ATE502701T1 - Auf druck basierendes gaszufuhrsystem und verfahren zur reduzierung von mit der lagerung und zufuhr von hochdruckgasen verbundenen gefahren - Google Patents

Auf druck basierendes gaszufuhrsystem und verfahren zur reduzierung von mit der lagerung und zufuhr von hochdruckgasen verbundenen gefahren

Info

Publication number
ATE502701T1
ATE502701T1 AT03736812T AT03736812T ATE502701T1 AT E502701 T1 ATE502701 T1 AT E502701T1 AT 03736812 T AT03736812 T AT 03736812T AT 03736812 T AT03736812 T AT 03736812T AT E502701 T1 ATE502701 T1 AT E502701T1
Authority
AT
Austria
Prior art keywords
delivery system
supply
storage
gas delivery
based gas
Prior art date
Application number
AT03736812T
Other languages
English (en)
Inventor
Karl Olander
Matthew Donatucci
Luping Wang
Michael Wodjenski
Original Assignee
Advanced Tech Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Tech Materials filed Critical Advanced Tech Materials
Application granted granted Critical
Publication of ATE502701T1 publication Critical patent/ATE502701T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00—Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0109—Shape cylindrical with exteriorly curved end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/01—Shape
    • F17C2201/0104—Shape cylindrical
    • F17C2201/0119—Shape cylindrical with flat end-piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/03—Orientation
    • F17C2201/032—Orientation with substantially vertical main axis
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/056—Small (<1 m3)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00—Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05—Size
    • F17C2201/058—Size portable (<30 l)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0103—Exterior arrangements
    • F17C2205/0111—Boxes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0153—Details of mounting arrangements
    • F17C2205/0176—Details of mounting arrangements with ventilation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0326—Valves electrically actuated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0332—Safety valves or pressure relief valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F17C2205/0335—Check-valves or non-return valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341—Filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0391—Arrangement of valves, regulators, filters inside the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0388—Arrangement of valves, regulators, filters
    • F17C2205/0394—Arrangement of valves, regulators, filters in direct contact with the pressure vessel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/012—Hydrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/016—Noble gases (Ar, Kr, Xe)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/03—Mixtures
    • F17C2221/037—Containing pollutant, e.g. H2S, Cl
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/03—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the pressure level
    • F17C2223/036—Very high pressure (>80 bar)
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107—Single phase
    • F17C2225/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/033—Small pressure, e.g. for liquefied gas
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/035—High pressure, i.e. between 10 and 80 bars
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/03—Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the pressure level
    • F17C2225/038—Subatmospheric pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/045—Methods for emptying or filling by vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/03—Control means
    • F17C2250/032—Control means using computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/03—Dealing with losses
    • F17C2260/035—Dealing with losses of fluid
    • F17C2260/036—Avoiding leaks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/04—Reducing risks and environmental impact
    • F17C2260/044—Avoiding pollution or contamination
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0402—Cleaning, repairing, or assembling
    • Y10T137/0419—Fluid cleaning or flushing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/2496—Self-proportioning or correlating systems
    • Y10T137/2559—Self-controlled branched flow systems
    • Y10T137/2564—Plural inflows
    • Y10T137/2567—Alternate or successive inflows
    • Y10T137/2569—Control by depletion of source
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/4238—With cleaner, lubrication added to fluid or liquid sealing at valve interface
    • Y10T137/4245—Cleaning or steam sterilizing
    • Y10T137/4259—With separate material addition
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7762—Fluid pressure type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7793—With opening bias [e.g., pressure regulator]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87249—Multiple inlet with multiple outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
AT03736812T 2002-06-10 2003-05-29 Auf druck basierendes gaszufuhrsystem und verfahren zur reduzierung von mit der lagerung und zufuhr von hochdruckgasen verbundenen gefahren ATE502701T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/166,242 US6857447B2 (en) 2002-06-10 2002-06-10 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
PCT/US2003/017429 WO2003103862A1 (en) 2002-06-10 2003-05-29 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases

