DE69329161D1 - Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung - Google Patents

Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung

Info

Publication number
DE69329161D1
DE69329161D1 DE69329161T DE69329161T DE69329161D1 DE 69329161 D1 DE69329161 D1 DE 69329161D1 DE 69329161 T DE69329161 T DE 69329161T DE 69329161 T DE69329161 T DE 69329161T DE 69329161 D1 DE69329161 D1 DE 69329161D1
Authority
DE
Germany
Prior art keywords
vapor deposition
physical vapor
deposition processes
substrate surface
hard material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69329161T
Other languages
English (en)
Other versions
DE69329161T2 (de
Inventor
Wolf-Dieter Muenz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Hauzer Techno Coating BV
Original Assignee
Hauzer Industries BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19924206110 external-priority patent/DE4206110A1/de
Application filed by Hauzer Industries BV filed Critical Hauzer Industries BV
Priority to DE69329161T priority Critical patent/DE69329161T2/de
Publication of DE69329161D1 publication Critical patent/DE69329161D1/de
Application granted granted Critical
Publication of DE69329161T2 publication Critical patent/DE69329161T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/48—Ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
  • Chemical Vapour Deposition (AREA)
DE69329161T 1992-02-27 1993-02-26 Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung Expired - Fee Related DE69329161T2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE69329161T DE69329161T2 (de) 1992-02-27 1993-02-26 Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19924206110 DE4206110A1 (de) 1992-02-27 1992-02-27 Mehrlagen-pvd-beschichtungsverfahren zur herstellung dekorativer und korrosionsschuetzender hartstoffoberflaechen
DE4208939 1992-03-19
DE69329161T DE69329161T2 (de) 1992-02-27 1993-02-26 Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung

Publications (2)

Publication Number Publication Date
DE69329161D1 true DE69329161D1 (de) 2000-09-14
DE69329161T2 DE69329161T2 (de) 2001-01-11

Family

ID=25912282

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69329161T Expired - Fee Related DE69329161T2 (de) 1992-02-27 1993-02-26 Verbesserungen von Verfahren der physikalischen Dampfphasen-Abscheidung

Country Status (5)

Country Link
EP (1) EP0558061B1 (de)
JP (1) JPH0693417A (de)
AT (1) ATE195354T1 (de)
DE (1) DE69329161T2 (de)
ES (1) ES2148189T3 (de)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2877027B2 (ja) * 1995-04-07 1999-03-31 日新電機株式会社 アーク式蒸発源
DE19547305A1 (de) * 1995-12-18 1997-06-19 Univ Sheffield Verfahren zum Beschichten von metallischen Substraten
DE19754821A1 (de) * 1997-04-14 1998-10-15 Cemecon Ceramic Metal Coatings Verfahren und Vorrichtung für eine PVD-Beschichtung
ATE224963T1 (de) 1997-04-14 2002-10-15 Cemecon Ceramic Metal Coatings Verfahren und vorrichtung für pvd beschichtung
JP4015883B2 (ja) * 2002-06-11 2007-11-28 株式会社神戸製鋼所 複合成膜装置
JP4771202B2 (ja) 2005-04-13 2011-09-14 日立金属株式会社 密着性と摺動特性に優れた複合皮膜およびその製造方法
AT8346U1 (de) 2005-04-29 2006-06-15 Ceratitzit Austria Ges M B H Beschichtetes werkzeug
JP4774080B2 (ja) * 2007-08-02 2011-09-14 株式会社神戸製鋼所 硬質皮膜被覆材および冷間塑性加工用金型
EP2159820B1 (de) 2008-08-25 2018-04-11 Oerlikon Surface Solutions AG, Pfäffikon Vorrichtung zur Beschichtung durch Ablagerung physikalischer Dämpfe sowie Verfahren zur Ablagerung physikalischer Dämpfe
US8277958B2 (en) 2009-10-02 2012-10-02 Kennametal Inc. Aluminum titanium nitride coating and method of making same
US8409702B2 (en) 2011-02-07 2013-04-02 Kennametal Inc. Cubic aluminum titanium nitride coating and method of making same
RU2479667C2 (ru) * 2011-05-31 2013-04-20 Общество с ограниченной ответственностью "Научно-производственное предприятие "Уралавиаспецтехнология" Способ ионно-имплантационной обработки деталей из титановых сплавов
JP5214075B1 (ja) * 2011-08-29 2013-06-19 京セラ株式会社 切削工具
JP5979927B2 (ja) * 2012-03-19 2016-08-31 シチズンホールディングス株式会社 金色硬質装飾部材
US9103036B2 (en) 2013-03-15 2015-08-11 Kennametal Inc. Hard coatings comprising cubic phase forming compositions
US9168664B2 (en) 2013-08-16 2015-10-27 Kennametal Inc. Low stress hard coatings and applications thereof
US9896767B2 (en) 2013-08-16 2018-02-20 Kennametal Inc Low stress hard coatings and applications thereof
US9988711B2 (en) * 2015-05-14 2018-06-05 Varian Semiconductor Equipment Associates, Inc. Apparatus and method for multilayer deposition
CN107663090B (zh) * 2016-07-28 2020-10-02 河南理工大学 一种合成高纯度Ti3B2N的方法
RU2640693C1 (ru) * 2016-10-11 2018-01-11 федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" Способ получения износостойкого покрытия для режущего инструмента
JP6476261B1 (ja) * 2017-10-17 2019-02-27 株式会社神戸製鋼所 成膜方法
CN113025967B (zh) * 2021-03-08 2023-04-14 南昌科勒有限公司 一种仿金色涂层的制备方法
CN113463046A (zh) * 2021-07-05 2021-10-01 大连德泰控股有限公司 一种增强水泵叶轮耐磨性的涂层材料及涂镀方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3742317A1 (de) * 1987-12-14 1989-06-22 Repenning Detlev Verfahren zur herstellung korrosion-, verschleiss- und pressfester schichten
DE3918562A1 (de) * 1989-06-07 1990-12-13 Repenning Detlev Verfahren zur herstellung hochharter schichten auf refraktaeren metallwerkstoffen sowie ihren legierungen
DE59004614D1 (de) * 1989-06-27 1994-03-24 Hauzer Holding Verfahren und vorrichtung zur beschichtung von substraten.

Also Published As

Publication number Publication date
EP0558061A1 (de) 1993-09-01
EP0558061B1 (de) 2000-08-09
JPH0693417A (ja) 1994-04-05
ATE195354T1 (de) 2000-08-15
ES2148189T3 (es) 2000-10-16
DE69329161T2 (de) 2001-01-11

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: HAUZER TECHNO COATING EUROPE B.V., VENLO, NL

8339 Ceased/non-payment of the annual fee