ATE464583T1 - Verfahren zum ausrichung optischer komponenten mit wellenleitern - Google Patents

Verfahren zum ausrichung optischer komponenten mit wellenleitern

Info

Publication number
ATE464583T1
ATE464583T1 AT06744110T AT06744110T ATE464583T1 AT E464583 T1 ATE464583 T1 AT E464583T1 AT 06744110 T AT06744110 T AT 06744110T AT 06744110 T AT06744110 T AT 06744110T AT E464583 T1 ATE464583 T1 AT E464583T1
Authority
AT
Austria
Prior art keywords
cladding layer
peaks
over
pattern
waveguides
Prior art date
Application number
AT06744110T
Other languages
English (en)
Inventor
Graeme Maxwell
Philip Townley
Robert Campbell Mcdougall
Original Assignee
Ct Integrated Photonics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ct Integrated Photonics Ltd filed Critical Ct Integrated Photonics Ltd
Application granted granted Critical
Publication of ATE464583T1 publication Critical patent/ATE464583T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/4228—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements
    • G02B6/423—Passive alignment, i.e. without a detection of the degree of coupling or the position of the elements using guiding surfaces for the alignment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Lasers (AREA)
AT06744110T 2005-06-03 2006-06-05 Verfahren zum ausrichung optischer komponenten mit wellenleitern ATE464583T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB0511300.6A GB0511300D0 (en) 2005-06-03 2005-06-03 Control of vertical axis for passive alignment of optical components with wave guides
PCT/GB2006/002056 WO2006129123A1 (en) 2005-06-03 2006-06-05 Method of aligning optical components with waveguides

Publications (1)

Publication Number Publication Date
ATE464583T1 true ATE464583T1 (de) 2010-04-15

Family

ID=34835055

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06744110T ATE464583T1 (de) 2005-06-03 2006-06-05 Verfahren zum ausrichung optischer komponenten mit wellenleitern

Country Status (8)

Country Link
US (1) US7772022B2 (de)
EP (1) EP1886175B1 (de)
JP (1) JP5161076B2 (de)
CN (1) CN100573211C (de)
AT (1) ATE464583T1 (de)
DE (1) DE602006013619D1 (de)
GB (1) GB0511300D0 (de)
WO (1) WO2006129123A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0813784D0 (en) 2008-07-28 2008-09-03 Ct Integrated Photonics Ltd Optical intergration system
US9478685B2 (en) 2014-06-23 2016-10-25 Zena Technologies, Inc. Vertical pillar structured infrared detector and fabrication method for the same
US9000353B2 (en) 2010-06-22 2015-04-07 President And Fellows Of Harvard College Light absorption and filtering properties of vertically oriented semiconductor nano wires
US8274039B2 (en) 2008-11-13 2012-09-25 Zena Technologies, Inc. Vertical waveguides with various functionality on integrated circuits
US8866065B2 (en) 2010-12-13 2014-10-21 Zena Technologies, Inc. Nanowire arrays comprising fluorescent nanowires
US9406709B2 (en) 2010-06-22 2016-08-02 President And Fellows Of Harvard College Methods for fabricating and using nanowires
US8890271B2 (en) 2010-06-30 2014-11-18 Zena Technologies, Inc. Silicon nitride light pipes for image sensors
US9082673B2 (en) 2009-10-05 2015-07-14 Zena Technologies, Inc. Passivated upstanding nanostructures and methods of making the same
US8299472B2 (en) 2009-12-08 2012-10-30 Young-June Yu Active pixel sensor with nanowire structured photodetectors
US8269985B2 (en) 2009-05-26 2012-09-18 Zena Technologies, Inc. Determination of optimal diameters for nanowires
US9343490B2 (en) 2013-08-09 2016-05-17 Zena Technologies, Inc. Nanowire structured color filter arrays and fabrication method of the same
US9515218B2 (en) 2008-09-04 2016-12-06 Zena Technologies, Inc. Vertical pillar structured photovoltaic devices with mirrors and optical claddings
US9299866B2 (en) 2010-12-30 2016-03-29 Zena Technologies, Inc. Nanowire array based solar energy harvesting device
US8519379B2 (en) 2009-12-08 2013-08-27 Zena Technologies, Inc. Nanowire structured photodiode with a surrounding epitaxially grown P or N layer
US8546742B2 (en) 2009-06-04 2013-10-01 Zena Technologies, Inc. Array of nanowires in a single cavity with anti-reflective coating on substrate
US8748799B2 (en) 2010-12-14 2014-06-10 Zena Technologies, Inc. Full color single pixel including doublet or quadruplet si nanowires for image sensors
US8791470B2 (en) 2009-10-05 2014-07-29 Zena Technologies, Inc. Nano structured LEDs
US8507840B2 (en) 2010-12-21 2013-08-13 Zena Technologies, Inc. Vertically structured passive pixel arrays and methods for fabricating the same
US8735797B2 (en) 2009-12-08 2014-05-27 Zena Technologies, Inc. Nanowire photo-detector grown on a back-side illuminated image sensor
US8384007B2 (en) 2009-10-07 2013-02-26 Zena Technologies, Inc. Nano wire based passive pixel image sensor
US8835831B2 (en) 2010-06-22 2014-09-16 Zena Technologies, Inc. Polarized light detecting device and fabrication methods of the same
US8229255B2 (en) 2008-09-04 2012-07-24 Zena Technologies, Inc. Optical waveguides in image sensors
US8889455B2 (en) 2009-12-08 2014-11-18 Zena Technologies, Inc. Manufacturing nanowire photo-detector grown on a back-side illuminated image sensor
JP7396272B2 (ja) * 2018-05-18 2023-12-12 Ａｇｃ株式会社 ポリマー光導波路及び複合光導波路
US20230168449A1 (en) * 2020-03-31 2023-06-01 Kyocera Corporation Optical waveguide module and light source module

