ATE177876T1 - System zum einschleusen von substraten in reinsträume - Google Patents

System zum einschleusen von substraten in reinsträume

Info

Publication number
ATE177876T1
ATE177876T1 AT93901038T AT93901038T ATE177876T1 AT E177876 T1 ATE177876 T1 AT E177876T1 AT 93901038 T AT93901038 T AT 93901038T AT 93901038 T AT93901038 T AT 93901038T AT E177876 T1 ATE177876 T1 AT E177876T1
Authority
AT
Austria
Prior art keywords
box
base
pivot
frame
lock
Prior art date
Application number
AT93901038T
Other languages
German (de)
English (en)
Inventor
Josef Gentischer
Original Assignee
Josef Gentischer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Josef Gentischer filed Critical Josef Gentischer
Application granted granted Critical
Publication of ATE177876T1 publication Critical patent/ATE177876T1/de

Links

Classifications

    • H10P72/3406—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L1/00—Enclosures; Chambers
    • B01L1/04—Dust-free rooms or enclosures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • H10P72/1912—
    • H10P72/1914—
    • H10P72/1924—
    • H10P72/1926—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • External Artificial Organs (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Intermediate Stations On Conveyors (AREA)
  • Acyclic And Carbocyclic Compounds In Medicinal Compositions (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Packaging For Recording Disks (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
AT93901038T 1992-03-09 1992-12-17 System zum einschleusen von substraten in reinsträume ATE177876T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4207341A DE4207341C1 (cg-RX-API-DMAC10.html) 1992-03-09 1992-03-09

Publications (1)

Publication Number Publication Date
ATE177876T1 true ATE177876T1 (de) 1999-04-15

Family

ID=6453534

Family Applications (2)

Application Number Title Priority Date Filing Date
AT93901038T ATE177876T1 (de) 1992-03-09 1992-12-17 System zum einschleusen von substraten in reinsträume
AT97111117T ATE214518T1 (de) 1992-03-09 1992-12-17 Smif-system zum einschleusen von substraten in schleusenreinsträume

Family Applications After (1)

Application Number Title Priority Date Filing Date
AT97111117T ATE214518T1 (de) 1992-03-09 1992-12-17 Smif-system zum einschleusen von substraten in schleusenreinsträume

Country Status (7)

Country Link
US (1) US5628683A (cg-RX-API-DMAC10.html)
EP (2) EP0630520B1 (cg-RX-API-DMAC10.html)
JP (1) JP3244505B2 (cg-RX-API-DMAC10.html)
KR (1) KR950700607A (cg-RX-API-DMAC10.html)
AT (2) ATE177876T1 (cg-RX-API-DMAC10.html)
DE (3) DE4207341C1 (cg-RX-API-DMAC10.html)
WO (1) WO1993018543A2 (cg-RX-API-DMAC10.html)

Families Citing this family (38)

