ATE307976T1 - Microbearbeitete fluidische vorrichtung und herstellungsverfahren - Google Patents

Microbearbeitete fluidische vorrichtung und herstellungsverfahren

Info

Publication number
ATE307976T1
ATE307976T1 AT01951621T AT01951621T ATE307976T1 AT E307976 T1 ATE307976 T1 AT E307976T1 AT 01951621 T AT01951621 T AT 01951621T AT 01951621 T AT01951621 T AT 01951621T AT E307976 T1 ATE307976 T1 AT E307976T1
Authority
AT
Austria
Prior art keywords
wafer
silicon layer
cavity
moving member
layer
Prior art date
Application number
AT01951621T
Other languages
English (en)
Inventor
Lintel Harald T Van
Didier Maillefer
Stephan Gamper
Original Assignee
Debiotech Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Debiotech Sa filed Critical Debiotech Sa
Application granted granted Critical
Publication of ATE307976T1 publication Critical patent/ATE307976T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/14—Infusion devices, e.g. infusing by gravity; Blood infusion; Accessories therefor
    • A61M5/142—Pressure infusion, e.g. using pumps
    • A61M5/14244—Pressure infusion, e.g. using pumps adapted to be carried by the patient, e.g. portable on the body

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Measuring Fluid Pressure (AREA)
  • Check Valves (AREA)
  • External Artificial Organs (AREA)
  • Micromachines (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Measuring Volume Flow (AREA)
AT01951621T 2000-05-25 2001-05-25 Microbearbeitete fluidische vorrichtung und herstellungsverfahren ATE307976T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0006669 2000-05-25
PCT/EP2001/007032 WO2001090577A1 (fr) 2000-05-25 2001-05-25 Dispositif fluidique micro-usine et son procede de fabrication

Publications (1)

Publication Number Publication Date
ATE307976T1 true ATE307976T1 (de) 2005-11-15

Family

ID=8850593

Family Applications (1)

Application Number Title Priority Date Filing Date
AT01951621T ATE307976T1 (de) 2000-05-25 2001-05-25 Microbearbeitete fluidische vorrichtung und herstellungsverfahren

Country Status (9)

Country Link
US (2) US7005078B2 (de)
EP (1) EP1283957B1 (de)
JP (1) JP4776139B2 (de)
CN (1) CN1324238C (de)
AT (1) ATE307976T1 (de)
AU (2) AU2001272500B2 (de)
CA (1) CA2410306C (de)
DE (1) DE60114411T2 (de)
WO (1) WO2001090577A1 (de)

