ATE210641T1 - Sulfoniumsalze und verfahren zu ihrer herstellung - Google Patents

Sulfoniumsalze und verfahren zu ihrer herstellung

Info

Publication number
ATE210641T1
ATE210641T1 AT99305552T AT99305552T ATE210641T1 AT E210641 T1 ATE210641 T1 AT E210641T1 AT 99305552 T AT99305552 T AT 99305552T AT 99305552 T AT99305552 T AT 99305552T AT E210641 T1 ATE210641 T1 AT E210641T1
Authority
AT
Austria
Prior art keywords
sulfonium salt
prior
art
photoacid generator
prepare
Prior art date
Application number
AT99305552T
Other languages
English (en)
Inventor
Joo-Hyeon Park
Dong-Chul Seo
Sun-Ju Park
Seong-Ju Kim
Original Assignee
Korea Kumho Petrochem Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1019980028833A external-priority patent/KR100279497B1/ko
Application filed by Korea Kumho Petrochem Co Ltd filed Critical Korea Kumho Petrochem Co Ltd
Application granted granted Critical
Publication of ATE210641T1 publication Critical patent/ATE210641T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C381/00—Compounds containing carbon and sulfur and having functional groups not covered by groups C07C301/00 - C07C337/00
    • C07C381/12—Sulfonium compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Glass Compositions (AREA)
  • Curing Cements, Concrete, And Artificial Stone (AREA)
AT99305552T 1998-07-16 1999-07-13 Sulfoniumsalze und verfahren zu ihrer herstellung ATE210641T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019980028833A KR100279497B1 (ko) 1998-07-16 1998-07-16 술포늄 염의 제조방법
EP98307103 1998-09-03

Publications (1)

Publication Number Publication Date
ATE210641T1 true ATE210641T1 (de) 2001-12-15

Family

ID=26151423

Family Applications (1)

Application Number Title Priority Date Filing Date
AT99305552T ATE210641T1 (de) 1998-07-16 1999-07-13 Sulfoniumsalze und verfahren zu ihrer herstellung

Country Status (5)

Country Link
EP (1) EP0972761B1 (de)
AT (1) ATE210641T1 (de)
DE (1) DE69900570T2 (de)
ES (1) ES2169938T3 (de)
PT (1) PT972761E (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PT105584B (pt) * 2011-03-28 2013-08-30 Hovione Farmaciencia S A Reagentes electrofílicos de alquilação, a sua preparação e usos

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6664022B1 (en) * 2000-08-25 2003-12-16 Shipley Company, L.L.C. Photoacid generators and photoresists comprising same
US7358408B2 (en) * 2003-05-16 2008-04-15 Az Electronic Materials Usa Corp. Photoactive compounds
CN113264856B (zh) * 2014-09-26 2022-11-22 东京应化工业株式会社 锍盐、光产酸剂及感光性组合物
US11281099B2 (en) * 2018-05-28 2022-03-22 Tokyo Ohka Kogyo Co., Ltd. Resist composition, method of forming resist pattern, compound, acid generator, and method of producing compound
KR102863079B1 (ko) 2020-11-27 2025-09-19 삼성전자주식회사 광산발생제, 이를 포함하는 포토레지스트 조성물, 및 상기 광산발생제의 제조방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0442158A (ja) * 1990-06-08 1992-02-12 Hitachi Ltd 放射線感応性組成物及びそれを用いたパタン形成法
JP2964109B2 (ja) * 1992-02-18 1999-10-18 日本電信電話株式会社 ポジ型レジスト材料
JP3588822B2 (ja) * 1994-07-07 2004-11-17 Ｊｓｒ株式会社 新規オニウム塩およびそれを含有する感放射線性樹脂 組成物
JP3198845B2 (ja) * 1994-12-05 2001-08-13 信越化学工業株式会社 化学増幅ポジ型レジスト材料
JP3606291B2 (ja) * 1995-06-29 2005-01-05 信越化学工業株式会社 スルホニウム塩

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PT105584B (pt) * 2011-03-28 2013-08-30 Hovione Farmaciencia S A Reagentes electrofílicos de alquilação, a sua preparação e usos

Also Published As

Publication number Publication date
DE69900570D1 (de) 2002-01-24
ES2169938T3 (es) 2002-07-16
PT972761E (pt) 2002-06-28
DE69900570T2 (de) 2002-05-29
EP0972761A1 (de) 2000-01-19
EP0972761B1 (de) 2001-12-12

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Legal Events

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UEP Publication of translation of european patent specification