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Publication number Priority date Publication date Assignee Title
DE4425208C2 (de) * 1994-07-16 1996-05-09 Jenoptik Technologie Gmbh Einrichtung zur Kopplung von Be- und Entladegeräten mit Halbleiterbearbeitungsmaschinen
US5713711A (en) * 1995-01-17 1998-02-03 Bye/Oasis Multiple interface door for wafer storage and handling container
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5895191A (en) * 1995-08-23 1999-04-20 Asyst Technologies Sealable, transportable container adapted for horizontal loading and unloading
DE19535178C2 (de) * 1995-09-22 2001-07-19 Jenoptik Jena Gmbh Einrichtung zum Ver- und Entriegeln einer Tür eines Behälters
US5810537A (en) * 1995-10-18 1998-09-22 Bye/Oasis Engineering Inc. Isolation chamber transfer apparatus
US5752796A (en) * 1996-01-24 1998-05-19 Muka; Richard S. Vacuum integrated SMIF system
US5915562A (en) * 1996-07-12 1999-06-29 Fluoroware, Inc. Transport module with latching door
US5711427A (en) * 1996-07-12 1998-01-27 Fluoroware, Inc. Wafer carrier with door
DE19805624A1 (de) 1998-02-12 1999-09-23 Acr Automation In Cleanroom Schleuse zum Öffnen und Schließen von Reinraumtransport-Boxen
US6106213A (en) * 1998-02-27 2000-08-22 Pri Automation, Inc. Automated door assembly for use in semiconductor wafer manufacturing
EP0987750B1 (en) * 1998-04-06 2006-11-15 Dainichi Shoji K.K. Container
CH693309A5 (de) * 1998-06-03 2003-05-30 Tec Sem Ag Vorrichtung und Verfahren zum Handhaben eines Behälters.
US6142722A (en) * 1998-06-17 2000-11-07 Genmark Automation, Inc. Automated opening and closing of ultra clean storage containers
US6220808B1 (en) * 1998-07-13 2001-04-24 Asyst Technologies, Inc. Ergonomic, variable size, bottom opening system compatible with a vertical interface
JP3556480B2 (ja) * 1998-08-17 2004-08-18 信越ポリマー株式会社 精密基板収納容器
US6120229A (en) * 1999-02-01 2000-09-19 Brooks Automation Inc. Substrate carrier as batchloader
DE19916932C1 (de) * 1999-04-09 2000-10-12 Jenoptik Jena Gmbh Einrichtung zur Handhabung eines Gegenstandes für die Be- und Entladung eines Reinstraumes
US6736582B1 (en) 1999-04-09 2004-05-18 Brooks Automation, Inc. Device for manipulating an object for loading and unloading a clean room
US6641349B1 (en) * 1999-04-30 2003-11-04 Tdk Corporation Clean box, clean transfer method and system
US6234219B1 (en) * 1999-05-25 2001-05-22 Micron Technology, Inc. Liner for use in processing chamber
WO2001089701A1 (en) * 2000-05-22 2001-11-29 Nara Machinery Co., Ltd. Powder processing unit
DE10119702A1 (de) * 2001-04-20 2002-10-24 Brooks Automation Gmbh Einrichtung zur Prüfung der Verschlußkräfte an der Verriegelung von Reinraumtransportboxen
US7100340B2 (en) * 2001-08-31 2006-09-05 Asyst Technologies, Inc. Unified frame for semiconductor material handling system
KR100825363B1 (ko) * 2001-09-18 2008-04-28 무라타 기카이 가부시키가이샤 무인반송차
JP2003332402A (ja) * 2002-05-10 2003-11-21 Kondo Kogyo Kk ミニエンバライメント方式の半導体製造装置
US7810645B2 (en) * 2002-07-03 2010-10-12 Taiwan Semiconductor Manufacturing Co., Ltd. Paddle for securely mounting a wafer cassette holder thereto
JP3759492B2 (ja) 2002-12-03 2006-03-22 近藤工業株式会社 ミニエンバライメント方式の半導体製造装置
DE10311298B4 (de) * 2003-03-12 2007-07-12 Schlick Roto-Jet Maschinenbau Gmbh Kupplungssystem zum fernbetätigbaren Kuppeln und Entkuppeln eines Roboters mit einer Dichtung
US7182203B2 (en) * 2003-11-07 2007-02-27 Entegris, Inc. Wafer container and door with vibration dampening latching mechanism
US7328836B2 (en) * 2004-02-03 2008-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Smart tag holder and cover housing
JP4540529B2 (ja) 2005-04-18 2010-09-08 信越ポリマー株式会社 収納容器
KR101262402B1 (ko) * 2005-05-31 2013-05-08 가부시키가이샤 반테크 박판 반송 용기의 개폐 구조
JP4278699B1 (ja) * 2008-03-27 2009-06-17 Ｔｄｋ株式会社 密閉容器及び該密閉容器の蓋開閉システム、ウエハ搬送システム、及び密閉容器の蓋閉鎖方法
JP5134495B2 (ja) * 2008-10-16 2013-01-30 東京エレクトロン株式会社 処理装置及び処理方法
JP5687575B2 (ja) * 2011-07-11 2015-03-18 株式会社東芝 ウェハ搬送容器保護ケース
KR101710770B1 (ko) * 2012-05-18 2017-02-27 비코 인스트루먼츠 인코포레이티드 화학적 기상 증착을 위한 페로플루이드 밀봉부를 갖는 회전 디스크 리액터
US9564350B1 (en) * 2015-09-18 2017-02-07 Globalfoundries Inc. Method and apparatus for storing and transporting semiconductor wafers in a vacuum pod

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4674939A (en) * 1984-07-30 1987-06-23 Asyst Technologies Sealed standard interface apparatus
US4815912A (en) * 1984-12-24 1989-03-28 Asyst Technologies, Inc. Box door actuated retainer
JPS6222933A (ja) * 1985-07-19 1987-01-31 Matsushita Seiko Co Ltd 空気清浄装置
US4739882A (en) * 1986-02-13 1988-04-26 Asyst Technologies Container having disposable liners
DE3814924A1 (de) * 1988-05-03 1989-11-16 Leybold Ag Vorrichtung zum ein- und ausschleusen von substraten aus einem vakuumkessel
DE3826925A1 (de) * 1988-08-09 1990-02-15 Daldrop & Dr Ing Huber Gmbh & Einrichtung zur handhabung und behandlung kontaminationsempfindlicher gegenstaende, wie halbleiterteile (wafers) oder aehnlicher produkte
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5261935A (en) * 1990-09-26 1993-11-16 Tokyo Electron Sagami Limited Clean air apparatus
JP3108459B2 (ja) * 1991-02-26 2000-11-13 東京エレクトロン株式会社 縦型熱処理装置
JP3275390B2 (ja) * 1992-10-06 2002-04-15 神鋼電機株式会社 可搬式密閉コンテナ流通式の自動搬送システム

Also Published As

Publication number Publication date
DE59209659D1 (de) 1999-04-22
US5628683A (en) 1997-05-13
WO1993018543A3 (de) 1993-10-28
DE59209948D1 (de) 2002-04-18
EP0630520A1 (de) 1994-12-28
DE4207341C1 (cg-RX-API-DMAC10.html) 1993-07-15
EP0630520B1 (de) 1999-03-17
JPH07504536A (ja) 1995-05-18
EP0805480A3 (de) 1997-12-10
WO1993018543A2 (de) 1993-09-16
KR950700607A (ko) 1995-01-16
JP3244505B2 (ja) 2002-01-07
EP0805480A2 (de) 1997-11-05
EP0805480B1 (de) 2002-03-13
ATE214518T1 (de) 2002-03-15

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Legal Events

Date Code Title Description
REN Ceased due to non-payment of the annual fee