ATE436041T1 - Unter biokompatiblen bedingungen verarbeitbare fotoresists zur erzeugung von biomolekül-mustern - Google Patents
Unter biokompatiblen bedingungen verarbeitbare fotoresists zur erzeugung von biomolekül-musternInfo
- Publication number
- ATE436041T1 ATE436041T1 AT02727805T AT02727805T ATE436041T1 AT E436041 T1 ATE436041 T1 AT E436041T1 AT 02727805 T AT02727805 T AT 02727805T AT 02727805 T AT02727805 T AT 02727805T AT E436041 T1 ATE436041 T1 AT E436041T1
- Authority
- AT
- Austria
- Prior art keywords
- photoresists
- processed under
- biocompatible conditions
- solid substrates
- conditions
- Prior art date
Links
- 229920002120 photoresistant polymer Polymers 0.000 title abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 102000004169 proteins and genes Human genes 0.000 abstract 2
- 108090000623 proteins and genes Proteins 0.000 abstract 2
- 239000007787 solid Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000002253 acid Substances 0.000 abstract 1
- 230000001476 alcoholic effect Effects 0.000 abstract 1
- 229920001577 copolymer Polymers 0.000 abstract 1
- 238000004925 denaturation Methods 0.000 abstract 1
- 230000036425 denaturation Effects 0.000 abstract 1
- 125000004185 ester group Chemical group 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
- G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
- G03F7/0397—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition the macromolecular compound having an alicyclic moiety in a side chain
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/544—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals the carrier being organic
- G01N33/545—Synthetic resin
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/53—Immunoassay; Biospecific binding assay; Materials therefor
- G01N33/543—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals
- G01N33/551—Immunoassay; Biospecific binding assay; Materials therefor with an insoluble carrier for immobilising immunochemicals the carrier being inorganic
- G01N33/552—Glass or silica
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/1053—Imaging affecting physical property or radiation sensitive material, or producing nonplanar or printing surface - process, composition, or product: radiation sensitive composition or product or process of making binder containing
- Y10S430/1055—Radiation sensitive composition or product or process of making
- Y10S430/106—Binder containing
- Y10S430/111—Polymer of unsaturated acid or ester
Landscapes
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Molecular Biology (AREA)
- General Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Hematology (AREA)
- Urology & Nephrology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Food Science & Technology (AREA)
- General Health & Medical Sciences (AREA)
- Cell Biology (AREA)
- Biotechnology (AREA)
- Medicinal Chemistry (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Microbiology (AREA)
- Pathology (AREA)
- Inorganic Chemistry (AREA)
- Peptides Or Proteins (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GR20010100271A GR1004058B (el) | 2001-05-31 | 2001-05-31 | Φωτοπολυμερικα υλικα με βιοσυμβατες λιθογραφικες απαιτησεις καταλληλα για σχηματοποιηση επιστρωσεων πολλαπλων βioμοριων |
PCT/GR2002/000033 WO2002097533A1 (en) | 2001-05-31 | 2002-05-30 | Photoresists processable under biocompatible conditions for multi-biomolecule patterning |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE436041T1 true ATE436041T1 (de) | 2009-07-15 |
Family
ID=10944758
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT02727805T ATE436041T1 (de) | 2001-05-31 | 2002-05-30 | Unter biokompatiblen bedingungen verarbeitbare fotoresists zur erzeugung von biomolekül-mustern |
Country Status (6)
Country | Link |
---|---|
US (1) | US7608389B2 (de) |
EP (1) | EP1395878B1 (de) |
AT (1) | ATE436041T1 (de) |
DE (1) | DE60232878D1 (de) |
GR (1) | GR1004058B (de) |
