ATE402275T1 - Cvd-diamantbeschichtetes verbundsubstrat und herstellungsverfahren dafür - Google Patents
Cvd-diamantbeschichtetes verbundsubstrat und herstellungsverfahren dafürInfo
- Publication number
- ATE402275T1 ATE402275T1 AT04779199T AT04779199T ATE402275T1 AT E402275 T1 ATE402275 T1 AT E402275T1 AT 04779199 T AT04779199 T AT 04779199T AT 04779199 T AT04779199 T AT 04779199T AT E402275 T1 ATE402275 T1 AT E402275T1
- Authority
- AT
- Austria
- Prior art keywords
- composite
- cvd diamond
- composite substrate
- production method
- applications
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/34—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member
- F16J15/3496—Sealings between relatively-moving surfaces with slip-ring pressed against a more or less radial face on one member use of special materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0018—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for by electrolytic deposition
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5001—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with carbon or carbonisable materials
- C04B41/5002—Diamond
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/271—Diamond only using hot filaments
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Structural Engineering (AREA)
- General Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Ceramic Products (AREA)
- Chemical Vapour Deposition (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/627,931 US20050025973A1 (en) | 2003-07-25 | 2003-07-25 | CVD diamond-coated composite substrate containing a carbide-forming material and ceramic phases and method for making same |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE402275T1 true ATE402275T1 (de) | 2008-08-15 |
Family
ID=34103298
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT04779199T ATE402275T1 (de) | 2003-07-25 | 2004-07-26 | Cvd-diamantbeschichtetes verbundsubstrat und herstellungsverfahren dafür |
Country Status (7)
Country | Link |
---|---|
US (2) | US20050025973A1 (de) |
EP (1) | EP1649075B1 (de) |
AT (1) | ATE402275T1 (de) |
DE (1) | DE602004015294D1 (de) |
MY (1) | MY141135A (de) |
TW (1) | TWI377265B (de) |
WO (1) | WO2005012592A2 (de) |
Families Citing this family (87)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7173334B2 (en) * | 2002-10-11 | 2007-02-06 | Chien-Min Sung | Diamond composite heat spreader and associated methods |
AU2003284065A1 (en) * | 2002-10-11 | 2005-05-05 | Chien-Min Sung | Carbonaceous heat spreader and associated methods |
US20060113546A1 (en) * | 2002-10-11 | 2006-06-01 | Chien-Min Sung | Diamond composite heat spreaders having low thermal mismatch stress and associated methods |
WO2005084163A2 (en) * | 2003-08-08 | 2005-09-15 | University Of Delaware | Method for creating flip-chip conductive polymer bumps using photolithography and polishing |
US7253104B2 (en) * | 2003-12-01 | 2007-08-07 | Micron Technology, Inc. | Methods of forming particle-containing materials |
JP2006088315A (ja) * | 2004-08-24 | 2006-04-06 | Shapton Kk | 砥石修正器、砥石の製造方法および砥石修正器、砥石 |
KR100636793B1 (ko) * | 2004-12-13 | 2006-10-23 | 이화다이아몬드공업 주식회사 | Cmp 패드용 컨디셔너 |
US20060237236A1 (en) * | 2005-04-26 | 2006-10-26 | Harold Sreshta | Composite structure having a non-planar interface and method of making same |
US7819149B2 (en) * | 2005-06-03 | 2010-10-26 | Metso Paper, Inc. | Method and apparatus for mechanical defibration of wood |
KR20130086057A (ko) * | 2005-09-16 | 2013-07-30 | 크리 인코포레이티드 | 실리콘 카바이드 전력 소자들을 그 상에 가지는 반도체 웨이퍼들의 가공방법들 |
US20070232074A1 (en) * | 2006-03-31 | 2007-10-04 | Kramadhati Ravi | Techniques for the synthesis of dense, high-quality diamond films using a dual seeding approach |
GB0612788D0 (en) * | 2006-06-28 | 2006-08-09 | Insectshield Ltd | Pest control materials |
DE102006032455A1 (de) * | 2006-07-13 | 2008-04-10 | Siltronic Ag | Verfahren zum gleichzeitigen beidseitigen Schleifen mehrerer Halbleiterscheiben sowie Halbleierscheibe mit hervorragender Ebenheit |
US20080271384A1 (en) * | 2006-09-22 | 2008-11-06 | Saint-Gobain Ceramics & Plastics, Inc. | Conditioning tools and techniques for chemical mechanical planarization |
US20080119011A1 (en) * | 2006-11-20 | 2008-05-22 | Industrial Technology Research Institute | Method of film coating and device manufactured thereby |
US7934978B2 (en) * | 2007-05-10 | 2011-05-03 | 1339513 Ontario Ltd. | Ice skate blade sharpening machine |
US8277284B2 (en) | 2007-05-10 | 2012-10-02 | 1339513 Ontario Ltd. | Ice skate blade sharpening machines and associated method of dressing a grinding wheel |
US8056907B2 (en) * | 2008-05-02 | 2011-11-15 | 1339513 Ontario Ltd. | Ice skate blades |
US7791188B2 (en) * | 2007-06-18 | 2010-09-07 | Chien-Min Sung | Heat spreader having single layer of diamond particles and associated methods |
CN102825547A (zh) | 2007-08-23 | 2012-12-19 | 圣戈班磨料磨具有限公司 | 用于下一代氧化物/金属cmp的优化的cmp修整器设计 |
EP2056004A1 (de) * | 2007-10-29 | 2009-05-06 | General Electric Company | Mechanische Dichtungen und Herstellungsverfahren dafür |
DE102007063517B3 (de) * | 2007-12-21 | 2009-01-22 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung von Bauteilen mit einer Verschleißschutzbeschichtung, ein so hergestelltes Bauteil sowie dessen Verwendung |
KR20100133415A (ko) * | 2008-03-10 | 2010-12-21 | 모간 어드밴스드 세라믹스, 인코포레이티드 | 비평면 cvd 다이아몬드 코팅된 cmp pad 컨디셔너 및 제조 방법 |
JP2009302136A (ja) * | 2008-06-10 | 2009-12-24 | Panasonic Corp | 半導体集積回路 |
SG158775A1 (en) * | 2008-07-28 | 2010-02-26 | Kinik Co | Grinding tool and method for fabricating the same |
USD688343S1 (en) | 2009-03-12 | 2013-08-20 | 1339513 Ontario Ltd. | Flat bottom vee ice skate blade |
SG174351A1 (en) | 2009-03-24 | 2011-10-28 | Saint Gobain Abrasives Inc | Abrasive tool for use as a chemical mechanical planarization pad conditioner |
US20110159784A1 (en) * | 2009-04-30 | 2011-06-30 | First Principles LLC | Abrasive article with array of gimballed abrasive members and method of use |
US9221148B2 (en) | 2009-04-30 | 2015-12-29 | Rdc Holdings, Llc | Method and apparatus for processing sliders for disk drives, and to various processing media for the same |
US8801497B2 (en) * | 2009-04-30 | 2014-08-12 | Rdc Holdings, Llc | Array of abrasive members with resilient support |
WO2010141464A2 (en) * | 2009-06-02 | 2010-12-09 | Saint-Gobain Abrasives, Inc. | Corrosion-resistant cmp conditioning tools and methods for making and using same |
US20100330890A1 (en) | 2009-06-30 | 2010-12-30 | Zine-Eddine Boutaghou | Polishing pad with array of fluidized gimballed abrasive members |
US8079428B2 (en) | 2009-07-02 | 2011-12-20 | Baker Hughes Incorporated | Hardfacing materials including PCD particles, welding rods and earth-boring tools including such materials, and methods of forming and using same |
CH701596B1 (de) * | 2009-08-11 | 2013-08-15 | Meister Abrasives Ag | Abrichtwerkzeug. |
SG178605A1 (en) | 2009-09-01 | 2012-04-27 | Saint Gobain Abrasives Inc | Chemical mechanical polishing conditioner |
KR101091030B1 (ko) * | 2010-04-08 | 2011-12-09 | 이화다이아몬드공업 주식회사 | 감소된 마찰력을 갖는 패드 컨디셔너 제조방법 |
SA111320374B1 (ar) | 2010-04-14 | 2015-08-10 | بيكر هوغيس انكوبوريتد | طريقة تشكيل الماسة متعدد البلورات من الماس المستخرج بحجم النانو |
US8911522B2 (en) * | 2010-07-06 | 2014-12-16 | Baker Hughes Incorporated | Methods of forming inserts and earth-boring tools |
DE102010038324B4 (de) * | 2010-07-23 | 2012-03-22 | Hilti Aktiengesellschaft | Vorrichtung zum Positionieren von Schneidpartikeln |
KR101161015B1 (ko) * | 2010-09-10 | 2012-07-02 | 신한다이아몬드공업 주식회사 | Cmp 패드 컨디셔너 및 그 제조방법 |
US9006086B2 (en) | 2010-09-21 | 2015-04-14 | Chien-Min Sung | Stress regulated semiconductor devices and associated methods |
US8778784B2 (en) | 2010-09-21 | 2014-07-15 | Ritedia Corporation | Stress regulated semiconductor devices and associated methods |
CN103221180A (zh) | 2010-09-21 | 2013-07-24 | 铼钻科技股份有限公司 | 具有基本平坦颗粒尖端的超研磨工具及其相关方法 |
TW201219131A (en) * | 2010-11-04 | 2012-05-16 | Ritedia Corp | comprising multiple stacked and bonded composite bodies each of which is formed by using a metal substrate to enclose a single layer of planar arrangement of diamond particles |
TW201246342A (en) * | 2010-12-13 | 2012-11-16 | Saint Gobain Abrasives Inc | Chemical mechanical planarization (CMP) pad conditioner and method of making |
DE102010054875B4 (de) * | 2010-12-17 | 2012-10-31 | Eagleburgmann Germany Gmbh & Co. Kg | Reibungsarmer Gleitring mit kostengünstiger Diamantbeschichtung |
EP2684211B1 (de) | 2011-03-07 | 2017-01-18 | Entegris, Inc. | Aufbereitungsvorrichtung für ein chemisch-mechanisches planarisierungskissen |
US8574728B2 (en) | 2011-03-15 | 2013-11-05 | Kennametal Inc. | Aluminum oxynitride coated article and method of making the same |
USD665830S1 (en) | 2011-03-28 | 2012-08-21 | 1339513 Ontario Ltd. | Multiple spinner carousel for dressing a grinding wheel |
CN102758188A (zh) * | 2011-04-28 | 2012-10-31 | 鸿富锦精密工业(深圳)有限公司 | 镀膜件及其制造方法 |
WO2013045596A2 (en) * | 2011-09-29 | 2013-04-04 | The Morgan Crucible Company Plc | Inorganic materials, methods and apparatus for making same, and uses thereof |
CN104285001A (zh) | 2012-02-29 | 2015-01-14 | 六号元素技术美国公司 | 金刚石载氮化镓晶片以及制造设备和制造方法 |
US9254548B2 (en) * | 2012-04-25 | 2016-02-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of forming diamond conditioners for CMP process |
