ATE235040T1 - Durch mikromaterialbearbeitung hergestellter induktiver sensor - Google Patents

Durch mikromaterialbearbeitung hergestellter induktiver sensor

Info

Publication number
ATE235040T1
ATE235040T1 AT98400835T AT98400835T ATE235040T1 AT E235040 T1 ATE235040 T1 AT E235040T1 AT 98400835 T AT98400835 T AT 98400835T AT 98400835 T AT98400835 T AT 98400835T AT E235040 T1 ATE235040 T1 AT E235040T1
Authority
AT
Austria
Prior art keywords
coils
magnetic field
inductive sensor
field
machined
Prior art date
Application number
AT98400835T
Other languages
English (en)
Inventor
Coulon Yves De
Michel Alain Chevroulet
Original Assignee
Suisse Electronique Microtech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suisse Electronique Microtech filed Critical Suisse Electronique Microtech
Application granted granted Critical
Publication of ATE235040T1 publication Critical patent/ATE235040T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/22—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils
    • G01D5/2208—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature differentially influencing two coils by influencing the self-induction of the coils

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
  • Switches That Are Operated By Magnetic Or Electric Fields (AREA)
  • Burglar Alarm Systems (AREA)
AT98400835T 1997-04-07 1998-04-07 Durch mikromaterialbearbeitung hergestellter induktiver sensor ATE235040T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9704218A FR2761772B1 (fr) 1997-04-07 1997-04-07 Capteur inductif micro-usine, notamment pour la mesure de la position et/ou du mouvement d'un objet

Publications (1)

Publication Number Publication Date
ATE235040T1 true ATE235040T1 (de) 2003-04-15

Family

ID=9505592

Family Applications (1)

Application Number Title Priority Date Filing Date
AT98400835T ATE235040T1 (de) 1997-04-07 1998-04-07 Durch mikromaterialbearbeitung hergestellter induktiver sensor

Country Status (5)

Country Link
US (1) US6175232B1 (de)
EP (1) EP0871012B1 (de)
AT (1) ATE235040T1 (de)
DE (1) DE69812199T2 (de)
FR (1) FR2761772B1 (de)

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US7388370B2 (en) * 2005-07-29 2008-06-17 Automotive Systems Laboratory Systems, Inc. Magnetic crash sensor
US8180585B2 (en) * 1999-08-26 2012-05-15 Tk Holdings, Inc. Magnetic crash sensor
US20070188168A1 (en) * 1999-08-26 2007-08-16 Stanley James G Magnetic sensor
EP1261895B1 (de) * 1999-12-10 2005-11-23 Sensopad Limited Mensch-maschine interface mit relativem positionssensor
JP3504904B2 (ja) * 2000-03-13 2004-03-08 株式会社ミツトヨ 誘導型トランスデューサ及び電子ノギス
JP2002031545A (ja) * 2000-07-13 2002-01-31 Mitsutoyo Corp 相対変位検出ユニット
DE10057773B4 (de) * 2000-11-22 2021-05-27 Werner Turck Gmbh & Co. Kg Näherungsschalter
DE10242385B4 (de) * 2002-09-12 2005-09-01 Cherry Gmbh Induktive Sensoreinheit
FI115109B (fi) * 2003-01-22 2005-02-28 Nokia Corp Tunnistusjärjestely ja tunnistusjärjestelyn käsittävä matkaviestin
US7701201B2 (en) * 2003-09-11 2010-04-20 Cherry Gmbh Inductive switch
US7772839B2 (en) * 2003-09-19 2010-08-10 Tk Holdings, Inc. Eddy current magnetic crash sensor
US7839142B2 (en) * 2003-09-19 2010-11-23 Tk Holdings, Inc. Magnetic crash sensor
EP1663707A4 (de) * 2003-09-19 2007-03-14 Automotive Systems Lab Magnetischer aufprallsensor
US7839143B2 (en) * 2003-09-19 2010-11-23 Tk Holdings Inc. Eddy current magnetic crash sensor
US7463987B2 (en) * 2003-09-19 2008-12-09 Takata Holdings, Inc. Magnetic sensing system and method
DE102005010692A1 (de) * 2005-03-09 2006-09-14 Zf Friedrichshafen Ag Sensoreinrichtung und Verfahren zur Verwendung einer Sensoreinrichtung
US7719263B2 (en) * 2006-11-22 2010-05-18 Zf Friedrichshafen Ag Inductive position measuring device or goniometer
US7911354B2 (en) * 2007-12-12 2011-03-22 Ksr Technologies Co. Inductive position sensor
CH702340A2 (fr) * 2009-12-15 2011-06-15 Posic Sa Arrangement comportant un capteur de proximité inductif, et procédé mettant en oeuvre un tel capteur.
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
GB2541313B (en) * 2012-10-02 2017-10-11 Anthony Howard Mark Inductive displacement detector
US10495699B2 (en) * 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US10712403B2 (en) 2014-10-31 2020-07-14 Allegro Microsystems, Llc Magnetic field sensor and electronic circuit that pass amplifier current through a magnetoresistance element
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
FR3028942B1 (fr) * 2014-11-26 2016-12-23 Continental Automotive France Capteur inductif de mesure de la position d'un arbre d'un vehicule
FR3031586B1 (fr) 2015-01-13 2017-02-10 Dymeo Capteurs inductifs de deplacement
FR3031589B1 (fr) 2015-01-13 2018-11-16 Hutchinson Capteurs inductifs de deplacement
FR3031588B1 (fr) 2015-01-13 2018-11-16 Hutchinson Capteurs inductifs de deplacement
FR3031587B1 (fr) * 2015-01-13 2018-11-16 Hutchinson Capteurs inductifs de deplacement
WO2016138546A2 (en) 2015-02-27 2016-09-01 Azoteq (Pty) Ltd Inductance sensing
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
US10641842B2 (en) 2017-05-26 2020-05-05 Allegro Microsystems, Llc Targets for coil actuated position sensors
US10823586B2 (en) 2018-12-26 2020-11-03 Allegro Microsystems, Llc Magnetic field sensor having unequally spaced magnetic field sensing elements
DE102019103670A1 (de) * 2019-02-13 2020-08-13 Balluff Gmbh Induktiver Sensor und Verfahren zu seinem Betrieb
US11237020B2 (en) 2019-11-14 2022-02-01 Allegro Microsystems, Llc Magnetic field sensor having two rows of magnetic field sensing elements for measuring an angle of rotation of a magnet
US11280637B2 (en) 2019-11-14 2022-03-22 Allegro Microsystems, Llc High performance magnetic angle sensor
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents

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DE3476035D1 (en) * 1983-07-05 1989-02-16 Elektroniktechnologie Get Inductive sensor device and measuring device for using the same
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
JPH05187803A (ja) * 1992-01-14 1993-07-27 Kanbayashi Seisakusho:Kk センサ
US5574367A (en) * 1992-02-27 1996-11-12 Logue; Delmar L. Polar coordinates sensor array with rotating magnetic field driven pickup elements
JPH07325137A (ja) * 1994-05-31 1995-12-12 Tokyo Gas Co Ltd 閉磁路型マイクロフラックスゲートセンサ
US5763783A (en) * 1994-12-20 1998-06-09 The Nippon Signal Co., Ltd. Acceleration sensor

Also Published As

Publication number Publication date
DE69812199T2 (de) 2003-12-24
US6175232B1 (en) 2001-01-16
EP0871012B1 (de) 2003-03-19
FR2761772B1 (fr) 1999-05-21
EP0871012A1 (de) 1998-10-14
DE69812199D1 (de) 2003-04-24
FR2761772A1 (fr) 1998-10-09

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