretary Of The Navy High aspect ratio metal microstructures and method for preparing the same
JPH05312594A (ja) 1992-05-08 1993-11-22 Ricoh Co Ltd 格子作製方法
JP3731759B2 (ja) 1995-02-09 2006-01-05 大日本印刷株式会社 連続的フィルムラミネート及び剥離システム
IL123871A0 (en) 1995-09-29 1998-10-30 Sage Technology Inc Optical digital media recording and reproduction system
US5620817A (en) 1995-11-16 1997-04-15 Taiwan Semiconductor Manufacturing Company Ltd Fabrication of self-aligned attenuated rim phase shift mask
DE19616286A1 (de) 1996-04-24 1997-10-30 Sel Alcatel Ag Synchrones Übertragungssystem mit Fehlerortungsfunktion und Monitoreinrichtung dafür
EP0838812B1 (en) 1996-10-23 2003-04-09 Konica Corporation Method for recording/reproducing on/from an optical information recording medium, optical pickup apparatus, objective lens and design method of objective lens
CA2271815C (en) 1996-11-15 2010-01-19 Diffraction Ltd. In-line holographic mask for micromachining
US6143451A (en) * 1996-11-26 2000-11-07 E. I. Du Pont De Nemours And Company Imaged laserable assemblages and associated processes with high speed and durable image-transfer characteristics for laser-induced thermal transfer
WO1999058319A1 (en) * 1998-05-08 1999-11-18 Physical Optics Corporation Method for making optical masters using incoherent light
US6410213B1 (en) 1998-06-09 2002-06-25 Corning Incorporated Method for making optical microstructures having profile heights exceeding fifteen microns
JP3877444B2 (ja) 1998-09-02 2007-02-07 富士通株式会社 回折格子
JP2000231057A (ja) 1999-02-10 2000-08-22 Konica Corp 対物レンズ及び光ピックアップ装置
JP2000343753A (ja) 1999-06-04 2000-12-12 Konica Corp 画像記録方法及び画像記録装置
US6140008A (en) * 1999-09-02 2000-10-31 Agfa Corporation Infrared laser imageable, peel developable, single sheet color proofing system having a crosslinked thermal transfer layer
US6835535B2 (en) 2000-07-31 2004-12-28 Corning Incorporated Microlens arrays having high focusing efficiency
KR100948725B1 (ko) 2000-07-31 2010-03-22 코닝 로체스터 포토닉스 코포레이션 빛을 제어하여 발산시키기 위한 구조 스크린
US7923173B1 (en) 2000-10-19 2011-04-12 Illinois Tool Works Inc. Photo definable polyimide film used as an embossing surface
JP4535309B2 (ja) * 2000-11-10 2010-09-01 デュランド テクノロジー リミテッド 光学記録材料
US7106524B2 (en) 2000-11-15 2006-09-12 Tae-Sun Song Optical pickup apparatus for read-write heads in high density optical storages
EP1366388A4 (en) 2001-02-07 2007-08-29 Corning Prec Lens Inc SCREEN WITH HIGH CONTRAST AND RANDOM MICROLINE ARRAY
US6970288B2 (en) 2001-06-01 2005-11-29 Toppan Printing Co., Ltd. Micro-lens sheet and projection screen
US6597388B2 (en) 2001-06-21 2003-07-22 Kodak Polychrome Graphics, Llc Laser-induced thermal imaging with masking
JP2003107697A (ja) * 2001-09-28 2003-04-09 Fuji Photo Film Co Ltd 感光性転写材料、フォトマスク材料、フォトマスクおよびフォトマスクの製造方法
JP2003200433A (ja) * 2001-10-24 2003-07-15 Mitsuboshi Belting Ltd 微細加工型の製造方法とこれに使用する有機色素分散基板
US7182692B2 (en) * 2003-04-25 2007-02-27 Igt Gaming machine with scanning capability
US7192692B2 (en) * 2003-09-11 2007-03-20 Bright View Technologies, Inc. Methods for fabricating microstructures by imaging a radiation sensitive layer sandwiched between outer layers
US7867695B2 (en) * 2003-09-11 2011-01-11 Bright View Technologies Corporation Methods for mastering microstructures through a substrate using negative photoresist
US7190387B2 (en) * 2003-09-11 2007-03-13 Bright View Technologies, Inc. Systems for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam

Also Published As

Publication number Publication date
US7425407B1 (en) 2008-09-16
US20070003868A1 (en) 2007-01-04
JP4989223B2 (ja) 2012-08-01
US7192692B2 (en) 2007-03-20
WO2005036271A3 (en) 2005-08-04
US20080233519A1 (en) 2008-09-25
US20050058949A1 (en) 2005-03-17
WO2005036271A2 (en) 2005-04-21
EP1664929A2 (en) 2006-06-07
KR20070005910A (ko) 2007-01-10
JP2007507364A (ja) 2007-03-29
EP1664929B1 (en) 2011-10-05
KR101192624B1 (ko) 2012-10-18

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