KR102168330B1 (ko) * | 2012-05-04 | 2020-10-22 | 엔테그리스, 아이엔씨. | 초연마 그리트 개선을 갖는 cmp 컨디셔너 패드 |
US9956664B2 (en) | 2012-08-02 | 2018-05-01 | 3M Innovative Properties Company | Abrasive element precursor with precisely shaped features and methods of making thereof |
CN104736299A (zh) | 2012-08-02 | 2015-06-24 | 3M创新有限公司 | 具有精确成形特征部的研磨制品及其制造方法 |
GB201222395D0 (en) * | 2012-12-12 | 2013-01-23 | Element Six Ltd | Microwave plasma CVD synthetic diamond growth on non-planar and/or non-refractory substrates |
US9017809B2 (en) | 2013-01-25 | 2015-04-28 | Kennametal Inc. | Coatings for cutting tools |
US9138864B2 (en) | 2013-01-25 | 2015-09-22 | Kennametal Inc. | Green colored refractory coatings for cutting tools |
US9140072B2 (en) | 2013-02-28 | 2015-09-22 | Baker Hughes Incorporated | Cutting elements including non-planar interfaces, earth-boring tools including such cutting elements, and methods of forming cutting elements |
SG11201509933QA (en) | 2013-06-06 | 2016-01-28 | Advanced Tech Materials | Compositions and methods for selectively etching titanium nitride |
US9427808B2 (en) | 2013-08-30 | 2016-08-30 | Kennametal Inc. | Refractory coatings for cutting tools |
US9469918B2 (en) * | 2014-01-24 | 2016-10-18 | Ii-Vi Incorporated | Substrate including a diamond layer and a composite layer of diamond and silicon carbide, and, optionally, silicon |
WO2015112540A1 (en) | 2014-01-24 | 2015-07-30 | 3M Innovative Properties Company | Abrasive material having a structured surface |
KR102618488B1 (ko) | 2014-11-23 | 2023-12-27 | 엠 큐브드 테크놀로지스 | 웨이퍼 핀 척 제조 및 수리 |
US10066443B2 (en) | 2014-12-22 | 2018-09-04 | Haliburton Energy Services, Inc. | Chemically strengthened bond between thermally stable polycrystalline hard materials and braze material |
US10695872B2 (en) * | 2015-03-11 | 2020-06-30 | Lockheed Martin Corporation | Heat spreaders fabricated from metal nanoparticles |
CN105479318B (zh) * | 2015-11-25 | 2018-05-18 | 赣州澳克泰工具技术有限公司 | 硬质合金涂层刀具的后处理方法和硬质合金涂层刀具 |
US10584412B2 (en) | 2016-03-08 | 2020-03-10 | Ii-Vi Delaware, Inc. | Substrate comprising a layer of silicon and a layer of diamond having an optically finished (or a dense) silicon-diamond interface |
JP2018032745A (ja) * | 2016-08-24 | 2018-03-01 | 東芝メモリ株式会社 | ドレッサー、ドレッサーの製造方法、及び半導体装置の製造方法 |
EP3415797A1 (de) | 2017-06-12 | 2018-12-19 | Huhnseal AB | Dynamische mechanische versiegelungsanordnung |
KR20190036941A (ko) * | 2017-09-28 | 2019-04-05 | 삼성전자주식회사 | 화학적 기계적 연마 방법 및 반도체 장치의 제조 방법 |
CN108396308B (zh) * | 2018-05-03 | 2023-06-09 | 广东鼎泰高科精工科技有限公司 | 一种具有多个热丝装置的cvd金刚石涂层设备 |
US20190351527A1 (en) * | 2018-05-17 | 2019-11-21 | Entegris, Inc. | Conditioner for chemical-mechanical-planarization pad and related methods |
EP3843946A1 (de) * | 2018-08-31 | 2021-07-07 | Best Engineered Surface Technologies, LLC | Hybrider cmp-konditionierungskopf |
CN109731389B (zh) * | 2019-02-20 | 2023-11-03 | 佛山市芯耀环保科技有限公司 | 一种滤芯结构及净水设备 |
CN110465897B (zh) * | 2019-08-13 | 2021-08-24 | 江苏师范大学 | 一种用于加工氧化碲晶体的磨砂盘的制作方法 |