Publications (1)

Publication Number Publication Date
ATE502701T1 true ATE502701T1 (de) 2011-04-15

Family

ID=29710621

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03736812T ATE502701T1 (de) 2002-06-10 2003-05-29 Auf druck basierendes gaszufuhrsystem und verfahren zur reduzierung von mit der lagerung und zufuhr von hochdruckgasen verbundenen gefahren

Country Status (12)

Country Link
US (4) US6857447B2 (de)
EP (2) EP2428286A3 (de)
JP (2) JP2005529294A (de)
KR (2) KR101077451B1 (de)
CN (2) CN1323770C (de)
AT (1) ATE502701T1 (de)
AU (1) AU2003237350A1 (de)
DE (1) DE60336467D1 (de)
ES (1) ES2363277T3 (de)
SG (1) SG152060A1 (de)
TW (1) TWI279660B (de)
WO (1) WO2003103862A1 (de)

Families Citing this family (77)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0211410D0 (en) * 2002-05-17 2002-06-26 Air Prod & Chem Intra-cylinder tubular pressure regulator
US6857447B2 (en) * 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US6843882B2 (en) * 2002-07-15 2005-01-18 Applied Materials, Inc. Gas flow control in a wafer processing system having multiple chambers for performing same process
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
JP4195819B2 (ja) * 2003-01-17 2008-12-17 忠弘 大見 弗化水素ガスの流量制御方法及びこれに用いる弗化水素ガス用流量制御装置
CA2420571C (en) * 2003-02-28 2011-09-27 Gary Howard Hydrogen storage system and power system incorporating same
US7150299B2 (en) * 2003-09-12 2006-12-19 Air Products And Chemicals, Inc. Assembly and method for containing, receiving and storing fluids and for dispensing gas from a fluid control and gas delivery assembly having an integrated fluid flow restrictor
JP2005131632A (ja) * 2003-10-08 2005-05-26 Adeka Engineering & Consutruction Co Ltd 流体供給装置
US20060093746A1 (en) * 2004-11-04 2006-05-04 Tokyo Electron Limited Method and apparatus for atomic layer deposition
JP4606396B2 (ja) * 2006-09-15 2011-01-05 東京エレクトロン株式会社 処理ガス供給システム及び処理ガス供給方法
US8530777B2 (en) * 2006-10-20 2013-09-10 Swagelok Company Welding purge control using electronic flow control
US7708028B2 (en) * 2006-12-08 2010-05-04 Praxair Technology, Inc. Fail-safe vacuum actuated valve for high pressure delivery systems
KR101321455B1 (ko) * 2007-03-27 2013-10-25 주식회사 케이씨텍 가스공급장치
FR2924198B1 (fr) * 2007-11-22 2010-05-28 Air Liquide Electronics Systems Armoire a gaz miniature
WO2009079218A2 (en) 2007-12-06 2009-06-25 L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Integrated valve regulator assembly and system for the controlled storage and dispensing of a hazardous material
US20100228399A1 (en) * 2007-12-06 2010-09-09 Udischas Richard J Pressure regulator assembly and system for the controlled storage and dispensing of a fluid
DE102008018665B4 (de) * 2008-04-11 2011-02-03 Khs Gmbh Vorrichtung und Verfahren zur aseptischen Druckentlastung
DE102008020803A1 (de) * 2008-04-23 2009-10-29 Volkswagen Ag Gastank-Entleerungs-System zur Entleerung von Gasdruckbehältern
US7905247B2 (en) * 2008-06-20 2011-03-15 Praxair Technology, Inc. Vacuum actuated valve for high capacity storage and delivery systems