Families Citing this family (139)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7347360B2 (en) 2003-12-10 2008-03-25 American Express Travel Related Services Company, Inc. Foldable transaction card systems for non-traditionally-sized transaction cards
FR2839712A1 (fr) * 2002-05-14 2003-11-21 Westonbridge Internat Ltd Dispositif micromecanique, en particulier fluidique, et son procede de fabrication, organe de controle d'entree de liquide et/ou organe de detection de pression de liquide et/ou micropompe formant un tel dispositif micromecanique
US7867193B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
US20050160858A1 (en) * 2002-07-24 2005-07-28 M 2 Medical A/S Shape memory alloy actuator
CN1681544A (zh) 2002-07-24 2005-10-12 M2医药有限公司 一种输液泵系统、输液泵组件及输液泵
US20040021741A1 (en) * 2002-07-30 2004-02-05 Ottenheimer Thomas H. Slotted substrate and method of making
WO2004041330A2 (en) * 2002-11-05 2004-05-21 M 2 Medical A/S A disposable wearable insulin dispensing device, a combination of such a device and a programming controller and a method of controlling the operation of such a device
AU2003293507A1 (en) * 2002-12-11 2004-06-30 American Express Travel Related Services Company, Inc. Foldable transaction card systems
EP1583571B1 (de) 2002-12-23 2008-02-13 M2 Medical A/S Medizinische Vorrichtung zur Abgabe von Insulin
JP2006511262A (ja) * 2002-12-23 2006-04-06 エム２・メディカル・アクティーゼルスカブ 可撓性ピストンロッド
DE10321099A1 (de) * 2003-05-09 2004-11-25 Cgs Sensortechnik Gmbh Vorrichtung zur Druckmessung
DE10334240A1 (de) * 2003-07-28 2005-02-24 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Bauteils vorzugsweise für fluidische Anwendungen und Mikropumpe mit einer Pumpmembran aus einer Polysiliciumschicht
US7753879B2 (en) * 2004-01-29 2010-07-13 M2 Group Holdings, Inc. Disposable medicine dispensing device
US7867194B2 (en) 2004-01-29 2011-01-11 The Charles Stark Draper Laboratory, Inc. Drug delivery apparatus
WO2005124918A2 (en) 2004-06-14 2005-12-29 Massachusetts Institute Of Technology Electrochemical actuating methods, devices and structures
US7994686B2 (en) * 2004-06-14 2011-08-09 Massachusetts Institute Of Technology Electrochemical methods, devices, and structures
US8247946B2 (en) 2004-06-14 2012-08-21 Massachusetts Institute Of Technology Electrochemical actuator
US7872396B2 (en) * 2004-06-14 2011-01-18 Massachusetts Institute Of Technology Electrochemical actuator
US7999435B2 (en) * 2004-06-14 2011-08-16 Massachusetts Institute Of Technology Electrochemical actuator
US7731678B2 (en) 2004-10-13 2010-06-08 Hyprotek, Inc. Syringe devices and methods for mixing and administering medication
WO2006056967A1 (fr) * 2004-11-29 2006-06-01 Debiotech Sa Dispositif microfluidique mecanique, le procede de fabrication d'un empilement intermediaire et de ce dispositif microfluidique, et une micropompe.
FR2881222A1 (fr) 2005-01-25 2006-07-28 Debiotech Sa Procede de mesure de volume par profilometrie optique de surface dans un dispositif micromecanique et ensemble destine a une telle mesure
DE202006020986U1 (de) * 2005-04-06 2011-08-05 Asante Solutions, Inc. Ein Stellglied
US8551046B2 (en) 2006-09-18 2013-10-08 Asante Solutions, Inc. Dispensing fluid from an infusion pump system
US8409142B2 (en) 2005-09-26 2013-04-02 Asante Solutions, Inc. Operating an infusion pump system
US8057436B2 (en) 2005-09-26 2011-11-15 Asante Solutions, Inc. Dispensing fluid from an infusion pump system
US7534226B2 (en) * 2005-09-26 2009-05-19 M2 Group Holdings, Inc. Dispensing fluid from an infusion pump system
US8105279B2 (en) 2005-09-26 2012-01-31 M2 Group Holdings, Inc. Dispensing fluid from an infusion pump system
EP2162168B1 (de) 2005-09-26 2018-11-07 Bigfoot Biomedical, Inc. Modulare infusionspumpe mit zwei verschiedenen energiequellen
US8475408B2 (en) * 2005-11-08 2013-07-02 Asante Solutions, Inc. Infusion pump system
