FR3106630B1 - Pompe à vide sèche - Google Patents

Pompe à vide sèche Download PDF

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Publication number
FR3106630B1
FR3106630B1 FR2000701A FR2000701A FR3106630B1 FR 3106630 B1 FR3106630 B1 FR 3106630B1 FR 2000701 A FR2000701 A FR 2000701A FR 2000701 A FR2000701 A FR 2000701A FR 3106630 B1 FR3106630 B1 FR 3106630B1
Authority
FR
France
Prior art keywords
vacuum pump
dry vacuum
shells
stator casing
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2000701A
Other languages
English (en)
Other versions
FR3106630A1 (fr
Inventor
Yann Olivier
Thierry Neel
Lucas Rey
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to FR2000701A priority Critical patent/FR3106630B1/fr
Priority to PCT/EP2021/051318 priority patent/WO2021148525A1/fr
Priority to KR1020227025618A priority patent/KR20220127266A/ko
Publication of FR3106630A1 publication Critical patent/FR3106630A1/fr
Application granted granted Critical
Publication of FR3106630B1 publication Critical patent/FR3106630B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/10—Outer members for co-operation with rotary pistons; Casings
    • F01C21/104—Stators; Members defining the outer boundaries of the working chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/086—Carter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/10—Stators
    • F04C2240/102—Stators with means for discharging condensate or liquid separated from the gas pumped
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors

Abstract

Pompe à vide (1) sèche dans laquelle les au moins deux étages de pompage (1a-1f) présentent chacun une entrée (7) et une sortie (8) débouchant d’une demi-coquille (9, 10) respective, le stator (2) comportant en outre une enveloppe de stator (15) entourant les demi-coquilles (9, 10) assemblées, au moins une rainure (20) étant ménagée dans l’enveloppe de stator (15) ou dans une surface externe des demi-coquilles (9, 10) pour former au moins un canal de transfert (21) par l’assemblage de l’enveloppe de stator (15) sur les demi-coquilles (9, 10), le au moins un canal de transfert (21) mettant en communication la sortie (8) d’un étage de pompage (1a-1e) avec l’entrée (7) de l’étage de pompage (1b-1f) qui suit. Figure d’abrégé : Figure 2
FR2000701A 2020-01-24 2020-01-24 Pompe à vide sèche Active FR3106630B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2000701A FR3106630B1 (fr) 2020-01-24 2020-01-24 Pompe à vide sèche
PCT/EP2021/051318 WO2021148525A1 (fr) 2020-01-24 2021-01-21 Pompe à vide sèche
KR1020227025618A KR20220127266A (ko) 2020-01-24 2021-01-21 건식 진공 펌프

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2000701 2020-01-24
FR2000701A FR3106630B1 (fr) 2020-01-24 2020-01-24 Pompe à vide sèche

Publications (2)

Publication Number Publication Date
FR3106630A1 FR3106630A1 (fr) 2021-07-30
FR3106630B1 true FR3106630B1 (fr) 2022-01-28

Family

ID=70008929

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2000701A Active FR3106630B1 (fr) 2020-01-24 2020-01-24 Pompe à vide sèche

Country Status (3)

Country Link
KR (1) KR20220127266A (fr)
FR (1) FR3106630B1 (fr)
WO (1) WO2021148525A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2623108A (en) * 2022-10-06 2024-04-10 Edwards Ltd Multistage vacuum pump and a stator for a multistage pump

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2642479B1 (fr) * 1989-02-02 1994-03-18 Alcatel Cit Pompe a vide du type roots, multietagee
FR2813104B1 (fr) 2000-08-21 2002-11-29 Cit Alcatel Joint etancheite pour pompe a vide
TWI237093B (en) * 2003-10-23 2005-08-01 Ind Tech Res Inst Multi-staged vacuum pump
GB0620144D0 (en) * 2006-10-11 2006-11-22 Boc Group Plc Vacuum pump
GB0719394D0 (en) * 2007-10-04 2007-11-14 Edwards Ltd A multi stage clam shell vacuum pump

Also Published As

Publication number Publication date
KR20220127266A (ko) 2022-09-19
WO2021148525A1 (fr) 2021-07-29
FR3106630A1 (fr) 2021-07-30

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Year of fee payment: 2

PLSC Publication of the preliminary search report

Effective date: 20210730

TP Transmission of property

Owner name: PFEIFFER VACUUM, FR

Effective date: 20211122

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Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4

PLFP Fee payment

Year of fee payment: 5