ATE421081T1 - Messung von wellenlängen-änderungen - Google Patents

Messung von wellenlängen-änderungen

Info

Publication number
ATE421081T1
ATE421081T1 AT01926237T AT01926237T ATE421081T1 AT E421081 T1 ATE421081 T1 AT E421081T1 AT 01926237 T AT01926237 T AT 01926237T AT 01926237 T AT01926237 T AT 01926237T AT E421081 T1 ATE421081 T1 AT E421081T1
Authority
AT
Austria
Prior art keywords
signals
wavelength
detector
diffracted
selection means
Prior art date
Application number
AT01926237T
Other languages
English (en)
Inventor
Lun Cheng
Original Assignee
Tno
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tno filed Critical Tno
Application granted granted Critical
Publication of ATE421081T1 publication Critical patent/ATE421081T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0264—Electrical interface; User interface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0294—Multi-channel spectroscopy
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/14—Generating the spectrum; Monochromators using refracting elements, e.g. prisms

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Laser Surgery Devices (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Surgical Instruments (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Lasers (AREA)
AT01926237T 2000-05-01 2001-05-01 Messung von wellenlängen-änderungen ATE421081T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/NL2000/000281 WO2001084098A1 (en) 2000-05-01 2000-05-01 Method and means of measuring wavelength change

Publications (1)

Publication Number Publication Date
ATE421081T1 true ATE421081T1 (de) 2009-01-15

Family

ID=19760685

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01926237T ATE421081T1 (de) 2000-05-01 2001-05-01 Messung von wellenlängen-änderungen

Country Status (7)

Country Link
US (1) US7061609B2 (de)
EP (1) EP1903320A1 (de)
JP (1) JP5259036B2 (de)
AT (1) ATE421081T1 (de)
DE (1) DE60137415D1 (de)
DK (1) DK1279010T3 (de)
WO (1) WO2001084098A1 (de)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100451611C (zh) * 2005-10-21 2009-01-14 中国科学院上海光学精密机械研究所 快速测量光谱的分光光度计
JP2007139514A (ja) * 2005-11-16 2007-06-07 Yokogawa Electric Corp Ｗｄｍ信号モニタ
JP2007205784A (ja) * 2006-01-31 2007-08-16 Yokogawa Electric Corp 光スペクトラムアナライザ
US20080100839A1 (en) * 2006-10-31 2008-05-01 Fouquet Julie E Method and system for measuring light propagating at multiple wavelengths
EP2073000A1 (de) 2007-12-20 2009-06-24 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Beschichteter Wellenleiter zur optischen Erkennung
EP2075549A1 (de) 2007-12-28 2009-07-01 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Formgedächtnis-Sensor
EP2202548A1 (de) 2008-12-23 2010-06-30 Nederlandse Organisatie voor Toegepast-Natuurwetenschappelijk Onderzoek TNO Verteilter optisch-chemischer Sensor
EP2500314A1 (de) 2011-03-14 2012-09-19 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Photonischer Kristallsensor
NL2008353A (nl) * 2011-03-30 2012-10-02 Asml Netherlands Bv Lithographic apparatus and method.
EP3149432B1 (de) 2014-05-28 2019-02-20 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO Optischer faser-bragg-gittersensor mit nanoporöser beschichtung
EP3247983A1 (de) * 2015-01-23 2017-11-29 Rigaku Raman Technologies, Inc. System und verfahren zur minimierung von geordnetem festmusterrauschen in spektrometern
US11536605B2 (en) 2020-09-18 2022-12-27 Apple Inc. Electronic devices with an alignment-free spectrometer

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US3578837A (en) * 1969-04-01 1971-05-18 Trw Inc Double-diffuser holographic system
JPS6167528U (de) * 1984-10-05 1986-05-09
CA1229897A (en) * 1984-12-03 1987-12-01 Gilbert M. Levy Optics system for emission spectrometer
US4669880A (en) 1985-02-21 1987-06-02 The Perkin-Elmer Corporation Apparatus for converting the wavelength resolution of a spectrophotometer
DE3686184T2 (de) * 1985-03-21 1993-02-25 Abbott Lab Spektralfotometer.
JPS63115730U (de) * 1987-01-21 1988-07-26
JPS6435325A (en) * 1987-07-31 1989-02-06 Shimadzu Corp Spectral sensor
US4932779A (en) * 1989-01-05 1990-06-12 Byk Gardner, Inc. Color measuring instrument with integrating sphere
US5055684A (en) * 1989-12-06 1991-10-08 Nirsystems Incorporated System to reduce wave shift error in spectrophotometer caused by hot spots in the light source
JPH04140619A (ja) * 1990-09-29 1992-05-14 Shimadzu Corp 分光器
JP3067880B2 (ja) * 1991-01-12 2000-07-24 キヤノン株式会社 回折格子を有する光検出装置
US5523879A (en) * 1991-04-26 1996-06-04 Fuji Xerox Co., Ltd. Optical link amplifier and a wavelength multiplex laser oscillator
DE9313632U1 (de) * 1993-09-09 1993-12-23 Franzke, Michael, Dipl.-Chem., 06126 Halle Diodenarrayspektrometer für Unterrichtszwecke
JP3230565B2 (ja) * 1996-02-07 2001-11-19 横河電機株式会社 光スペクトラムアナライザ
US5933235A (en) * 1995-03-15 1999-08-03 Yokogawa Electric Corporation Optical spectrum analyzer and spectrometer
JPH08292098A (ja) * 1995-04-24 1996-11-05 Advantest Corp 光スペクトラムアナライザ
JP3451526B2 (ja) * 1996-10-25 2003-09-29 オムロン株式会社 光学式センサ装置
NO307357B1 (no) * 1997-02-14 2000-03-20 Optoplan As Anordning for maling av optiske bolgelengder
JP3512974B2 (ja) * 1997-03-07 2004-03-31 サンテック株式会社 レーザ光源の波長モニタ装置
US5796479A (en) * 1997-03-27 1998-08-18 Hewlett-Packard Company Signal monitoring apparatus for wavelength division multiplexed optical telecommunication networks
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Also Published As

Publication number Publication date
US20030156287A1 (en) 2003-08-21
JP2003532102A (ja) 2003-10-28
DE60137415D1 (de) 2009-03-05
EP1903320A1 (de) 2008-03-26
DK1279010T3 (da) 2009-04-27
US7061609B2 (en) 2006-06-13
JP5259036B2 (ja) 2013-08-07
WO2001084098A1 (en) 2001-11-08

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