CN101334129B (zh) * 2008-07-16 2012-06-13 上海大学 定流量流体输送系统
FR2949812B1 (fr) * 2009-09-10 2012-03-30 Peugeot Citroen Automobiles Sa Dispositif et procede de regulation de l'injection d'une quantite de reducteur en phase gaz
EP2523744A4 (de) * 2010-01-14 2017-01-11 Entegris Inc. Systeme und verfahren für belüftungsgasmanagement
DE102010003016B4 (de) 2010-03-18 2018-11-08 Hyptec Gmbh Druckregler zur Zuführung von Kraftstoff und Kraftstoffversorgungssystem mit einer Regeleinheit aus diesen Druckreglern
KR20130079363A (ko) 2010-03-26 2013-07-10 솔베이(소시에떼아노님) 불소 공급 방법
US8338806B2 (en) * 2010-05-05 2012-12-25 Tel Epion Inc. Gas cluster ion beam system with rapid gas switching apparatus
JP3184355U (ja) * 2010-07-05 2013-06-27 ソルヴェイ（ソシエテ アノニム） フッ素供給用のパージボックス及びパージシステム
US8430112B2 (en) * 2010-07-13 2013-04-30 Siemens Industry, Inc. Slurry feed system and method
CN102374381B (zh) * 2010-08-23 2013-09-18 无锡华润上华半导体有限公司 防止吹扫气体倒灌的气柜装置及方法
TWI586842B (zh) * 2010-09-15 2017-06-11 首威公司 氟之製造工廠及使用彼之方法
CN103180029A (zh) * 2010-09-15 2013-06-26 索尔维公司 从气体中去除f2和/或of2的方法
WO2012034825A2 (en) * 2010-09-16 2012-03-22 Solvay Sa Fluorine gas plant
TWI525042B (zh) * 2010-09-16 2016-03-11 首威公司 氟化氫供應單元
JP6355336B2 (ja) 2010-11-30 2018-07-11 インテグリス・インコーポレーテッド 遠隔ドーパント源を含むイオン注入機システム及び当該イオン注入機システムを備える方法
JP5528374B2 (ja) * 2011-03-03 2014-06-25 東京エレクトロン株式会社 ガス減圧供給装置、これを備えるシリンダキャビネット、バルブボックス、及び基板処理装置
CN102155611B (zh) * 2011-03-21 2015-05-27 福建博纯材料有限公司 储气钢瓶纯化方法和系统
TWI447300B (zh) * 2011-07-18 2014-08-01 Fu Sheng Ind Co Ltd Active Compressor System for Air Compressor
US20130118609A1 (en) * 2011-11-12 2013-05-16 Thomas Neil Horsky Gas flow device
EP2618143B1 (de) * 2012-01-19 2015-05-27 Idexx Laboratories, Inc. Analysator mit Vorrichtung zur Steuerung des Flüssigkeitsdrucks
JP5665794B2 (ja) * 2012-04-27 2015-02-04 株式会社フジキン 半導体製造装置のガス分流供給装置
US9175810B2 (en) * 2012-05-04 2015-11-03 General Electric Company Custody transfer system and method for gas fuel
US9740182B2 (en) 2012-06-08 2017-08-22 Applied Materials, Inc. Integrated controller solution for monitoring and controlling manufacturing equipment
CN103574289A (zh) * 2012-08-02 2014-02-12 上海晶玺电子科技有限公司 危险气体安全输送系统
CN104813095B (zh) 2012-09-21 2018-05-01 恩特格里斯公司 压力调节流体贮存和输送容器的抗尖峰压力管理
US9157535B2 (en) 2012-11-30 2015-10-13 Fluor Technologies Corporation Positive isolation through isolation of air supply to pneumatic valves
WO2014084862A1 (en) * 2012-11-30 2014-06-05 Fluor Technologies Corporation Positive isolation through isolation of air supply to pneumatic valves
KR101403988B1 (ko) * 2012-12-03 2014-06-10 주식회사 케이씨텍 가스 공급장치
JP5998975B2 (ja) * 2013-02-12 2016-09-28 オムロン株式会社 エアー洗浄方法、エアー洗浄装置、プログラムおよび記録媒体
JP6580032B2 (ja) 2013-05-17 2019-09-25 インテグリス・インコーポレーテッド 高圧ｂｆ３／ｈ２混合物の製造
EP2833231B1 (de) * 2013-07-29 2017-10-04 Honeywell Technologies Sarl Gasbrenner mit einem Servogassystem mit einer hydraulischen Wheatstone-Brücke welche ein elektrisches Brennstoffzufuhrventil steuert, und Verfahren zum Steuern eines solchen Gasbrenners
US9353440B2 (en) * 2013-12-20 2016-05-31 Applied Materials, Inc. Dual-direction chemical delivery system for ALD/CVD chambers
CN104406050A (zh) * 2014-11-07 2015-03-11 合肥大安印刷有限责任公司 工作气体分流系统
US9909670B2 (en) 2015-03-04 2018-03-06 Praxair Technology, Inc. Modified vacuum actuated valve assembly and sealing mechanism for improved flow stability for fluids sub-atmospherically dispensed from storage and delivery systems
FR3039622B1 (fr) * 2015-07-31 2018-03-02 Air Liquide Electronics Systems Installation de distribution de gaz de travail.
US10330210B2 (en) * 2016-07-12 2019-06-25 Saudi Arabian Oil Company Utilizing clean gas to reliably operate main and pilot relief valve
DE102016119713B3 (de) * 2016-10-17 2018-03-08 Avl Emission Test Systems Gmbh Gaszuführeinheit für eine Abgasanalyseeinheit zur Messung von Abgasen von Verbrennungskraftmaschinen
CN106764435A (zh) * 2016-12-15 2017-05-31 南通华夏飞机工程技术股份有限公司 一种充氧设备
CN106757145A (zh) * 2017-03-07 2017-05-31 洛阳黎明大成氟化工有限公司 一种电解槽用氟化氢自动化供料装置及其使用方法
CA2999424C (en) 2017-03-31 2023-08-29 Roska Dbo Inc. Loading system and method of use thereof
US10751763B2 (en) * 2017-05-31 2020-08-25 Airgas, Inc. Gas sampling methods
WO2019083761A1 (en) * 2017-10-23 2019-05-02 Applied Materials, Inc. LIQUID PRECURSOR FEEDING SYSTEM
JP7067910B2 (ja) * 2017-12-12 2022-05-16 株式会社堀場エステック 流体装置及び流体装置用プログラム
JP7190677B2 (ja) * 2018-03-06 2022-12-16 パナソニックＩｐマネジメント株式会社 水素システム
CN108317398A (zh) * 2018-03-13 2018-07-24 中国石油工程建设有限公司 一种液态乙烷输送管道压力保护系统及方法
US20190346867A1 (en) * 2018-05-14 2019-11-14 Critical Systems, Inc. Pressure control for gas system payback
CN109116008A (zh) * 2018-06-29 2019-01-01 南方电网科学研究院有限责任公司 一种c4f7n气体的毒性试验装置
US20210341103A1 (en) * 2018-09-03 2021-11-04 Showa Denko K.K Method and supply equipment for supplying fluorine gas-containing gas
JP2021536130A (ja) 2018-09-05 2021-12-23 アプライド マテリアルズ インコーポレイテッドApplied Materials, Incorporated 基板処理チャンバ用ガス注入システム
KR101974647B1 (ko) * 2019-01-04 2019-05-02 조수민 가스 제거 장치 및 방법
US11602815B2 (en) * 2019-01-31 2023-03-14 Fusion Coolant Systems, Inc. Machining systems utilizing supercritical fluids
FR3113310B1 (fr) * 2020-08-05 2022-07-15 Air Liquide Dispositif et procédé de remplissage de gaz liquéfié
AU2021423209A1 (en) * 2021-01-29 2023-07-27 Manuel Muñoz Saiz Hydrogen transport system
DE102021203386A1 (de) 2021-04-06 2022-10-06 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Kommunikation zwischen einer Betankungseinrichtung und einem Fahrzeug
US20220336235A1 (en) * 2021-04-16 2022-10-20 Taiwan Semiconductor Manufacturing Company Ltd. Valve box module, semiconductor device manufacturing system and method for manufacturing semiconductor device
CN114636101A (zh) * 2022-03-16 2022-06-17 江苏正帆半导体设备有限公司 气体输送设备
US20230324933A1 (en) * 2022-04-11 2023-10-12 Entegris, Inc. Pressure sensing and regulating system
KR102488044B1 (ko) * 2022-06-14 2023-01-13 주식회사 하영테크 화학물질 리크 감시장치, 이의 동작방법, 및 화학물질 공급 시스템
KR102590526B1 (ko) * 2023-06-02 2023-10-17 문도선 전자 솔밸브를 이용한 가스 누출 방지 시스템

