ATE518131T1 - Sensorsystem auf nanoröhrchenbasis und verfahren zur anwedung davon - Google Patents

Sensorsystem auf nanoröhrchenbasis und verfahren zur anwedung davon

Info

Publication number
ATE518131T1
ATE518131T1 AT06802998T AT06802998T ATE518131T1 AT E518131 T1 ATE518131 T1 AT E518131T1 AT 06802998 T AT06802998 T AT 06802998T AT 06802998 T AT06802998 T AT 06802998T AT E518131 T1 ATE518131 T1 AT E518131T1
Authority
AT
Austria
Prior art keywords
optical
nanotube
sensor element
nanotube sensor
fluid
Prior art date
Application number
AT06802998T
Other languages
English (en)
Inventor
Jonathan W Ward
Brent M Segal
Original Assignee
Nantero Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nantero Inc filed Critical Nantero Inc
Application granted granted Critical
Publication of ATE518131T1 publication Critical patent/ATE518131T1/de

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
AT06802998T 2005-09-06 2006-09-06 Sensorsystem auf nanoröhrchenbasis und verfahren zur anwedung davon ATE518131T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US71438805P 2005-09-06 2005-09-06
PCT/US2006/034627 WO2007030484A2 (en) 2005-09-06 2006-09-06 Nanotube fabric-based sensor systems and methods of making same

Publications (1)

Publication Number Publication Date
ATE518131T1 true ATE518131T1 (de) 2011-08-15

Family

ID=37836395

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06802998T ATE518131T1 (de) 2005-09-06 2006-09-06 Sensorsystem auf nanoröhrchenbasis und verfahren zur anwedung davon

Country Status (6)

Country Link
US (1) US8366999B2 (de)
EP (1) EP1929276B1 (de)
AT (1) ATE518131T1 (de)
AU (1) AU2006287610A1 (de)
CA (1) CA2621103C (de)
WO (1) WO2007030484A2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008112764A1 (en) * 2007-03-12 2008-09-18 Nantero, Inc. Electromagnetic and thermal sensors using carbon nanotubes and methods of making same
KR20090065272A (ko) * 2007-12-17 2009-06-22 한국전자통신연구원 바이오 센서 및 그 제조 방법
US20110227043A1 (en) 2010-03-19 2011-09-22 International Business Machines Corporation Graphene sensor
EP2388337B1 (de) * 2010-04-30 2014-07-02 Nxp B.V. Messgerät und Herstellungsverfahren dafür
FR2971338B1 (fr) * 2011-02-09 2018-02-09 Univ Paris Sud 11 Biocapteur photonique multi-cible, procede de fabrication et de preparation.
US9196766B1 (en) 2012-04-25 2015-11-24 Magnolia Optical Technologies, Inc. Thermal detectors using graphene and oxides of graphene and methods of making the same
CN103487143B (zh) * 2012-06-12 2015-07-29 清华大学 光强分布的检测系统
CN105188561B (zh) 2013-02-14 2019-04-05 保罗·威博 生物组织剖割的系统、装置和方法
US9776916B2 (en) * 2014-01-28 2017-10-03 University Of Delaware Processes for depositing nanoparticles upon non-conductive substrates
US9632251B2 (en) 2014-04-02 2017-04-25 International Business Machines Corporation Integration of photonic, electronic, and sensor devices with SOI VLSI microprocessor technology
CA2957918A1 (en) 2014-08-11 2016-02-18 The Arizona Board Of Regents On Behalf Of The University Of Arizona Aligned graphene-carbon nanotube porous carbon composite
EP3136443A1 (de) * 2015-08-28 2017-03-01 Nokia Technologies Oy Verfahren zur herstellung einer vorrichtung mit zweidimensionalem material
US10470674B2 (en) * 2016-03-17 2019-11-12 Intel Corporation Technologies for a fabric acoustic sensor
JP7090400B2 (ja) 2017-03-08 2022-06-24 浜松ホトニクス株式会社 半導体光検出素子
US10546303B2 (en) 2017-03-21 2020-01-28 International Business Machines Corporation Optically visible carbon nanotube with nanocrystals decoration as unique ID
CN113103681A (zh) * 2019-12-25 2021-07-13 清华大学 基于碳纳米管结构的红外隐身布料及红外隐身衣服