GB2590511B (en) * | 2019-11-20 | 2023-10-25 | Best Engineered Surface Tech Llc | Hybrid CMP conditioning head |
CN111203800B (zh) * | 2020-02-20 | 2021-11-05 | 长江存储科技有限责任公司 | 研磨垫修整器及化学机械研磨设备 |
US12054439B2 (en) * | 2020-04-28 | 2024-08-06 | Ii-Vi Delaware, Inc. | Ceramic substrate with reaction-bonded silicon carbide having diamond particles |
CN111745555B (zh) * | 2020-06-08 | 2022-04-26 | 3M材料技术(合肥)有限公司 | 研磨工具制造系统以及研磨工具制造方法 |
CN111941300B (zh) * | 2020-08-14 | 2021-11-19 | 长沙理工大学 | 晶体定向磨料有序排布的金刚石砂轮制备方法 |
CN112538612B (zh) * | 2020-11-19 | 2024-02-27 | 贵州大学 | 一种涂层微结构化仿生表面金刚石刀具的加工方法 |
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CN113182938B (zh) * | 2021-03-01 | 2023-02-03 | 燕山大学 | 金刚石复相材料表面的加工方法 |
CN114921768B (zh) * | 2022-05-27 | 2023-09-12 | 厦门微思纳涂层技术有限公司 | 一种α-SiC与金刚石共聚合的涂层制作方法 |
CN115302375B (zh) * | 2022-06-29 | 2024-03-22 | 郑州磨料磨具磨削研究所有限公司 | 一种金刚石晶圆片的高效高精复合加工装备及方法 |
Family Cites Families (56)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US334041A (en) * | 1886-01-12 | Method of operating explosive vapor engines | ||
US2277520A (en) * | 1936-03-02 | 1942-03-24 | Carborundum Co | Method of making coated abrasives |
US2201195A (en) * | 1939-09-22 | 1940-05-21 | Carborundum Co | Granular coated material |
US3334041A (en) * | 1964-08-28 | 1967-08-01 | Norton Co | Coated abrasives |
US4486200A (en) * | 1980-09-15 | 1984-12-04 | Minnesota Mining And Manufacturing Company | Method of making an abrasive article comprising abrasive agglomerates supported in a fibrous matrix |
EP0081775B1 (de) | 1981-12-16 | 1986-04-09 | General Electric Company | Nitriertes überhartes Verbundmaterial |
US4698070A (en) * | 1981-12-16 | 1987-10-06 | General Electric Company | Cutting insert for interrupted heavy machining |
CH669138A5 (de) * | 1982-11-22 | 1989-02-28 | Schweizer Schmirgel Schleif | Schleifmittel auf dehnbarer und flexibler unterlage. |
US4576612A (en) * | 1984-06-01 | 1986-03-18 | Ferro Corporation | Fixed ophthalmic lens polishing pad |
SE442305B (sv) * | 1984-06-27 | 1985-12-16 | Santrade Ltd | Forfarande for kemisk gasutfellning (cvd) for framstellning av en diamantbelagd sammansatt kropp samt anvendning av kroppen |
US5125822A (en) * | 1986-11-07 | 1992-06-30 | Gas Research Institute | Apparatus for the production of ceramic articles |
US4991362A (en) * | 1988-09-13 | 1991-02-12 | Minnesota Mining And Manufacturing Company | Hand scouring pad |
US5272009A (en) * | 1988-10-21 | 1993-12-21 | Battelle Memorial Institute | Laminate material and its use as heat-sink |
US4992082A (en) * | 1989-01-12 | 1991-02-12 | Ford Motor Company | Method of toughening diamond coated tools |
US4990403A (en) * | 1989-01-20 | 1991-02-05 | Idemitsu Petrochemical Company Limited | Diamond coated sintered body |
CA2034483C (en) * | 1989-06-15 | 2001-04-24 | Toshimichi Ito | Diamond-coated member |
US5206083A (en) * | 1989-09-18 | 1993-04-27 | Cornell Research Foundation, Inc. | Diamond and diamond-like films and coatings prepared by deposition on substrate that contain a dispersion of diamond particles |
