ATE467221T1 - Variabler kondensator und verfahren zu seiner herstellung - Google Patents

Variabler kondensator und verfahren zu seiner herstellung

Info

Publication number
ATE467221T1
ATE467221T1 AT01908665T AT01908665T ATE467221T1 AT E467221 T1 ATE467221 T1 AT E467221T1 AT 01908665 T AT01908665 T AT 01908665T AT 01908665 T AT01908665 T AT 01908665T AT E467221 T1 ATE467221 T1 AT E467221T1
Authority
AT
Austria
Prior art keywords
variable capacitor
charge plate
movable
producing same
plate
Prior art date
Application number
AT01908665T
Other languages
English (en)
Inventor
Peng Cheng
Qing Ma
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE467221T1 publication Critical patent/ATE467221T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making
    • Y10T29/435—Solid dielectric type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT01908665T 2000-01-26 2001-01-22 Variabler kondensator und verfahren zu seiner herstellung ATE467221T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/491,560 US6355534B1 (en) 2000-01-26 2000-01-26 Variable tunable range MEMS capacitor
PCT/US2001/002202 WO2001056046A2 (en) 2000-01-26 2001-01-22 Variable tunable range mems capacitor

Publications (1)

Publication Number Publication Date
ATE467221T1 true ATE467221T1 (de) 2010-05-15

Family

ID=23952734

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01908665T ATE467221T1 (de) 2000-01-26 2001-01-22 Variabler kondensator und verfahren zu seiner herstellung

Country Status (7)

Country Link
US (2) US6355534B1 (de)
EP (2) EP1250707B1 (de)
AT (1) ATE467221T1 (de)
AU (1) AU2001236510A1 (de)
DE (1) DE60142024D1 (de)
TW (1) TW477991B (de)
WO (1) WO2001056046A2 (de)

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US7167135B2 (en) * 2003-09-11 2007-01-23 Intel Corporation MEMS based tunable antenna for wireless reception and transmission
US6954348B1 (en) 2003-11-21 2005-10-11 Memx, Inc. Tunable MEMS capacitor
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US8008835B2 (en) * 2004-02-27 2011-08-30 Georgia Tech Research Corporation Multiple element electrode cMUT devices and fabrication methods
US7646133B2 (en) * 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
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US7068125B2 (en) * 2004-03-04 2006-06-27 Robert Bosch Gmbh Temperature controlled MEMS resonator and method for controlling resonator frequency
US7112951B2 (en) * 2004-06-07 2006-09-26 General Electric Company MEMS based current sensor using magnetic-to-mechanical conversion and reference components
US7265019B2 (en) * 2004-06-30 2007-09-04 International Business Machines Corporation Elastomeric CMOS based micro electromechanical varactor
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US7348928B2 (en) * 2004-12-14 2008-03-25 Intel Corporation Slot antenna having a MEMS varactor for resonance frequency tuning
US7957277B2 (en) * 2005-02-25 2011-06-07 Interdigital Technology Corporation Wireless communication method and system for routing packets via intra-mesh and extra-mesh routes
US7786820B2 (en) * 2005-03-21 2010-08-31 Ngimat Co. Tunable dielectric radio frequency microelectromechanical system capacitive switch
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US7345866B1 (en) * 2005-05-13 2008-03-18 Hrl Laboratories, Llc Continuously tunable RF MEMS capacitor with ultra-wide tuning range
US7457033B2 (en) * 2005-05-27 2008-11-25 The Regents Of The University Of California MEMS tunable vertical-cavity semiconductor optical amplifier
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DE102006040345B4 (de) * 2006-08-29 2016-08-11 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zu dessen Herstellung
JP2008211420A (ja) * 2007-02-26 2008-09-11 Seiko Instruments Inc 発振器
JP4594340B2 (ja) * 2007-02-26 2010-12-08 富士通株式会社 マイクロ可動デバイス
WO2008152559A2 (en) 2007-06-13 2008-12-18 Nxp B.V. Controller for tunable mems capacitor
US9099248B2 (en) * 2007-06-29 2015-08-04 Corporation for National Research Iniatives Variable capacitor tuned using laser micromachining
US8363380B2 (en) 2009-05-28 2013-01-29 Qualcomm Incorporated MEMS varactors
US8218228B2 (en) * 2009-12-18 2012-07-10 Qualcomm Mems Technologies, Inc. Two-terminal variable capacitance MEMS device
US20110148837A1 (en) * 2009-12-18 2011-06-23 Qualcomm Mems Technologies, Inc. Charge control techniques for selectively activating an array of devices
JP5252016B2 (ja) * 2011-03-18 2013-07-31 横河電機株式会社 振動式トランスデューサ
US9349786B2 (en) 2011-08-25 2016-05-24 King Abdullah University Of Science And Technology Fractal structures for fixed MEMS capacitors
CN108281286B (zh) 2012-09-20 2020-04-07 维斯普瑞公司 微机电系统(mems)可变电容器装置及相关方法
TWI571427B (zh) * 2013-03-08 2017-02-21 先技股份有限公司 訊號增強裝置與訊號增強方法
US9506777B2 (en) 2013-03-08 2016-11-29 Sagatek Co., Ltd. Micro-electromechanical apparatus having signal attenuation-proof function, and manufacturing method and signal attenuation-proof method thereof
US9424994B2 (en) 2013-12-10 2016-08-23 Tdk Corporation Tunable interdigitated capacitor
US9443657B1 (en) 2013-12-10 2016-09-13 Tdk Corporation Piezo controlled variable capacitor
US9474150B2 (en) 2013-12-10 2016-10-18 Tdk Corporation Transmission line filter with tunable capacitor

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Also Published As

Publication number Publication date
US6980412B2 (en) 2005-12-27
DE60142024D1 (de) 2010-06-17
WO2001056046A9 (en) 2002-10-31
WO2001056046A3 (en) 2002-03-07
EP1250707B1 (de) 2010-05-05
US20020074621A1 (en) 2002-06-20
EP1942509A1 (de) 2008-07-09
EP1942509B1 (de) 2013-06-19
US6355534B1 (en) 2002-03-12
WO2001056046A2 (en) 2001-08-02
TW477991B (en) 2002-03-01
EP1250707A2 (de) 2002-10-23
AU2001236510A1 (en) 2001-08-07

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