ATE259073T1 - Herstellung von materialien für wellenleiter mit stufenbrechungsindex - Google Patents

Herstellung von materialien für wellenleiter mit stufenbrechungsindex

Info

Publication number
ATE259073T1
ATE259073T1 AT00650200T AT00650200T ATE259073T1 AT E259073 T1 ATE259073 T1 AT E259073T1 AT 00650200 T AT00650200 T AT 00650200T AT 00650200 T AT00650200 T AT 00650200T AT E259073 T1 ATE259073 T1 AT E259073T1
Authority
AT
Austria
Prior art keywords
regions
gelable
incorporated
component
index
Prior art date
Application number
AT00650200T
Other languages
English (en)
Inventor
Andrew Connell
Shane O'brien
Patrick Vincent Kelly
Original Assignee
Nat Univ Ireland Cork
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nat Univ Ireland Cork filed Critical Nat Univ Ireland Cork
Application granted granted Critical
Publication of ATE259073T1 publication Critical patent/ATE259073T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
    • C08G77/04—Polysiloxanes
    • C08G77/14—Polysiloxanes containing silicon bound to oxygen-containing groups
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/04—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of organic materials, e.g. plastics
    • G02B1/045—Light guides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0757—Macromolecular compounds containing Si-O, Si-C or Si-N bonds
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12035—Materials
    • G02B2006/12069—Organic material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/121—Channel; buried or the like

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optical Integrated Circuits (AREA)
AT00650200T 2000-11-28 2000-11-28 Herstellung von materialien für wellenleiter mit stufenbrechungsindex ATE259073T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP00650200A EP1209492B1 (de) 2000-11-28 2000-11-28 Herstellung von Materialien für Wellenleiter mit Stufenbrechungsindex

Publications (1)

Publication Number Publication Date
ATE259073T1 true ATE259073T1 (de) 2004-02-15

Family

ID=8174482

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00650200T ATE259073T1 (de) 2000-11-28 2000-11-28 Herstellung von materialien für wellenleiter mit stufenbrechungsindex

Country Status (4)

Country Link
US (1) US20020142096A1 (de)
EP (1) EP1209492B1 (de)
AT (1) ATE259073T1 (de)
DE (1) DE60008121T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2843205A1 (fr) * 2002-08-02 2004-02-06 Centre Nat Rech Scient Solution sol-gels photoreticulables dans le spectre du visible, et leurs utilisations
JP2009518135A (ja) * 2005-12-07 2009-05-07 ズィマー・インコーポレーテッド 照射を使用してハイドロゲルを結合させるまたは改質する方法
GB2438440B (en) * 2006-05-26 2008-04-23 Design Led Products Ltd A composite light guiding device
DE102010021466A1 (de) * 2010-05-25 2011-12-01 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren zur Herstellung strukturierter Oxid-Dünnschichten über Vorstufen aus organisch vernetzten oder organisch vernetzbaren metallorganischen Verbindungen, sowie diese Vorstufen selbst
JP2012073358A (ja) 2010-09-28 2012-04-12 Nitto Denko Corp コネクタ用光導波路の製法
WO2019040582A1 (en) 2017-08-25 2019-02-28 Arizona Board Of Regents On Behalf Of The University Of Arizona HIGH-EFFICIENCY FABRICATION OF PHOTONIC INTEGRATED CIRCUIT (PIC) WAVEGUIDES USING MULTIPLE EXHIBITIONS
JP2023167743A (ja) * 2022-05-13 2023-11-24 東京応化工業株式会社 クラッドレス型光導波路

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5080962A (en) * 1985-02-25 1992-01-14 University Of Florida Method for making silica optical devices and devices produced thereby
JPH0262502A (ja) * 1988-08-30 1990-03-02 Asahi Chem Ind Co Ltd 新規なる光デバイス
US5064684A (en) * 1989-08-02 1991-11-12 Eastman Kodak Company Waveguides, interferometers, and methods of their formation
US5169576A (en) * 1989-10-23 1992-12-08 Wisconsin Alumni Research Foundation Method of making metal oxide ceramic membranes with small pore sizes
US5054872A (en) * 1990-03-16 1991-10-08 Ibm Corporation Polymeric optical waveguides and methods of forming the same
CA2041133C (en) * 1990-04-27 1995-01-03 Toru Matsuura Polymide optical waveguide
US5265185A (en) * 1992-10-02 1993-11-23 The United States Of America As Represented By The Secretary Of The Army Optical waveguides in electro-optical polymers and method
DE69418752T2 (de) * 1993-03-18 2000-01-27 Nippon Telegraph And Telephone Corp., Tokio/Tokyo Herstellungsverfahren von optischen Wellenleitern aus Polyimid
EP0661558A1 (de) * 1993-12-29 1995-07-05 Minnesota Mining And Manufacturing Company Polymerkeramischer Sol-Gel
JPH07333450A (ja) * 1994-06-08 1995-12-22 Hoechst Japan Ltd 光結合用導波路の形成方法及び光結合用導波路を有する光導波路素子
JPH08184718A (ja) * 1994-12-28 1996-07-16 Hoechst Japan Ltd 光導波路素子およびその製造方法
US5991493A (en) * 1996-12-13 1999-11-23 Corning Incorporated Optically transmissive bonding material
US6144795A (en) * 1996-12-13 2000-11-07 Corning Incorporated Hybrid organic-inorganic planar optical waveguide device
US6335149B1 (en) * 1997-04-08 2002-01-01 Corning Incorporated High performance acrylate materials for optical interconnects
US6054253A (en) * 1997-10-10 2000-04-25 Mcgill University-The Royal Institute For The Advancement Of Learning Solvent-assisted lithographic process using photosensitive sol-gel derived glass for depositing ridge waveguides on silicon
US6306563B1 (en) * 1999-06-21 2001-10-23 Corning Inc. Optical devices made from radiation curable fluorinated compositions
US7016589B2 (en) * 2000-05-19 2006-03-21 Optinetrics, Inc. Thermally-assisted photo-lithographic process using sol-gel derived glass and products made thereby

Also Published As

Publication number Publication date
EP1209492A1 (de) 2002-05-29
DE60008121D1 (de) 2004-03-11
DE60008121T2 (de) 2004-09-16
US20020142096A1 (en) 2002-10-03
EP1209492B1 (de) 2004-02-04

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