ATE182103T1 - Vorrichtung zum polieren eines halbleiters - Google Patents
Vorrichtung zum polieren eines halbleitersInfo
- Publication number
- ATE182103T1 ATE182103T1 AT95307203T AT95307203T ATE182103T1 AT E182103 T1 ATE182103 T1 AT E182103T1 AT 95307203 T AT95307203 T AT 95307203T AT 95307203 T AT95307203 T AT 95307203T AT E182103 T1 ATE182103 T1 AT E182103T1
- Authority
- AT
- Austria
- Prior art keywords
- support
- polishing pad
- pad assembly
- polishing
- fluid
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
- B24B21/06—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces involving members with limited contact area pressing the belt against the work, e.g. shoes sweeping across the whole area to be ground
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/321,085 US5593344A (en) | 1994-10-11 | 1994-10-11 | Wafer polishing machine with fluid bearings and drive systems |
US08/333,463 US5558568A (en) | 1994-10-11 | 1994-11-02 | Wafer polishing machine with fluid bearings |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE182103T1 true ATE182103T1 (de) | 1999-07-15 |
Family
ID=26982813
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT95307203T ATE182103T1 (de) | 1994-10-11 | 1995-10-11 | Vorrichtung zum polieren eines halbleiters |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0706857B1 (de) |
JP (1) | JPH08195363A (de) |
AT (1) | ATE182103T1 (de) |
DE (1) | DE69510745T2 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5961372A (en) * | 1995-12-05 | 1999-10-05 | Applied Materials, Inc. | Substrate belt polisher |
US5886535A (en) * | 1996-11-08 | 1999-03-23 | W. L. Gore & Associates, Inc. | Wafer level burn-in base unit substrate and assembly |
US6273806B1 (en) * | 1997-05-15 | 2001-08-14 | Applied Materials, Inc. | Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus |
US6111634A (en) * | 1997-05-28 | 2000-08-29 | Lam Research Corporation | Method and apparatus for in-situ monitoring of thickness using a multi-wavelength spectrometer during chemical-mechanical polishing |
US6108091A (en) | 1997-05-28 | 2000-08-22 | Lam Research Corporation | Method and apparatus for in-situ monitoring of thickness during chemical-mechanical polishing |
US6146248A (en) * | 1997-05-28 | 2000-11-14 | Lam Research Corporation | Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher |
US5980368A (en) * | 1997-11-05 | 1999-11-09 | Aplex Group | Polishing tool having a sealed fluid chamber for support of polishing pad |
US6062959A (en) * | 1997-11-05 | 2000-05-16 | Aplex Group | Polishing system including a hydrostatic fluid bearing support |
US6336845B1 (en) * | 1997-11-12 | 2002-01-08 | Lam Research Corporation | Method and apparatus for polishing semiconductor wafers |
US6068539A (en) | 1998-03-10 | 2000-05-30 | Lam Research Corporation | Wafer polishing device with movable window |
US6132289A (en) * | 1998-03-31 | 2000-10-17 | Lam Research Corporation | Apparatus and method for film thickness measurement integrated into a wafer load/unload unit |
US7204924B2 (en) | 1998-12-01 | 2007-04-17 | Novellus Systems, Inc. | Method and apparatus to deposit layers with uniform properties |
US6413388B1 (en) | 2000-02-23 | 2002-07-02 | Nutool Inc. | Pad designs and structures for a versatile materials processing apparatus |
US7141146B2 (en) | 2000-02-23 | 2006-11-28 | Asm Nutool, Inc. | Means to improve center to edge uniformity of electrochemical mechanical processing of workpiece surface |
US6729945B2 (en) | 2001-03-30 | 2004-05-04 | Lam Research Corporation | Apparatus for controlling leading edge and trailing edge polishing |
US6991512B2 (en) * | 2001-03-30 | 2006-01-31 | Lam Research Corporation | Apparatus for edge polishing uniformity control |
US6939212B1 (en) | 2001-12-21 | 2005-09-06 | Lam Research Corporation | Porous material air bearing platen for chemical mechanical planarization |
US6790128B1 (en) | 2002-03-29 | 2004-09-14 | Lam Research Corporation | Fluid conserving platen for optimizing edge polishing |
US6769970B1 (en) | 2002-06-28 | 2004-08-03 | Lam Research Corporation | Fluid venting platen for optimizing wafer polishing |
US7018273B1 (en) | 2003-06-27 | 2006-03-28 | Lam Research Corporation | Platen with diaphragm and method for optimizing wafer polishing |
US6955588B1 (en) | 2004-03-31 | 2005-10-18 | Lam Research Corporation | Method of and platen for controlling removal rate characteristics in chemical mechanical planarization |
CN112975721B (zh) * | 2021-03-10 | 2022-04-22 | 江苏特丽亮镀膜科技有限公司 | 金属件表面抛光系统及方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US529732A (en) | 1894-11-27 | Cravat | ||
DE3411120A1 (de) * | 1983-03-26 | 1984-11-08 | TOTO Ltd., Kitakyushyu, Fukuoka | Laeppvorrichtung |
JPS59232768A (ja) * | 1983-06-16 | 1984-12-27 | Kanebo Ltd | 平面研磨装置 |
JPS63200965A (ja) * | 1987-02-12 | 1988-08-19 | Fujitsu Ltd | ウエ−ハ研磨装置 |
US4811522A (en) | 1987-03-23 | 1989-03-14 | Gill Jr Gerald L | Counterbalanced polishing apparatus |
JPS63251166A (ja) * | 1987-04-07 | 1988-10-18 | Hitachi Ltd | ウエハチヤツク |
JPH0811356B2 (ja) * | 1989-04-06 | 1996-02-07 | ロデール・ニッタ株式会社 | ポリッシング方法およびポリッシング装置 |
DE69206685T2 (de) | 1991-06-06 | 1996-07-04 | Commissariat Energie Atomique | Poliermaschine mit einem gespannten Feinschleifband und einem verbesserten Werkstückträgerkopf |
FR2677276B1 (fr) | 1991-06-06 | 1995-12-01 | Commissariat Energie Atomique | Machine de polissage a table porte-echantillon perfectionnee. |
JP3334139B2 (ja) * | 1991-07-01 | 2002-10-15 | ソニー株式会社 | 研磨装置 |
US5287663A (en) | 1992-01-21 | 1994-02-22 | National Semiconductor Corporation | Polishing pad and method for polishing semiconductor wafers |
-
1995
- 1995-10-06 JP JP26042795A patent/JPH08195363A/ja active Pending
- 1995-10-11 EP EP95307203A patent/EP0706857B1/de not_active Expired - Lifetime
- 1995-10-11 AT AT95307203T patent/ATE182103T1/de not_active IP Right Cessation
- 1995-10-11 DE DE69510745T patent/DE69510745T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0706857B1 (de) | 1999-07-14 |
DE69510745T2 (de) | 1999-12-09 |
JPH08195363A (ja) | 1996-07-30 |
EP0706857A1 (de) | 1996-04-17 |
DE69510745D1 (de) | 1999-08-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |