ATE476537T1 - Verfahren und vorrichtung zur herstellung von einkristallen - Google Patents

Verfahren und vorrichtung zur herstellung von einkristallen

Info

Publication number
ATE476537T1
ATE476537T1 AT05717694T AT05717694T ATE476537T1 AT E476537 T1 ATE476537 T1 AT E476537T1 AT 05717694 T AT05717694 T AT 05717694T AT 05717694 T AT05717694 T AT 05717694T AT E476537 T1 ATE476537 T1 AT E476537T1
Authority
AT
Austria
Prior art keywords
single crystals
producing single
heater
interface
producing
Prior art date
Application number
AT05717694T
Other languages
English (en)
Inventor
Thierry Duffar
Annie Fournier-Gagnoud
Original Assignee
Centre Nat Rech Scient
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Nat Rech Scient filed Critical Centre Nat Rech Scient
Application granted granted Critical
Publication of ATE476537T1 publication Critical patent/ATE476537T1/de

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B11/00Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
    • C30B11/007Mechanisms for moving either the charge or the heater
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/108Including a solid member other than seed or product contacting the liquid [e.g., crucible, immersed heating element]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y10T117/1084Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone having details of a stabilizing feature

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
AT05717694T 2004-01-30 2005-01-28 Verfahren und vorrichtung zur herstellung von einkristallen ATE476537T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0450177A FR2865740B1 (fr) 2004-01-30 2004-01-30 Procede et dispositif de fabrication de monocristaux
PCT/FR2005/050055 WO2005078166A1 (fr) 2004-01-30 2005-01-28 Procede et dispositif de fabrication de monocristaux

Publications (1)

Publication Number Publication Date
ATE476537T1 true ATE476537T1 (de) 2010-08-15

Family

ID=34746517

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05717694T ATE476537T1 (de) 2004-01-30 2005-01-28 Verfahren und vorrichtung zur herstellung von einkristallen

Country Status (8)

Country Link
US (1) US7465355B2 (de)
EP (1) EP1713958B1 (de)
JP (1) JP5160095B2 (de)
AT (1) ATE476537T1 (de)
DE (1) DE602005022676D1 (de)
ES (1) ES2350189T3 (de)
FR (1) FR2865740B1 (de)
WO (1) WO2005078166A1 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2927910B1 (fr) 2008-02-27 2011-06-17 Centre Nat Rech Scient Procede de cristallogenese d'un materiau electriquement conducteur a l'etat fondu.

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3096158A (en) * 1959-09-25 1963-07-02 Gerthart K Gaule Apparatus for pulling single crystals in the form of long flat strips from a melt
JPS5921593A (ja) * 1982-07-23 1984-02-03 Matsushita Electric Ind Co Ltd 単結晶育成法
JPS5921583A (ja) 1982-07-29 1984-02-03 日産自動車株式会社 セラミツク軸と金属軸との接合法
JPH06234590A (ja) * 1993-02-09 1994-08-23 Furukawa Electric Co Ltd:The 化合物半導体単結晶の製造方法とその装置
FR2757184B1 (fr) * 1996-12-12 1999-02-26 Commissariat Energie Atomique Dispositif et procede de cristallogenese
FR2806100B1 (fr) * 2000-03-10 2002-09-20 Commissariat Energie Atomique Dispositif et procede de cristallogenese
FR2810342B1 (fr) * 2000-06-20 2002-11-29 Commissariat Energie Atomique Procede de cristallogenese avec champ magnetique
US6482261B2 (en) * 2000-12-29 2002-11-19 Ebara Solar, Inc. Magnetic field furnace

Also Published As

Publication number Publication date
EP1713958A1 (de) 2006-10-25
WO2005078166A1 (fr) 2005-08-25
ES2350189T3 (es) 2011-01-19
FR2865740A1 (fr) 2005-08-05
JP5160095B2 (ja) 2013-03-13
EP1713958B1 (de) 2010-08-04
JP2007519599A (ja) 2007-07-19
US7465355B2 (en) 2008-12-16
US20070277729A1 (en) 2007-12-06
FR2865740B1 (fr) 2007-06-22
DE602005022676D1 (de) 2010-09-16

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