WO2007056592A2 (en) 2005-11-08 2007-05-18 M2 Medical A/S Method and system for manual and autonomous control of an infusion pump
CN101365503B (zh) * 2005-11-09 2012-02-29 海浦德科公司 注射器设备、注射器设备的部件和形成部件和注射器设备的方法
US7798954B2 (en) 2006-01-04 2010-09-21 Allergan, Inc. Hydraulic gastric band with collapsible reservoir
US8043206B2 (en) 2006-01-04 2011-10-25 Allergan, Inc. Self-regulating gastric band with pressure data processing
US7516661B2 (en) * 2006-02-23 2009-04-14 Honeywell International Inc. Z offset MEMS device
EP1839695A1 (de) 2006-03-31 2007-10-03 Debiotech S.A. Vorrichtung zur Injektion einer medizinischen Flüssigkeit
FR2900400B1 (fr) * 2006-04-28 2008-11-07 Tronic S Microsystems Sa Procede collectif de fabrication de membranes et de cavites de faible volume et de haute precision
WO2008008845A2 (en) * 2006-07-11 2008-01-17 Microchips, Inc. Multi-reservoir pump device for dialysis, biosensing, or delivery of substances
FR2905429A1 (fr) 2006-09-04 2008-03-07 Debiotech Sa Dispositif de delivrance d'un liquide comportant une pompe et une valve
US8202267B2 (en) * 2006-10-10 2012-06-19 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US20080161754A1 (en) * 2006-12-29 2008-07-03 Medsolve Technologies, Inc. Method and apparatus for infusing liquid to a body
US8168140B2 (en) * 2007-01-31 2012-05-01 Agilent Technologies, Inc. Microfluidic apparatuses with nanochannels
US9046192B2 (en) 2007-01-31 2015-06-02 The Charles Stark Draper Laboratory, Inc. Membrane-based fluid control in microfluidic devices
US7892199B2 (en) 2007-05-21 2011-02-22 Asante Solutions, Inc. Occlusion sensing for an infusion pump
US7833196B2 (en) 2007-05-21 2010-11-16 Asante Solutions, Inc. Illumination instrument for an infusion pump
US7794426B2 (en) * 2007-05-21 2010-09-14 Asante Solutions, Inc. Infusion pump system with contamination-resistant features
US7981102B2 (en) 2007-05-21 2011-07-19 Asante Solutions, Inc. Removable controller for an infusion pump
JP2010534530A (ja) * 2007-07-26 2010-11-11 エントラ ファーマシューティカルズ，インコーポレイテッド 薬物を供給するためのシステム及び方法
US7828528B2 (en) * 2007-09-06 2010-11-09 Asante Solutions, Inc. Occlusion sensing system for infusion pumps
US7717903B2 (en) 2007-09-06 2010-05-18 M2 Group Holdings, Inc. Operating an infusion pump system
US8287514B2 (en) 2007-09-07 2012-10-16 Asante Solutions, Inc. Power management techniques for an infusion pump system
US7935105B2 (en) 2007-09-07 2011-05-03 Asante Solutions, Inc. Data storage for an infusion pump system
US7935076B2 (en) 2007-09-07 2011-05-03 Asante Solutions, Inc. Activity sensing techniques for an infusion pump system
US7879026B2 (en) 2007-09-07 2011-02-01 Asante Solutions, Inc. Controlled adjustment of medicine dispensation from an infusion pump device
DE102007045637A1 (de) * 2007-09-25 2009-04-02 Robert Bosch Gmbh Mikrodosiervorrichtung zum Dosieren von Kleinstmengen eines Mediums
US7934912B2 (en) * 2007-09-27 2011-05-03 Curlin Medical Inc Peristaltic pump assembly with cassette and mounting pin arrangement
US8083503B2 (en) * 2007-09-27 2011-12-27 Curlin Medical Inc. Peristaltic pump assembly and regulator therefor
US8062008B2 (en) * 2007-09-27 2011-11-22 Curlin Medical Inc. Peristaltic pump and removable cassette therefor
US8002737B2 (en) * 2007-10-04 2011-08-23 Hyprotek, Inc. Mixing/administration syringe devices, protective packaging and methods of protecting syringe handlers
US9522097B2 (en) 2007-10-04 2016-12-20 Hyprotek, Inc. Mixing/administration syringe devices, protective packaging and methods of protecting syringe handlers
DE102008003792A1 (de) * 2008-01-10 2009-07-16 Robert Bosch Gmbh Verfahren zum Herstellen einer Mikropumpe sowie Mikropumpe
US8708961B2 (en) * 2008-01-28 2014-04-29 Medsolve Technologies, Inc. Apparatus for infusing liquid to a body
CA2727001A1 (en) 2008-06-11 2009-12-17 Allergan, Inc. Implantable pump system
US7959598B2 (en) 2008-08-20 2011-06-14 Asante Solutions, Inc. Infusion pump systems and methods
CN102165193B (zh) * 2008-09-29 2014-07-16 株式会社村田制作所 压电泵
