FR2900400B1 - Procede collectif de fabrication de membranes et de cavites de faible volume et de haute precision - Google Patents

Procede collectif de fabrication de membranes et de cavites de faible volume et de haute precision

Info

Publication number
FR2900400B1
FR2900400B1 FR0651511A FR0651511A FR2900400B1 FR 2900400 B1 FR2900400 B1 FR 2900400B1 FR 0651511 A FR0651511 A FR 0651511A FR 0651511 A FR0651511 A FR 0651511A FR 2900400 B1 FR2900400 B1 FR 2900400B1
Authority
FR
France
Prior art keywords
cavities
high precision
low volume
collective process
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0651511A
Other languages
English (en)
Other versions
FR2900400A1 (fr
Inventor
Joel Collet
Stephane Nicolas
Christian Pisella
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tronics Microsystems SA
Original Assignee
Tronics Microsystems SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0651511A priority Critical patent/FR2900400B1/fr
Application filed by Tronics Microsystems SA filed Critical Tronics Microsystems SA
Priority to US12/298,894 priority patent/US7838393B2/en
Priority to DK07728561.7T priority patent/DK2013137T3/da
Priority to EP07728561A priority patent/EP2013137B1/fr
Priority to PCT/EP2007/054106 priority patent/WO2007128705A1/fr
Priority to CN2007800152426A priority patent/CN101432223B/zh
Priority to AT07728561T priority patent/ATE528256T1/de
Priority to KR1020087027808A priority patent/KR101424748B1/ko
Priority to JP2009507079A priority patent/JP5112420B2/ja
Publication of FR2900400A1 publication Critical patent/FR2900400A1/fr
Application granted granted Critical
Publication of FR2900400B1 publication Critical patent/FR2900400B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0015—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00349—Creating layers of material on a substrate
    • B81C1/00357—Creating layers of material on a substrate involving bonding one or several substrates on a non-temporary support, e.g. another substrate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15C—FLUID-CIRCUIT ELEMENTS PREDOMINANTLY USED FOR COMPUTING OR CONTROL PURPOSES
    • F15C5/00—Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/05—Microfluidics
    • B81B2201/054—Microvalves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/019—Bonding or gluing multiple substrate layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Micromachines (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Valve Housings (AREA)
  • Reciprocating Pumps (AREA)
  • Element Separation (AREA)
  • Recrystallisation Techniques (AREA)
FR0651511A 2006-04-28 2006-04-28 Procede collectif de fabrication de membranes et de cavites de faible volume et de haute precision Expired - Fee Related FR2900400B1 (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR0651511A FR2900400B1 (fr) 2006-04-28 2006-04-28 Procede collectif de fabrication de membranes et de cavites de faible volume et de haute precision
DK07728561.7T DK2013137T3 (da) 2006-04-28 2007-04-26 Fremgangsmåde til kollektiv fremstilling af membraner og hulrum med lille volumen, som har høj dimensionsmæssig nøjagtighed
EP07728561A EP2013137B1 (fr) 2006-04-28 2007-04-26 Procede collectif de fabrication de membranes et de cavites de faible volume ayant un grand respect de tolerances
PCT/EP2007/054106 WO2007128705A1 (fr) 2006-04-28 2007-04-26 Processus de fabrication collective de membranes et de cavités à haute précision de petit volume
US12/298,894 US7838393B2 (en) 2006-04-28 2007-04-26 Process for collective manufacturing of small volume high precision membranes and cavities
CN2007800152426A CN101432223B (zh) 2006-04-28 2007-04-26 用于集体制造小体积高精度膜片和腔的方法
AT07728561T ATE528256T1 (de) 2006-04-28 2007-04-26 Verfahren zur gemeinsamen herstellung von membranen und hohlräumen mit kleinem volumen und grosser masshaltigkeit
KR1020087027808A KR101424748B1 (ko) 2006-04-28 2007-04-26 작은 부피 및 높은 정밀도의 멤브레인들 및 캐비티들의 집합적 제조 프로세스
JP2009507079A JP5112420B2 (ja) 2006-04-28 2007-04-26 小容積で高精度の膜及びキャビティを集合的に製造する方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0651511A FR2900400B1 (fr) 2006-04-28 2006-04-28 Procede collectif de fabrication de membranes et de cavites de faible volume et de haute precision

Publications (2)

Publication Number Publication Date
FR2900400A1 FR2900400A1 (fr) 2007-11-02
FR2900400B1 true FR2900400B1 (fr) 2008-11-07

Family

ID=37507609

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0651511A Expired - Fee Related FR2900400B1 (fr) 2006-04-28 2006-04-28 Procede collectif de fabrication de membranes et de cavites de faible volume et de haute precision

Country Status (9)

