NO20006355L - Kombinasjon av interferenskantmönstre til et moire kantmönster - Google Patents

Kombinasjon av interferenskantmönstre til et moire kantmönster

Info

Publication number
NO20006355L
NO20006355L NO20006355A NO20006355A NO20006355L NO 20006355 L NO20006355 L NO 20006355L NO 20006355 A NO20006355 A NO 20006355A NO 20006355 A NO20006355 A NO 20006355A NO 20006355 L NO20006355 L NO 20006355L
Authority
NO
Norway
Prior art keywords
fringe pattern
interference
interference fringe
image
edge
Prior art date
Application number
NO20006355A
Other languages
English (en)
Other versions
NO20006355D0 (no
Inventor
Colin Forno
Maurice Patrick Whelan
Original Assignee
European Community
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by European Community filed Critical European Community
Publication of NO20006355D0 publication Critical patent/NO20006355D0/no
Publication of NO20006355L publication Critical patent/NO20006355L/no

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02015—Interferometers characterised by the beam path configuration
    • G01B9/02032—Interferometers characterised by the beam path configuration generating a spatial carrier frequency, e.g. by creating lateral or angular offset between reference and object beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G01B9/02087—Combining two or more images of the same region
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Details Of Television Scanning (AREA)
  • Details Of Aerials (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Viewing The Inside Of Hollow Bodies (AREA)
  • Endoscopes (AREA)
NO20006355A 1999-02-17 2000-12-13 Kombinasjon av interferenskantmönstre til et moire kantmönster NO20006355L (no)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9903638.6A GB9903638D0 (en) 1999-02-17 1999-02-17 A measurement method and measurement apparatus
PCT/GB2000/000236 WO2000049364A1 (en) 1999-02-17 2000-01-27 Combining interference fringe patterns to a moire fringe pattern

Publications (2)

Publication Number Publication Date
NO20006355D0 NO20006355D0 (no) 2000-12-13
NO20006355L true NO20006355L (no) 2001-02-15

Family

ID=10847969

Family Applications (1)

Application Number Title Priority Date Filing Date
NO20006355A NO20006355L (no) 1999-02-17 2000-12-13 Kombinasjon av interferenskantmönstre til et moire kantmönster

Country Status (9)

Country Link
US (1) US6744517B1 (no)
EP (1) EP1153263B1 (no)
JP (1) JP2002537550A (no)
AT (1) ATE284527T1 (no)
CA (1) CA2336942C (no)
DE (1) DE60016573T2 (no)
GB (1) GB9903638D0 (no)
NO (1) NO20006355L (no)
WO (1) WO2000049364A1 (no)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10125785A1 (de) * 2001-05-26 2002-11-28 Zeiss Carl Verfahren zur Absolutkalibrierung eines Interferometers
JP4758572B2 (ja) * 2001-07-27 2011-08-31 富士フイルム株式会社 縞画像解析用の位相アンラッピング方法
IL146924A (en) * 2001-12-04 2007-03-08 Nova Measuring Instr Ltd Metal cmp process monitoring
US20080137098A1 (en) * 2002-01-25 2008-06-12 Mater Michael J Method of multiple wavelength interferometry
AU2003256897A1 (en) * 2002-08-09 2004-02-25 Angstro Vision, Inc. Determining topography and composition of a sample by using an interferometer
US6999181B2 (en) 2002-08-09 2006-02-14 Angstrovision, Inc. Advanced signal processing technique for translating fringe line disturbances into sample height at a particular position above an interferometer's sample stage
US7136168B2 (en) 2002-08-09 2006-11-14 Angstrovision, Inc. Interferometric topological metrology with pre-established reference scale
WO2004046645A2 (en) * 2002-11-21 2004-06-03 Solvision Fast 3d height measurement method and system
DE112004001034T5 (de) * 2003-06-11 2006-10-19 Solvision, Longueuil 3D- und 2D-Meßsystem und -verfahren mit erhöhter Sensitivität und erhöhtem Dynamikbereich
US20050219553A1 (en) * 2003-07-31 2005-10-06 Kelly Patrick V Monitoring apparatus
JP4739806B2 (ja) * 2004-06-07 2011-08-03 富士フイルム株式会社 光ビーム測定装置および方法
US7359065B2 (en) * 2005-07-14 2008-04-15 Coherix, Inc. Method of combining holograms
CN100347535C (zh) * 2006-09-15 2007-11-07 清华大学 一种力电耦合加载与三维全场变形测量系统
WO2010052772A1 (ja) * 2008-11-05 2010-05-14 富士通株式会社 カメラ角度算出装置、カメラ角度算出方法およびカメラ角度算出プログラム
US8982355B2 (en) * 2010-12-09 2015-03-17 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Smart optical material characterization system and method
US8687204B2 (en) * 2011-03-24 2014-04-01 Canon Kabushiki Kaisha Method and apparatus for measuring refractive index based on a ratio between a number of second fringes divided by a difference of the number of second fringes minus a number of first fringes
US9708908B2 (en) 2014-06-13 2017-07-18 Halliburton Energy Services, Inc. Integrated computational element with multiple frequency selective surfaces
CN104729419B (zh) * 2014-11-04 2019-09-13 广东工业大学 透视测量高聚物材料内部热变形场分布的装置及方法
US10136120B2 (en) 2016-04-15 2018-11-20 Microsoft Technology Licensing, Llc Depth sensing using structured illumination
TWI578785B (zh) * 2016-06-08 2017-04-11 群邁通訊股份有限公司 拍照裝置及拍照方法
CN107966453B (zh) * 2016-10-20 2020-08-04 上海微电子装备（集团）股份有限公司 一种芯片缺陷检测装置及检测方法
US11143503B2 (en) * 2018-08-07 2021-10-12 Kimball Electronics Indiana, Inc. Interferometric waviness detection systems
CN110243289A (zh) * 2018-12-27 2019-09-17 桂林电子科技大学 一种实时云纹干涉图高速相位提取系统及提取方法

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB893669A (en) 1958-08-16 1962-04-11 American M A R C Inc Supercharged, opposed piston, two stroke cycle internal combustion engine with piston controlled ports
US3767308A (en) * 1972-01-12 1973-10-23 Gen Electric Method and apparatus for sensing surface displacement orthogonal to the line of sight
GB1377831A (en) * 1972-04-17 1974-12-18 Secr Defence Interferometers for fluid flow measurements
US5243542A (en) * 1987-12-29 1993-09-07 Asahi Kogaku Kogyo Kabushiki Kaisha Interferometer employing reference images
US4981360A (en) 1989-05-10 1991-01-01 Grumman Aerospace Corporation Apparatus and method for projection moire mapping
DE4204857C2 (de) * 1991-02-18 1998-01-22 Asahi Optical Co Ltd Verfahren zur Untersuchung einer Oberflächenform mit einem Interferometer
US5432595A (en) * 1993-07-13 1995-07-11 Pechersky; Martin J. Method for measuring residual stresses in materials by plastically deforming the material and interference pattern comparison
US5732163A (en) * 1993-07-21 1998-03-24 Northrop Grumman Corporation Angular alignment of structures using moire patterns
US5436462A (en) * 1993-12-21 1995-07-25 United Technologies Optical Systems Video contour measurement system employing moire interferometry having a beat frequency pattern
KR0124058B1 (en) * 1993-12-22 1997-11-24 Korea Telecommunication Measuring device and method of 2-dimension microscope displacement by using moire appearance
US5481356A (en) * 1994-04-25 1996-01-02 Northwestern University Apparatus and method for nondestructive testing using additive-subtractive phase-modulated interferometry
JP3287517B2 (ja) 1994-06-29 2002-06-04 富士写真光機株式会社 干渉縞による測定方法および装置
EP0768511A1 (en) * 1995-10-16 1997-04-16 European Community Optical three-dimensional profilometry method based on processing speckle images in partially coherent light, and interferometer implementing such a method
US5703680A (en) * 1996-01-16 1997-12-30 The Goodyear Tire & Rubber Company Method for dynamic interference pattern testing
EP0893669B1 (en) * 1997-07-21 2002-06-12 European Atomic Energy Community (EURATOM) Device and method for measuring deformation of a mechanical test specimen

Also Published As

Publication number Publication date
WO2000049364A1 (en) 2000-08-24
DE60016573D1 (de) 2005-01-13
CA2336942C (en) 2007-03-27
JP2002537550A (ja) 2002-11-05
NO20006355D0 (no) 2000-12-13
EP1153263A1 (en) 2001-11-14
GB9903638D0 (en) 1999-04-07
ATE284527T1 (de) 2004-12-15
DE60016573T2 (de) 2005-12-08
US6744517B1 (en) 2004-06-01
EP1153263B1 (en) 2004-12-08
CA2336942A1 (en) 2000-08-24

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