ATE484607T1 - Mikrowellenplasmaverarbeitungsverfahren - Google Patents

Mikrowellenplasmaverarbeitungsverfahren

Info

Publication number
ATE484607T1
ATE484607T1 AT04726897T AT04726897T ATE484607T1 AT E484607 T1 ATE484607 T1 AT E484607T1 AT 04726897 T AT04726897 T AT 04726897T AT 04726897 T AT04726897 T AT 04726897T AT E484607 T1 ATE484607 T1 AT E484607T1
Authority
AT
Austria
Prior art keywords
processing method
plasma processing
microwave plasma
parahydroxybenzoic acid
precipitating
Prior art date
Application number
AT04726897T
Other languages
English (en)
Inventor
Hideo Kurashima
Akira Kobayashi
Kouji Yamada
Tsunehisa Namiki
Original Assignee
Toyo Seikan Kaisha Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Seikan Kaisha Ltd filed Critical Toyo Seikan Kaisha Ltd
Application granted granted Critical
Publication of ATE484607T1 publication Critical patent/ATE484607T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/511—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using microwave discharges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32266—Means for controlling power transmitted to the plasma
    • H01J37/32284—Means for controlling or selecting resonance mode
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/64—Heating using microwaves
    • H05B6/80—Apparatus for specific applications

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Chemical Vapour Deposition (AREA)
  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Absorbent Articles And Supports Therefor (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
AT04726897T 2003-04-16 2004-04-12 Mikrowellenplasmaverarbeitungsverfahren ATE484607T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003112134 2003-04-16
PCT/JP2004/005202 WO2004092443A1 (ja) 2003-04-16 2004-04-12 マイクロ波プラズマ処理方法

Publications (1)

Publication Number Publication Date
ATE484607T1 true ATE484607T1 (de) 2010-10-15

Family

ID=33296025

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04726897T ATE484607T1 (de) 2003-04-16 2004-04-12 Mikrowellenplasmaverarbeitungsverfahren

Country Status (8)

Country Link
US (1) US7170027B2 (de)
EP (1) EP1614770B1 (de)
JP (1) JP4752503B2 (de)
KR (1) KR101101026B1 (de)
CN (1) CN100447297C (de)
AT (1) ATE484607T1 (de)
DE (1) DE602004029561D1 (de)
WO (1) WO2004092443A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5000154B2 (ja) * 2006-02-28 2012-08-15 三菱重工食品包装機械株式会社 充填システム及び方法
JP5136551B2 (ja) 2007-06-06 2013-02-06 東洋製罐株式会社 生分解性樹脂ボトル及びその製造方法
CN102171795A (zh) * 2008-10-03 2011-08-31 维易科加工设备股份有限公司 气相外延系统
JP5210905B2 (ja) * 2009-01-30 2013-06-12 株式会社日立ハイテクノロジーズ プラズマ処理装置
JP5234791B2 (ja) * 2009-02-19 2013-07-10 日本電信電話株式会社 プラズマ装置
KR101335187B1 (ko) * 2011-11-17 2013-11-29 한국기초과학지원연구원 미세조절이 가능한 스퍼터링 장치 및 이를 이용한 스퍼터링 방법
CN102794146B (zh) * 2012-08-17 2013-12-11 清华大学 一种用于制备纳米材料的微波等离子体反应装置
US9374853B2 (en) 2013-02-08 2016-06-21 Letourneau University Method for joining two dissimilar materials and a microwave system for accomplishing the same
JP6752117B2 (ja) * 2016-11-09 2020-09-09 東京エレクトロン株式会社 マイクロ波プラズマ源およびマイクロ波プラズマ処理装置
AU2019325589B2 (en) 2018-08-23 2023-08-31 Transform Materials Llc Systems and methods for processing gases
US11633710B2 (en) 2018-08-23 2023-04-25 Transform Materials Llc Systems and methods for processing gases

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4691662A (en) * 1983-02-28 1987-09-08 Michigan State University Dual plasma microwave apparatus and method for treating a surface
US4727293A (en) * 1984-08-16 1988-02-23 Board Of Trustees Operating Michigan State University Plasma generating apparatus using magnets and method
JP3020580B2 (ja) * 1990-09-28 2000-03-15 株式会社日立製作所 マイクロ波プラズマ処理装置
US5670224A (en) * 1992-11-13 1997-09-23 Energy Conversion Devices, Inc. Modified silicon oxide barrier coatings produced by microwave CVD deposition on polymeric substrates
TW264601B (de) * 1993-09-17 1995-12-01 Hitachi Seisakusyo Kk
AU747272B2 (en) * 1997-09-30 2002-05-09 Tetra Laval Holdings & Finance Sa Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process
EP1019943A1 (de) * 1997-09-30 2000-07-19 Tetra Laval Holdings & Finance S.A. Vorrichtung und verfahren zur behandlung der innenoberfläche eines kunststoffbehälters mit einer engen öffnung in einem plasma-unterstützten prozess
JP2001102309A (ja) * 1998-04-09 2001-04-13 Tokyo Electron Ltd ガス処理装置
JP4222707B2 (ja) * 2000-03-24 2009-02-12 東京エレクトロン株式会社 プラズマ処理装置及び方法、ガス供給リング及び誘電体
JP2002153830A (ja) * 2000-11-17 2002-05-28 Hokkai Can Co Ltd プラスチック容器内面の清浄化方法
JP4595276B2 (ja) * 2000-12-25 2010-12-08 東洋製罐株式会社 マイクロ波プラズマ処理方法及び装置

Also Published As

Publication number Publication date
US20070000879A1 (en) 2007-01-04
JPWO2004092443A1 (ja) 2006-07-06
EP1614770B1 (de) 2010-10-13
EP1614770A4 (de) 2007-11-07
KR20060019513A (ko) 2006-03-03
CN100447297C (zh) 2008-12-31
CN1777698A (zh) 2006-05-24
EP1614770A1 (de) 2006-01-11
US7170027B2 (en) 2007-01-30
WO2004092443A1 (ja) 2004-10-28
KR101101026B1 (ko) 2011-12-29
JP4752503B2 (ja) 2011-08-17
DE602004029561D1 (de) 2010-11-25

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Legal Events

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