Family Cites Families (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6007A (en) 1849-01-09 Improvement in plows
US6314A (en) 1849-04-17 Bedstead fob invalids
US5937A (en) 1848-11-28 Sylvania
US1679826A (en) * 1923-11-08 1928-08-07 Jenkins Alexander Frederick Fluid-pressure regulator
US1659263A (en) * 1925-05-04 1928-02-14 Harris Calorific Co Regulator
US2043632A (en) * 1931-07-13 1936-06-09 Eclipse Aviat Corp Remote control for high pressure tanks
US2047339A (en) * 1934-10-19 1936-07-14 Phillips Petroleum Co Consumer's liquefied petroleum gas storage and utilization equipment
US2514147A (en) * 1941-05-02 1950-07-04 Phillips Petroleum Co Portable liquefied gas container
US2354283A (en) * 1941-08-04 1944-07-25 Phillips Petroleum Co Antibuzz fluid pressure regulator
US2502588A (en) * 1945-04-11 1950-04-04 Linde Air Prod Co Portable apparatus for holding and vaporizing liquefied gases
US2615287A (en) * 1948-10-01 1952-10-28 Air Reduction Gas pressure regulator
US2707484A (en) * 1952-05-12 1955-05-03 Phillips Petroleum Co Valves
BE539182A (de) 1954-06-22 1900-01-01
US3388962A (en) * 1966-07-07 1968-06-18 Western Ind Inc Gas appliance metering device
US3791412A (en) * 1972-06-05 1974-02-12 H Mays Reducing valve for high pressure fluids and connecting means therefor
US3972346A (en) 1974-08-23 1976-08-03 Wingaersheek, Inc. Pressure regulator
JPS5138065U (de) 1974-09-11 1976-03-22
US3994674A (en) * 1975-03-14 1976-11-30 Western Industries, Inc. Detachable burner assembly for gas-burning torch
US4076176A (en) * 1976-12-27 1978-02-28 Allis-Chalmers Corporation Gas distribution manifold arrangement and methods for use with plurality of hydropneumatic hydraulic accumulators
US4173986A (en) * 1977-04-18 1979-11-13 American Safety Equipment Corporation Pressurized gas flow control valve and assembly thereof with reducer regulator
US4211086A (en) * 1977-10-11 1980-07-08 Beatrice Foods Company Cryogenic breathing system
US4202180A (en) * 1978-10-13 1980-05-13 The Scott & Fetzer Company Liquefied gas supply system
US4793379A (en) * 1982-07-16 1988-12-27 Eidsmore Paul G Supply cylinder shut-off and flow control valve
US4694860A (en) * 1984-11-28 1987-09-22 Eidsmore Paul G Fluid-flow isolation and control apparatus and method
US4624443A (en) * 1982-07-16 1986-11-25 Integrated Flow Systems, Inc. Fluid-flow control valve
US4485739A (en) * 1983-03-02 1984-12-04 H. L. & A. G. Balsinger, Inc. Detonation gas delivery unit
FR2544052B1 (fr) * 1983-04-11 1985-07-05 Air Liquide Dispositif pour fournir a une conduite un fluide sous une pression determinee en provenance de deux recipients
US4597408A (en) * 1985-06-20 1986-07-01 Canter Mark A Rotating poppet valve system
JPS6326500A (ja) * 1986-07-18 1988-02-04 Fujitsu Ltd 圧縮ガス容器系統自動切換装置
US4723967A (en) * 1987-04-27 1988-02-09 Advanced Technology Materials, Inc. Valve block and container for semiconductor source reagent dispensing and/or purification
FR2615270B1 (fr) * 1987-05-15 1989-07-13 Air Liquide Detendeur pour gaz purs