Family Cites Families (104)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0927331B1 (de) * 1996-08-08 2004-03-31 William Marsh Rice University Makroskopisch manipulierbare, aus nanoröhrenanordnungen hergestellte vorrichtungen
US6057637A (en) * 1996-09-13 2000-05-02 The Regents Of The University Of California Field emission electron source
JP3183845B2 (ja) 1997-03-21 2001-07-09 財団法人ファインセラミックスセンター カーボンナノチューブ及びカーボンナノチューブ膜の製造方法
US6409567B1 (en) * 1997-12-15 2002-06-25 E.I. Du Pont De Nemours And Company Past-deposited carbon electron emitters
EP1089938A1 (de) * 1998-06-19 2001-04-11 The Research Foundation Of State University Of New York Freistehende, ausgerichtete kohlenstoffnanoröhren und synthese derselben
US6287506B1 (en) * 1998-07-09 2001-09-11 Schneider (Usa) Inc. Method for reducing dilation balloon cone stiffness
US7416699B2 (en) * 1998-08-14 2008-08-26 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotube devices
US6346189B1 (en) * 1998-08-14 2002-02-12 The Board Of Trustees Of The Leland Stanford Junior University Carbon nanotube structures made using catalyst islands
US6630772B1 (en) * 1998-09-21 2003-10-07 Agere Systems Inc. Device comprising carbon nanotube field emitter structure and process for forming device
US6531513B2 (en) * 1998-10-02 2003-03-11 University Of Kentucky Research Foundation Method of solubilizing carbon nanotubes in organic solutions
US6368569B1 (en) * 1998-10-02 2002-04-09 University Of Kentucky Research Foundation Method of solubilizing unshortened carbon nanotubes in organic solutions
US6641793B2 (en) * 1998-10-02 2003-11-04 University Of Kentucky Research Foundation Method of solubilizing single-walled carbon nanotubes in organic solutions
US6187823B1 (en) * 1998-10-02 2001-02-13 University Of Kentucky Research Foundation Solubilizing single-walled carbon nanotubes by direct reaction with amines and alkylaryl amines
US6331262B1 (en) * 1998-10-02 2001-12-18 University Of Kentucky Research Foundation Method of solubilizing shortened single-walled carbon nanotubes in organic solutions
JP3943272B2 (ja) 1999-01-18 2007-07-11 双葉電子工業株式会社 カーボンナノチューブのフイルム化方法
AUPP976499A0 (en) * 1999-04-16 1999-05-06 Commonwealth Scientific And Industrial Research Organisation Multilayer carbon nanotube films
KR100364095B1 (ko) 1999-06-15 2002-12-12 일진나노텍 주식회사 탄소나노튜브의 대량 정제 방법
JP4063451B2 (ja) 1999-07-26 2008-03-19 双葉電子工業株式会社 カーボンナノチューブのパターン形成方法
JP2003507304A (ja) * 1999-08-12 2003-02-25 ミッドウエスト リサーチ インスティチュート 高純度単一壁カーボンナノチューブ
US6277318B1 (en) * 1999-08-18 2001-08-21 Agere Systems Guardian Corp. Method for fabrication of patterned carbon nanotube films
US6361958B1 (en) * 1999-11-12 2002-03-26 Motorola, Inc. Biochannel assay for hybridization with biomaterial
KR20010055501A (ko) * 1999-12-10 2001-07-04 김순택 전계 방출 표시 소자의 음극 형성 방법
KR20010056153A (ko) * 1999-12-14 2001-07-04 구자홍 카본나노 튜브막을 갖는 전계방출형 디스플레이 소자 및그의 제조방법
US6495116B1 (en) * 2000-04-10 2002-12-17 Lockheed Martin Corporation Net shape manufacturing using carbon nanotubes
EP1170799A3 (de) * 2000-07-04 2009-04-01 Infineon Technologies AG Elektronisches Bauelement und Verfahren zum Herstellen eines elektronischen Bauelements
JP3859199B2 (ja) 2000-07-18 2006-12-20 エルジー エレクトロニクス インコーポレイティド カーボンナノチューブの水平成長方法及びこれを利用した電界効果トランジスタ
US7301199B2 (en) * 2000-08-22 2007-11-27 President And Fellows Of Harvard College Nanoscale wires and related devices
KR100376768B1 (ko) * 2000-08-23 2003-03-19 한국과학기술연구원 전자, 스핀 및 광소자 응용을 위한 탄소나노튜브의 선택적 수평성장 방법
US6495258B1 (en) * 2000-09-20 2002-12-17 Auburn University Structures with high number density of carbon nanotubes and 3-dimensional distribution