US8317677B2 (en) 2008-10-06 2012-11-27 Allergan, Inc. Mechanical gastric band with cushions
WO2010046728A1 (en) 2008-10-22 2010-04-29 Debiotech S.A. Mems fluid pump with integrated pressure sensor for dysfunction detection
US20100185049A1 (en) 2008-10-22 2010-07-22 Allergan, Inc. Dome and screw valves for remotely adjustable gastric banding systems
US8678993B2 (en) 2010-02-12 2014-03-25 Apollo Endosurgery, Inc. Remotely adjustable gastric banding system
US8758221B2 (en) 2010-02-24 2014-06-24 Apollo Endosurgery, Inc. Source reservoir with potential energy for remotely adjustable gastric banding system
US8764624B2 (en) * 2010-02-25 2014-07-01 Apollo Endosurgery, Inc. Inductively powered remotely adjustable gastric banding system
US20110223253A1 (en) * 2010-03-15 2011-09-15 Artimplant Ab Physically stabilized biodegradable osteochondral implant and methods for its manufacture and implantation
US20110270025A1 (en) 2010-04-30 2011-11-03 Allergan, Inc. Remotely powered remotely adjustable gastric band system
US8337457B2 (en) 2010-05-05 2012-12-25 Springleaf Therapeutics, Inc. Systems and methods for delivering a therapeutic agent
KR101153613B1 (ko) * 2010-05-25 2012-06-18 삼성전기주식회사 마이크로 이젝터 및 그 제조방법
USD669165S1 (en) 2010-05-27 2012-10-16 Asante Solutions, Inc. Infusion pump
US9226840B2 (en) 2010-06-03 2016-01-05 Apollo Endosurgery, Inc. Magnetically coupled implantable pump system and method
US8517915B2 (en) 2010-06-10 2013-08-27 Allergan, Inc. Remotely adjustable gastric banding system
DE102010030504A1 (de) 2010-06-24 2011-12-29 HSG-IMIT-Institut für Mikro- und Informationstechnologie Quellstoffaktor mit elektrisch angetriebener fluidischer Transportvorrichtung
US9211207B2 (en) 2010-08-18 2015-12-15 Apollo Endosurgery, Inc. Power regulated implant
US8698373B2 (en) 2010-08-18 2014-04-15 Apollo Endosurgery, Inc. Pare piezo power with energy recovery
US8932031B2 (en) 2010-11-03 2015-01-13 Xylem Ip Holdings Llc Modular diaphragm pumping system
US8961393B2 (en) 2010-11-15 2015-02-24 Apollo Endosurgery, Inc. Gastric band devices and drive systems
WO2012083174A2 (en) 2010-12-17 2012-06-21 Massachusetts Institute Of Technology Electrochemical actuators
EP2469089A1 (de) 2010-12-23 2012-06-27 Debiotech S.A. Elektronisches Steuerungsverfahren und System für eine piezoelektrische Pumpe
EP2670456B1 (de) 2011-02-02 2019-12-18 The Charles Stark Draper Laboratory, Inc. Vorrichtung zur wirkstofffreisetzung
US8852152B2 (en) 2011-02-09 2014-10-07 Asante Solutions, Inc. Infusion pump systems and methods
US8454581B2 (en) 2011-03-16 2013-06-04 Asante Solutions, Inc. Infusion pump systems and methods
US8585657B2 (en) 2011-06-21 2013-11-19 Asante Solutions, Inc. Dispensing fluid from an infusion pump system
EP2551523A1 (de) 2011-07-29 2013-01-30 Debiotech S.A. Verfahren und Vorrichtung zur Betätigung einer präzisen MEMS-Mikropumpe mit niedrigem Verbrauch
US8808230B2 (en) 2011-09-07 2014-08-19 Asante Solutions, Inc. Occlusion detection for an infusion pump system
EP2758096A4 (de) 2011-09-21 2015-07-01 Bayer Medical Care Inc System und verfahren für kontinuierliche mehrfachflüssigkeitsausgabe
US8454557B1 (en) 2012-07-19 2013-06-04 Asante Solutions, Inc. Infusion pump system and method
US8454562B1 (en) 2012-07-20 2013-06-04 Asante Solutions, Inc. Infusion pump system and method
KR101452050B1 (ko) * 2012-11-12 2014-10-21 삼성전기주식회사 마이크로 펌프
US9427523B2 (en) 2012-12-10 2016-08-30 Bigfoot Biomedical, Inc. Infusion pump system and method
US20140276536A1 (en) 2013-03-14 2014-09-18 Asante Solutions, Inc. Infusion Pump System and Methods
KR20140081570A (ko) * 2012-12-21 2014-07-01 삼성전기주식회사 마이크로 펌프
US9446186B2 (en) 2013-03-01 2016-09-20 Bigfoot Biomedical, Inc. Operating an infusion pump system
EP2964986A1 (de) 2013-03-07 2016-01-13 Debiotech S.A. Mikrofluidisches ventil mit verbesserter partikeltoleranz
KR20140118542A (ko) * 2013-03-29 2014-10-08 삼성전기주식회사 마이크로 펌프
US9446187B2 (en) 2013-06-03 2016-09-20 Bigfoot Biomedical, Inc. Infusion pump system and method
US9457141B2 (en) 2013-06-03 2016-10-04 Bigfoot Biomedical, Inc. Infusion pump system and method
US9561324B2 (en) 2013-07-19 2017-02-07 Bigfoot Biomedical, Inc. Infusion pump system and method
WO2015022176A1 (en) * 2013-08-12 2015-02-19 Koninklijke Philips N.V. Microfluidic device with valve
US10292424B2 (en) 2013-10-31 2019-05-21 Rai Strategic Holdings, Inc. Aerosol delivery device including a pressure-based aerosol delivery mechanism
US10569015B2 (en) 2013-12-02 2020-02-25 Bigfoot Biomedical, Inc. Infusion pump system and method
JP6081962B2 (ja) * 2014-06-20 2017-02-15 デビオテック ソシエテ アノニム 医療用ポンプ装置
US9629901B2 (en) 2014-07-01 2017-04-25 Bigfoot Biomedical, Inc. Glucagon administration system and methods
US10137246B2 (en) 2014-08-06 2018-11-27 Bigfoot Biomedical, Inc. Infusion pump assembly and method
EP3185931A1 (de) 2014-08-26 2017-07-05 Debiotech S.A. Erkennung einer infusionsanomalie
US9919096B2 (en) 2014-08-26 2018-03-20 Bigfoot Biomedical, Inc. Infusion pump system and method
US20170216523A1 (en) 2014-10-17 2017-08-03 Debiotech S.A. Secure Bolus-Control System
RU2714926C2 (ru) 2015-01-09 2020-02-21 БАЙЕР ХелсКер ЛЛСи Многофлюидная система доставки с многоразовым расходным комплектом и ее конструкционные особенности
CN104728492A (zh) * 2015-01-27 2015-06-24 东南大学 一种微型被动流量调节阀及其制作工艺
WO2016171660A1 (en) 2015-04-20 2016-10-27 Hewlett-Packard Development Company, L.P. Pump having freely movable member
US10684662B2 (en) 2015-04-20 2020-06-16 Hewlett-Packard Development Company, L.P. Electronic device having a coolant
WO2016171659A1 (en) 2015-04-20 2016-10-27 Hewlett-Packard Development Company, L.P. Pump having freely movable member
US9878097B2 (en) 2015-04-29 2018-01-30 Bigfoot Biomedical, Inc. Operating an infusion pump system
ITUB20151781A1 (it) * 2015-07-02 2017-01-02 Milano Politecnico Micropompa con attuazione elettrostatica
US10449294B1 (en) 2016-01-05 2019-10-22 Bigfoot Biomedical, Inc. Operating an infusion pump system
CN108472440B (zh) 2016-01-05 2021-11-09 比格福特生物医药公司 操作多模式药物输送系统
WO2017123703A2 (en) 2016-01-14 2017-07-20 Bigfoot Biomedical, Inc. Occlusion resolution in medication delivery devices, systems, and methods
CN107131333B (zh) * 2016-02-29 2020-05-22 博世汽车柴油系统有限公司 高压泵及其溢流组件
USD809134S1 (en) 2016-03-10 2018-01-30 Bigfoot Biomedical, Inc. Infusion pump assembly
EP4386533A3 (de) 2016-09-27 2024-08-07 Bigfoot Biomedical, Inc. Personalisierung vorgegebener mahlzeitgrössen in insulinabgabesystemen
USD836769S1 (en) 2016-12-12 2018-12-25 Bigfoot Biomedical, Inc. Insulin delivery controller
CA3037432A1 (en) 2016-12-12 2018-06-21 Bigfoot Biomedical, Inc. Alarms and alerts for medication delivery devices and related systems and methods
JP6666275B2 (ja) * 2017-01-19 2020-03-13 デビオテック ソシエテ アノニム 医療用ポンプ装置
USD839294S1 (en) 2017-06-16 2019-01-29 Bigfoot Biomedical, Inc. Display screen with graphical user interface for closed-loop medication delivery
EP3651647A1 (de) 2017-07-13 2020-05-20 Bigfoot Biomedical, Inc. Multiskalige anzeige von blutglukoseinformationen
EP3527826B1 (de) 2018-02-16 2020-07-08 ams AG Pumpstruktur, partikeldetektor und verfahren zum pumpen
US20200254985A1 (en) * 2019-02-12 2020-08-13 The Goodyear Tire & Rubber Company Brake pressure sensor for determination of braking efficiency
DE102019218485B4 (de) * 2019-11-28 2022-03-31 Festo Se & Co. Kg Arbeitseinrichtung
CN112452365B (zh) * 2020-11-23 2021-12-07 无锡市夸克微智造科技有限责任公司 微加工流体装置
CN112614797B (zh) * 2021-03-08 2021-07-02 杭州众硅电子科技有限公司 一种晶圆位置检测装置
EP4381192A1 (de) * 2021-08-04 2024-06-12 Aita Bio Inc. Mems-mikropumpe mit sensorintegration zur detektion einer abnormalen funktion
WO2024167501A1 (en) * 2023-02-10 2024-08-15 Rochester Institute Of Technology Leak-free, diffusion-blocking check valve, pump and method
CN116658400B (zh) * 2023-08-01 2023-09-29 常州威图流体科技有限公司 一种流体输送装置、液冷散热模组及微流控芯片