US4744221A (en) * 1987-06-29 1988-05-17 Olin Corporation Zeolite based arsine storage and delivery system
JP2821699B2 (ja) 1990-01-19 1998-11-05 株式会社ネリキ 減圧弁付きボンベバルブ
JPH044400A (ja) 1990-04-20 1992-01-08 Teisan Kk ボンベ付ガス供給装置
US5220517A (en) * 1990-08-31 1993-06-15 Sci Systems, Inc. Process gas distribution system and method with supervisory control
US5165247A (en) * 1991-02-11 1992-11-24 Rocky Research Refrigerant recycling system
US5169119A (en) * 1991-03-08 1992-12-08 The Boeing Company Mechanism for releasing stored gas from a pressure vessel
US5132492A (en) * 1991-05-06 1992-07-21 Heath Company Limited travel universally adjustable electrical fixture
US5197710A (en) 1991-05-30 1993-03-30 Lloyd G. Wass Crash proof solenoid controlled valve for natural gas powered vehicles
US5240024A (en) * 1992-03-31 1993-08-31 Moore Epitaxial, Inc. Automated process gas supply system for evacuating a process line
US6153289A (en) * 1992-04-29 2000-11-28 Murray; Nicholas J. Laminates
US5230359A (en) * 1992-06-15 1993-07-27 Veriflo Corporation Supply pressure compensated fluid pressure regulator and method
US5233837A (en) * 1992-09-03 1993-08-10 Enerfex, Inc. Process and apparatus for producing liquid carbon dioxide
JPH0694196A (ja) 1992-09-09 1994-04-05 Neriki:Kk ガスボンベ用バルブ装置
GB9220975D0 (en) 1992-10-06 1992-11-18 Air Prod & Chem Apparatus for supplying high purity gas
US5303734A (en) * 1993-02-01 1994-04-19 Eidsmore Paul G Pressure regulator
FR2706051B1 (fr) * 1993-06-03 1995-07-28 Taema Ensemble de commande de distribution de gaz et bouteille de gaz équipée d'un tel ensemble.
JP2813856B2 (ja) * 1993-11-29 1998-10-22 日本エア・リキード株式会社 シリンダ付ガス供給装置
US5685159A (en) * 1994-02-04 1997-11-11 Chicago Bridge & Iron Technical Services Company Method and system for storing cold liquid
US5547229A (en) * 1994-05-13 1996-08-20 Eidsmore; Paul G. Fluid coupling assembly
FR2724241B1 (fr) * 1994-09-02 1996-10-25 Air Liquide Ensemble de commande et de distribution de gaz et dispositif de stockage de gaz equipe d'un tel ensemble
US5704967A (en) 1995-10-13 1998-01-06 Advanced Technology Materials, Inc. Fluid storage and delivery system comprising high work capacity physical sorbent
US5707424A (en) 1994-10-13 1998-01-13 Advanced Technology Materials, Inc. Process system with integrated gas storage and delivery unit
US5518528A (en) 1994-10-13 1996-05-21 Advanced Technology Materials, Inc. Storage and delivery system for gaseous hydride, halide, and organometallic group V compounds
US6132492A (en) 1994-10-13 2000-10-17 Advanced Technology Materials, Inc. Sorbent-based gas storage and delivery system for dispensing of high-purity gas, and apparatus and process for manufacturing semiconductor devices, products and precursor structures utilizing same
GB9513606D0 (en) * 1995-07-04 1995-09-06 Boc Group Plc Apparatus for chilling fluids
FR2741937B1 (fr) 1995-12-01 1998-02-20 Gaz De France Dispositif d'alimentation en fluide gazeux d'un reseau de distribution
