ATE451621T1 - Resonanter trägheitsmikrosensor variabler dicke, der im bereich der oberflächentechnologien eingesetzt wird - Google Patents

Resonanter trägheitsmikrosensor variabler dicke, der im bereich der oberflächentechnologien eingesetzt wird

Info

Publication number
ATE451621T1
ATE451621T1 AT07104737T AT07104737T ATE451621T1 AT E451621 T1 ATE451621 T1 AT E451621T1 AT 07104737 T AT07104737 T AT 07104737T AT 07104737 T AT07104737 T AT 07104737T AT E451621 T1 ATE451621 T1 AT E451621T1
Authority
AT
Austria
Prior art keywords
mass
field
thickness
variable thickness
thickness used
Prior art date
Application number
AT07104737T
Other languages
English (en)
Inventor
Philippe Robert
Laurent Duraffour
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE451621T1 publication Critical patent/ATE451621T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/5755—Structural details or topology the devices having a single sensing mass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5769—Manufacturing; Mounting; Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
AT07104737T 2006-03-27 2007-03-23 Resonanter trägheitsmikrosensor variabler dicke, der im bereich der oberflächentechnologien eingesetzt wird ATE451621T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0651053A FR2898884B1 (fr) 2006-03-27 2006-03-27 Micro-capteur inertiel resonant a epaisseur variable realise en technologies de surface

Publications (1)

Publication Number Publication Date
ATE451621T1 true ATE451621T1 (de) 2009-12-15

Family

ID=37429311

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07104737T ATE451621T1 (de) 2006-03-27 2007-03-23 Resonanter trägheitsmikrosensor variabler dicke, der im bereich der oberflächentechnologien eingesetzt wird

Country Status (6)

Country Link
US (1) US8783107B2 (de)
EP (1) EP1840582B1 (de)
JP (1) JP5562517B2 (de)
AT (1) ATE451621T1 (de)
DE (1) DE602007003625D1 (de)
FR (1) FR2898884B1 (de)

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DE102007062705A1 (de) * 2007-12-27 2009-07-02 Robert Bosch Gmbh Verfahren zur Steuerung des Energieverbrauchs elektrischer und/oder elektronischer Komponenten und Vorrichtung
US8187902B2 (en) * 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
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FR2941533B1 (fr) * 2009-01-23 2011-03-11 Commissariat Energie Atomique Capteur inertiel ou resonnant en technologie de surface, a detection hors plan par jauge de contrainte.
FR2941534B1 (fr) 2009-01-26 2011-12-23 Commissariat Energie Atomique Capteur de champ magnetique a jauge de contrainte suspendue
FR2951826B1 (fr) * 2009-10-23 2012-06-15 Commissariat Energie Atomique Capteur a detection piezoresistive dans le plan
FR2954505B1 (fr) * 2009-12-22 2012-08-03 Commissariat Energie Atomique Structure micromecanique comportant une partie mobile presentant des butees pour des deplacements hors plan de la structure et son procede de realisation
FR2957414B1 (fr) * 2010-03-15 2012-09-28 Commissariat Energie Atomique Capteur de force a bruit reduit
FR2958030B1 (fr) * 2010-03-23 2012-04-20 Sagem Defense Securite Procede et dispositif de mesure angulaire avec compensation de non linearites
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US9250113B2 (en) 2010-06-21 2016-02-02 The Board Of Trustees Of The University Of Illinois Cell mass measurement and apparatus
FR2963099B1 (fr) 2010-07-22 2013-10-04 Commissariat Energie Atomique Capteur de pression dynamique mems, en particulier pour des applications a la realisation de microphones
FR2963192B1 (fr) 2010-07-22 2013-07-19 Commissariat Energie Atomique Générateur d'impulsions de pression de type mems
FR2965349B1 (fr) 2010-09-23 2017-01-20 Commissariat Energie Atomique Bolometre a detection frequentielle
US8779534B2 (en) 2010-11-04 2014-07-15 Meggitt (Orange County), Inc. Low-G MEMS acceleration switch
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FR3017463B1 (fr) 2014-02-13 2020-11-13 Commissariat Energie Atomique Capteur de concentration de gaz a structure suspendue
JP6044607B2 (ja) * 2014-08-28 2016-12-14 横河電機株式会社 振動式センサ装置
FR3028257A1 (fr) 2014-11-10 2016-05-13 Tronic's Microsystems Procede de fabrication d'un dispositif electromecanique et dispositif correspondant
US9903718B2 (en) * 2015-05-28 2018-02-27 Invensense, Inc. MEMS device mechanical amplitude control
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Also Published As

Publication number Publication date
US8783107B2 (en) 2014-07-22
FR2898884B1 (fr) 2008-05-02
US20070222011A1 (en) 2007-09-27
FR2898884A1 (fr) 2007-09-28
JP5562517B2 (ja) 2014-07-30
DE602007003625D1 (de) 2010-01-21
JP2007316056A (ja) 2007-12-06
EP1840582A1 (de) 2007-10-03
EP1840582B1 (de) 2009-12-09

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