DE69841923D1 - Verfahren zur Herstellung einer Kondensatorelektrode aus Polysilizium - Google Patents

Verfahren zur Herstellung einer Kondensatorelektrode aus Polysilizium

Info

Publication number
DE69841923D1
DE69841923D1 DE69841923T DE69841923T DE69841923D1 DE 69841923 D1 DE69841923 D1 DE 69841923D1 DE 69841923 T DE69841923 T DE 69841923T DE 69841923 T DE69841923 T DE 69841923T DE 69841923 D1 DE69841923 D1 DE 69841923D1
Authority
DE
Germany
Prior art keywords
producing
capacitor electrode
polysilicon capacitor
polysilicon
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69841923T
Other languages
English (en)
Inventor
Christine Dehm
Stephen K Loh
Carlos Mazure
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qimonda AG
International Business Machines Corp
Original Assignee
Qimonda AG
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qimonda AG, International Business Machines Corp filed Critical Qimonda AG
Application granted granted Critical
Publication of DE69841923D1 publication Critical patent/DE69841923D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • H01L28/40—Capacitors
    • H01L28/60—Electrodes
    • H01L28/75—Electrodes comprising two or more layers, e.g. comprising a barrier layer and a metal layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B12/00—Dynamic random access memory [DRAM] devices
    • H10B12/01—Manufacture or treatment
    • H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
    • H10B12/03—Making the capacitor or connections thereto
    • H10B12/033—Making the capacitor or connections thereto the capacitor extending over the transistor
    • H10B12/0335—Making a connection between the transistor and the capacitor, e.g. plug
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/914—Doping
    • Y10S438/922—Diffusion along grain boundaries

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Semiconductor Memories (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
DE69841923T 1997-12-19 1998-12-18 Verfahren zur Herstellung einer Kondensatorelektrode aus Polysilizium Expired - Lifetime DE69841923D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/994,275 US6228701B1 (en) 1997-12-19 1997-12-19 Apparatus and method for minimizing diffusion in stacked capacitors formed on silicon plugs

Publications (1)

Publication Number Publication Date
DE69841923D1 true DE69841923D1 (de) 2010-11-18

Family

ID=25540496

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69841923T Expired - Lifetime DE69841923D1 (de) 1997-12-19 1998-12-18 Verfahren zur Herstellung einer Kondensatorelektrode aus Polysilizium

Country Status (7)

Country Link
US (1) US6228701B1 (de)
EP (1) EP0926717B1 (de)
JP (1) JPH11261031A (de)
KR (1) KR100596832B1 (de)
CN (1) CN1167118C (de)
DE (1) DE69841923D1 (de)
TW (1) TW406408B (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW437010B (en) * 1998-09-08 2001-05-28 Siemens Ag A layer-arrangement with a material-layer and a diffusion-barrier against diffusable material-components
KR100351451B1 (ko) * 1999-12-30 2002-09-09 주식회사 하이닉스반도체 반도체메모리장치의 커패시터제조방법
US6833329B1 (en) 2000-06-22 2004-12-21 Micron Technology, Inc. Methods of forming oxide regions over semiconductor substrates
US6686298B1 (en) * 2000-06-22 2004-02-03 Micron Technology, Inc. Methods of forming structures over semiconductor substrates, and methods of forming transistors associated with semiconductor substrates
US6649543B1 (en) 2000-06-22 2003-11-18 Micron Technology, Inc. Methods of forming silicon nitride, methods of forming transistor devices, and transistor devices
US6660657B1 (en) 2000-08-07 2003-12-09 Micron Technology, Inc. Methods of incorporating nitrogen into silicon-oxide-containing layers
US6383943B1 (en) * 2000-10-16 2002-05-07 Taiwan Semiconductor Manufacturing Company Process for improving copper fill integrity
US6399401B1 (en) * 2001-07-24 2002-06-04 Advanced Micro Devices, In. Test structures for electrical linewidth measurement and processes for their formation
US6878585B2 (en) 2001-08-29 2005-04-12 Micron Technology, Inc. Methods of forming capacitors
US6723599B2 (en) * 2001-12-03 2004-04-20 Micron Technology, Inc. Methods of forming capacitors and methods of forming capacitor dielectric layers
KR100543655B1 (ko) * 2003-06-30 2006-01-20 주식회사 하이닉스반도체 반도체 소자의 제조방법
CN104465519B (zh) * 2013-09-23 2017-07-28 中芯国际集成电路制造(上海)有限公司 嵌入式源/漏mos晶体管的制造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2786071B2 (ja) * 1993-02-17 1998-08-13 日本電気株式会社 半導体装置の製造方法
US5392189A (en) * 1993-04-02 1995-02-21 Micron Semiconductor, Inc. Capacitor compatible with high dielectric constant materials having two independent insulative layers and the method for forming same
US5381302A (en) 1993-04-02 1995-01-10 Micron Semiconductor, Inc. Capacitor compatible with high dielectric constant materials having a low contact resistance layer and the method for forming same
JPH0714993A (ja) * 1993-06-18 1995-01-17 Mitsubishi Electric Corp 半導体装置およびその製造方法
JPH0794600A (ja) * 1993-06-29 1995-04-07 Mitsubishi Electric Corp 半導体装置およびその製造方法
US5504041A (en) 1994-08-01 1996-04-02 Texas Instruments Incorporated Conductive exotic-nitride barrier layer for high-dielectric-constant materials
KR0168346B1 (ko) * 1994-12-29 1998-12-15 김광호 고유전율 재료를 이용한 커패시터 및 그 제조방법
US5612574A (en) 1995-06-06 1997-03-18 Texas Instruments Incorporated Semiconductor structures using high-dielectric-constant materials and an adhesion layer
US5786248A (en) * 1995-10-12 1998-07-28 Micron Technology, Inc. Semiconductor processing method of forming a tantalum oxide containing capacitor
KR100285066B1 (ko) * 1997-12-06 2001-04-02 윤종용 고유전체 물질을 갖는 커패시터의 형성방법
US6037235A (en) * 1998-09-14 2000-03-14 Applied Materials, Inc. Hydrogen anneal for curing defects of silicon/nitride interfaces of semiconductor devices

Also Published As

Publication number Publication date
CN1225506A (zh) 1999-08-11
JPH11261031A (ja) 1999-09-24
CN1167118C (zh) 2004-09-15
EP0926717B1 (de) 2010-10-06
KR100596832B1 (ko) 2006-11-30
EP0926717A2 (de) 1999-06-30
KR19990063238A (ko) 1999-07-26
TW406408B (en) 2000-09-21
EP0926717A3 (de) 2003-04-02
US6228701B1 (en) 2001-05-08

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