ATE525638T1 - Verfahren und vorrichtung zur gleichzeitigen 2d- und topographischen untersuchung - Google Patents

Verfahren und vorrichtung zur gleichzeitigen 2d- und topographischen untersuchung

Info

Publication number
ATE525638T1
ATE525638T1 AT04701074T AT04701074T ATE525638T1 AT E525638 T1 ATE525638 T1 AT E525638T1 AT 04701074 T AT04701074 T AT 04701074T AT 04701074 T AT04701074 T AT 04701074T AT E525638 T1 ATE525638 T1 AT E525638T1
Authority
AT
Austria
Prior art keywords
simultaneous
optical elements
information
acquire
topographic
Prior art date
Application number
AT04701074T
Other languages
English (en)
Inventor
Gregory Toker
Andrei Brunfeld
Ilia Lutsker
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Application granted granted Critical
Publication of ATE525638T1 publication Critical patent/ATE525638T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1765—Method using an image detector and processing of image signal
    • G01N2021/177—Detector of the video camera type
    • G01N2021/1772—Array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/178—Methods for obtaining spatial resolution of the property being measured
    • G01N2021/1785—Three dimensional
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/061—Sources
    • G01N2201/06113—Coherent sources; lasers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
AT04701074T 2003-01-09 2004-01-09 Verfahren und vorrichtung zur gleichzeitigen 2d- und topographischen untersuchung ATE525638T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43878303P 2003-01-09 2003-01-09
PCT/IL2004/000019 WO2004063668A2 (en) 2003-01-09 2004-01-09 Method and apparatus for simultaneous 2-d and topographical inspection

Publications (1)

Publication Number Publication Date
ATE525638T1 true ATE525638T1 (de) 2011-10-15

Family

ID=32713379

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04701074T ATE525638T1 (de) 2003-01-09 2004-01-09 Verfahren und vorrichtung zur gleichzeitigen 2d- und topographischen untersuchung

Country Status (8)

Country Link
US (1) US7253891B2 (de)
EP (1) EP1581781B1 (de)
JP (1) JP2006515676A (de)
KR (1) KR20050096125A (de)
CN (1) CN1788194A (de)
AT (1) ATE525638T1 (de)
TW (1) TWI298097B (de)
WO (1) WO2004063668A2 (de)

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JP5276833B2 (ja) * 2007-02-28 2013-08-28 株式会社日立ハイテクノロジーズ 欠陥検査方法及び欠陥検査装置
US7847927B2 (en) 2007-02-28 2010-12-07 Hitachi High-Technologies Corporation Defect inspection method and defect inspection apparatus
JP2009222689A (ja) * 2008-03-19 2009-10-01 Nuflare Technology Inc 検査装置
US9482755B2 (en) 2008-11-17 2016-11-01 Faro Technologies, Inc. Measurement system having air temperature compensation between a target and a laser tracker
JP5542367B2 (ja) * 2009-05-08 2014-07-09 池上通信機株式会社 外観検査装置及び外観検査用の光学装置
WO2011049190A1 (ja) * 2009-10-24 2011-04-28 株式会社Djtech 外観検査装置及び印刷半田検査装置
JP5621178B2 (ja) * 2009-10-24 2014-11-05 株式会社第一メカテック 外観検査装置及び印刷半田検査装置
US9035673B2 (en) 2010-01-25 2015-05-19 Palo Alto Research Center Incorporated Method of in-process intralayer yield detection, interlayer shunt detection and correction
US9772394B2 (en) 2010-04-21 2017-09-26 Faro Technologies, Inc. Method and apparatus for following an operator and locking onto a retroreflector with a laser tracker
US9377885B2 (en) 2010-04-21 2016-06-28 Faro Technologies, Inc. Method and apparatus for locking onto a retroreflector with a laser tracker
US9400170B2 (en) 2010-04-21 2016-07-26 Faro Technologies, Inc. Automatic measurement of dimensional data within an acceptance region by a laser tracker
US8619265B2 (en) 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
TW201215845A (en) * 2010-10-05 2012-04-16 Machvision Inc Illumination system for automatic optical inspection and assembly of it and camera system
US8902408B2 (en) 2011-02-14 2014-12-02 Faro Technologies Inc. Laser tracker used with six degree-of-freedom probe having separable spherical retroreflector
GB2518769A (en) 2011-03-03 2015-04-01 Faro Tech Inc Target apparatus and method
JP2014516409A (ja) 2011-04-15 2014-07-10 ファロ テクノロジーズ インコーポレーテッド レーザトラッカの改良位置検出器
US9686532B2 (en) 2011-04-15 2017-06-20 Faro Technologies, Inc. System and method of acquiring three-dimensional coordinates using multiple coordinate measurement devices
US9482529B2 (en) 2011-04-15 2016-11-01 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US9164173B2 (en) 2011-04-15 2015-10-20 Faro Technologies, Inc. Laser tracker that uses a fiber-optic coupler and an achromatic launch to align and collimate two wavelengths of light
JP6099675B2 (ja) 2012-01-27 2017-03-22 ファロ テクノロジーズ インコーポレーテッド バーコード識別による検査方法
JP5773939B2 (ja) 2012-04-27 2015-09-02 株式会社日立ハイテクノロジーズ 欠陥検査装置および欠陥検査方法
US9279722B2 (en) * 2012-04-30 2016-03-08 Agilent Technologies, Inc. Optical emission system including dichroic beam combiner
US9041914B2 (en) 2013-03-15 2015-05-26 Faro Technologies, Inc. Three-dimensional coordinate scanner and method of operation
US9116038B2 (en) * 2013-08-19 2015-08-25 International Business Machines Corporation Integrated optical illumination reference source
TWI489101B (zh) * 2013-12-02 2015-06-21 Ind Tech Res Inst 結合三維及二維形貌之量測方法及裝置
US9395174B2 (en) 2014-06-27 2016-07-19 Faro Technologies, Inc. Determining retroreflector orientation by optimizing spatial fit
US10724947B2 (en) * 2015-04-14 2020-07-28 Cognex Corporation System and method for acquiring images of surface texture
WO2020049551A1 (en) 2018-09-06 2020-03-12 Orbotech Ltd. Multimodality multiplexed illumination for optical inspection systems
DE102022132162A1 (de) * 2022-12-05 2024-06-06 Witrins S.R.O. Verfahren zur Fehleranalyse und Inspektionssystem

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Also Published As

Publication number Publication date
TW200506317A (en) 2005-02-16
WO2004063668A2 (en) 2004-07-29
KR20050096125A (ko) 2005-10-05
US20040156043A1 (en) 2004-08-12
JP2006515676A (ja) 2006-06-01
EP1581781B1 (de) 2011-09-21
TWI298097B (en) 2008-06-21
US7253891B2 (en) 2007-08-07
WO2004063668A3 (en) 2005-09-09
EP1581781A2 (de) 2005-10-05
EP1581781A4 (de) 2008-03-12
CN1788194A (zh) 2006-06-14

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