WO (1) | WO2002097533A1 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004099373A2 (en) * | 2003-05-02 | 2004-11-18 | University Of North Carolina At Charlotte | Biocompatible resists |
GB0513910D0 (en) * | 2005-07-07 | 2005-08-10 | Univ Newcastle | Immobilisation of biological molecules |
WO2009152276A2 (en) | 2008-06-10 | 2009-12-17 | University Of North Carolina At Charlotte | Photoacid generators and lithographic resists comprising the same |
KR101039630B1 (ko) * | 2009-02-18 | 2011-06-08 | 성균관대학교산학협력단 | 기판 상에 나노구조체를 선택적으로 위치시키는 방법 및 이에 의해 형성된 나노구조체를 포함하는 나노-분자 소자 |
WO2011109368A2 (en) * | 2010-03-01 | 2011-09-09 | Cornell University | Patterning of biomaterials using fluorinated materials and fluorinated solvents |
JP6789024B2 (ja) * | 2016-07-22 | 2020-11-25 | 東京応化工業株式会社 | レジスト組成物及びレジストパターン形成方法、並びに、高分子化合物 |
EP3929658A1 (de) | 2020-06-23 | 2021-12-29 | Koninklijke Philips N.V. | Druckverfahren und gemusterte schicht |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4103064A (en) | 1976-01-09 | 1978-07-25 | Dios, Inc. | Microdevice substrate and method for making micropattern devices |
US4103073A (en) | 1976-01-09 | 1978-07-25 | Dios, Inc. | Microsubstrates and method for making micropattern devices |
JPH02309358A (ja) * | 1989-05-24 | 1990-12-25 | Nippon Paint Co Ltd | ポジ型感光性樹脂組成物 |
US5688642A (en) * | 1994-12-01 | 1997-11-18 | The United States Of America As Represented By The Secretary Of The Navy | Selective attachment of nucleic acid molecules to patterned self-assembled surfaces |
JP3457080B2 (ja) * | 1994-12-28 | 2003-10-14 | 株式会社コスモ総合研究所 | 炭化水素油中の芳香族化合物の水素化処理方法 |
US5736257A (en) | 1995-04-25 | 1998-04-07 | Us Navy | Photoactivatable polymers for producing patterned biomolecular assemblies |
DE19546140C2 (de) * | 1995-11-28 | 1998-08-06 | Atotech Deutschland Gmbh | Photoempfindliche Zusammensetzung |
US5876899A (en) * | 1996-09-18 | 1999-03-02 | Shipley Company, L.L.C. | Photoresist compositions |
JPH10219182A (ja) * | 1997-02-06 | 1998-08-18 | Nkk Corp | 耐傷つき性、耐摩耗性及び耐久性に優れた塗料組成物および塗装金属板 |
US5773308A (en) | 1997-02-10 | 1998-06-30 | The United States Of America As Represented By The Secretary Of The Navy | Photoactivatable o-nitrobenzyl polyethylene glycol-silane for the production of patterned biomolecular arrays |
JPH10235788A (ja) * | 1997-02-21 | 1998-09-08 | Sumitomo Metal Ind Ltd | 耐薬品性に優れた塗装金属板 |
GB9715101D0 (en) * | 1997-07-18 | 1997-09-24 | Environmental Sensors Ltd | The production of microstructures for analysis of fluids |
JPH1184125A (ja) * | 1997-09-12 | 1999-03-26 | Tokyo Ohka Kogyo Co Ltd | 色フィルタ用光重合性組成物、および色フィルタの製造方法 |
EP0957399B1 (de) * | 1998-04-24 | 2004-02-18 | Infineon Technologies AG | Strahlungsempfindliches Gemisch und dessen Verwendung |
US6884562B1 (en) * | 1998-10-27 | 2005-04-26 | E. I. Du Pont De Nemours And Company | Photoresists and processes for microlithography |
US6852466B2 (en) * | 1998-12-23 | 2005-02-08 | Shipley Company, L.L.C. | Photoresist compositions particularly suitable for short wavelength imaging |
GR1003421B (el) * | 1999-05-26 | 2000-09-01 | Βιοσυμβατες λιθογραφικες διαδικασιες και υλικα για διαμορφωση σχηματοποιημενων επιστρωσεων βιομοριων | |
JP3672780B2 (ja) * | 1999-11-29 | 2005-07-20 | セントラル硝子株式会社 | ポジ型レジスト組成物およびパターン形成方法 |
-
2001
- 2001-05-31 GR GR20010100271A patent/GR1004058B/el not_active IP Right Cessation
-
2002
- 2002-05-30 EP EP02727805A patent/EP1395878B1/de not_active Expired - Lifetime
- 2002-05-30 AT AT02727805T patent/ATE436041T1/de not_active IP Right Cessation
- 2002-05-30 DE DE60232878T patent/DE60232878D1/de not_active Expired - Fee Related
- 2002-05-30 US US10/479,293 patent/US7608389B2/en not_active Expired - Fee Related
- 2002-05-30 WO PCT/GR2002/000033 patent/WO2002097533A1/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP1395878B1 (de) | 2009-07-08 |
US20050037276A1 (en) | 2005-02-17 |
DE60232878D1 (de) | 2009-08-20 |
US7608389B2 (en) | 2009-10-27 |
EP1395878A1 (de) | 2004-03-10 |
WO2002097533A1 (en) | 2002-12-05 |
GR1004058B (el) | 2002-11-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |