ATE463673T1 - Gehäuse einer vakuumpumpe - Google Patents

Gehäuse einer vakuumpumpe

Info

Publication number
ATE463673T1
ATE463673T1 AT09156665T AT09156665T ATE463673T1 AT E463673 T1 ATE463673 T1 AT E463673T1 AT 09156665 T AT09156665 T AT 09156665T AT 09156665 T AT09156665 T AT 09156665T AT E463673 T1 ATE463673 T1 AT E463673T1
Authority
AT
Austria
Prior art keywords
ports
vacuum pump
external surface
open
port
Prior art date
Application number
AT09156665T
Other languages
English (en)
Inventor
Nigel Schofield
Stephen Dowdeswell
Peter Hugh Birch
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE463673T1 publication Critical patent/ATE463673T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)
  • Electrophonic Musical Instruments (AREA)
AT09156665T 2006-10-11 2007-10-01 Gehäuse einer vakuumpumpe ATE463673T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0620144.6A GB0620144D0 (en) 2006-10-11 2006-10-11 Vacuum pump

Publications (1)

Publication Number Publication Date
ATE463673T1 true ATE463673T1 (de) 2010-04-15

Family

ID=37491304

Family Applications (2)

Application Number Title Priority Date Filing Date
AT07804498T ATE507370T1 (de) 2006-10-11 2007-10-01 Gehäuse einer vakuumpumpe
AT09156665T ATE463673T1 (de) 2006-10-11 2007-10-01 Gehäuse einer vakuumpumpe

Family Applications Before (1)

Application Number Title Priority Date Filing Date
AT07804498T ATE507370T1 (de) 2006-10-11 2007-10-01 Gehäuse einer vakuumpumpe

Country Status (9)

Country Link
US (1) US8500422B2 (de)
EP (2) EP2074329B1 (de)
JP (1) JP5040040B2 (de)
KR (1) KR101293397B1 (de)
AT (2) ATE507370T1 (de)
DE (2) DE602007005825D1 (de)
GB (1) GB0620144D0 (de)
TW (1) TWI394894B (de)
WO (1) WO2008044064A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump
GB2489248A (en) * 2011-03-22 2012-09-26 Edwards Ltd Vacuum pump with stator joint seals
GB2499217A (en) * 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
GB2500603A (en) * 2012-03-26 2013-10-02 Edwards Ltd Vacuum pump stators and vacuum pumps
DE102014104161A1 (de) * 2014-03-26 2015-10-01 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
CN110594156B (zh) 2019-09-23 2021-05-25 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的驱动结构
CN210629269U (zh) 2019-09-23 2020-05-26 兑通真空技术(上海)有限公司 一种罗茨泵的电机连接传动结构
CN110500275B (zh) 2019-09-23 2021-03-16 兑通真空技术(上海)有限公司 一种三轴多级罗茨泵的泵壳体结构
CN110685912A (zh) 2019-10-10 2020-01-14 兑通真空技术(上海)有限公司 一种多轴多级罗茨泵转子连接的结构
GB2588424B (en) * 2019-10-23 2022-01-26 Edwards Ltd Pump apparatus
FR3106630B1 (fr) * 2020-01-24 2022-01-28 Pfeiffer Vacuum Technology AG Pompe à vide sèche
GB2592030B (en) * 2020-02-12 2022-03-09 Edwards Ltd Multiple stage vacuum pump
GB2608383B (en) * 2021-06-29 2023-12-20 Edwards Ltd Vacuum pump cooler for cooling a pumped fluid in a multistage vacuum pump
GB2623108B (en) * 2022-10-06 2024-10-16 Edwards Ltd Multistage vacuum pump and a stator for a multistage pump