US6423583B1 (en) * 2001-01-03 2002-07-23 International Business Machines Corporation Methodology for electrically induced selective breakdown of nanotubes
WO2002079514A1 (en) * 2001-01-10 2002-10-10 The Trustees Of Boston College Dna-bridged carbon nanotube arrays
US6752977B2 (en) * 2001-02-12 2004-06-22 William Marsh Rice University Process for purifying single-wall carbon nanotubes and compositions thereof
CN1543399B (zh) * 2001-03-26 2011-02-23 艾考斯公司 含碳纳米管的涂层
US7459312B2 (en) * 2001-04-18 2008-12-02 The Board Of Trustees Of The Leland Stanford Junior University Photodesorption in carbon nanotubes
US20020160111A1 (en) * 2001-04-25 2002-10-31 Yi Sun Method for fabrication of field emission devices using carbon nanotube film as a cathode
WO2002095097A1 (en) * 2001-05-21 2002-11-28 Trustees Of Boston College, The Varied morphology carbon nanotubes and methods for their manufacture
JP4207398B2 (ja) * 2001-05-21 2009-01-14 富士ゼロックス株式会社 カーボンナノチューブ構造体の配線の製造方法、並びに、カーボンナノチューブ構造体の配線およびそれを用いたカーボンナノチューブデバイス
US20040023253A1 (en) * 2001-06-11 2004-02-05 Sandeep Kunwar Device structure for closely spaced electrodes
US6896864B2 (en) * 2001-07-10 2005-05-24 Battelle Memorial Institute Spatial localization of dispersed single walled carbon nanotubes into useful structures
US6643165B2 (en) * 2001-07-25 2003-11-04 Nantero, Inc. Electromechanical memory having cell selection circuitry constructed with nanotube technology
US6919592B2 (en) * 2001-07-25 2005-07-19 Nantero, Inc. Electromechanical memory array using nanotube ribbons and method for making same
US6835591B2 (en) * 2001-07-25 2004-12-28 Nantero, Inc. Methods of nanotube films and articles
US6911682B2 (en) * 2001-12-28 2005-06-28 Nantero, Inc. Electromechanical three-trace junction devices
US6574130B2 (en) * 2001-07-25 2003-06-03 Nantero, Inc. Hybrid circuit having nanotube electromechanical memory
US7566478B2 (en) * 2001-07-25 2009-07-28 Nantero, Inc. Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles
US6924538B2 (en) * 2001-07-25 2005-08-02 Nantero, Inc. Devices having vertically-disposed nanofabric articles and methods of making the same
US6706402B2 (en) * 2001-07-25 2004-03-16 Nantero, Inc. Nanotube films and articles
US7259410B2 (en) * 2001-07-25 2007-08-21 Nantero, Inc. Devices having horizontally-disposed nanofabric articles and methods of making the same
EP1444701A4 (de) * 2001-07-27 2005-01-12 Eikos Inc Konforme beschichtungen mit kohlenstoffnanoröhren
EP1414744A1 (de) * 2001-07-27 2004-05-06 University Of Surrey Herstellung von kohlenstoffnanoröhren
US7812190B2 (en) * 2001-10-01 2010-10-12 Tda Research, Inc. Derivatization and solubilization of fullerenes for use in therapeutic and diagnostic applications
US7671230B2 (en) * 2001-10-01 2010-03-02 Tda Research, Inc. Derivatization and solubilization of insoluble classes of fullerenes
US6645628B2 (en) * 2001-11-13 2003-11-11 The United States Of America As Represented By The Secretary Of The Air Force Carbon nanotube coated anode
US7176505B2 (en) * 2001-12-28 2007-02-13 Nantero, Inc. Electromechanical three-trace junction devices
US6784028B2 (en) * 2001-12-28 2004-08-31 Nantero, Inc. Methods of making electromechanical three-trace junction devices
US6894359B2 (en) * 2002-09-04 2005-05-17 Nanomix, Inc. Sensitivity control for nanotube sensors
WO2003063208A2 (en) * 2002-01-18 2003-07-31 California Institute Of Technology Array-based architecture for molecular electronics