US5126206A (en) * | 1990-03-20 | 1992-06-30 | Diamonex, Incorporated | Diamond-on-a-substrate for electronic applications |
EP0454114B1 (de) | 1990-04-27 | 1994-07-27 | Sumitomo Electric Industries, Ltd. | Bohrer mit gesintertem diamantbeschichtetem Körper |
US5376444A (en) * | 1990-07-27 | 1994-12-27 | Grotepass; Wilhelm P. | Diamond coated wear resistant tools |
US5186973A (en) * | 1990-09-13 | 1993-02-16 | Diamonex, Incorporated | HFCVD method for producing thick, adherent and coherent polycrystalline diamonds films |
EP0552190B1 (de) * | 1990-10-09 | 1996-12-18 | Minnesota Mining And Manufacturing Company | Erodierbare agglomerate enthaltendes beschichtetes schleifmittel |
CA2081631A1 (en) * | 1991-10-30 | 1993-05-01 | Cornelius Phaal | Tool insert |
US5445887A (en) * | 1991-12-27 | 1995-08-29 | Casti; Thomas E. | Diamond coated microcomposite sintered body |
US5435815A (en) * | 1992-06-30 | 1995-07-25 | Sumitomo Electric Industries, Ltd. | Cutting tool employing vapor-deposited polycrystalline diamond for cutting edge and method of manufacturing the same |
SE503038C2 (sv) * | 1993-07-09 | 1996-03-11 | Sandvik Ab | Diamantbelagt skärande verktyg av hårdmetall eller keramik |
FR2712285B1 (fr) * | 1993-11-12 | 1995-12-22 | Lorraine Carbone | Traitement de surface de matériau carbone pour rendre adhérent un dépôt ultérieur de diamant et pièces revêtues de diamant obtenues. |
US5485804A (en) * | 1994-05-17 | 1996-01-23 | University Of Florida | Enhanced chemical vapor deposition of diamond and related materials |
US5536202A (en) * | 1994-07-27 | 1996-07-16 | Texas Instruments Incorporated | Semiconductor substrate conditioning head having a plurality of geometries formed in a surface thereof for pad conditioning during chemical-mechanical polish |
US5551959A (en) * | 1994-08-24 | 1996-09-03 | Minnesota Mining And Manufacturing Company | Abrasive article having a diamond-like coating layer and method for making same |
US5665201A (en) * | 1995-06-06 | 1997-09-09 | Advanced Micro Devices, Inc. | High removal rate chemical-mechanical polishing |
US5688557A (en) * | 1995-06-07 | 1997-11-18 | Lemelson; Jerome H. | Method of depositing synthetic diamond coatings with intermediates bonding layers |
US5958794A (en) * | 1995-09-22 | 1999-09-28 | Minnesota Mining And Manufacturing Company | Method of modifying an exposed surface of a semiconductor wafer |
US5833753A (en) * | 1995-12-20 | 1998-11-10 | Sp 3, Inc. | Reactor having an array of heating filaments and a filament force regulator |
US5643669A (en) * | 1996-02-08 | 1997-07-01 | Minnesota Mining And Manufacturing Company | Curable water-based coating compositions and cured products thereof |
US5737841A (en) * | 1996-07-12 | 1998-04-14 | Mchenry; William J. | Pocket knife with lock |
US6194317B1 (en) * | 1998-04-30 | 2001-02-27 | 3M Innovative Properties Company | Method of planarizing the upper surface of a semiconductor wafer |
US5921856A (en) * | 1997-07-10 | 1999-07-13 | Sp3, Inc. | CVD diamond coated substrate for polishing pad conditioning head and method for making same |
US6054183A (en) * | 1997-07-10 | 2000-04-25 | Zimmer; Jerry W. | Method for making CVD diamond coated substrate for polishing pad conditioning head |
US6267867B1 (en) * | 1998-05-26 | 2001-07-31 | Saint-Gobain Industrial Ceramics, Inc. | Composite article with adherent CVD diamond coating and method of making |
US6591504B2 (en) * | 2001-07-12 | 2003-07-15 | Kat U.S.A. Ltd. | Folding knife with safety lock |
TW467802B (en) * | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
US6560873B1 (en) * | 1999-11-12 | 2003-05-13 | Mel Wayne Ortner | Automatic safety knife |
FR2807689B1 (fr) * | 2000-04-12 | 2002-06-28 | Marc Gerard Seraphin | Couteau pliant |
US6594906B1 (en) * | 2001-01-10 | 2003-07-22 | Buck Knives, Inc. | Knife with integral gated attachment |
US6618947B1 (en) * | 2001-02-27 | 2003-09-16 | Imperial Schrade Corp. | Spring for knife |
US6632127B1 (en) * | 2001-03-07 | 2003-10-14 | Jerry W. Zimmer | Fixed abrasive planarization pad conditioner incorporating chemical vapor deposited polycrystalline diamond and method for making same |
US6675484B2 (en) * | 2001-07-30 | 2004-01-13 | Mentor Group Llc | Folding tool locking mechanism |
US6684510B1 (en) * | 2001-11-19 | 2004-02-03 | Walter W. Collins | Self locking folding knife |
TW545356U (en) * | 2002-01-31 | 2003-08-01 | Kantas Products Co Ltd | Structure for folding knife |
USD474095S1 (en) * | 2002-05-03 | 2003-05-06 | L. Hans Luquire | Combination snap hook and knife |
US7086157B2 (en) * | 2002-07-31 | 2006-08-08 | The Great American Tool Company Inc. | Folding knife having a biased blade |
USD484770S1 (en) * | 2002-08-07 | 2004-01-06 | Kai U.S.A., Ltd. | Carabiner knife |
US6848184B2 (en) * | 2002-10-08 | 2005-02-01 | Kantas Products Co., Ltd. | Single blade foldable knife |
US20040078981A1 (en) * | 2002-10-23 | 2004-04-29 | Kantas Products Co., Ltd. | Foldable knife having a single blade |
USD480492S1 (en) * | 2002-10-28 | 2003-10-07 | Webb Business Promotions, Incorporated | Flashlight with flat edge integral clip |
-
2003
- 2003-07-25 US US10/627,931 patent/US20050025973A1/en not_active Abandoned
-
2004
- 2004-07-23 MY MYPI20042969A patent/MY141135A/en unknown
- 2004-07-23 TW TW093122205A patent/TWI377265B/zh not_active IP Right Cessation
- 2004-07-26 AT AT04779199T patent/ATE402275T1/de active
- 2004-07-26 DE DE602004015294T patent/DE602004015294D1/de not_active Expired - Lifetime
- 2004-07-26 EP EP04779199A patent/EP1649075B1/de not_active Expired - Lifetime
- 2004-07-26 WO PCT/US2004/024025 patent/WO2005012592A2/en active Search and Examination
-
2005
- 2005-06-24 US US11/165,873 patent/US7367875B2/en not_active Expired - Lifetime
Also Published As
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US20050276979A1 (en) | 2005-12-15 |
WO2005012592A2 (en) | 2005-02-10 |
TWI377265B (en) | 2012-11-21 |
WO2005012592A3 (en) | 2005-05-26 |
US7367875B2 (en) | 2008-05-06 |
EP1649075B1 (de) | 2008-07-23 |
TW200510562A (en) | 2005-03-16 |
EP1649075A2 (de) | 2006-04-26 |
MY141135A (en) | 2010-03-15 |
DE602004015294D1 (de) | 2008-09-04 |
US20050025973A1 (en) | 2005-02-03 |
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