ATE365441T1 - Vorrichtung und verfahren zur bildung eines plasmas - Google Patents

Vorrichtung und verfahren zur bildung eines plasmas

Info

Publication number
ATE365441T1
ATE365441T1 AT04727950T AT04727950T ATE365441T1 AT E365441 T1 ATE365441 T1 AT E365441T1 AT 04727950 T AT04727950 T AT 04727950T AT 04727950 T AT04727950 T AT 04727950T AT E365441 T1 ATE365441 T1 AT E365441T1
Authority
AT
Austria
Prior art keywords
plasma
gas stream
effluent gas
electromagnetic radiation
glow discharge
Prior art date
Application number
AT04727950T
Other languages
English (en)
Inventor
Andrew Seeley
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Application granted granted Critical
Publication of ATE365441T1 publication Critical patent/ATE365441T1/de

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/4697—Generating plasma using glow discharges
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
    • H05H1/461—Microwave discharges
    • H05H1/463—Microwave discharges using antennas or applicators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/30—Capture or disposal of greenhouse gases of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Treating Waste Gases (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
AT04727950T 2003-04-30 2004-04-16 Vorrichtung und verfahren zur bildung eines plasmas ATE365441T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0309932.2A GB0309932D0 (en) 2003-04-30 2003-04-30 Apparatus and method for forming a plasma

Publications (1)

Publication Number Publication Date
ATE365441T1 true ATE365441T1 (de) 2007-07-15

Family

ID=9957343

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04727950T ATE365441T1 (de) 2003-04-30 2004-04-16 Vorrichtung und verfahren zur bildung eines plasmas

Country Status (11)

Country Link
US (1) US8685332B2 (de)
EP (2) EP1618767B1 (de)
JP (1) JP5039381B2 (de)
KR (2) KR101107819B1 (de)
CN (1) CN100417308C (de)
AT (1) ATE365441T1 (de)
DE (1) DE602004007126T2 (de)
GB (1) GB0309932D0 (de)
SG (1) SG181176A1 (de)
TW (1) TWI400010B (de)
WO (1) WO2004098246A1 (de)

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GB0516695D0 (en) 2005-08-15 2005-09-21 Boc Group Plc Microwave plasma reactor
GB0521830D0 (en) 2005-10-26 2005-12-07 Boc Group Plc Plasma reactor
GB0522088D0 (en) * 2005-10-28 2005-12-07 Boc Group Plc Plasma abatement device
US7410593B2 (en) * 2006-02-22 2008-08-12 Macronix International Co., Ltd. Plasma etching methods using nitrogen memory species for sustaining glow discharge
RU2418978C2 (ru) * 2006-09-20 2011-05-20 Имэджиниринг, Инк. Устройство зажигания, двигатель внутреннего сгорания, свеча зажигания, плазменное оборудование, устройство для разложения отработавшего газа, озонообразующее/стерилизующее/дезинфицирующее устройство и устройство для устранения запахов
WO2009008519A1 (ja) * 2007-07-12 2009-01-15 Imagineering, Inc. ガス処理装置、ガス処理システム及びガス処理方法、並びにそれを用いた排気ガス処理システム及び内燃機関
KR100910875B1 (ko) * 2008-03-21 2009-08-06 한국기계연구원 플라즈마 스크러버
JP6082879B2 (ja) * 2011-07-16 2017-02-22 イマジニアリング株式会社 プラズマ生成装置、及び内燃機関
EP2743497A4 (de) * 2011-08-10 2016-07-27 Imagineering Inc Verbrennungsmotor
KR101136166B1 (ko) * 2011-11-07 2012-04-17 주식회사 네패스 플라즈마 토치 장치 및 플라즈마 토치를 이용한 소각 설비
US9144858B2 (en) * 2011-11-18 2015-09-29 Recarbon Inc. Plasma generating system having movable electrodes
KR101398854B1 (ko) * 2012-10-05 2014-05-27 한국기계연구원 코로나 방전 점화를 위한 저전류 유지 회로 구조 및 코로나 방전 점화장치
KR101458592B1 (ko) * 2013-05-21 2014-11-07 주식회사 메디플 제작 편의성 및 기계적 구조상의 안정성이 향상된 소형 마이크로파 플라즈마 발생기
KR101450807B1 (ko) * 2013-08-05 2014-10-15 주식회사 에너콘스테크 불활성가스 분해용 아크플라즈마 반응기
US9345121B2 (en) * 2014-03-28 2016-05-17 Agilent Technologies, Inc. Waveguide-based apparatus for exciting and sustaining a plasma
US10978277B2 (en) * 2015-05-11 2021-04-13 Nova Plasma Ltd. Apparatus and method for handling an implant
US9767992B1 (en) * 2017-02-09 2017-09-19 Lyten, Inc. Microwave chemical processing reactor
TWI669149B (zh) * 2017-07-20 2019-08-21 岳盟企業股份有限公司 Exhaust gas recombination power generation system and radio frequency plasma recombination device
CN117373964B (zh) * 2023-12-05 2024-03-12 天津吉兆源科技有限公司 一种用于微波远程等离子体源自动点火装置

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US4282267A (en) * 1979-09-20 1981-08-04 Western Electric Co., Inc. Methods and apparatus for generating plasmas
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JPH084071B2 (ja) * 1985-12-28 1996-01-17 キヤノン株式会社 堆積膜形成法
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Also Published As

Publication number Publication date
WO2004098246A1 (en) 2004-11-11
KR101107819B1 (ko) 2012-01-31
US8685332B2 (en) 2014-04-01
SG181176A1 (en) 2012-06-28
US20060232214A1 (en) 2006-10-19
CN1781345A (zh) 2006-05-31
GB0309932D0 (en) 2003-06-04
EP1786245A2 (de) 2007-05-16
DE602004007126T2 (de) 2008-02-21
CN100417308C (zh) 2008-09-03
EP1618767B1 (de) 2007-06-20
EP1786245A3 (de) 2010-06-23
KR101107832B1 (ko) 2012-01-31
EP1786245B1 (de) 2011-07-27
JP5039381B2 (ja) 2012-10-03
TW200507700A (en) 2005-02-16
KR20060008924A (ko) 2006-01-27
KR20110027855A (ko) 2011-03-16
DE602004007126D1 (de) 2007-08-02
JP2006525111A (ja) 2006-11-09
EP1618767A1 (de) 2006-01-25
TWI400010B (zh) 2013-06-21

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