ATE284527T1 - Kombination von interferenzlinienbildern zu einem moire bild - Google Patents

Kombination von interferenzlinienbildern zu einem moire bild

Info

Publication number
ATE284527T1
ATE284527T1 AT00901234T AT00901234T ATE284527T1 AT E284527 T1 ATE284527 T1 AT E284527T1 AT 00901234 T AT00901234 T AT 00901234T AT 00901234 T AT00901234 T AT 00901234T AT E284527 T1 ATE284527 T1 AT E284527T1
Authority
AT
Austria
Prior art keywords
fringe pattern
interference fringe
interference
image
interferometers
Prior art date
Application number
AT00901234T
Other languages
English (en)
Inventor
Colin Forno
Maurice Whelan
Original Assignee
Europ Economic Community
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Europ Economic Community filed Critical Europ Economic Community
Application granted granted Critical
Publication of ATE284527T1 publication Critical patent/ATE284527T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02087—Combining two or more images of the same region
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Details Of Television Scanning (AREA)
  • Details Of Aerials (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)
  • Endoscopes (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
AT00901234T 1999-02-17 2000-01-27 Kombination von interferenzlinienbildern zu einem moire bild ATE284527T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9903638.6A GB9903638D0 (en) 1999-02-17 1999-02-17 A measurement method and measurement apparatus
PCT/GB2000/000236 WO2000049364A1 (en) 1999-02-17 2000-01-27 Combining interference fringe patterns to a moire fringe pattern

Publications (1)

Publication Number Publication Date
ATE284527T1 true ATE284527T1 (de) 2004-12-15

Family

ID=10847969

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00901234T ATE284527T1 (de) 1999-02-17 2000-01-27 Kombination von interferenzlinienbildern zu einem moire bild

Country Status (9)

Country Link
US (1) US6744517B1 (de)
EP (1) EP1153263B1 (de)
JP (1) JP2002537550A (de)
AT (1) ATE284527T1 (de)
CA (1) CA2336942C (de)
DE (1) DE60016573T2 (de)
GB (1) GB9903638D0 (de)
NO (1) NO20006355L (de)
WO (1) WO2000049364A1 (de)

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DE10125785A1 (de) * 2001-05-26 2002-11-28 Zeiss Carl Verfahren zur Absolutkalibrierung eines Interferometers
JP4758572B2 (ja) * 2001-07-27 2011-08-31 富士フイルム株式会社 縞画像解析用の位相アンラッピング方法
IL146924A (en) * 2001-12-04 2007-03-08 Nova Measuring Instr Ltd Metal cmp process monitoring
US20080137098A1 (en) * 2002-01-25 2008-06-12 Mater Michael J Method of multiple wavelength interferometry
AU2003256897A1 (en) * 2002-08-09 2004-02-25 Angstro Vision, Inc. Determining topography and composition of a sample by using an interferometer
US7136168B2 (en) 2002-08-09 2006-11-14 Angstrovision, Inc. Interferometric topological metrology with pre-established reference scale
US6999181B2 (en) 2002-08-09 2006-02-14 Angstrovision, Inc. Advanced signal processing technique for translating fringe line disturbances into sample height at a particular position above an interferometer's sample stage
US20040130730A1 (en) * 2002-11-21 2004-07-08 Michel Cantin Fast 3D height measurement method and system
TW200510690A (en) * 2003-06-11 2005-03-16 Solvision Inc 3D and 2D measurement system and method with increased sensitivity and dynamic range
US20050219553A1 (en) * 2003-07-31 2005-10-06 Kelly Patrick V Monitoring apparatus
JP4739806B2 (ja) * 2004-06-07 2011-08-03 富士フイルム株式会社 光ビーム測定装置および方法
US7359065B2 (en) * 2005-07-14 2008-04-15 Coherix, Inc. Method of combining holograms
CN100347535C (zh) * 2006-09-15 2007-11-07 清华大学 一种力电耦合加载与三维全场变形测量系统
JP5387580B2 (ja) * 2008-11-05 2014-01-15 富士通株式会社 カメラ角度算出装置およびカメラ角度算出方法
US8982355B2 (en) * 2010-12-09 2015-03-17 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Smart optical material characterization system and method
US8687204B2 (en) * 2011-03-24 2014-04-01 Canon Kabushiki Kaisha Method and apparatus for measuring refractive index based on a ratio between a number of second fringes divided by a difference of the number of second fringes minus a number of first fringes
MX2016015788A (es) * 2014-06-13 2017-04-25 Halliburton Energy Services Inc Elemento computacional integrado con multiples superficies selectivas de frecuencia.
CN104729419B (zh) * 2014-11-04 2019-09-13 广东工业大学 透视测量高聚物材料内部热变形场分布的装置及方法
US10136120B2 (en) 2016-04-15 2018-11-20 Microsoft Technology Licensing, Llc Depth sensing using structured illumination
TWI578785B (zh) * 2016-06-08 2017-04-11 群邁通訊股份有限公司 拍照裝置及拍照方法
CN107966453B (zh) * 2016-10-20 2020-08-04 上海微电子装备（集团）股份有限公司 一种芯片缺陷检测装置及检测方法
US11143503B2 (en) 2018-08-07 2021-10-12 Kimball Electronics Indiana, Inc. Interferometric waviness detection systems
CN110243289A (zh) * 2018-12-27 2019-09-17 桂林电子科技大学 一种实时云纹干涉图高速相位提取系统及提取方法