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0483469B1 (de) * 1990-10-30 1994-10-12 Hewlett-Packard Company Mikropumpe
DE4135655A1 (de) * 1991-09-11 1993-03-18 Fraunhofer Ges Forschung Mikrominiaturisierte, elektrostatisch betriebene membranpumpe
GB2266751A (en) * 1992-05-02 1993-11-10 Westonbridge Int Ltd Piezoelectric micropump excitation voltage control.
SG44800A1 (en) * 1993-12-28 1997-12-19 Westonbridge Int Ltd A micropump
CH689836A5 (fr) * 1994-01-14 1999-12-15 Westonbridge Int Ltd Micropompe.
JP2628019B2 (ja) * 1994-04-19 1997-07-09 株式会社日立製作所 静電駆動型マイクロアクチュエータとバルブの製作方法、及び静電駆動型ポンプ
JPH0823153A (ja) * 1994-07-05 1996-01-23 Sharp Corp 配線形成方法
JP2001502247A (ja) 1996-02-10 2001-02-20 フラウンホーファー―ゲゼルシャフト、ツール、フェルデルング、デァ、アンゲヴァンテン、フォルシュング、アインゲトラーゲネル、フェライン 膜連結による双安定マイクロアクチュエータ
US6123316A (en) * 1996-11-27 2000-09-26 Xerox Corporation Conduit system for a valve array
US6069392A (en) * 1997-04-11 2000-05-30 California Institute Of Technology Microbellows actuator
DE19719862A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
US6116863A (en) * 1997-05-30 2000-09-12 University Of Cincinnati Electromagnetically driven microactuated device and method of making the same
AU9739898A (en) 1997-08-20 1999-03-08 Westonbridge International Limited Micro pump comprising an inlet control member for its self-priming
US6126140A (en) * 1997-12-29 2000-10-03 Honeywell International Inc. Monolithic bi-directional microvalve with enclosed drive electric field
US6576478B1 (en) * 1998-07-14 2003-06-10 Zyomyx, Inc. Microdevices for high-throughput screening of biomolecules
JP2001304454A (ja) * 2000-04-27 2001-10-31 Matsushita Electric Works Ltd 半導体マイクロバルブ

