WO2003031319A3 - Adhäsionsverminderte mikromechanische bauelemente - Google Patents

Adhäsionsverminderte mikromechanische bauelemente Download PDF

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Publication number
WO2003031319A3
WO2003031319A3 PCT/DE2002/003317 DE0203317W WO03031319A3 WO 2003031319 A3 WO2003031319 A3 WO 2003031319A3 DE 0203317 W DE0203317 W DE 0203317W WO 03031319 A3 WO03031319 A3 WO 03031319A3
Authority
WO
WIPO (PCT)
Prior art keywords
components
static friction
micromechanical components
reduced static
micromechanical
Prior art date
Application number
PCT/DE2002/003317
Other languages
English (en)
French (fr)
Other versions
WO2003031319A2 (de
Inventor
Frank Fischer
Arnold Rump
Original Assignee
Bosch Gmbh Robert
Max Planck Gesellschaft
Frank Fischer
Arnold Rump
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Max Planck Gesellschaft, Frank Fischer, Arnold Rump filed Critical Bosch Gmbh Robert
Publication of WO2003031319A2 publication Critical patent/WO2003031319A2/de
Publication of WO2003031319A3 publication Critical patent/WO2003031319A3/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/0008—Structures for avoiding electrostatic attraction, e.g. avoiding charge accumulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/016—Passivation

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)

Abstract

Es werden adhäsionsverminderte mikromechanische Bauelemente (4';40) rnit einer Größe von in der Regel weniger als 1 mn, derartige Bauelemente enthaltende Einrichtungen, die Herstellung und Verwendung dieser Bauelemente sowie ein Verfahren zur Behandlung der Oberflächen von mikromechanischen Bauelementen(4';40) bereitgestellt, wobei das Verfahren den Schritt umfasst, dass die elektronischen Störstellen des verwendeten Halbleitermaterials im Wege einer Oberflächenbehandlung verändert werden. Derartige Bauelemente werden beispielsweise in Beschleunigungssensoren verwendet.
PCT/DE2002/003317 2001-10-04 2002-09-06 Adhäsionsverminderte mikromechanische bauelemente WO2003031319A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10148864.5 2001-10-04
DE2001148864 DE10148864A1 (de) 2001-10-04 2001-10-04 Adhäsionsverminderte mikromechanische Bauelemente

Publications (2)

Publication Number Publication Date
WO2003031319A2 WO2003031319A2 (de) 2003-04-17
WO2003031319A3 true WO2003031319A3 (de) 2003-10-09

Family

ID=7701310

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/003317 WO2003031319A2 (de) 2001-10-04 2002-09-06 Adhäsionsverminderte mikromechanische bauelemente

Country Status (2)

Country Link
DE (1) DE10148864A1 (de)
WO (1) WO2003031319A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006127776A1 (en) * 2005-05-25 2006-11-30 Northrop Grumman Corporation Metal electrodes for elimination of spurious charge effects in accelerometers and other mems devices
US7417784B2 (en) 2006-04-19 2008-08-26 Qualcomm Mems Technologies, Inc. Microelectromechanical device and method utilizing a porous surface
EP2129619A2 (de) 2007-04-04 2009-12-09 Qualcomm Mems Technologies, Inc. Beseitigung von freisetzungsätzangriffen durch schnittstellenmodifikation in opferschichten
US7738158B2 (en) 2007-06-29 2010-06-15 Qualcomm Mems Technologies, Inc. Electromechanical device treatment with water vapor
US7851239B2 (en) 2008-06-05 2010-12-14 Qualcomm Mems Technologies, Inc. Low temperature amorphous silicon sacrificial layer for controlled adhesion in MEMS devices

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5694740A (en) * 1996-03-15 1997-12-09 Analog Devices, Inc. Micromachined device packaged to reduce stiction
WO2001057920A1 (en) * 2000-02-01 2001-08-09 Analog Devices, Inc. Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor
US6290859B1 (en) * 1999-11-12 2001-09-18 Sandia Corporation Tungsten coating for improved wear resistance and reliability of microelectromechanical devices

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5476691A (en) * 1994-01-21 1995-12-19 International Business Machines, Inc. Surface treatment of magnetic recording heads
US6096149A (en) * 1997-04-21 2000-08-01 Ford Global Technologies, Inc. Method for fabricating adhesion-resistant micromachined devices
US6328903B1 (en) * 2000-03-07 2001-12-11 Sandia Corporation Surface-micromachined chain for use in microelectromechanical structures

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US5694740A (en) * 1996-03-15 1997-12-09 Analog Devices, Inc. Micromachined device packaged to reduce stiction
US6290859B1 (en) * 1999-11-12 2001-09-18 Sandia Corporation Tungsten coating for improved wear resistance and reliability of microelectromechanical devices
WO2001057920A1 (en) * 2000-02-01 2001-08-09 Analog Devices, Inc. Process for wafer level treatment to reduce stiction and passivate micromachined surfaces and compounds used therefor

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
ABE T ET AL: "Effects of elevated temperature treatments in microstructure release procedures", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, JUNE 1995, USA, vol. 4, no. 2, pages 66 - 75, XP002247902, ISSN: 1057-7157 *
KOMVOPOULOS K: "SURFACE ENGINEERING AND MICROTRIBOLOGY FOR MICROELECTROMECHNICAL SYSTEMS", WEAR, LAUSANNE, CH, vol. 200, 1996, pages 305 - 327, XP001090868 *
LEGTENBERG R ET AL: "STICTION OF SURFACE MICROMACHINED STRUCTURES AFTER RINSING AND DRYING: MODEL AND INVESTIGATION OF ADHESION MECHANISMS", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A43, no. 1/3, 1 May 1994 (1994-05-01), pages 230 - 238, XP000454116, ISSN: 0924-4247 *
SCHEEPER P R ET AL: "INVESTIGATION OF ATTRACTIVE FORCES BETWEEN PECVD SILICON NITRIDE MICROSTRUCTURES AND AN OXIDIZED SILICON SUBSTRATE", SENSORS AND ACTUATORS A, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. A30, no. 3, 1 February 1992 (1992-02-01), pages 231 - 239, XP000277434, ISSN: 0924-4247 *
SRINIVASAN U ET AL: "Self-assembled fluorocarbon films for enhanced stiction reduction", 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, TRANSDUCERS 97, CHICAGO, IL, JUNE 16 - 19, 1997. SESSIONS 3A1 - 4D3. PAPERS NO. 3A1.01 - 4D3.14P,, ISBN: 0-7803-3829-4, XP010240746 *

Also Published As

Publication number Publication date
DE10148864A1 (de) 2003-04-17
WO2003031319A2 (de) 2003-04-17

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