US20040029706A1 (en) * 2002-02-14 2004-02-12 Barrera Enrique V. Fabrication of reinforced composite material comprising carbon nanotubes, fullerenes, and vapor-grown carbon fibers for thermal barrier materials, structural ceramics, and multifunctional nanocomposite ceramics
US6889216B2 (en) * 2002-03-12 2005-05-03 Knowm Tech, Llc Physical neural network design incorporating nanotechnology
US6858197B1 (en) * 2002-03-13 2005-02-22 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Controlled patterning and growth of single wall and multi-wall carbon nanotubes
US6919730B2 (en) * 2002-03-18 2005-07-19 Honeywell International, Inc. Carbon nanotube sensor
US7049625B2 (en) * 2002-03-18 2006-05-23 Max-Planck-Gesellschaft Zur Fonderung Der Wissenschaften E.V. Field effect transistor memory cell, memory device and method for manufacturing a field effect transistor memory cell
US6899945B2 (en) * 2002-03-19 2005-05-31 William Marsh Rice University Entangled single-wall carbon nanotube solid material and methods for making same
US6872645B2 (en) * 2002-04-02 2005-03-29 Nanosys, Inc. Methods of positioning and/or orienting nanostructures
US6946410B2 (en) * 2002-04-05 2005-09-20 E. I. Du Pont De Nemours And Company Method for providing nano-structures of uniform length
US7335395B2 (en) * 2002-04-23 2008-02-26 Nantero, Inc. Methods of using pre-formed nanotubes to make carbon nanotube films, layers, fabrics, ribbons, elements and articles
AU2003228720A1 (en) * 2002-04-29 2003-11-17 The Trustees Of Boston College Density controlled carbon nanotube array electrodes
US20040034177A1 (en) * 2002-05-02 2004-02-19 Jian Chen Polymer and method for using the polymer for solubilizing nanotubes
CN100341629C (zh) * 2002-05-21 2007-10-10 艾考斯公司 使碳纳米管涂层形成图案的方法和碳纳米管布线
US7348298B2 (en) * 2002-05-30 2008-03-25 Ashland Licensing And Intellectual Property, Llc Enhancing thermal conductivity of fluids with graphite nanoparticles and carbon nanotube
US6548313B1 (en) 2002-05-31 2003-04-15 Intel Corporation Amorphous carbon insulation and carbon nanotube wires
DE10229267A1 (de) * 2002-06-28 2004-01-29 Philips Intellectual Property & Standards Gmbh Vorrichtung zur optischen Signalverarbeitung und nichtlineares optisches Bauelement
US20040007528A1 (en) * 2002-07-03 2004-01-15 The Regents Of The University Of California Intertwined, free-standing carbon nanotube mesh for use as separation, concentration, and/or filtration medium
JP4338948B2 (ja) * 2002-08-01 2009-10-07 株式会社半導体エネルギー研究所 カーボンナノチューブ半導体素子の作製方法
JP4547852B2 (ja) 2002-09-04 2010-09-22 富士ゼロックス株式会社 電気部品の製造方法
US20060061011A1 (en) * 2002-09-30 2006-03-23 Masami Kikuchi Orientated carbon nanotube composite, process for producing orientated carbon nanotube, and, produced using orientated carbon nanotube composite, pneumatic tire, wheel for vehicle, tire wheel assembly and disk brake
US7051945B2 (en) * 2002-09-30 2006-05-30 Nanosys, Inc Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites
KR100461002B1 (ko) * 2002-10-17 2004-12-09 삼성전자주식회사 언더컷 메탈 배선방법
US7835266B2 (en) * 2002-10-29 2010-11-16 Fujitsu Limited Node apparatus and maintenance and operation supporting device
US7645400B2 (en) * 2002-11-01 2010-01-12 Mitsubishi Rayon Co., Ltd. Composition containing carbon nanotubes having a coating
WO2004051219A2 (en) * 2002-11-27 2004-06-17 Molecular Nanosystems, Inc. Nanotube chemical sensor based on work function of electrodes
WO2004052559A2 (en) * 2002-12-06 2004-06-24 Eikos, Inc. Optically transparent nanostructured electrical conductors
EP1583853A4 (de) 2003-01-13 2006-12-20 Nantero Inc Kohlenstoffnanoröhren enthaltende filme, schichten, textileflächengebilde, bänder, elemente und gegenstände
US7858185B2 (en) * 2003-09-08 2010-12-28 Nantero, Inc. High purity nanotube fabrics and films
AU2003210495A1 (en) 2003-01-13 2004-08-13 Nantero, Inc. Methods of making carbon nanotube films, layers, fabrics, ribbons, elements and articles
EP1585845A1 (de) 2003-01-13 2005-10-19 Nantero, Inc. Verfahren zur verwendung dünner metallschichten für die herstellung von folien, schichten, geweben, bändern, elementen und artikeln aus kohlenstoffnanoröhrchen
US6919740B2 (en) * 2003-01-31 2005-07-19 Hewlett-Packard Development Company, Lp. Molecular-junction-nanowire-crossbar-based inverter, latch, and flip-flop circuits, and more complex circuits composed, in part, from molecular-junction-nanowire-crossbar-based inverter, latch, and flip-flop circuits
US6918284B2 (en) * 2003-03-24 2005-07-19 The United States Of America As Represented By The Secretary Of The Navy Interconnected networks of single-walled carbon nanotubes
WO2005019793A2 (en) * 2003-05-14 2005-03-03 Nantero, Inc. Sensor platform using a horizontally oriented nanotube element
US7097906B2 (en) * 2003-06-05 2006-08-29 Lockheed Martin Corporation Pure carbon isotropic alloy of allotropic forms of carbon including single-walled carbon nanotubes and diamond-like carbon
US7115901B2 (en) * 2003-06-09 2006-10-03 Nantero, Inc. Non-volatile electromechanical field effect devices and circuits using same and methods of forming same
JP2005036112A (ja) * 2003-07-16 2005-02-10 National Institute Of Advanced Industrial & Technology 発光機能を有する単層カーボンナノチューブ
US7115960B2 (en) * 2003-08-13 2006-10-03 Nantero, Inc. Nanotube-based switching elements
CA2535634A1 (en) * 2003-08-13 2005-05-26 Nantero, Inc Nanotube-based switching elements with multiple controls and circuits made from same
US7416993B2 (en) * 2003-09-08 2008-08-26 Nantero, Inc. Patterned nanowire articles on a substrate and methods of making the same
US7354877B2 (en) * 2003-10-29 2008-04-08 Lockheed Martin Corporation Carbon nanotube fabrics
US7118440B2 (en) * 2004-01-09 2006-10-10 Teco Nanotech Co., Ltd. Spray with carbon nanotubes and method to spray the same
US7658869B2 (en) 2004-06-03 2010-02-09 Nantero, Inc. Applicator liquid containing ethyl lactate for preparation of nanotube films
US7556746B2 (en) 2004-06-03 2009-07-07 Nantero, Inc. Method of making an applicator liquid for electronics fabrication process
US7778640B2 (en) * 2004-06-25 2010-08-17 Lg Electronics Inc. Method of communicating data in a wireless mobile communication system
WO2006065937A2 (en) * 2004-12-16 2006-06-22 Nantero, Inc. Aqueous carbon nanotube applicator liquids and methods for producing applicator liquids thereof
US7245370B2 (en) * 2005-01-06 2007-07-17 Hewlett-Packard Development Company, L.P. Nanowires for surface-enhanced Raman scattering molecular sensors
US20060276056A1 (en) 2005-04-05 2006-12-07 Nantero, Inc. Nanotube articles with adjustable electrical conductivity and methods of making the same
US7538040B2 (en) * 2005-06-30 2009-05-26 Nantero, Inc. Techniques for precision pattern transfer of carbon nanotubes from photo mask to wafers

Also Published As

Publication number Publication date
EP1929276A4 (de) 2008-10-15
CA2621103C (en) 2015-11-03
EP1929276A2 (de) 2008-06-11
WO2007030484A3 (en) 2007-06-14
EP1929276B1 (de) 2011-07-27
US20090140167A1 (en) 2009-06-04
AU2006287610A1 (en) 2007-03-15
US8366999B2 (en) 2013-02-05
WO2007030484A2 (en) 2007-03-15
CA2621103A1 (en) 2007-03-15

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