ATE195354T1 - Verbesserungen von verfahren der physikalischen dampfphasen-abscheidung - Google Patents

Verbesserungen von verfahren der physikalischen dampfphasen-abscheidung

Info

Publication number
ATE195354T1
ATE195354T1 AT93103108T AT93103108T ATE195354T1 AT E195354 T1 ATE195354 T1 AT E195354T1 AT 93103108 T AT93103108 T AT 93103108T AT 93103108 T AT93103108 T AT 93103108T AT E195354 T1 ATE195354 T1 AT E195354T1
Authority
AT
Austria
Prior art keywords
vapor phase
physical vapor
deposition processes
phase deposition
substrate surface
Prior art date
Application number
AT93103108T
Other languages
English (en)
Inventor
Wolf-Dieter Muenz
Original Assignee
Hauzer Ind Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19924206110 external-priority patent/DE4206110A1/de
Application filed by Hauzer Ind Bv filed Critical Hauzer Ind Bv
Application granted granted Critical
Publication of ATE195354T1 publication Critical patent/ATE195354T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
  • Chemical Vapour Deposition (AREA)
AT93103108T 1992-02-27 1993-02-26 Verbesserungen von verfahren der physikalischen dampfphasen-abscheidung ATE195354T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19924206110 DE4206110A1 (de) 1992-02-27 1992-02-27 Mehrlagen-pvd-beschichtungsverfahren zur herstellung dekorativer und korrosionsschuetzender hartstoffoberflaechen
DE4208939 1992-03-19

Publications (1)

Publication Number Publication Date
ATE195354T1 true ATE195354T1 (de) 2000-08-15

Family

ID=25912282

Family Applications (1)

Application Number Title Priority Date Filing Date
AT93103108T ATE195354T1 (de) 1992-02-27 1993-02-26 Verbesserungen von verfahren der physikalischen dampfphasen-abscheidung

Country Status (5)

Country Link
EP (1) EP0558061B1 (de)
JP (1) JPH0693417A (de)
AT (1) ATE195354T1 (de)
DE (1) DE69329161T2 (de)
ES (1) ES2148189T3 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2877027B2 (ja) * 1995-04-07 1999-03-31 日新電機株式会社 アーク式蒸発源
DE19547305A1 (de) * 1995-12-18 1997-06-19 Univ Sheffield Verfahren zum Beschichten von metallischen Substraten
DE19754821A1 (de) * 1997-04-14 1998-10-15 Cemecon Ceramic Metal Coatings Verfahren und Vorrichtung für eine PVD-Beschichtung
ES2184265T3 (es) 1997-04-14 2003-04-01 Cemecon Ag Procedimiento y dispositivo de revestimiento por pvd.
JP4015883B2 (ja) * 2002-06-11 2007-11-28 株式会社神戸製鋼所 複合成膜装置
JP4771202B2 (ja) 2005-04-13 2011-09-14 日立金属株式会社 密着性と摺動特性に優れた複合皮膜およびその製造方法
AT8346U1 (de) 2005-04-29 2006-06-15 Ceratitzit Austria Ges M B H Beschichtetes werkzeug
JP4774080B2 (ja) * 2007-08-02 2011-09-14 株式会社神戸製鋼所 硬質皮膜被覆材および冷間塑性加工用金型
EP2159820B1 (de) 2008-08-25 2018-04-11 Oerlikon Surface Solutions AG, Pfäffikon Vorrichtung zur Beschichtung durch Ablagerung physikalischer Dämpfe sowie Verfahren zur Ablagerung physikalischer Dämpfe
US8277958B2 (en) 2009-10-02 2012-10-02 Kennametal Inc. Aluminum titanium nitride coating and method of making same
US8409702B2 (en) 2011-02-07 2013-04-02 Kennametal Inc. Cubic aluminum titanium nitride coating and method of making same
RU2479667C2 (ru) * 2011-05-31 2013-04-20 Общество с ограниченной ответственностью "Научно-производственное предприятие "Уралавиаспецтехнология" Способ ионно-имплантационной обработки деталей из титановых сплавов
US9132484B2 (en) * 2011-08-29 2015-09-15 Kyocera Corporation Cutting tool
JP5979927B2 (ja) * 2012-03-19 2016-08-31 シチズンホールディングス株式会社 金色硬質装飾部材
US9103036B2 (en) 2013-03-15 2015-08-11 Kennametal Inc. Hard coatings comprising cubic phase forming compositions
US9896767B2 (en) 2013-08-16 2018-02-20 Kennametal Inc Low stress hard coatings and applications thereof
US9168664B2 (en) 2013-08-16 2015-10-27 Kennametal Inc. Low stress hard coatings and applications thereof
US9988711B2 (en) * 2015-05-14 2018-06-05 Varian Semiconductor Equipment Associates, Inc. Apparatus and method for multilayer deposition
CN107663090B (zh) * 2016-07-28 2020-10-02 河南理工大学 一种合成高纯度Ti3B2N的方法
RU2640693C1 (ru) * 2016-10-11 2018-01-11 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения износостойкого покрытия для режущего инструмента
JP6476261B1 (ja) 2017-10-17 2019-02-27 株式会社神戸製鋼所 成膜方法
CN113025967B (zh) * 2021-03-08 2023-04-14 南昌科勒有限公司 一种仿金色涂层的制备方法
CN113463046A (zh) * 2021-07-05 2021-10-01 大连德泰控股有限公司 一种增强水泵叶轮耐磨性的涂层材料及涂镀方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3742317A1 (de) * 1987-12-14 1989-06-22 Repenning Detlev Verfahren zur herstellung korrosion-, verschleiss- und pressfester schichten
DE3918562A1 (de) * 1989-06-07 1990-12-13 Repenning Detlev Verfahren zur herstellung hochharter schichten auf refraktaeren metallwerkstoffen sowie ihren legierungen
US5306407A (en) * 1989-06-27 1994-04-26 Hauzer Holding Bv Method and apparatus for coating substrates

Also Published As

Publication number Publication date
DE69329161D1 (de) 2000-09-14
DE69329161T2 (de) 2001-01-11
ES2148189T3 (es) 2000-10-16
EP0558061B1 (de) 2000-08-09
EP0558061A1 (de) 1993-09-01
JPH0693417A (ja) 1994-04-05

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Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification
REN Ceased due to non-payment of the annual fee