ATE258084T1 - Superreinigung von komplizierten mikroteilchen - Google Patents

Superreinigung von komplizierten mikroteilchen

Info

Publication number
ATE258084T1
ATE258084T1 AT98203334T AT98203334T ATE258084T1 AT E258084 T1 ATE258084 T1 AT E258084T1 AT 98203334 T AT98203334 T AT 98203334T AT 98203334 T AT98203334 T AT 98203334T AT E258084 T1 ATE258084 T1 AT E258084T1
Authority
AT
Austria
Prior art keywords
enclosure
micro particles
complex micro
holding
port
Prior art date
Application number
AT98203334T
Other languages
English (en)
Inventor
Alan E Walter
Original Assignee
Cfmt Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cfmt Inc filed Critical Cfmt Inc
Application granted granted Critical
Publication of ATE258084T1 publication Critical patent/ATE258084T1/de

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Detergent Compositions (AREA)
  • Cosmetics (AREA)
  • Toys (AREA)
AT98203334T 1991-10-04 1992-10-02 Superreinigung von komplizierten mikroteilchen ATE258084T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US77135291A 1991-10-04 1991-10-04

Publications (1)

Publication Number Publication Date
ATE258084T1 true ATE258084T1 (de) 2004-02-15

Family

ID=25091536

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98203334T ATE258084T1 (de) 1991-10-04 1992-10-02 Superreinigung von komplizierten mikroteilchen

Country Status (9)

Country Link
US (2) US6143087A (de)
EP (2) EP0608363A1 (de)
JP (1) JP3209426B2 (de)
KR (1) KR100254653B1 (de)
AT (1) ATE258084T1 (de)
AU (1) AU2884992A (de)
CA (1) CA2120325A1 (de)
DE (1) DE69233293T2 (de)
WO (1) WO1993006949A1 (de)

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ATE258084T1 (de) * 1991-10-04 2004-02-15 Cfmt Inc Superreinigung von komplizierten mikroteilchen
US6039059A (en) * 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
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US20140048103A1 (en) * 2012-08-20 2014-02-20 Kyle J. Doyel Method and apparatus for continuous separation of cleaning solvent from rinse fluid in a dual-solvent vapor degreasing system
US20140311526A1 (en) * 2013-02-22 2014-10-23 Kyzen Corporation Solvent systems for use in cleaning electronic and other components
US20160282278A1 (en) * 2015-03-23 2016-09-29 Cummins Inc. Chemical cleanliness test method prior to surface treatment
TWI831656B (zh) * 2018-01-04 2024-02-01 日商東京威力科創股份有限公司 基板處理裝置及基板處理方法
US11786893B2 (en) 2019-03-01 2023-10-17 United Laboratories International, Llc Solvent system for cleaning fixed bed reactor catalyst in situ
US11769660B2 (en) * 2021-12-03 2023-09-26 Pulseforge, Inc. Method and apparatus for removing particles from the surface of a semiconductor wafer
US20230234095A1 (en) 2022-01-27 2023-07-27 GM Global Technology Operations LLC Method for preparing a metallic surface

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Also Published As

Publication number Publication date
DE69233293D1 (de) 2004-02-26
EP0608363A1 (de) 1994-08-03
DE69233293T2 (de) 2004-11-18
US6348101B1 (en) 2002-02-19
KR940702773A (ko) 1994-09-17
AU2884992A (en) 1993-05-03
CA2120325A1 (en) 1993-04-15
EP0894542A1 (de) 1999-02-03
US6143087A (en) 2000-11-07
JP2001504381A (ja) 2001-04-03
EP0894542B1 (de) 2004-01-21
JP3209426B2 (ja) 2001-09-17
WO1993006949A1 (en) 1993-04-15
KR100254653B1 (ko) 2000-05-01

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