US5645192A (en) * 1995-12-11 1997-07-08 Vent-Matic Co., Inc. Self regulating valve assembly for controlling fluid ingress and egress from a transportable container which stores and distributes liquid under pressure
US5762086A (en) * 1995-12-19 1998-06-09 Veriflo Corporation Apparatus for delivering process gas for making semiconductors and method of using same
US5664759A (en) * 1996-02-21 1997-09-09 Aeroquip Corporation Valved coupling for ultra high purity gas distribution systems
JP3450575B2 (ja) * 1996-02-22 2003-09-29 長野計器株式会社 ガスボンベの残量検出方法
US5673562A (en) * 1996-02-23 1997-10-07 L'air Liquide, S.A. Bulk delivery of ultra-high purity gases at high flow rates
US5917140A (en) 1996-05-21 1999-06-29 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means
US5901557A (en) * 1996-10-04 1999-05-11 Mcdonnell Douglas Corporation Passive low gravity cryogenic storage vessel
US6069027A (en) * 1997-05-21 2000-05-30 Lsi Logic Corporation Fixture for lid-attachment for encapsulated packages
GB9724168D0 (en) * 1997-11-14 1998-01-14 Air Prod & Chem Gas control device and method of supplying gas
US6007609A (en) 1997-12-18 1999-12-28 Uop Llc Pressurized container with restrictor tube having multiple capillary passages
US6453924B1 (en) * 2000-07-24 2002-09-24 Advanced Technology Materials, Inc. Fluid distribution system and process, and semiconductor fabrication facility utilizing same
US5937895A (en) 1998-04-17 1999-08-17 Uop Llc Fail-safe delivery valve for pressurized tanks
US6101816A (en) 1998-04-28 2000-08-15 Advanced Technology Materials, Inc. Fluid storage and dispensing system
US6343476B1 (en) 1998-04-28 2002-02-05 Advanced Technology Materials, Inc. Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein
US6155289A (en) 1999-05-07 2000-12-05 International Business Machines Method of and system for sub-atmospheric gas delivery with backflow control
US6302139B1 (en) * 1999-07-16 2001-10-16 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
US6581623B1 (en) * 1999-07-16 2003-06-24 Advanced Technology Materials, Inc. Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
US6296515B1 (en) * 2000-02-29 2001-10-02 Avaya Technology Corp. Connector having a latching mechanism
US6298515B1 (en) * 2000-03-09 2001-10-09 Bessie Jane Robinson Multi-purpose scrubbing sponge
US6257000B1 (en) * 2000-03-22 2001-07-10 Luping Wang Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas
SG99928A1 (en) 2000-08-18 2003-11-27 Air Prod & Chem Sub-atmospheric gas delivery method and apparatus
JP2003166700A (ja) * 2001-11-30 2003-06-13 Nippon Sanso Corp 減圧機能付き容器弁
US6857447B2 (en) * 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US6955198B2 (en) * 2003-09-09 2005-10-18 Advanced Technology Materials, Inc. Auto-switching system for switch-over of gas storage and dispensing vessels in a multi-vessel array
US7051749B2 (en) * 2003-11-24 2006-05-30 Advanced Technology Materials, Inc. Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications

Also Published As

Publication number Publication date
US20050224116A1 (en) 2005-10-13
US20060174944A1 (en) 2006-08-10
US20030226588A1 (en) 2003-12-11
JP2010261597A (ja) 2010-11-18
US20100059694A1 (en) 2010-03-11
CN1668393A (zh) 2005-09-14
AU2003237350A1 (en) 2003-12-22
CN1323770C (zh) 2007-07-04
TW200405149A (en) 2004-04-01
CN101059206A (zh) 2007-10-24
EP1511583B1 (de) 2011-03-23
SG152060A1 (en) 2009-05-29
DE60336467D1 (de) 2011-05-05
US6857447B2 (en) 2005-02-22
ES2363277T3 (es) 2011-07-28
WO2003103862A1 (en) 2003-12-18
EP2428286A2 (de) 2012-03-14
KR101077451B1 (ko) 2011-10-26
TWI279660B (en) 2007-04-21
KR20100132056A (ko) 2010-12-16
EP1511583A4 (de) 2008-12-24
US7614421B2 (en) 2009-11-10
EP1511583A1 (de) 2005-03-09
US7328716B2 (en) 2008-02-12
JP2005529294A (ja) 2005-09-29
EP2428286A3 (de) 2016-05-18
US7798168B2 (en) 2010-09-21
KR101077364B1 (ko) 2011-10-26
KR20050010895A (ko) 2005-01-28
JP5560139B2 (ja) 2014-07-23

Similar Documents

Publication Publication Date Title
ATE502701T1 (de) Auf druck basierendes gaszufuhrsystem und verfahren zur reduzierung von mit der lagerung und zufuhr von hochdruckgasen verbundenen gefahren
DE60328305D1 (de) System zum nachweis der abgabe von gasen an einen patienten
ATE303847T1 (de) Lebenserhaltungssysteme für flugzeuge
NO20052597D0 (no) Anordning og fremgangsmate for kontrollert utstotning av gasser fra avleveringssystemer for medisinske fluider.
NO20090545L (no) Metode og utstyr for regulert tilforselsluft
MX2019015465A (es) Sistema y metodo para administrar un gas farmaceutico a un paciente.
NZ607671A (en) Tape applicator
NZ721025A (en) Delivery of respiratory therapy
DE69725379D1 (de) Dosiervorrichtung zur Zuführung von zusätzlichem Gas oder Flüssigkeit im Atemgas eines Anästhesie- oder Beatmungsgerätes
HK1140446A1 (en) Self-regulating gas generator and method
DE69839940D1 (de) Sauerstoff-abgabe mittel und ihre anwendung
TW200732836A (en) Method for expelling gas positioned between a substrate and a mold
DE602006010255D1 (de) Verfahren zur Abgabe von kryogenem Fluid, in flüssigem oder in gasförmigem Zustand, in ein Netz von Empfangstankstellen
ATE526504T1 (de) System und verfahren zur zufuhr von kryogener flüssigkeit
ATE510164T1 (de) Füllen von druckbehältern mit kryogen erstarrtem gas
ZA202213411B (en) Systems and methods for algae cultivation using direct air capture
DE50305345D1 (de) Vorrichtung zur Beatmung
SE0300918L (sv) System, komponent och förfarande för anestesimedelsdistribution där anestesimedlet har låg kokpunkt och en tryckstyrd ventil öppnar till anestesimedelsbehållaren
EA200401550A1 (ru) Система подачи газа
DE502008001034D1 (de) Verfahren zur Reduzierung der Luftzuführung aus der Atmosphäre in das Ausdehnungsgefäß von mit Isolierflüssigkeit gefüllten Hochspannungsanlagen und Vorrichtung zur Durchführung des Verfahrens
BR9905650A (pt) Câmara de aquecimento de obras de atmosfera controlada
DE502004000259D1 (de) Verfahren zur Befeuchtung eines Atemgases sowie Vorrichtung zur Beatmung
BR0307412A (pt) Dispositivo e método de redução de fluxo de polarização em ventiladores oscilatórios
AU2002328407A8 (en) Liquefied natural gas supply system
SE9800276L (sv) Förfarande för blandning jämte blandningsanordning

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties