ATE232042T1 - Plasmabrenner mit einem mikrowellensender - Google Patents
Plasmabrenner mit einem mikrowellensenderInfo
- Publication number
- ATE232042T1 ATE232042T1 AT99920621T AT99920621T ATE232042T1 AT E232042 T1 ATE232042 T1 AT E232042T1 AT 99920621 T AT99920621 T AT 99920621T AT 99920621 T AT99920621 T AT 99920621T AT E232042 T1 ATE232042 T1 AT E232042T1
- Authority
- AT
- Austria
- Prior art keywords
- waveguide
- microwaves
- coaxial conductor
- plasma torch
- plasma
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19814812A DE19814812C2 (de) | 1998-04-02 | 1998-04-02 | Plasmabrenner mit einem Mikrowellensender |
PCT/EP1999/002413 WO1999052332A1 (de) | 1998-04-02 | 1999-04-01 | Plasmabrenner mit einem mikrowellensender |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE232042T1 true ATE232042T1 (de) | 2003-02-15 |
Family
ID=7863378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT99920621T ATE232042T1 (de) | 1998-04-02 | 1999-04-01 | Plasmabrenner mit einem mikrowellensender |
Country Status (7)
Country | Link |
---|---|
US (1) | US6388225B1 (de) |
EP (1) | EP1068778B1 (de) |
AT (1) | ATE232042T1 (de) |
CA (1) | CA2327093A1 (de) |
DE (1) | DE19814812C2 (de) |
ES (1) | ES2192383T3 (de) |
WO (1) | WO1999052332A1 (de) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7591957B2 (en) * | 2001-01-30 | 2009-09-22 | Rapt Industries, Inc. | Method for atmospheric pressure reactive atom plasma processing for surface modification |
US6660177B2 (en) * | 2001-11-07 | 2003-12-09 | Rapt Industries Inc. | Apparatus and method for reactive atom plasma processing for material deposition |
EP1361437A1 (de) * | 2002-05-07 | 2003-11-12 | Centre National De La Recherche Scientifique (Cnrs) | Ein neuer biologischer Tumormarker und Methoden für die Detektion des krebsartigen oder nicht krebsartigen Phenotyps von Zellen |
US7445817B2 (en) * | 2002-05-08 | 2008-11-04 | Btu International Inc. | Plasma-assisted formation of carbon structures |
US20050233091A1 (en) * | 2002-05-08 | 2005-10-20 | Devendra Kumar | Plasma-assisted coating |
US6870124B2 (en) * | 2002-05-08 | 2005-03-22 | Dana Corporation | Plasma-assisted joining |
US20060057016A1 (en) * | 2002-05-08 | 2006-03-16 | Devendra Kumar | Plasma-assisted sintering |
US20060233682A1 (en) * | 2002-05-08 | 2006-10-19 | Cherian Kuruvilla A | Plasma-assisted engine exhaust treatment |
US7494904B2 (en) * | 2002-05-08 | 2009-02-24 | Btu International, Inc. | Plasma-assisted doping |
US20060062930A1 (en) * | 2002-05-08 | 2006-03-23 | Devendra Kumar | Plasma-assisted carburizing |
US7465362B2 (en) * | 2002-05-08 | 2008-12-16 | Btu International, Inc. | Plasma-assisted nitrogen surface-treatment |
US20060237398A1 (en) * | 2002-05-08 | 2006-10-26 | Dougherty Mike L Sr | Plasma-assisted processing in a manufacturing line |
US7638727B2 (en) * | 2002-05-08 | 2009-12-29 | Btu International Inc. | Plasma-assisted heat treatment |
US20060228497A1 (en) * | 2002-05-08 | 2006-10-12 | Satyendra Kumar | Plasma-assisted coating |
US7560657B2 (en) * | 2002-05-08 | 2009-07-14 | Btu International Inc. | Plasma-assisted processing in a manufacturing line |
US7498066B2 (en) * | 2002-05-08 | 2009-03-03 | Btu International Inc. | Plasma-assisted enhanced coating |
US7497922B2 (en) * | 2002-05-08 | 2009-03-03 | Btu International, Inc. | Plasma-assisted gas production |
JP4163681B2 (ja) * | 2002-05-08 | 2008-10-08 | レオナード クルツ シュティフトゥング ウント コンパニー カーゲー | 大型のプラスチック製三次元物体の装飾方法 |
US20040173316A1 (en) * | 2003-03-07 | 2004-09-09 | Carr Jeffrey W. | Apparatus and method using a microwave source for reactive atom plasma processing |
US7371992B2 (en) | 2003-03-07 | 2008-05-13 | Rapt Industries, Inc. | Method for non-contact cleaning of a surface |
US7297892B2 (en) * | 2003-08-14 | 2007-11-20 | Rapt Industries, Inc. | Systems and methods for laser-assisted plasma processing |
US7304263B2 (en) * | 2003-08-14 | 2007-12-04 | Rapt Industries, Inc. | Systems and methods utilizing an aperture with a reactive atom plasma torch |
US7091441B1 (en) * | 2004-03-19 | 2006-08-15 | Polytechnic University | Portable arc-seeded microwave plasma torch |
JP4109213B2 (ja) * | 2004-03-31 | 2008-07-02 | 株式会社アドテック プラズマ テクノロジー | 同軸形マイクロ波プラズマトーチ |
US7442271B2 (en) * | 2004-04-07 | 2008-10-28 | Board Of Trustees Of Michigan State University | Miniature microwave plasma torch application and method of use thereof |
US7164095B2 (en) * | 2004-07-07 | 2007-01-16 | Noritsu Koki Co., Ltd. | Microwave plasma nozzle with enhanced plume stability and heating efficiency |
US7271363B2 (en) * | 2004-09-01 | 2007-09-18 | Noritsu Koki Co., Ltd. | Portable microwave plasma systems including a supply line for gas and microwaves |
WO2006127037A2 (en) * | 2004-11-05 | 2006-11-30 | Dana Corporation | Atmospheric pressure processing using microwave-generated plasmas |
US9681529B1 (en) * | 2006-01-06 | 2017-06-13 | The United States Of America As Represented By The Secretary Of The Air Force | Microwave adapting plasma torch module |
TW200742506A (en) | 2006-02-17 | 2007-11-01 | Noritsu Koki Co Ltd | Plasma generation apparatus and work process apparatus |
US8748785B2 (en) * | 2007-01-18 | 2014-06-10 | Amastan Llc | Microwave plasma apparatus and method for materials processing |
US20100074810A1 (en) * | 2008-09-23 | 2010-03-25 | Sang Hun Lee | Plasma generating system having tunable plasma nozzle |
US7921804B2 (en) * | 2008-12-08 | 2011-04-12 | Amarante Technologies, Inc. | Plasma generating nozzle having impedance control mechanism |
US20100201272A1 (en) * | 2009-02-09 | 2010-08-12 | Sang Hun Lee | Plasma generating system having nozzle with electrical biasing |
US8932435B2 (en) | 2011-08-12 | 2015-01-13 | Harris Corporation | Hydrocarbon resource processing device including radio frequency applicator and related methods |
CN102530859B (zh) * | 2011-12-29 | 2013-11-06 | 武汉凯迪工程技术研究总院有限公司 | 一种外热型微波等离子气化炉及合成气生产方法 |
KR101967646B1 (ko) * | 2012-03-21 | 2019-04-10 | 엘지전자 주식회사 | 마이크로웨이브 가스버너 |
US10477665B2 (en) * | 2012-04-13 | 2019-11-12 | Amastan Technologies Inc. | Microwave plasma torch generating laminar flow for materials processing |
CN103269560B (zh) * | 2013-05-03 | 2016-07-06 | 大连海事大学 | 一种微波液相等离子体发生装置 |
CN103269561B (zh) * | 2013-05-15 | 2016-01-06 | 浙江大学 | 波导直馈式微波等离子体炬装置 |
KR101765271B1 (ko) * | 2016-09-06 | 2017-08-04 | 이성주 | 병원폐기물 플라즈마 소각처리기 |
DE102017130210A1 (de) | 2017-12-15 | 2019-06-19 | Hegwein GmbH | Plasmabrennerspitze für einen Plasmabrenner |
DE102018100683A1 (de) | 2018-01-12 | 2019-07-18 | EMIL OTTO Flux- und Oberflächentechnik GmbH | Verfahren zur Herstellung eines Lotmittels |
ES2696227B2 (es) * | 2018-07-10 | 2019-06-12 | Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat | Fuente de iones interna para ciclotrones de baja erosion |
CN108901114B (zh) * | 2018-07-27 | 2020-07-10 | 上海工程技术大学 | 一种等离子体射流的发生装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3353060A (en) | 1964-11-28 | 1967-11-14 | Hitachi Ltd | High-frequency discharge plasma generator with an auxiliary electrode |
FR2480552A1 (fr) * | 1980-04-10 | 1981-10-16 | Anvar | Generateur de plasma |
FR2533397A2 (fr) * | 1982-09-16 | 1984-03-23 | Anvar | Perfectionnements aux torches a plasma |
FR2616030A1 (fr) * | 1987-06-01 | 1988-12-02 | Commissariat Energie Atomique | Procede de gravure ou de depot par plasma et dispositif pour la mise en oeuvre du procede |
FR2616614B1 (fr) | 1987-06-10 | 1989-10-20 | Air Liquide | Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvre |
DE3738352A1 (de) * | 1987-11-11 | 1989-05-24 | Technics Plasma Gmbh | Filamentloses magnetron-ionenstrahlsystem |
DE3905303C2 (de) * | 1988-02-24 | 1996-07-04 | Hitachi Ltd | Vorrichtung zur Erzeugung eines Plasmas durch Mikrowellen |
JP2805009B2 (ja) * | 1988-05-11 | 1998-09-30 | 株式会社日立製作所 | プラズマ発生装置及びプラズマ元素分析装置 |
US4943345A (en) * | 1989-03-23 | 1990-07-24 | Board Of Trustees Operating Michigan State University | Plasma reactor apparatus and method for treating a substrate |
US5349154A (en) * | 1991-10-16 | 1994-09-20 | Rockwell International Corporation | Diamond growth by microwave generated plasma flame |
US5439154A (en) * | 1994-05-02 | 1995-08-08 | Delligatti; Anna | Diaper bag |
TW285746B (de) * | 1994-10-26 | 1996-09-11 | Matsushita Electric Ind Co Ltd | |
DE19511915C2 (de) * | 1995-03-31 | 1997-04-30 | Wu Jeng Ming Dipl Ing | Plasmabrenner mit einem Mikrowellengenerator |
-
1998
- 1998-04-02 DE DE19814812A patent/DE19814812C2/de not_active Expired - Fee Related
-
1999
- 1999-04-01 EP EP99920621A patent/EP1068778B1/de not_active Expired - Lifetime
- 1999-04-01 WO PCT/EP1999/002413 patent/WO1999052332A1/de active IP Right Grant
- 1999-04-01 US US09/647,631 patent/US6388225B1/en not_active Expired - Fee Related
- 1999-04-01 AT AT99920621T patent/ATE232042T1/de not_active IP Right Cessation
- 1999-04-01 CA CA002327093A patent/CA2327093A1/en not_active Abandoned
- 1999-04-01 ES ES99920621T patent/ES2192383T3/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CA2327093A1 (en) | 1999-10-14 |
EP1068778B1 (de) | 2003-01-29 |
DE19814812C2 (de) | 2000-05-11 |
EP1068778A1 (de) | 2001-01-17 |
WO1999052332A1 (de) | 1999-10-14 |
US6388225B1 (en) | 2002-05-14 |
ES2192383T3 (es) | 2003-10-01 |
DE19814812A1 (de) | 1999-10-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
REN | Ceased due to non-payment of the annual fee |