ATE424550T1 - Thermischer detektor mit wabenförmiger struktur für elektromagnetische strahlung - Google Patents

Thermischer detektor mit wabenförmiger struktur für elektromagnetische strahlung

Info

Publication number
ATE424550T1
ATE424550T1 AT04742523T AT04742523T ATE424550T1 AT E424550 T1 ATE424550 T1 AT E424550T1 AT 04742523 T AT04742523 T AT 04742523T AT 04742523 T AT04742523 T AT 04742523T AT E424550 T1 ATE424550 T1 AT E424550T1
Authority
AT
Austria
Prior art keywords
electromagnetic radiation
honeycomb structure
thermal detector
substrate
membrane
Prior art date
Application number
AT04742523T
Other languages
English (en)
Inventor
Jean-Jacques Yon
Jean-Louis Ouvrier-Buffet
Astrid Astier
Michel Vilain
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Application granted granted Critical
Publication of ATE424550T1 publication Critical patent/ATE424550T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0081—Thermal properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/0235—Spacers, e.g. for avoidance of stiction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0278—Temperature sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0111—Bulk micromachining
    • B81C2201/0115—Porous silicon

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
  • Measurement Of Radiation (AREA)
  • Aerials With Secondary Devices (AREA)
AT04742523T 2003-04-24 2004-04-16 Thermischer detektor mit wabenförmiger struktur für elektromagnetische strahlung ATE424550T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0305030A FR2854277B1 (fr) 2003-04-24 2003-04-24 Detecteur thermique de rayonnement electromagnetique a structure alveolee

Publications (1)

Publication Number Publication Date
ATE424550T1 true ATE424550T1 (de) 2009-03-15

Family

ID=33104367

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04742523T ATE424550T1 (de) 2003-04-24 2004-04-16 Thermischer detektor mit wabenförmiger struktur für elektromagnetische strahlung

Country Status (7)

Country Link
US (1) US7244935B2 (de)
EP (1) EP1616159B1 (de)
JP (1) JP2006524323A (de)
AT (1) ATE424550T1 (de)
DE (1) DE602004019772D1 (de)
FR (1) FR2854277B1 (de)
WO (1) WO2004097355A1 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7372115B2 (en) 2005-11-16 2008-05-13 Delphi Technologies, Inc. Thermally isolated membrane structure
JP4710691B2 (ja) * 2006-03-28 2011-06-29 パナソニック電工株式会社 赤外線センサ
CN102918369A (zh) * 2010-05-20 2013-02-06 日本电气株式会社 辐射热计及其制造方法
AT511105B1 (de) * 2011-06-27 2012-09-15 Holcim Technology Ltd Verfahren und vorrichtung zum erfassen von geradheitsabweichungen und/oder verformungen bei einem drehrohrofen
FR3016997B1 (fr) * 2014-01-30 2016-03-04 Commissariat Energie Atomique Detecteur de rayonnement photonique comportant un reseau d'antennes et un support resistif en spirale
US9788459B2 (en) * 2014-03-19 2017-10-10 Aerojet Rocketdyne, Inc. Thermal stand-off with tortuous solid-wall thermal conduction path
FR3087007B1 (fr) * 2018-10-05 2021-03-12 Commissariat Energie Atomique Dispositif de detection pyroelectrique a membrane rigide
CN115574949A (zh) * 2022-10-11 2023-01-06 杭州大立微电子有限公司 红外传感器及其制备方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0630058A3 (de) * 1993-05-19 1995-03-15 Siemens Ag Verfahren zur Herstellung einer Pyrodetektoranordnung durch elektronisches Ätzen eines Silizium Substrats.
JP3269200B2 (ja) * 1993-08-23 2002-03-25 松下電器産業株式会社 焦電型赤外線検出素子及びその製造方法
US5638599A (en) * 1995-03-29 1997-06-17 Texas Instruments Incorporated Method of fabricating hybrid uncooled infrared detectors
JPH0961234A (ja) * 1995-08-28 1997-03-07 Matsushita Electric Works Ltd 赤外線検出素子およびその製造方法
EP0827216B1 (de) * 1996-08-30 2007-01-24 Texas Instruments Incorporated Verbesserungen für thermische Bildsysteme
US5990481A (en) * 1996-08-30 1999-11-23 Raytheon Company Thermal detector with preferentially-ordered thermally sensitive element and method
JPH10185681A (ja) * 1996-11-08 1998-07-14 Mitsuteru Kimura 熱型赤外線センサとその製造方法およびこれを用いた赤外線イメージセンサ
US6144030A (en) 1997-10-28 2000-11-07 Raytheon Company Advanced small pixel high fill factor uncooled focal plane array
JPH11337403A (ja) * 1998-05-22 1999-12-10 Nissan Motor Co Ltd 赤外線検出素子およびその製造方法
WO2000034751A1 (en) * 1998-12-04 2000-06-15 Daewoo Electronics Co., Ltd. Infrared bolometer and method for manufacturing same
JP2000186958A (ja) * 1998-12-24 2000-07-04 Sharp Corp 熱型赤外線検出素子
JP3523588B2 (ja) * 1999-11-01 2004-04-26 松下電器産業株式会社 半導体装置およびその製造方法
DE10046621B4 (de) * 2000-09-20 2010-08-05 Robert Bosch Gmbh Verfahren zur Herstellung eines Membransensor-Arrays sowie Membransensor-Array
GR1004040B (el) * 2001-07-31 2002-10-31 Μεθοδος για την κατασκευη αιωρουμενων μεμβρανων πορωδους πυριτιου και εφαρμογης της σε αισθητηρες αεριων

Also Published As

Publication number Publication date
JP2006524323A (ja) 2006-10-26
FR2854277A1 (fr) 2004-10-29
EP1616159B1 (de) 2009-03-04
US7244935B2 (en) 2007-07-17
DE602004019772D1 (de) 2009-04-16
US20060273256A1 (en) 2006-12-07
WO2004097355A1 (fr) 2004-11-11
EP1616159A1 (de) 2006-01-18
FR2854277B1 (fr) 2005-08-05

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