Country Link
US (1) US7838393B2 (fr)
EP (1) EP2013137B1 (fr)
JP (1) JP5112420B2 (fr)
KR (1) KR101424748B1 (fr)
CN (1) CN101432223B (fr)
AT (1) ATE528256T1 (fr)
DK (1) DK2013137T3 (fr)
FR (1) FR2900400B1 (fr)
WO (1) WO2007128705A1 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2952628A1 (fr) * 2009-11-13 2011-05-20 Commissariat Energie Atomique Procede de fabrication d'au moins une micropompe a membrane deformable et micropompe a membrane deformable
CN102306703B (zh) * 2011-08-09 2013-05-22 上海交通大学 一种微型压电泵的制备方法
US9752565B2 (en) 2012-07-05 2017-09-05 Kci Licensing, Inc. Systems and methods for supplying reduced pressure using a disc pump with electrostatic actuation
FR2994228B1 (fr) 2012-07-31 2017-05-12 Commissariat Energie Atomique Pompe realisee dans un substrat
DE102013002667B4 (de) 2013-02-15 2022-02-10 Microfluidic Chipshop Gmbh Mikrofluidiksystem mit nach außen verschlossenen Kavitäten
FR3030111B1 (fr) 2014-12-12 2017-12-22 Commissariat Energie Atomique Procede de realisation d'une connexion electrique dans un via borgne et connexion electrique obtenue
NL2014801B1 (en) * 2015-05-13 2017-01-27 Berkin Bv Fluid flow device, comprising a valve unit, as well as method of manufacturing the same.
DE102015220018A1 (de) * 2015-10-15 2016-10-06 Carl Zeiss Smt Gmbh Verfahren zur Herstellung eines mikroelektromechanischen Bauelements mit mindestens einem beweglichen Bestandteil
CN107512699B (zh) * 2017-07-27 2019-10-11 沈阳工业大学 基于键合技术的soi加速度敏感芯片制造方法
TWI626627B (zh) * 2017-08-31 2018-06-11 研能科技股份有限公司 致動傳感模組
JP7146499B2 (ja) * 2018-07-17 2022-10-04 東京計器株式会社 ３次元構造部材の製造方法、加速度ピックアップ部材の製造方法、加速度ピックアップ部材、及び加速度センサ
DE102019208023B4 (de) 2019-05-31 2024-01-04 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zum herstellen einer mikromechanischen vorrichtung, mikromechanisches ventil und mikropumpe

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH051669A (ja) * 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
FR2681472B1 (fr) 1991-09-18 1993-10-29 Commissariat Energie Atomique Procede de fabrication de films minces de materiau semiconducteur.
DE19719862A1 (de) * 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DE19719861A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
EP1179139B1 (fr) * 1999-05-17 2003-08-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Pompe micromecanique
EP1283957B1 (fr) * 2000-05-25 2005-10-26 Debiotech S.A. Dispositif fluidique micro-usine et son procede de fabrication
GB2371119A (en) * 2000-09-25 2002-07-17 Marconi Caswell Ltd Micro electro-mechanical systems
JP2002228033A (ja) * 2001-02-05 2002-08-14 Olympus Optical Co Ltd 分離型マイクロバルブ
KR100439700B1 (ko) * 2002-07-16 2004-07-12 한국과학기술원 전자기력으로 구동되는 미소거울 구동기 및 그 제조방법
JP2004332706A (ja) * 2003-05-09 2004-11-25 Honda Motor Co Ltd マイクロポンプ
JP4572534B2 (ja) * 2003-12-18 2010-11-04 パナソニック電工株式会社 静電駆動型半導体マイクロバルブ
CN1583541B (zh) * 2004-05-27 2010-09-29 哈尔滨工程大学 采用多层驱动膜结构的微驱动器及其制作方法
JP4208777B2 (ja) * 2004-06-25 2009-01-14 キヤノン株式会社 マイクロバルブの製造方法
US7238589B2 (en) * 2004-11-01 2007-07-03 International Business Machines Corporation In-place bonding of microstructures

Also Published As

Publication number Publication date
EP2013137A1 (fr) 2009-01-14
US7838393B2 (en) 2010-11-23
KR101424748B1 (ko) 2014-08-01
CN101432223B (zh) 2011-11-16
JP2009535549A (ja) 2009-10-01
US20090130822A1 (en) 2009-05-21
CN101432223A (zh) 2009-05-13
ATE528256T1 (de) 2011-10-15
JP5112420B2 (ja) 2013-01-09
WO2007128705A1 (fr) 2007-11-15
KR20090007436A (ko) 2009-01-16
DK2013137T3 (da) 2012-01-30
FR2900400A1 (fr) 2007-11-02
EP2013137B1 (fr) 2011-10-12

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Year of fee payment: 11

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Effective date: 20171229