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US3767308A (en) * 1972-01-12 1973-10-23 Gen Electric Method and apparatus for sensing surface displacement orthogonal to the line of sight
GB1377831A (en) * 1972-04-17 1974-12-18 Secr Defence Interferometers for fluid flow measurements
US5243542A (en) * 1987-12-29 1993-09-07 Asahi Kogaku Kogyo Kabushiki Kaisha Interferometer employing reference images
US4981360A (en) 1989-05-10 1991-01-01 Grumman Aerospace Corporation Apparatus and method for projection moire mapping
DE4204857C2 (de) * 1991-02-18 1998-01-22 Asahi Optical Co Ltd Verfahren zur Untersuchung einer Oberflächenform mit einem Interferometer
US5432595A (en) * 1993-07-13 1995-07-11 Pechersky; Martin J. Method for measuring residual stresses in materials by plastically deforming the material and interference pattern comparison
US5732163A (en) * 1993-07-21 1998-03-24 Northrop Grumman Corporation Angular alignment of structures using moire patterns
US5436462A (en) * 1993-12-21 1995-07-25 United Technologies Optical Systems Video contour measurement system employing moire interferometry having a beat frequency pattern
KR0124058B1 (en) * 1993-12-22 1997-11-24 Korea Telecommunication Measuring device and method of 2-dimension microscope displacement by using moire appearance
US5481356A (en) * 1994-04-25 1996-01-02 Northwestern University Apparatus and method for nondestructive testing using additive-subtractive phase-modulated interferometry
JP3287517B2 (ja) * 1994-06-29 2002-06-04 富士写真光機株式会社 干渉縞による測定方法および装置
EP0768511A1 (de) * 1995-10-16 1997-04-16 European Community Optisches Verfahren für dreidimensionale Profilometrie basiert auf der Verarbeitung von Speckle-Bildern in Teilkohärenter Beleuchtung, und Interferometer zur Durchführung dieses Verfahrens
US5703680A (en) * 1996-01-16 1997-12-30 The Goodyear Tire & Rubber Company Method for dynamic interference pattern testing
ES2178747T3 (es) * 1997-07-21 2003-01-01 Euratom Dispositivo y metodo para medir la deformacion de una muestra de ensayo mecanico.

Also Published As

Publication number Publication date
WO2000049364A1 (en) 2000-08-24
DE60016573T2 (de) 2005-12-08
JP2002537550A (ja) 2002-11-05
DE60016573D1 (de) 2005-01-13
GB9903638D0 (en) 1999-04-07
CA2336942C (en) 2007-03-27
EP1153263A1 (de) 2001-11-14
EP1153263B1 (de) 2004-12-08
US6744517B1 (en) 2004-06-01
NO20006355L (no) 2001-02-15
CA2336942A1 (en) 2000-08-24
NO20006355D0 (no) 2000-12-13

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