DE69014252D1 - Druckregler und Ventilbetätigungsvorrichtung. - Google Patents

Druckregler und Ventilbetätigungsvorrichtung.

Info

Publication number
DE69014252D1
DE69014252D1 DE69014252T DE69014252T DE69014252D1 DE 69014252 D1 DE69014252 D1 DE 69014252D1 DE 69014252 T DE69014252 T DE 69014252T DE 69014252 T DE69014252 T DE 69014252T DE 69014252 D1 DE69014252 D1 DE 69014252D1
Authority
DE
Germany
Prior art keywords
pressure regulator
actuation device
valve actuation
valve
regulator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69014252T
Other languages
English (en)
Other versions
DE69014252T2 (de
Inventor
Heinz Nusser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SVG Lithography Systems Inc
Original Assignee
SVG Lithography Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SVG Lithography Systems Inc filed Critical SVG Lithography Systems Inc
Application granted granted Critical
Publication of DE69014252D1 publication Critical patent/DE69014252D1/de
Publication of DE69014252T2 publication Critical patent/DE69014252T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/08—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet
    • F16K31/082—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid using a permanent magnet using a electromagnet and a permanent magnet
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Magnetically Actuated Valves (AREA)
  • Control Of Fluid Pressure (AREA)
DE69014252T 1989-07-21 1990-07-20 Druckregler und Ventilbetätigungsvorrichtung. Expired - Fee Related DE69014252T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/382,943 US5014031A (en) 1989-07-21 1989-07-21 Ultra precision pressure regulator

Publications (2)

Publication Number Publication Date
DE69014252D1 true DE69014252D1 (de) 1995-01-05
DE69014252T2 DE69014252T2 (de) 1995-06-22

Family

ID=23511053

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69014252T Expired - Fee Related DE69014252T2 (de) 1989-07-21 1990-07-20 Druckregler und Ventilbetätigungsvorrichtung.

Country Status (5)

Country Link
US (1) US5014031A (de)
EP (1) EP0409664B1 (de)
JP (1) JPH03148713A (de)
CA (1) CA2021370A1 (de)
DE (1) DE69014252T2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5159949A (en) * 1988-12-23 1992-11-03 Dresser Industries, Inc. Electropneumatic positioner
US5841023A (en) * 1993-08-31 1998-11-24 Boehringer Mannheim Corporation Magnet for medical instrument
US5522255A (en) 1993-08-31 1996-06-04 Boehringer Mannheim Corporation Fluid dose, flow and coagulation sensor for medical instrument
US5758626A (en) * 1995-10-05 1998-06-02 Caterpillar Inc. Magnetically adjustable valve adapted for a fuel injector
US5645031A (en) * 1996-01-18 1997-07-08 Meneely; Vincent Allan Compression release brake with hydraulically adjustable timing
US8023425B2 (en) * 2009-01-28 2011-09-20 Headwater Partners I Verifiable service billing for intermediate networking devices

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT236721B (de) * 1962-08-18 1964-11-10 Kromschroeder Ag G Elektromagnetisch gesteuertes Ventil
US3203447A (en) * 1963-10-09 1965-08-31 Skinner Prec Ind Inc Magnetically operated valve
US3272234A (en) * 1964-05-13 1966-09-13 Woodward Governor Co Magnetically controlled valve
US3571769A (en) * 1969-05-08 1971-03-23 Bell Aerospace Corp Electromagnetic force motor having adjustable magnetic saturation
IT974590B (it) * 1972-08-12 1974-07-10 Billi Spa Congegno di comando ad impulsi elettrici per guidafili di mac chine da maglieria e per altri impieghi
GB1591471A (en) * 1977-06-18 1981-06-24 Hart J C H Electromagnetic actuators
DE3026133A1 (de) * 1980-07-10 1982-02-18 Robert Bosch Gmbh, 7000 Stuttgart Elektromagnetisches ventil
DE3334158C1 (de) * 1983-09-21 1985-01-17 Sauer, Otto, 6800 Mannheim Magnetventil

Also Published As

Publication number Publication date
EP0409664A3 (en) 1991-06-26
DE69014252T2 (de) 1995-06-22
EP0409664B1 (de) 1994-11-23
US5014031A (en) 1991-05-07
CA2021370A1 (en) 1991-01-22
JPH03148713A (ja) 1991-06-25
EP0409664A2 (de) 1991-01-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee