ATE274714T1 - Linsensystem für photodetektoren und herstellungsverfahren - Google Patents

Linsensystem für photodetektoren und herstellungsverfahren

Info

Publication number
ATE274714T1
ATE274714T1 AT00903285T AT00903285T ATE274714T1 AT E274714 T1 ATE274714 T1 AT E274714T1 AT 00903285 T AT00903285 T AT 00903285T AT 00903285 T AT00903285 T AT 00903285T AT E274714 T1 ATE274714 T1 AT E274714T1
Authority
AT
Austria
Prior art keywords
photodetectors
production method
lens system
lens
diffractive lens
Prior art date
Application number
AT00903285T
Other languages
German (de)
English (en)
Inventor
Azar Assadi
Kannan Raj
Robert C Sundahl
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Application granted granted Critical
Publication of ATE274714T1 publication Critical patent/ATE274714T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0037—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration with diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
    • G02B27/4211—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant correcting chromatic aberrations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14601—Structural or functional details thereof
    • H01L27/14625—Optical elements or arrangements associated with the device
    • H01L27/14627—Microlenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0216—Coatings
    • H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
    • H01L31/02162—Coatings for devices characterised by at least one potential jump barrier or surface barrier for filtering or shielding light, e.g. multicolour filters for photodetectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02—Details
    • H01L31/0232—Optical elements or arrangements associated with the device
    • H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/024—Details of scanning heads ; Means for illuminating the original
    • H04N1/028—Details of scanning heads ; Means for illuminating the original for picture information pick-up
    • H04N1/03—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a substantially linear array
    • H04N1/031—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a substantially linear array the photodetectors having a one-to-one and optically positive correspondence with the scanned picture elements, e.g. linear contact sensors
    • H04N1/0311—Details of scanning heads ; Means for illuminating the original for picture information pick-up with photodetectors arranged in a substantially linear array the photodetectors having a one-to-one and optically positive correspondence with the scanned picture elements, e.g. linear contact sensors using an array of elements to project the scanned image elements onto the photodetectors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1876—Diffractive Fresnel lenses; Zone plates; Kinoforms
    • G02B5/188—Plurality of such optical elements formed in or on a supporting substrate
    • G02B5/1885—Arranged as a periodic array

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Lenses (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Optical Head (AREA)
  • Automatic Focus Adjustment (AREA)
AT00903285T 1999-02-16 2000-01-12 Linsensystem für photodetektoren und herstellungsverfahren ATE274714T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/250,910 US6150653A (en) 1998-11-25 1999-02-16 Lens system for photodetectors
PCT/US2000/000859 WO2000049449A1 (en) 1999-02-16 2000-01-12 Lens system for photodetectors

Publications (1)

Publication Number Publication Date
ATE274714T1 true ATE274714T1 (de) 2004-09-15

Family

ID=22949667

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00903285T ATE274714T1 (de) 1999-02-16 2000-01-12 Linsensystem für photodetektoren und herstellungsverfahren

Country Status (9)

Country Link
US (1) US6150653A (ko)
EP (1) EP1157300B1 (ko)
JP (1) JP2002542606A (ko)
KR (1) KR100461268B1 (ko)
AT (1) ATE274714T1 (ko)
AU (1) AU2505600A (ko)
DE (1) DE60013259T2 (ko)
TW (1) TW460708B (ko)
WO (1) WO2000049449A1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6665014B1 (en) * 1998-11-25 2003-12-16 Intel Corporation Microlens and photodetector
US7129982B1 (en) * 1999-12-30 2006-10-31 Intel Corporation Color image sensor with integrated binary optical elements
WO2001091193A2 (en) 2000-05-23 2001-11-29 Atmel Corporation Integrated ic chip package for electronic image sensor die
US6987258B2 (en) * 2001-12-19 2006-01-17 Intel Corporation Integrated circuit-based compound eye image sensor using a light pipe bundle
US7023622B2 (en) * 2002-08-06 2006-04-04 Dmetrix, Inc. Miniature microscope objective lens
US7113651B2 (en) * 2002-11-20 2006-09-26 Dmetrix, Inc. Multi-spectral miniature microscope array
JP2004341395A (ja) 2003-05-19 2004-12-02 Alps Electric Co Ltd 光学素子
KR20160028196A (ko) * 2014-09-03 2016-03-11 에스케이하이닉스 주식회사 위상차 검출 픽셀을 구비한 이미지 센서
CN109148637B (zh) * 2018-09-20 2020-10-02 南京邮电大学 具有阶梯光栅结构的单光子雪崩二极管探测器及制作方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8303932A (nl) * 1982-11-17 1984-06-18 Pioneer Electronic Corp Opneeminrichting voor optische plaat.
JPS60191202A (ja) * 1984-03-12 1985-09-28 Matsushita Electric Ind Co Ltd フレネルレンズの製造方法
JPS63239402A (ja) * 1986-11-06 1988-10-05 Matsushita Electric Ind Co Ltd 光学装置
JPH0290685A (ja) * 1988-09-28 1990-03-30 Nec Corp 半導体受光素子
US5148314A (en) * 1991-06-06 1992-09-15 Chen Chungte W Optical systems employing refractive and diffractive optical elements to correct for chromatic aberration
WO1993021120A1 (en) * 1992-04-13 1993-10-28 Geltech, Inc. Glass and ceramic components having microscopic features
DE4323971C2 (de) * 1992-07-16 2002-11-07 Asahi Optical Co Ltd Schreib-/Lesegerät für eine optische Speicherplatte
US5340978A (en) * 1992-09-30 1994-08-23 Lsi Logic Corporation Image-sensing display panels with LCD display panel and photosensitive element array
US5486951A (en) * 1993-12-16 1996-01-23 Eastman Kodak Company Gradial zone lens and method of fabrication
JPH07306306A (ja) * 1994-05-13 1995-11-21 Mitsubishi Materials Corp フレネルレンズ及びその製造方法
US5623473A (en) * 1994-06-30 1997-04-22 Nikon Corporation Method and apparatus for manufacturing a diffraction grating zone plate
US5796514A (en) * 1996-03-04 1998-08-18 Raytheon Ti Systems, Inc. Infrared zoom lens assembly having a variable F/number

Also Published As

Publication number Publication date
DE60013259D1 (de) 2004-09-30
EP1157300A1 (en) 2001-11-28
KR20010102126A (ko) 2001-11-15
US6150653A (en) 2000-11-21
AU2505600A (en) 2000-09-04
JP2002542606A (ja) 2002-12-10
WO2000049449A1 (en) 2000-08-24
EP1157300B1 (en) 2004-08-25
KR100461268B1 (ko) 2004-12-10
TW460708B (en) 2001-10-21
DE60013259T2 (de) 2004-12-30

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