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0733834B2 (ja) * 1986-12-18 1995-04-12 株式会社宇野澤組鐵工所 ロータ内蔵ハウジングの外周温度が安定化された内部分流逆流冷却多段式の三葉式真空ポンプ
FR2642479B1 (fr) * 1989-02-02 1994-03-18 Alcatel Cit Pompe a vide du type roots, multietagee
EP0738833B1 (de) * 1995-04-19 2000-09-20 Ebara Corporation Mehrstufige Verdrängungsvakuumpumpe
US6123526A (en) * 1998-09-18 2000-09-26 Industrial Technology Research Institute Multistage pump and method for assembling the pump
JP2001304115A (ja) * 2000-04-26 2001-10-31 Toyota Industries Corp 真空ポンプにおけるガス供給装置
FR2813104B1 (fr) * 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
JP2002115690A (ja) * 2000-10-12 2002-04-19 Toyota Industries Corp 真空ポンプにおける冷却構造
JP2002213379A (ja) * 2001-01-15 2002-07-31 Toyota Industries Corp スクロール式圧縮機
US7556086B2 (en) * 2001-04-06 2009-07-07 University Of Maryland, College Park Orientation-independent thermosyphon heat spreader
JP3758550B2 (ja) 2001-10-24 2006-03-22 アイシン精機株式会社 多段真空ポンプ
JP3941484B2 (ja) 2001-12-03 2007-07-04 アイシン精機株式会社 多段式真空ポンプ
JP4007130B2 (ja) 2002-09-10 2007-11-14 株式会社豊田自動織機 真空ポンプ
TW200506217A (en) 2003-03-19 2005-02-16 Ebara Corp Positive-displacement vacuum pump
GB0310615D0 (en) * 2003-05-08 2003-06-11 Boc Group Plc Improvements in seal assemblies
JP3991918B2 (ja) * 2003-05-19 2007-10-17 株式会社豊田自動織機 ルーツポンプ
JP2005098210A (ja) 2003-09-25 2005-04-14 Aisin Seiki Co Ltd 多段ドライポンプ
TWI237093B (en) * 2003-10-23 2005-08-01 Ind Tech Res Inst Multi-staged vacuum pump

Also Published As

Publication number Publication date
GB0620144D0 (en) 2006-11-22
TWI394894B (zh) 2013-05-01
EP2071191B1 (de) 2010-04-07
KR20090074030A (ko) 2009-07-03
EP2074329B1 (de) 2011-04-27
ATE507370T1 (de) 2011-05-15
EP2074329A2 (de) 2009-07-01
EP2071191A2 (de) 2009-06-17
WO2008044064A3 (en) 2008-06-26
TW200825284A (en) 2008-06-16
US20100119399A1 (en) 2010-05-13
US8500422B2 (en) 2013-08-06
WO2008044064A2 (en) 2008-04-17
DE602007014238D1 (de) 2011-06-09
KR101293397B1 (ko) 2013-08-05
DE602007005825D1 (de) 2010-05-20
JP5040040B2 (ja) 2012-10-03
JP2010506096A (ja) 2010-02-25
EP2071191A3 (de) 2009-09-23

Similar Documents

Publication Publication Date Title
ATE463673T1 (de) Gehäuse einer vakuumpumpe
US10198046B2 (en) Heat exchange module and serial pump thereof
ATE507394T1 (de) Vakuumpumpe
ATE462081T1 (de) Pumpanordnung
SG152213A1 (en) Multi-port pumping system for substrate processing chambers
WO2009044197A3 (en) A multi stage, clam shell vacuum pump
US20130280062A1 (en) Coupling structure for vacuum exhaust device and vacuum exhaust system
ATE535715T1 (de) Vakuumpumpe
JP2003307192A (ja) 多段ルーツポンプ
ATE427426T1 (de) Vakuumpumpe
SE9900350L (sv) Membranpump
CN113396272A (zh) 多级泵体以及多级气体泵
TW200702482A (en) Trap device
WO2012019604A3 (de) Kolbenmaschine
ATE404793T1 (de) Einstufige flüssigkeitsringvakuumpumpe mit saug- und druckleitungen im zentralen gehäuse integriert.
RU2005113098A (ru) Роторная шиберная машина
EP2108839A3 (de) Servolenkpumpe mit Eingangskanälen mit verbesserten Strömungsmerkmalen und/oder Flüssigkeitskommunikationskanal zum Druckausgleich
CY1111131T1 (el) Μεθοδος και συσκευη για μειωση του θορυβου σε φυσητηρες τυπου roots
ATE373173T1 (de) Doppel- oder mehrfachpumpe
TW202120806A (zh) 液冷式散熱系統及其串聯式泵浦
CN106939885B (zh) 叶片泵装置
ATE530768T1 (de) Pumpe
CN217270715U (zh) 一种散热性好的真空设备
JPWO2021079088A5 (de)
CA2523958A1 (en) Liquid ring pump

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties