ATE505817T1 - Lichtemittierende halbleitervorrichtung - Google Patents

Lichtemittierende halbleitervorrichtung

Info

Publication number
ATE505817T1
ATE505817T1 AT01130937T AT01130937T ATE505817T1 AT E505817 T1 ATE505817 T1 AT E505817T1 AT 01130937 T AT01130937 T AT 01130937T AT 01130937 T AT01130937 T AT 01130937T AT E505817 T1 ATE505817 T1 AT E505817T1
Authority
AT
Austria
Prior art keywords
light emitting
semiconductor device
emitting semiconductor
metal elements
nitride material
Prior art date
Application number
AT01130937T
Other languages
English (en)
Inventor
Yuji Hori
Tomohiko Shibata
Osamu Oda
Mitsuhiro Tanaka
Original Assignee
Ngk Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ngk Insulators Ltd filed Critical Ngk Insulators Ltd
Application granted granted Critical
Publication of ATE505817T1 publication Critical patent/ATE505817T1/de

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26Materials of the light emitting region
    • H01L33/30Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
    • H01L33/32Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
    • H01L33/325Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/12Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0062Processes for devices with an active region comprising only III-V compounds
    • H01L33/0066Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
    • H01L33/007Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Led Devices (AREA)
AT01130937T 2000-12-28 2001-12-27 Lichtemittierende halbleitervorrichtung ATE505817T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2000401418 2000-12-28
JP2001343055A JP3888668B2 (ja) 2000-12-28 2001-11-08 半導体発光素子

Publications (1)

Publication Number Publication Date
ATE505817T1 true ATE505817T1 (de) 2011-04-15

Family

ID=26607103

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01130937T ATE505817T1 (de) 2000-12-28 2001-12-27 Lichtemittierende halbleitervorrichtung

Country Status (5)

Country Link
US (1) US6677708B2 (de)
EP (1) EP1220334B1 (de)
JP (1) JP3888668B2 (de)
AT (1) ATE505817T1 (de)
DE (1) DE60144419D1 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4327339B2 (ja) * 2000-07-28 2009-09-09 独立行政法人物質・材料研究機構 半導体層形成用基板とそれを利用した半導体装置
JP4963763B2 (ja) * 2000-12-21 2012-06-27 日本碍子株式会社 半導体素子
JP2005136200A (ja) * 2003-10-30 2005-05-26 Univ Nagoya 窒化物半導体結晶層の作製方法、窒化物半導体結晶層、及び窒化物半導体結晶層作製用の基材
JP2005183947A (ja) * 2003-11-26 2005-07-07 Ricoh Co Ltd Iii族窒化物の結晶成長方法およびiii族窒化物結晶およびiii族窒化物半導体デバイスおよび発光デバイス
JP2011082528A (ja) * 2003-11-26 2011-04-21 Ricoh Co Ltd 半導体発光素子
JP2006206343A (ja) * 2005-01-25 2006-08-10 Ngk Insulators Ltd AlN単結晶の表面平坦化方法およびAlN単結晶基板の作製方法
KR100770440B1 (ko) * 2006-08-29 2007-10-26 삼성전기주식회사 질화물 반도체 발광소자
JP2009123718A (ja) * 2007-01-16 2009-06-04 Showa Denko Kk Iii族窒化物化合物半導体素子及びその製造方法、iii族窒化物化合物半導体発光素子及びその製造方法、並びにランプ
TWI377703B (en) * 2007-05-02 2012-11-21 Showa Denko Kk Production method of group iii nitride semiconductor light-emitting device
WO2008144337A1 (en) * 2007-05-16 2008-11-27 Osram Sylvania Inc. Light emitting diode based on multiple double-heterostructures (quantum wells) with rare earth doped active regions
JPWO2008153130A1 (ja) * 2007-06-15 2010-08-26 ローム株式会社 窒化物半導体発光素子及び窒化物半導体の製造方法
JP2011049271A (ja) * 2009-08-26 2011-03-10 Sanken Electric Co Ltd 半導体装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2649936B2 (ja) * 1988-03-01 1997-09-03 富士通株式会社 歪超格子バッファ
JPH0964477A (ja) * 1995-08-25 1997-03-07 Toshiba Corp 半導体発光素子及びその製造方法
JP3209096B2 (ja) 1996-05-21 2001-09-17 豊田合成株式会社 3族窒化物化合物半導体発光素子
JP4292600B2 (ja) 1998-09-11 2009-07-08 ソニー株式会社 GaN系半導体発光素子およびその製造方法
US6255669B1 (en) 1999-04-23 2001-07-03 The University Of Cincinnati Visible light emitting device formed from wide band gap semiconductor doped with a rare earth element

Also Published As

Publication number Publication date
US20020117961A1 (en) 2002-08-29
DE60144419D1 (de) 2011-05-26
JP2002261324A (ja) 2002-09-13
JP3888668B2 (ja) 2007-03-07
US6677708B2 (en) 2004-01-13
EP1220334A3 (de) 2006-08-02
EP1220334B1 (de) 2011-04-13
EP1220334A2 (de) 2002-07-03

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