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JPS61191093A (ja) 1985-02-20 1986-08-25 Matsushita Electric Ind Co Ltd 半導体装置
FR2694841B1 (fr) * 1992-08-14 1994-09-09 Commissariat Energie Atomique Procédé d'hybridation et de positionnement d'un composant opto-électronique et application de ce procédé au positionnement de ce composant par rapport à un guide optique intégré.
JP2606078B2 (ja) 1993-06-25 1997-04-30 日本電気株式会社 半導体レーザアレイおよびその製造方法
JPH0829637A (ja) * 1994-07-20 1996-02-02 Nippon Telegr & Teleph Corp <Ntt> 光導波回路、光ファイバと光導波回路との接続器および接続方法
JPH10308555A (ja) * 1997-05-01 1998-11-17 Nippon Telegr & Teleph Corp <Ntt> ハイブリッド導波形光回路とその製造方法
JP2000047055A (ja) * 1998-07-28 2000-02-18 Japan Aviation Electronics Industry Ltd 光導波路デバイスおよびその製造方法
JP2000098157A (ja) * 1998-09-25 2000-04-07 Japan Aviation Electronics Industry Ltd 光分岐装置およびその製造方法
JP2000275480A (ja) * 1999-03-19 2000-10-06 Nippon Telegr & Teleph Corp <Ntt> 光モジュール
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US6778718B2 (en) * 2001-11-09 2004-08-17 Corning Incorporated Alignment of active optical components with waveguides
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US6816653B2 (en) * 2003-02-25 2004-11-09 Corning Incorporated Passive alignment of optical fibers with optical elements

Also Published As

Publication number Publication date
WO2006129123A1 (en) 2006-12-07
JP5161076B2 (ja) 2013-03-13
EP1886175B1 (de) 2010-04-14
CN101189541A (zh) 2008-05-28
JP2008542832A (ja) 2008-11-27
GB0511300D0 (en) 2005-07-13
WO2006129123A8 (en) 2008-01-24
US7772022B2 (en) 2010-08-10
CN100573211C (zh) 2009-12-23
EP1886175A1 (de) 2008-02-13
US20080311693A1 (en) 2008-12-18
DE602006013619D1 (de) 2010-05-27

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