Also Published As

Publication number Publication date
US20060027523A1 (en) 2006-02-09
US7311503B2 (en) 2007-12-25
WO2001090577A1 (fr) 2001-11-29
CA2410306C (en) 2009-12-15
JP2004505212A (ja) 2004-02-19
US7005078B2 (en) 2006-02-28
US20040052657A1 (en) 2004-03-18
CA2410306A1 (en) 2002-11-22
AU7250001A (en) 2001-12-03
AU2001272500B2 (en) 2005-06-23
CN1324238C (zh) 2007-07-04
EP1283957B1 (de) 2005-10-26
CN1430703A (zh) 2003-07-16
DE60114411D1 (de) 2005-12-01
EP1283957A1 (de) 2003-02-19
JP4776139B2 (ja) 2011-09-21
DE60114411T2 (de) 2006-07-20

Similar Documents

Publication Publication Date Title
ATE307976T1 (de) Microbearbeitete fluidische vorrichtung und herstellungsverfahren
DE69936719D1 (de) Mikro-fluidvorrichtung
GB2379958A (en) Micromachines
ATE513886T1 (de) Hydraulische frakturierungsflüssigkeit enthaltend blockcopolymeren mit hydrophilen und hydrophoben blöcke
DE50015274D1 (de) Einrichtung zum handhaben von flüssigkeitsproben und herstellungsverfahren sowie system zum handhaben von flüssigkeitsproben
DE60134760D1 (de) Stabilisierte flüssige zusammensetzungen
ATE316060T1 (de) Mikrokanlvorrichtung zum stoff- oder wärmeaustausch
ATE334885T1 (de) Siegelbacke
ES8800396A1 (es) Una valvula de silicio para controlar el caudal de un fluido
BRPI0500329A (pt) Método para formar fendas de manuseio de fluido em um substrato semicondutor
DE60045347D1 (de) Fluidhandhabungsvorrichtung mit diamantähnlichen filmen
ATE306237T1 (de) Intrauterine vorrichtung und verfahren zum einführen eines aktiven elementes in die vorrichtung
ATE277659T1 (de) Vorrichtung zum einsetzen in die menschliche nase
DE50109179D1 (de) Verfahren und vorrichtung zur manipulation kleiner flüssigkeitsmengen
BR9602506A (pt) Dispositivo semicondutor de medição de pressão diferencial
DE69014252D1 (de) Druckregler und Ventilbetätigungsvorrichtung.
DE60117949D1 (de) Eingepresste Ventildichtung und Herstellungsverfahren für dieselbe
ATE306073T1 (de) Druckmessgerät mit druckmittler mit exzentrischem kanal sowie nuten
DE60037960D1 (de) Verbesserungen bei Spannungsblöcken
WO2003031319A3 (de) Adhäsionsverminderte mikromechanische bauelemente
ATE422171T1 (de) Fluiderfassungsanordnung und mischsystem
SE0100702D0 (sv) A component
ATE354024T1 (de) Mechanische vorrichtung
SE9803264D0 (sv) Anordning för förflyttning av vätska eller gas
SE9602702D0 (sv) Säkerhetsanordning mot brott i gasledningar

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties