ATE268867T1 - Pumpensteuergerät für hochpräzisionsdosierpumpe - Google Patents

Pumpensteuergerät für hochpräzisionsdosierpumpe

Info

Publication number
ATE268867T1
ATE268867T1 AT99965911T AT99965911T ATE268867T1 AT E268867 T1 ATE268867 T1 AT E268867T1 AT 99965911 T AT99965911 T AT 99965911T AT 99965911 T AT99965911 T AT 99965911T AT E268867 T1 ATE268867 T1 AT E268867T1
Authority
AT
Austria
Prior art keywords
pump
control device
precision dosing
pump control
dispenses
Prior art date
Application number
AT99965911T
Other languages
German (de)
English (en)
Inventor
Raymond A Zagar
Robert F Mcloughlin
Original Assignee
Mykrolis Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corp filed Critical Mykrolis Corp
Application granted granted Critical
Publication of ATE268867T1 publication Critical patent/ATE268867T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/06—Control using electricity
    • F04B49/065—Control using electricity and making use of computers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/0076—Piston machines or pumps characterised by having positively-driven valving the members being actuated by electro-magnetic means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/02—Piston parameters
    • F04B2201/0201—Position of the piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/06—Valve parameters
    • F04B2201/0601—Opening times
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2205/00—Fluid parameters
    • F04B2205/03—Pressure in the compression chamber

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Control Of Non-Positive-Displacement Pumps (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Details Of Reciprocating Pumps (AREA)
AT99965911T 1998-11-23 1999-11-23 Pumpensteuergerät für hochpräzisionsdosierpumpe ATE268867T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10956898P 1998-11-23 1998-11-23
PCT/US1999/028002 WO2000031416A1 (fr) 1998-11-23 1999-11-23 Controleur de pompe pour appareil de pompage de precision

Publications (1)

Publication Number Publication Date
ATE268867T1 true ATE268867T1 (de) 2004-06-15

Family

ID=22328367

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99965911T ATE268867T1 (de) 1998-11-23 1999-11-23 Pumpensteuergerät für hochpräzisionsdosierpumpe

Country Status (6)

Country Link
EP (1) EP1133639B1 (fr)
CN (2) CN1590761A (fr)
AT (1) ATE268867T1 (fr)
DE (1) DE69917927T2 (fr)
TW (1) TW593888B (fr)
WO (1) WO2000031416A1 (fr)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
US6325932B1 (en) 1999-11-30 2001-12-04 Mykrolis Corporation Apparatus and method for pumping high viscosity fluid
US7543596B2 (en) * 2002-07-19 2009-06-09 Entegris, Inc. Liquid flow controller and precision dispense apparatus and system
JP5079516B2 (ja) * 2004-11-23 2012-11-21 インテグリス・インコーポレーテッド 可変定位置ディスペンスシステムのためのシステムおよび方法
US8753097B2 (en) 2005-11-21 2014-06-17 Entegris, Inc. Method and system for high viscosity pump
JP5339915B2 (ja) * 2005-11-21 2013-11-13 インテグリス・インコーポレーテッド ポンプの機械式ピストンのピストン制御システムおよび方法
US8087429B2 (en) 2005-11-21 2012-01-03 Entegris, Inc. System and method for a pump with reduced form factor
US7850431B2 (en) 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
JP4845969B2 (ja) 2005-12-02 2011-12-28 エンテグリース，インコーポレイテッド ポンプ制御装置を結合する入出力システム、方法、および装置
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
CN102705213A (zh) * 2005-12-02 2012-10-03 恩特格里公司 使用电机校正压力变化的系统和方法
WO2007067342A2 (fr) * 2005-12-02 2007-06-14 Entegris, Inc. Système et procédé destinés à un séquencement de vannes dans une pompe
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
CN102705209B (zh) 2005-12-02 2015-09-30 恩特格里公司 用于泵中压力补偿的系统和方法
KR101308175B1 (ko) * 2005-12-05 2013-09-26 엔테그리스, 아이엔씨. 분배 체적의 오차 보상 방법, 다단계 펌프, 및 시스템 컴플라이언스 보상 방법
TWI402423B (zh) * 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7684446B2 (en) 2006-03-01 2010-03-23 Entegris, Inc. System and method for multiplexing setpoints
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
CN101460742B (zh) * 2006-06-02 2011-06-08 诺迈特管理服务有限公司 包括驱动机构的容积泵
CN101936276B (zh) * 2008-11-20 2013-08-21 张家口百通环保科技有限公司 内燃机尾气净化的后处理系统过程中用于还原剂溶液抽取、计量并释放的计量泵
DE202010002145U1 (de) 2010-02-09 2011-09-07 Vacuubrand Gmbh + Co Kg Membranvakuumpumpe
US9421498B2 (en) * 2012-11-12 2016-08-23 Pall Corporation Systems and methods for conditioning a filter assembly
US9656197B2 (en) * 2012-11-12 2017-05-23 Pall Corporation Systems and methods for conditioning a filter assembly
US9719504B2 (en) * 2013-03-15 2017-08-01 Integrated Designs, L.P. Pump having an automated gas removal and fluid recovery system and method
EP3149328B1 (fr) * 2014-05-28 2019-03-20 Entegris, Inc. Système et procédé pour opérer une pompe avec senseurs d'alimentation et de sortie, confirmation de filtration et de pompage, et pression d'amorçage de filtration réduit

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59177929A (ja) * 1983-03-28 1984-10-08 Canon Inc サツクバツクポンプ
JP2803859B2 (ja) * 1989-09-29 1998-09-24 株式会社日立製作所 流動体供給装置およびその制御方法
JPH0727150U (ja) * 1993-10-07 1995-05-19 大日本スクリーン製造株式会社 シリカ系被膜形成用塗布液吐出装置
DE69814710T2 (de) * 1997-03-03 2004-03-18 Tokyo Electron Ltd. Beschichtungs-Vorrichtung und Verfahren
JP3940854B2 (ja) * 1997-03-25 2007-07-04 Ｓｍｃ株式会社 サックバックバルブ

Also Published As

Publication number Publication date
CN1331783A (zh) 2002-01-16
DE69917927T2 (de) 2005-06-23
CN1590761A (zh) 2005-03-09
EP1133639B1 (fr) 2004-06-09
TW593888B (en) 2004-06-21
CN1175182C (zh) 2004-11-10
WO2000031416A1 (fr) 2000-06-02
EP1133639A1 (fr) 2001-09-19
DE69917927D1 (de) 2004-07-15

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Legal Events

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