ATE419509T1 - Verfahren und system zur höhentriangulationsmessung - Google Patents

Verfahren und system zur höhentriangulationsmessung

Info

Publication number
ATE419509T1
ATE419509T1 AT05735069T AT05735069T ATE419509T1 AT E419509 T1 ATE419509 T1 AT E419509T1 AT 05735069 T AT05735069 T AT 05735069T AT 05735069 T AT05735069 T AT 05735069T AT E419509 T1 ATE419509 T1 AT E419509T1
Authority
AT
Austria
Prior art keywords
height
light strip
numerical aperture
trangulation
measurement
Prior art date
Application number
AT05735069T
Other languages
English (en)
Inventor
Meir Ben-Levi
Original Assignee
Camtek Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Ltd filed Critical Camtek Ltd
Application granted granted Critical
Publication of ATE419509T1 publication Critical patent/ATE419509T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
  • Measuring Fluid Pressure (AREA)
AT05735069T 2004-05-03 2005-05-01 Verfahren und system zur höhentriangulationsmessung ATE419509T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL161745A IL161745A (en) 2004-05-03 2004-05-03 A symmetrical configuration for triangulation measurement, especially for object height measurement

Publications (1)

Publication Number Publication Date
ATE419509T1 true ATE419509T1 (de) 2009-01-15

Family

ID=35242096

Family Applications (1)

Application Number Title Priority Date Filing Date
AT05735069T ATE419509T1 (de) 2004-05-03 2005-05-01 Verfahren und system zur höhentriangulationsmessung

Country Status (8)

Country Link
US (1) US8363229B2 (de)
EP (1) EP1756513B1 (de)
JP (1) JP2007536553A (de)
AT (1) ATE419509T1 (de)
CA (1) CA2563907A1 (de)
DE (1) DE602005012091D1 (de)
IL (1) IL161745A (de)
WO (1) WO2005104658A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20090091157A (ko) * 2006-12-07 2009-08-26 에섹 에스에이 높이 차이를 측정하기 위한 방법 및 장치
EP2191788A1 (de) * 2008-11-29 2010-06-02 Braun Gmbh Verfahren und Vorrichtung zur dreidimensionalen Messung eines Zahnmodells
JP5882011B2 (ja) * 2011-10-03 2016-03-09 ソフトワークス株式会社 尖端バンプの高さ測定装置
TWI509265B (zh) * 2012-04-18 2015-11-21 Chipmos Technologies Inc 垂直式探針卡及應用其之檢測模組
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
CN105387807A (zh) * 2014-09-04 2016-03-09 富泰华工业（深圳）有限公司 测量物体高度的系统及方法
US11959961B2 (en) 2022-04-08 2024-04-16 Orbotech Ltd. Method of determining an X and Y location of a surface particle

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3187185A (en) * 1960-12-22 1965-06-01 United States Steel Corp Apparatus for determining surface contour
JP2507370B2 (ja) * 1986-12-02 1996-06-12 株式会社東芝 試料面位置測定装置
JPS63262513A (ja) * 1987-04-20 1988-10-28 Fujitsu Ltd パタ−ン検査装置
US5028799A (en) * 1988-08-01 1991-07-02 Robotic Vision System, Inc. Method and apparatus for three dimensional object surface determination using co-planar data from multiple sensors
JPH0255936A (ja) * 1988-08-19 1990-02-26 Nippon Kagaku Kogyo Kk 光散乱式計測装置
US5181424A (en) * 1991-04-18 1993-01-26 International Paper Company Tear-strip testing apparatus
JPH0758172B2 (ja) * 1992-05-01 1995-06-21 工業技術院長 形状測定方法およびその装置
US5818061A (en) * 1992-06-24 1998-10-06 Robotic Vision Systems, Inc. Apparatus and method for obtaining three-dimensional data from objects in a contiguous array
JPH0949709A (ja) * 1995-08-09 1997-02-18 Hitachi Ltd 部品の傾き・高さ測定方法及びそれを用いた検査装置
JP3335826B2 (ja) * 1995-12-05 2002-10-21 株式会社日立製作所 はんだバンプの測定装置
JP3942252B2 (ja) 1997-12-19 2007-07-11 Ｊｕｋｉ株式会社 ３次元測定装置
JP2001289614A (ja) * 2000-01-31 2001-10-19 Omron Corp 変位センサ
US6975410B1 (en) * 2002-04-15 2005-12-13 Sturgill Dennis T Measuring device
US7145654B2 (en) * 2003-10-01 2006-12-05 Tokyo Electron Limited Method and apparatus to reduce spotsize in an optical metrology instrument

Also Published As

Publication number Publication date
IL161745A (en) 2014-07-31
EP1756513A2 (de) 2007-02-28
DE602005012091D1 (de) 2009-02-12
WO2005104658A2 (en) 2005-11-10
US20100220340A1 (en) 2010-09-02
EP1756513A4 (de) 2007-05-02
EP1756513B1 (de) 2008-12-31
CA2563907A1 (en) 2005-11-10
IL161745A0 (en) 2005-11-20
US8363229B2 (en) 2013-01-29
JP2007536553A (ja) 2007-12-13
WO2005104658A3 (en) 2006-04-06

Similar Documents

Publication Publication Date Title
ATE419509T1 (de) Verfahren und system zur höhentriangulationsmessung
ES2540262T3 (es) Sistema de medición tridimensional y método de re-escalado que utilizan un GPS de interior
ATE459858T1 (de) Vermessungsinstrument und verfahren zur bereitstellung von vermessungsdaten mithilfe des vermessungsinstruments
EP1580523A4 (de) Verfahren zur dreidimensionalen formmessung und einrichtungdafür
ATE497146T1 (de) Verfahren und anordnung zur abbildung von entfernungssensordaten auf bildsensordaten
WO2007110862A3 (en) Device, system and method for determining compliance with a positioning instruction by a figure in an image
DE502007003867D1 (de) Verfahren und System zur Kalibrierung einer Vorrichtung zur Formmessung einer spiegelnden Oberfläche
DE602005023292D1 (de) Verfahren und system zur messung der geschwindigkeit einer blutströmung
WO2011029740A3 (de) Vorrichtungen und verfahren zur positionsbestimmung und oberflächenvermessung
TW200622475A (en) Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus
WO2009046218A3 (en) Combined object capturing system and display device and associated method
ATE474419T1 (de) Kamera und verfahren in einer kamera
ATE532033T1 (de) Verfahren und vorrichtung zur bestimmung der aktualposition eines geodätischen instrumentes
SG158187A1 (en) Lithographic apparatus with multiple alignment arrangements and alignment measurement method
TW200632583A (en) A method for measuring information about a substrate, and a substrate for use in a lithographic apparatus
MX351039B (es) Procedimiento dinámico y dispositivo para medición de la luminancia y retrorreflexión de las marcas viales y del balizamiento y obtención de la forma, posición y dimensiones de las mismas.
ATE497175T1 (de) VERWENDUNG VON ßGEOMETRIC DILUTION OF PRECISIONß (GDOP) ZUR WAHL DER BESTEN EMPFÄNGERGRUPPE IN EINEM MULTILATERATIONSSYSTEM
DE602005021026D1 (de) Vorrichtung zur absoluten Distanzmessung durch chromatische Fokussierung
DE112004001005D2 (de) Vorrichtung zur Bestimmung der Fehlsichtigkeit eines optischen Systems
DE602006004625D1 (de) System und Verfahren zur Bewusstseinsbestimmung
BR0317394A (pt) Uso de nicotinamida n-metiltransferase como um marcador para câncer colorretal
FR2905455B1 (fr) Procede de detection de l'orientation et de la position d'un objet dans l'espace.
DE60221529D1 (de) System und verfahren zur messung der relativen position eines objektes bezüglich eines bezugspunktes
HK1136873A1 (en) Use of nnmt as a marker for lung cancer
DE502005000026D1 (de) Vorrichtung zur Ausrichtung eines optischen Sensors

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties